Several fabrication techniques for surface micromachined 3-D structures have been developed for RF components. The fabrication techniques all have in common the use of epoxy patterning and subsequent metallization. Techniques and structures such as embedded conductors, epoxy-core conductors, a reverse-side exposure technique, a multi-exposure scheme, and inclined patterning are presented. The epoxy-core conductor technique makes it easy to fabricate high-aspect-ratio (10-20:1), tall (~1mm) RF subelements as well as potentially very complex structures by taking advantage of advanced epoxy processes. To demonstrate feasibility and usefulness of the developed fabrication techniques for RF applications, two test vehicles are employed. One is a solenoid type RF inductor, and the other is a millimeter wave radiating structure such as a W-band quarter-wavelength monopole antenna. The embedded inductor approach provides mechanical robustness and package compatibility as well as good electrical performance. An inductor with a peak Q-factor of 21 and an inductance of 2.6nH at 4.5GHz has been fabricated on a silicon substrate. In addition, successful integration with a CMOS power amplifier has been demonstrated. A high-aspect-ratio inductor fabricated using epoxy core conductors shows a maximum Q-factor of 84 and an inductance of 1.17nH at 2.6GHz on a glass substrate with a height of 900um and a single turn. Successful W-band monopole antenna fabrication is demonstrated. A monopole with a height of 800um shows its radiating resonance at 85GHz with a return loss of 16dB. In addition to the epoxy-based devices, an advanced tunable ferroelectric device architecture is introduced. This architecture enables a low-loss conductor device; a reduced intermodulation distortion (IMD) device; and a compact tunable LC module. A single-finger capacitor having a low-loss conductor with an electrode gap of 1.2um and an electrode thickness of 2.2um has been fabricated using a reverse-side exposure technique, showing a tunability of 33% at 10V. It shows an improved Q-factor of 21.5. Reduced IMD capacitors consist of wide RF gaps and narrowly spaced high resistivity electrodes with a gap of 2um and a width of 2um within the wide gap. A 14um gap and a 20um gap capacitor show improved IMD performance compared to a 4um gap capacitor by 6dB and 15dB, respectively, while the tunability is approximately 21% at 30V for all three devices due to the narrowly spaced multi-pair high resistivity DC electrodes within the gap. Finally, a compact tunable LC module is implemented by forming the narrow gap capacitor in an inductor shape. The resonance frequency of this device is variable as a function of DC bias and a frequency tunability of 1.1%/V is achieved. The RF components developed in this thesis illustrate the usefulness of the application of micromachining technology to this application area, especially as frequencies of operation of RF systems continue to increase (and therefore wavelengths continue to shrink).

Lors de cette thèse, on a développé un banc automatisé de relevé du diagramme de rayonnement particulièrement pour des antennes millimétriques avec faible directivité. On propose trois méthodes d’alimentation. La première méthode développée a été de concevoir une nouvelle sonde ayant un accès micro-coaxial de plus de 5cm afin de réduire la zone de masquage au minimum. Associée à une configuration de type flip-chip inversée, cette méthode a permis d’avoir une réduction de la zone de masquage de 80° à 20°. La deuxième méthode a été de concevoir une liaison souple par film souple de Kapton. Cette méthode présente l’avantage de placer une plus grande partie des connexions métalliques sous un plan de masse, mais nécessite une connexion optimale à la puce. Les résultats obtenus présentent une zone de masquage pratiquement inexistante, et sont conformes à l’état de l’art. La troisième méthode SER est basée sur la mesure de l’antenne sans placer de sondes ou de connecteurs spéciaux, mais en utilisant un système à charges connues. La simulation nous montre qu'il nous manque une dynamique par ces trois charges. / In this thesis, we designed and built a new 3D test bench, particularly for low-directivity integrated antennas at millimeter-wave frequencies. We proposed three feeding techniques for the antenna under test (AUT): a probe-fed technique, a flexible-transmission-line-fed technique and a radar-cross-section (RCS) method. The probe-fed method was developed with a customized probe, which involves an elongated (50 mm) coaxial line between the probe tip and the probe body, wherein the probe body is reversed (relative to the conventional measurement configuration) so it lies below the plane of the AUT. This method reduces the range of angles that are masked from 80° (for a conventional probe setup) to 20°. The second method was developed using a flexible transmission line with a modified flip-chip connection to the AUT. This method completely eliminates the masked zone. The third method characterizes the radiation pattern using a radar cross-section (RCS) method. This method requires neither a probe system nor connectors. However the simulation results demonstrate that there is insufficient variation in the ratio of received power to incident power as the load on the AUT is varied in order to make precise measurement with conventional measurement equipment.

This thesis investigates a new approach for dealing with the adverse effects of large-scale deformations in the main reflector of large Cassegrain antennas. In this method, the incident aperture distribution is imaged onto a tertiary focal plane. This is accomplished by using an optical imaging system consisting of a lens mounted behind the Cassegrain focus of the antenna. The lens forms a real image of the product of the incident aperture distribution and the pupil function of the antenna. The pupil function describes the profile of the main reflector of the antenna. If the incident aperture distribution is a plane wave, a real image of the pupil function of the main reflector will be produced at the focal plane of the image lens. Any imperfections in the main reflector will be imaged onto the tertiary focal plane but over a smaller area as defined by the magnification of the system. In principle, an active correcting element placed into the tertiary focal plane could compensate for these errors, thus preserving the maximum efficiency of the antenna. Experimental verification of this principle was carried out in the lab using a dielectric lens 152.4mm in diameter. Phase perturbations were simulated by placing dielectric shims in the incident aperture plane. The phase of these shims in most cases was measured to within 10 degrees in the image plane. This degree of accuracy is found to be quite adequate for correcting large-scale errors in the main reflector of the antenna.

The infrared and millimeter-wave portions of the spectrum both have their advantages for development of imaging systems. Because of the difference in wavelengths, infrared imagers offer inherently high resolution, while millimeter-wave systems have better penetration through atmospheric aerosols such as fog and smoke. Shared-aperture imaging systems employing a common focal-plane array that responds to both wavebands are desirable from the viewpoint of overall size and weight. We have developed antenna-coupled sensors that respond simultaneously at 30 THz and at 94 GHz, utilizing electron-beam lithography. Slot-antenna designs were found to be particularly suitable for coupling radiation into metal-oxide-metal (MOM) tunnel diodes at both frequencies. The MOM diodes are fabricated in a layered structure of Ni-NiO-Ni, and act as rectifying contacts. With contact areas as low as 120 nm × 120 nm, these diodes have time constants commensurate with rectification at frequencies across the desired millimeter-wave and infrared bands. One challenge in the development of true focal-plane array imagers across this factor-of-300 bandwidth is that the optimum spatial sampling interval on the focal plane is different in both bands. We have demonstrated a focal plane with interleaved infrared and millimeter-wave sensors by fabricating infrared antennas in the ground plane of the millimeter-wave antenna. Measured performance data in both bands are presented for individual antenna-coupled sensors as well as for devices in the dual-band focal-plane-array format.

Il y a à l'heure actuelle un grand besoin d'antennes reconfigurables dans la bande des 60 GHz pour des applications de télédétection et de télécommunications sans fil très hauts débits. Les solutions traditionnelles de reconfiguration sont basées sur des semiconducteurs ou des composants RF-MEMS, qui connaissent un coût, une complexité et des pertes croissantes en bande millimétrique. Dans cette thèse, une approche originale a été développée : elle est basée sur la reconfiguration mécanique d'antennes et dispositifs millimétriques microrubans sur substrat élastomère ultrasouple PDMS grâce à des actionneurs MEMS grands déplacements. Premièrement, les choix de conception, la technique de simulation éléments finis (HFSS), et surtout la microfabrication d'antennes sur membrane PDMS ainsi que les techniques de mesure en impédance et rayonnement sont abordés.Deux axes ont ensuite été étudiés : les antennes accordables en fréquence, et les antennes et composants pour le balayage angulaire (déphaseurs et antennes à balayage mécanique de type scanner). Des procédés technologiques innovants ont été développés (reports de métallisations épaisses biocompatibles et d'aimants permanents en couches minces sur membrane PDMS) et différentes techniques d'actionnement (pneumatique, magnétique, par électromouillage) ont été mises en œuvre. Les performances en terme d'accord en fréquence (8,2 %) et de balayage angulaire (-90/+100°) dépassent l'état de l'art des antennes du même type en bande millimétrique, et ceci en utilisant une technologie peu complexe, ultra bas-coût et prometteuse pour la montée en fréquence. / There is currently an increasing need for reconfigurable antennas in the 60 GHz band for remote sensing applications and wireless communications. Traditional reconfiguration solutions are based on semiconductors or RF-MEMS but these components face cost, complexity and losses issues at millimeter-waves.In this thesis, an original approach was developed: it is based on the mechanical reconfiguration of millimeter-wave microstrip antennas and devices printed on ultrasoft PDMS substrates, thank to large displacements MEMS actuators. First, the design choices, the finite element simulation technique (HFSS), and the microfabrication of antennas supported by PDMS membranes as well as the impedance and radiation measurements techniques have been discussed. Two axis have then been studied: frequency-tunable antennas, and beam-steering components (phase shifters and "scanner" type antennas). Innovative technological processes were developed (transfer of biocompatible metal patterns and permanent magnet thin films on PDMS membranes) and several actuation techniques (pneumatic, magnetic, electrowetting) were implemented. Performances in terms of frequency tuning (8.2%) and scan angles (-90 / 100 °) are beyond the state of the art for similar antennas in the millimeter-wave band, and are achieved by using a very simple, ultra low-cost technique that is expected to be effective at even higher frequencies.