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Design and control of a 6-Degree-of-Freedom levitated positioner with high precisionHu, Tiejun 29 August 2005 (has links)
This dissertation presents a high-precision positioner with a novel superimposed
concentrated-field permanent-magnet matrix. This extended-range multi-axis positioner can
generate all 6-DOF (degree-of-freedom) motions with only a single moving part. It is actuated
by three planar levitation motors, which are attached on the bottom of the moving part. Three
aerostatic bearings are used to provide the suspension force against the gravity for the system.
The dynamic model of the system is developed and analyzed. And several control techniques
including SISO (single input and single output) and MIMO (multi inputs and multi outputs)
controls are discussed in the dissertation. The positioner demonstrates a position resolution of 20
nm and position noise of 10 nm rms in x and y and 15 nm rms in z. The angular resolution
around the x-, y-, and z-axes is in sub-microradian order. The planar travel range is 160 mm ??
160 mm, and the maximum velocity achieved is 0.5 m/s at a 5-m/s2 acceleration, which can
enhance the throughput in precision manufacturing. Various experimental results are presented in
this dissertation to demonstrate the positioner??s capability of accurately tracking any planar
trajectories. Those experimental results verified the potential utility of this 6-DOF high-precision
positioner in precision manufacturing and factory automation.
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Analyse et commande d'un système de mesure à courant tunnel / Modelling and control of nanometric systems based on tunneling current sensorAhmad, Irfan 20 July 2011 (has links)
L'objet de la thèse était la commande d'un système de nano-positionnement par couranttunnel, avec application sur la plateforme expérimentale développée au laboratoire Gipsa-lab.Cette thèse s'inscrit dans le cadre de la commande des systèmes micro et nano-mécatronique,pour des applications en microscopie en champ proche ou dans des systèmes depositionnement ultra-précis. A l'échelle nanométrique, des problèmes de bruits de différentesnatures, vibrations, non-linéarités et instabilité influencent la précision et la qualité de mesuredu système. L'objectif était donc de pouvoir faire face à ces contraintes en utilisant destechniques modernes de commande robuste. Dans cette thèse, un système de mesure à couranttunnel a été modélisé et le problème de contrôle lié aux performances de mesure souhaitées aété formulé. Les performances souhaitées, à savoir la précision de la mesure et le rejet decertaines perturbations avec la robustesse adéquate, ont été atteints en utilisant des lois decommande robuste. Ces lois de commande ont été validées expérimentalement (àl'atmosphère ambiante) sur une plateforme du Gipsa-lab. À la fin de cette thèse, pour uneapplication de scanner de surface à l'échelle atomique, une modélisation dynamique MIMOdu système a été proposée et un régulateur MIMO afin de réduire l'erreur de positionnementdûe au couplage a été validé en simulations. / The objective of this thesis was to control the nano-positioning system using tunneling current with the real-time validation over an experimental platform developed in Gipsa-lab. This thesis lies in the domain of control for micro and nano-mechatronics systems for the applications of scanning probe microscopy and ultra-precise positioning. At nanometer scale, the problems of noise, vibrations, nonlinearity and instability influence the precision of the measurement. The objective was to deal with these constraints by using the modern techniques of robust control. In this thesis, a system of tunneling current measurement has been modelled and the control problem has been formulated in terms of desired measurement performances. Then, robust control design laws are analyzed in order to achieve better performances in terms of measurement precision and rejection of certain disturbances with robustness. These control laws are experimentally validated (at ambient atmosphere) for a platform of Gipsa-lab. At the end of this thesis, a dynamic modelling of MIMO system for an application of scanning the surface with an atomic resolution has been proposed and a MIMO controller in order to reduce the positioning error due to coupling has been validated in simulations.
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High accurate 3-D photo-robotic nano-positioning for hybrid integrated optics / Nano-positionnement photo-robotique 3D de haute précision pour l'optique hybride intégréeBettahar, Houari 18 July 2019 (has links)
L'intégration hybride d'éléments photoniques individuels offre la promesse de fournir des performances très élevées, de proposer de nouvelles fonctionnalités et produits optiques mais aussi pour exploiter de nouveaux modes de propagation des faisceaux lumineux. Cette approche repose sur la capacité d'un positionnement multi Degré-De-Liberté (DDL) précis des éléments photoniques individuels. Ainsi, la mesure multi-DDL imprécise et le contrôle inexact des robots sont les principaux verrous à surmonter, notamment à l'échelle micrométrique Pour cela, une approche photo-robotique originale a été proposée, s'appuyant sur les mouvements d'un robot à plusieurs DDL associé à l'utilisation de l'interférométrie Fabry-Perot 1-D pour réaliser une mesure de pose multi-DOF. Cette approche intègre notamment la question de l'étalonnage des robots 6-DDL qui a été étudiée à travers l'étalonnage des paramètres géométriques extrinsèques et/ou intrinsèques. Afin de trouver la stratégie d'étalonnage appropriée pour une grande précision de positionnement et adaptée au contexte du micro-positionnement de composants optiques, une quantification et une analyse de durabilité des performances optiques et robotiques ont été étudiées. Des études expérimentales ont démontré qu'une précision de positionnement en rotation et en translation de 0.004° et 27.6 nm ont été obtenues respectivement.Cette approche photo-robotique a été notament appliquée pour réaliser le positionnement 6-DDL d'une lamelle optique par rapport à une fibre optique avec une grande précision ce qui conduit également à des performances optiques maximales. L'approche a également été appliquée pour contrôler les états de polarisation à la sortie d'un système optique hybride en réalisant des rotations très précises d'une lamelle d'onde optique spécifique autour de son axe optique. Les résultats expérimentaux démontrent notamment que la grande précision du positionnement permet un contrôle précis de l'état de polarisation optique. / The hybrid integration of individual photonic elements appears as promising, because it may provide high performances, propose new optical functionalities and products and exploit new propagation modes of light beams. This approach requires an accurate multi Degree-Of-Freedom (DOF) positioning of the individual photonic elements. Hence, the inaccurate multi-DOF measurement and robots control are the main locks to overcome, notably at the micro-scale. For this sake, an original photo-robotic approach has been proposed, relying on multi-DOF robot motion associated with the use of 1-D Fabry-Perot interferometry measure to realize multi-DOF pose measure. This approach notably integrates the issue of 6-DOF robot calibration that has been studied through extrinsic and/or intrinsic geometric parameters calibration. In order to find the appropriate calibration strategy for high positioning accuracy and adapted to the context of micro-positioning of optical components, a quantification and durability analysis of optical and robotic performances have been investigated. Experimental investigations demonstrate that a rotational and translational positioning accuracy of 0.004° and 27.6 nm have been obtained respectively.This photo-robotic approach has especially been applied to achieve the 6-DOF positioning of an optical lamella relative to an optical fiber with high accuracy that also conduct to maximum optical performances. The approach has also been applied to control the optical polarization states at the output of an hybrid optical system through achieving high accurate rotations of a specific optical wave plate around the optical axis. The experimental results notably demonstrate that the high positioning accuracy enables to accurately control of the optical polarization state.
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ON-MACHINE MEASUREMENT OF WORKPIECE FORM ERRORS IN ULTRAPRECISION MACHININGGomersall, Fiona January 2016 (has links)
Ultraprecision single point diamond turning is required to produce parts with sub-nanometer surface roughness and sub-micrometer surface profiles tolerances. These parts have applications in the optics industry, where tight form accuracy is required while achieving high surface finish quality. Generally, parts can be polished to achieve the desired finish, but then the form accuracy can easily be lost in the process rendering the part unusable.
Currently, most mid to low spatial frequency surface finish errors are inspected offline. This is done by physically removing the workpiece from the machining fixture and mounting the part in a laser interferometer. This action introduces errors in itself through minute differences in the support conditions of the over constrained part on a machine as compared to the mounting conditions used for part measurement. Once removed, the fixture induced stresses and the part’s internal residual stresses relax and change the shape of the generally thin parts machined in these applications. Thereby, the offline inspection provides an erroneous description of the performance of the machine.
This research explores the use of a single, high resolution, capacitance sensor to quickly and qualitatively measure the low to mid spatial frequencies on the workpiece surface, while it is mounted in a fixture on a standard ultraprecision single point diamond turning machine after a standard facing operation. Following initial testing, a strong qualitative correlation exists between the surface profiling on a standard offline system and this online measuring system. Despite environmental effects and the effects of the machine on the measurement system, the capacitive system with some modifications and awareness of its measurement method is a viable option for measuring mid to low spatial frequencies on a workpiece surface mounted on an ultraprecision machine with a resolution of 1nm with an error band of ±5nm with a 20kHz bandwidth. / Thesis / Master of Applied Science (MASc)
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