Abstract This thesis presents a novel method for fabricating quantum dot light-emitting devices (QDLEDs) based on colloidal inorganic light-emitting nanoparticles incorporated into an organic semiconductor matrix. CdSe core/ZnS shell nanoparticles were inkjet-printed in air and sandwiched between organic hole and electron transport layers to produce efficient photon-emissive media. The light-emitting devices fabricated here were tested as individual devices and integrated into a display setting, thus endorsing the capability of this method as a manufacturing approach for full-colour high-definition displays. By choosing inkjet printing as a deposition method for quantum dots, several problems currently inevitable with alternative methods are addressed. First, inkjet printing promises simple patterning due to its drop-on-demand concept, thus overruling a need for complicated and laborious patterning methods. Secondly, manufacturing costs can be reduced significantly by introducing this prudent fabrication step for very expensive nanoparticles. Since there are no prior demonstrations of inkjet printing of electroluminescent quantum dot devices in the literature, this work dives into the basics of inkjet printing of low-viscosity, relatively highly volatile quantum dot inks: piezo driver requirements, jetting parameters, fluid dynamics in the cartridge and on the surface, nanoparticle assembly in a wet droplet and packing of dots on the surface are main concerns in the experimental part. Device performance is likewise discussed and plays an important role in this thesis. Several compositional QDLED structures are described. In addition, different pixel geometries are discussed. The last part of this dissertation deals with the principles of QDLED displays and their basic components: RGB pixels and organic thin-film transistor (OTFT) drivers. Work related to transistors is intertwined with QDLED work; ideas for surface treatments that enhance nanoparticle packing are carried over from self-assembled monolayer (SAM) studies in the OTFT field. Moreover, all the work done in this thesis project was consolidated by one method, atomic force microscopy (AFM), which is discussed throughout the entire thesis.

The thesis describes surface topography of a-CSi:H films deposited by continuous wave plasma enhanced chemical vapor deposition (PECVD) based on tetravinylsilane monomer (TVS). Thin films are completely used in many fields of modern technologies and their physical and mechanical properties are affected by thin film preparation techniques. In this thesis the thin films were deposited by PECVD method on silicon wafers with the pure TVS monomer. Deposited samples were topographically described and analyzed using atomic force microscopy (AFM). The main characteristics which were described are RMS roughness, autocorrelation function and a size distribution of grains on the thin film surface. Analysis was realized with two sets of samples with different powers and thickness. The main results were statistically evaluated like a mixture of object on the surface prepared in different deposition conditions.

Tato Diplomová práce se zabývá povrchovou analýzou nanokompozitní folie polyetherimidu (PEI) vyztuženého exfoliovanými grafitickými nanodestičkami (xGnP). Analyzovány byly take vzorky nevyztužené PEI folie a samostatné nanodestičky. Vzorky nanokompozitu a PEI folie byly plazmaticky leptány s využitím argonového plazmatu po dobu 1, 3 a 10 hod. Skenovací elektronová mikroskopie (SEM) byla použita pro charakterizaci samostatných nanodestiček rozptýlených na křemíkovém substrátu, původních či leptaných vzorků PEI folie a nanokompozitu. Nanodestičky byly identifikovány při povrchu leptané nanokompozitní folie. Mikroskopie atomárních sil (AFM) byla použita pro zobrazení povrchové topografie separovaných nanodestiček a odkrytých destiček při povrchu leptaného kompozitu. Povrchová drsnost (střední kvadratická hodnota, vzdálenost nejnižšího a nejvyššího bodu) leptaného nanokompozitu narůstala s prodlužující se dobou leptání. Akustická mikroskopie atomárních sil (AFAM) byla použita pro charakterizaci elastické anizotropie leptaných kompozitních vzorků. Nanoindentační měření umožnila charakterizaci lokálních mechanických vlastností PEI a nanokompozitních folií.

Proposed diploma thesis is focused on preparation and characterization of the plasma polymer thin films based on tetravinylsilane monomer (TVS). Plasma enhanced chemical vapour deposition (PECVD) method involving pulse and continual plasma discharge modes were used for thin film deposition on silicon wafer pieces. Reactive plasma composition was containing pure TVS or mixtures of TVS and argon or oxygen gas. Atomic force microscopy was used for surface topography and roughness characterization. Cyclic nanoindentation was involved to measurements to determine the Young’s modulus and hardness of prepared films and scratch test was performed to evaluate the degree of adhesion. Special attention was drawn to the characterization of films with a Young’s modulus below 10 GPa. Tip geometry of indenter influence on scratch test was also commented. Surface and mechanical properties of thin films in relation to the deposition conditions were correlated to the obtained results and final analysis of deposition conditions influence is proposed.

Heteroepitaxial SiGeC layers have attracted immenseattention as a material for high frequency devices duringrecent years. The unique properties of integrating carbon inSiGe are the additional freedom for strain and bandgapengineering as well as allowing more aggressive device designdue to the potential for increased thermal budget duringprocessing. This work presents different issues on epitaxialgrowth, defect density, dopant incorporation and electricalproperties of SiGeC epitaxial layers, intended for variousdevice applications. Non-selective and selective epitaxial growth of Si1-x-yGexCy(0≤x≤30, ≤y≤0.02) layershave been optimized by using high-resolution x-ray reciprocallattice mapping. The incorporation of carbon into the SiGematrix was shown to be strongly sensitive to the growthparameters. As a consequence, a much smaller epitaxial processwindow compared to SiGe epitaxy was obtained. Differentsolutions to decrease the substrate pattern dependency (loadingeffect) of SiGeC growth have also been proposed. The key pointin these methods is based on reduction of surface migration ofthe adsorbed species on the oxide. In non-selective epitaxy,this was achieved by introducing a thin silicon polycrystallineseed layer on the oxide. The thickness of this seed layer had acrucial role on both the global and local loading effect, andon the epitaxial quality. Meanwhile, in selective epitaxy,polycrystalline stripes introduced around the oxide openingsact as migration barriers and reduce the loading effecteffectively. Chemical mechanical polishing (CMP) was performedto remove the polycrystalline stripes on the oxide. Incorporation and electrical properties of boron-doped Si1-x-yGexCylayers (x=0.23 and 0.28 with y=0 and 0.005) with aboron concentration in the range of 3x1018-1x1021atoms/cm3 have also been investigated. In SiGeClayers, the active boron concentration was obtained from thestrain compensation. It was also found that the boron atomshave a tendency to locate at substitutional sites morepreferentially compared to carbon. These findings led to anestimation of the Hall scattering factor of the SiGeC layers,which showed good agreement with theoretical calculations. Keywords:Silicon germanium carbon (SiGeC), Epitaxy,Chemical vapor deposition (CVD), Loading effect, Highresolution x-ray diffraction (HRXRD), Hall measurements, Atomicforce microscopy (AFM).

The treatment of polymer surfaces by low pressure plasmas is of technological interest in a variety of applications for modification and functionalisation. Until now the interactions of the individual plasma species (especially electrons) with polymeric material have not been subject of a microscopic study.In an anticipated chapter the inner plasma parameters were characterised by Langmuir probe measurements, leading to a precise knowledge about the density and energy distributions of plasma electrons and ions. The values for electrons were later used for an exclusive treatment with this species. The main part of this thesis describes and interprets the chemical composition after UV, plasma and electron treatment by x-ray photoelectron spectroscopy (XPS), structural changes by atomic force microscopy (AFM) and their combination to distinguish the fundamental interactions with polyethylene and polypropylene surfaces. It was found that all treatments show specific modification behaviour according to the chemical composition, topography and modification depth. For an argon microwave discharge, the plasma effects can also be obtained by a combination of UV and electron treatment. Fundamental radical reactions have been traced indirectly by chemical derivatisation as well as their passivation reactions through cross-linkage and the creation of double bonds.

This thesis is focused on synthesis and polymerization of caprolactone and its derivatives by living ring opening polymerization (LROP), Self-assembly in aqueous solutions produced nanoaggregates comprised of amphiphilic block copolymers or telechelic polymers with incorporated boron compounds (phenyl boronic acids and boron clusters). Incorporation of boron compounds was facilitated either by covalent or non-covalent bonding. Obtained complex nanoparticle structures manifested stimuli-responsive behaviour and were investigated under varying conditions by combination of light scattering, fluorescence spectroscopy and electron microscopy. The obtained results on solution behaviour of polymers in combination with added value of boron compounds, yield general aspects of nano aggregate morphology, responsive character tuning and practical aspects of synthesis and self-assembly overcame in the preparation process. The publications wrote during this thesis are therefore adding valuable information to researchers engaged in biomedical utilization of such nano assemblies.

This thesis reports on the controlled formation of surface rippling structures induced by tip scanning processes on compliant and brittle materials. Periodic surface structures were generated on polymeric and vitreous materials and with different length scales. Two aspects were focused on: the controlling of orientation and periodicity of the resulting structures via proper tuning the scan conditions and the physical mechanisms ruling the early stages of plowing wear causing the rippling effect. Specifically the influence of the scanned area geometric shape on the orientation of the rippling structure was investigated on a polystyrene surface. Nanoripples were induced by scanning the surface with a silicon tip using atomic force microscopy and dedicated scripts. Inside a structured area two ripple orientations can be observed: near boundaries the ripple orientation is determined by boundary orientation and regions away from the boundaries the ripples are aligned in a steady orientation. This steady orientation can be tuned by the distance between the scan lines. In the boundary regions the orientation of the ripples is different from steady orientation. The orientation of the boundaries clearly affected the orientation of the ripples and the tendency of the ripples to align in a steady angle defined by the scan parameters could be significantly modified. Geometric shapes like squares, circles, stars, pentagons and hearts allowed to distinguish the influence of curved and straight boundaries. Straight boundaries with different orientations allowed a detailed analysis of the influence of the angle on the rippling process. Straight boundaries inclined in the direction of the steady state angle of ripple orientation previously defined generate a uniform ripple pattern covering the entire scan area. The aspect of wear originating from the rippled surface was also investigated on similar polystyrene surfaces. As a result of repetitive scan passes spherical particles with diameters up to 250 nm were nucleated and detached from the surface. The particles originate from the crests of the ripples formed in the first scan pass. As proven by the lateral force signal the detachment occurs smoothly without a static friction peak suggesting a crazing mechanism induced by the scanning tip. Once detached from the surface the particles are displaced and piled up along the edges of scanned area. The formation of periodic surface structures was also investigated on a brittle silica glass. By a combination of scratch tests performed with a diamond microtip mounted in a nanoindenter and imaging with atomic force microscopy the existence of a periodic herringbone pattern inside scratch grooves on silica glass was proven. The rippled pattern was induced in the scratch process when the indenter was pulled laterally along the surface resulting in a microscopic scratch groove. The load was varied up to 30 nN and the scan velocity up to 500 µm/s. The resulting periodicity of the structures was found to increase linearly with increasing scratch velocity. The repetition distance was in the range of sub-µm and the corrugation in the range of a few hundred nm, which was well below indentation depth. In both cases, the surface rippling on a polymeric surfaces and the formation of a periodic pattern inside microscratches on a glass surface, the results were found to be consistent with minimalistic theoretical models for stick-slip.:Contents i Abstract iii Zusammenfassung v 1. Introduction 1 1.1. Periodic surface structures – relevance and formation 1 1.2. Surface rippling created by scanning probe lithography 2 1.3. Wear and nanoparticle release 4 1.4. Aim and outline 4 2. Experimental methods and fundamental concepts 6 2.1. Nanolithography 6 2.2. Atomic force microscopy 7 2.3. Nanoindentation and -scratching 10 2.4. Wear 11 2.5. Stick-slip motion 12 2.6. Spin coating 14 3. Surface rippling on polystyrene 15 3.1. Background and motivation 15 3.2. Methods 20 3.2.1. Sample preparation 20 3.2.2. Scanning probe lithography process 20 3.2.3. Imaging of structures and nanoparticles 21 3.3. Effect of boundaries on the orientation of surface rippling 22 3.4. Particle release as a result of surface rippling 31 4. Periodic structures inside scratches on silica glass 37 4.1. Background and motivation 37 4.2. Methods 38 4.2.1. Sample preparation 39 4.2.2. Scratch tests 39 4.2.3. AFM imaging and analysis 39 4.3. Surface rippling induces by scraping with a sharp indenter 40 5. Conclusion and outlook 49 A. Appendix surface rippling on polymers I B. Appendix surface rippling on glass IV Acknowledgements VII References IX

Micro and nanofabrication technologies have been used extensively in many biomedical and biological applications. Integration of MEMS technology and biology (BioMEMS) enables precise control of the cellular microenvironments and offers high throughput systems. The focus of this research was to develop three dimensional (3-D) isotropic microstructures for comprehensive analysis on cell-substrate interactions. The aim was to investigate whether the normal and cancerous cells differentially respond to their underlying substrate and whether the differential response of the cells leads to a novel label-free technique to distinguish between normal and cancerous cells. Three different generations of 3-D isotropic microstructures comprised of curved surfaces were developed using a single-mask, single-etch step process. Our experimental model included HS68 normal human fibroblasts, MCF10A normal human breast epithelial cells and MDA-MB-231 metastatic human breast cancer cells. Primary findings on the first generation of silicon substrates demonstrated a distinct adhesion and growth behavior in HS68 and MDA-MB-231 cells. MDA-MB-231 cells deformed while the fibroblasts stretched and elongated their cytoskeleton on the curved surfaces. Unlike fibroblasts, MDA-MB-231 cells mainly trapped and localized inside the deep microchambers. Detailed investigations on cytoskeletal organization, adhesion pattern and morphology of the cells on the second generation of the silicon substrates demonstrated that cytoskeletal prestress and microtubules organization in HS68 cells, cell-cell junction and cell-substrate adhesion strength in MCF10A cells, and deformability of MDA-MB-231 cells (obtained by using AFM technique) affect their behavior inside the etched cavities. Treatment of MDA-MB-231 cells with experimental breast cancer drug, SAHA, on the second generation of substrates, significantly altered the cells morphology, cytoarchitecture and adhesion pattern inside the 3-D microstructures. Third generation of silicon substrates was developed for comprehensive analysis on behavior of MDA-MB-231 and MCF10A cells in a co-culture system in response to SAHA drug. Formation of colonies of both cell types was evident inside the cavities within a few hours after seeding the cells on the chips. SAHA selectively altered the morphology and cytoarchitecture in MDA-MB-231 cells. Most importantly, the majority of MDA-MB-231 cells stretched inside the etched cavities, while the adhesion pattern of MCF10A cells remained unaltered. In the last part of this dissertation, using AFM analysis, we showed that the growth medium composition has a pronounced effect on cell elasticity. Our findings demonstrated that the proposed isotropic silicon microstructures have potential applications in development of biosensor platforms for cell segregation as well as conducting fundamental biological studies. / Ph. D.

Cancer progression is accompanied with alterations in the cell biomechanical phenotype, including changes in cell structure, morphology, and responses to microenvironmental stress. These alterations result in an increased deformability of transformed cells and reduced resistance to mechanical stimuli, enabling motility and invasion. Therefore, single cell biomechanical properties could be served as a powerful label-free biomarker for effective characterization and early detection of single cancer cells. Advances and innovations in microsystems and nanotechnology have facilitated interrogation of the biomechanical properties of single cells to predict their tumorigenicity, metastatic potential, and health state. This dissertation utilized Atomic Force Microscopy (AFM) for the cell biomechanical phenotyping for cancer diagnosis and early detection, efficacy screening of potential chemotherapeutic agents, and also cancer stem-like/tumor initiating cells (CSC/TICs) characterization as the critical topics received intensive attention in the search for effective cancer treatment. Our findings demonstrated the capability of exogenous sphingosine to revert the aberrant biomechanics of aggressive cells and showed a unique, mechanically homogeneous, and extremely soft characteristic of CSC/TICs, suitable for their targeted isolation. To make full use of cell biomechanical cues, this dissertation also considered the application of nonlinear viscoelastic models such as Fractional Zener and Generalized Maxwell models for the naturally complex, heterogeneous, and nonlinear structure of living cells. The emerging need for a high-throughput clinically relevant alternative for evaluating biomechanics of individual cells led us to the development of a microfluidic system. Therefore, a high-throughput, label-free, automated microfluidic chip was developed to investigate the biophysical (biomechanical-bioelectrical) markers of normal and malignant cells. Most importantly, this dissertation also explored the biomechanical response of cells upon a dynamic loading instead of a typical transient stress. Notably, metastatic and non-metastatic cells subjected to a pulsed stress regimen exerted by AFM exhibited distinct biomechanical responses. While non-metastatic cells showed an increase in their resistance against deformation and resulted in strain-stiffening behavior, metastatic cells responded by losing their resistance and yielded slight strain-softening. Ultimately, a second generation microfluidic chip called an iterative mechanical characteristics (iMECH) analyzer consisting of a series of constriction channels for simulating the dynamic stress paradigm was developed which could reproduce the same stiffening/softening trends of non-metastatic and metastatic cells, respectively. Therefore, for the first time, the use of dynamic loading paradigm to evaluate cell biomechanical responses was used as a new signature to predict malignancy or normalcy at a single-cell level with a high (~95%) confidence level. / Ph. D.