The objective of this thesis is to develop a complex dielectric properties sensor using interdigitated capacitor (IDC) structure. IDCs are easy to fabricate and because of its planar structure, it can be easily integrated with other sensing components and signal processing electronics. The design, fabrication, modeling, and testing of IDC sensors are presented in this thesis. Design parameters and their influence on sensor's output signals are discussed. Previous IDC models are reviewed and the limitations are studied. A new equivalent circuit model based on the fringing electric field distribution and a novel iterative data extraction algorithm combining Finite-Element Method (FEM) and the equivalent circuit model is studied. Results suggest that the algorithm can accurately extract relatively low dielectric constant and conductivity of material under test (MUT) from measured impedance data. / text

In order to address the challenges of capacitive sensing in harsh environment, self resonant passive wireless sensors are studied. The capacitive sensing elements based on interdigitated capacitor (IDC) sensor are used. A semi-empirical model providing accurate capacitance calculation for IDCs over a wide range of dimensions and dielectric constants is developed. An equivalent circuit model based on electric field distribution is proposed, leading to a closed form approximation for IDC capacitance calculation. The conductivity of the material under test is also considered and a model is proposed to calculate effective capacitance as a function of conductivity and measurement frequency. The model is used to study the design optimization of IDC sensor and suggested design procedure is proposed. To wirelessly interrogate the capacitive sensor, it is connected to an inductive element to form a resonant circuit, while the measurement is made at remote reader coil. Advantages and disadvantages of different type of resonant structure design are analyzed. In order to assist the design process, a SPICE circuit model is developed to estimate the resonant frequency of the self resonant sensor. Miniaturized sensors with different dimensions are designed, fabricated and tested. The sensor is integrated with silicon nanowire fabric coated with polymer. Measurements are made to illustrate the enhancement in sensing capability by integrating chemical selective material. / text