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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.
1

Optically active Si-rich Si3N4 Mu-cavities for sensoristic applications

Ferrarese Lupi, Federico 23 May 2012 (has links)
In this thesis we have presented a thorough study on the optical and sensoristic properties of SRSN Mu-disks, in an isolated configuration and when coupled to a passive Si3N4 waveguide placed underneath. The whole structure of the device have been previously simulated in order to study the behavior of the supported WGM when subject to a geometrical variation (i.e.: radius, thickness, shape of the edge of the isolated Mu-disk): the obtained results granted the realization of Mu-resonators with Q factor exceeding 104. The coupled structure have been then simulated with the main goal of maximizing the WGM intensity transmitted at the end of the WG. This task has been fulfilled through a careful optimization of the geometrical parameters (i.e.: X-Gap and Z-Gap). The subsequent step, involving the fabrication process of the sample - realized in the Centro Nacional de Microelectronica (CNM) of Bellaterra - has been carried out using standard CMOS compatible process. The deposition and the implantation of the Si3N4 has been performed by means of LPCVD technique, while for the SiO2 deposition the PECVD. Finally the optical elements has been defined by means of a two level photolithographic mask. On the produced samples we have performed a superficial analysis (SEM, AFM) with the aim of evaluate the presence of geometrical imperfections and estimation of the superficial roughness. Furthermore the EFTEM analysis revealed the absence of Si-nc inside the active layer. Using the Cut-back technique, low losses under 1 dB/cm have been found in both VIS and IR spectral range in the passive WG of different width. On the other hand, applying the SES technique on an Si-rich WG structure we have been able to extract the losses value of active material in a wide and continuous range of wavelength, defined inside the PL spectrum. As a result of a careful optimization of the active SRSN in terms of PL intensities and optical losses, we have been able to produce bright and high Q isolated Mu-disks, achieving maximum values about 1.4x104 in a wide spectral range in the VIS and emitting up to few nW on a single resonance. The reported Q values are the best ever reported in circular Si-based light emitting Mu-cavities and are just limited by the spectral resolution of our experimental setup. The coupled structures demonstrated Q values up to 1.48x103, which are susceptible to be greatly improved through optimization of the fabrication process. Through a prof of concept , we have demonstrated that these structures are very sensible to the surrounding material and are able to detect refractive index changes with sensitivities of 51.79 nm/RIU and minimum measured refractive index change of 1.15x10-3 RIU. / En esta tesis, realizada en el departament d' Electrònica de la Universitat de Barcelona se ha presentado un estudio detallado the las propiedades ópticas y sensoras de estructuras resonantes tipo micro-disco fabricados íntegramente en nitruro de silicio enriquecido con silicio (SRSN). El estudio se ha llevado a cabo bien en estructuras aisladas o en una configuración acoplada con una guía de onda passiva situada debajo de la cavidad. La totalidad de la estructura ha sido simulada con el fin de estudiar el comportamiento de los modos resonantes WGM soportados cuando se cambian las condiciones de contorno geómetricas y del material. Los resultado obtenidos han permitido la realización de estructuras resonantes con factores de calidad superiores a 104. El objetivo de las simulaciones ha sido el de maximizar la intensidad transmitida de los modos soportados (WGM) al final de la guía de onda. Este hito ha sido cumplido gracias a la optimización de los parámetros geómetricos relativos (el X-gap y el Z-gap). Una vez producidas las muestras, se procedió a la realización de un análisis de superficie (SEM, AFM) para evaluar la rugosidad efectiva de las estructuras y las eventuales imperfecciones geométricas. Como resultado de la optimización del material activo en términos de intensidad de fotoluminiscencia y pérdidas ópticas, se consiguieron realizar cavidades resonantes de alta emisión luminosa y buenos factores de calidad. En un nuevo montaje experimental de u-PL desarrollado íntegramente para el estudio de estos dispositivos, se obtuvieron valores máximos de Q = 1.4x104 en un rango espectral ancho en el visible. La potencia emitida en cada resonancia ha sido medida y cuantificada en un valor de nW. Este valor permite la utilización de detectores de silicio integrados. Con el fin de evaluar la sensitividad del dispositivo, se han llevado a cabo medidas de u-PL cambiando el entorno del microdisco y monitorizando el desplazamiento espectral que sufre una determinada resonancia. El resultado de estas medidas muestra un desplazamiento de 1.37 nm como consecuencia de un índice de refracción de An = 0.0038 RIU (refractive index unit).

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