As technology continues to scale down, semiconductor manufacturing with 193nm lithography is greatly challenging because the required half pitch size is beyond the resolution limit. In order to bridge the gap between design requirements and manufacturing limitations, various resolution enhancement techniques have been proposed to avoid potentially problematic patterns and to improve product yield. In addition, co-optimization between design performance and manufacturability can further provide flexible and significant yield improvement, and it has become necessary for advanced technology nodes. This dissertation presents the methodologies to consider the lithography impact in different design stages to improve layout manufacturability. Double Patterning Lithography (DPL) has been a promising solution for sub-22nm node volume production. Among DPL techniques, self-aligned double patterning (SADP) provides good overlay controllability when two masks are not aligned perfectly. However, SADP process places several limitations on design flexibility and still exists many challenges in physical design stages. Starting from the early design stage, we analyze the standard cell designs and construct a set of SADP-aware cell placement candidates, and show that placement legalization based on this SADP awareness information can effectively resolve DPL conflicts. In the detailed routing stage, we propose a new routing cost formulation based on SADP-compliant routing guidelines, and achieve routing and layout decomposition simultaneously. In the case that limited routing perturbation is allowed, we propose a post-routing flow based on lithography simulation and lithography-aware design rules. Both routing methods, one in detailed routing stage and one in post routing stage, reduce DPL conflicts/violations significantly with negligible wire length impact. In the layout decomposition stage, layout modification is restricted and thus the manufacturability is even harder to guaranteed. By taking the advantage of complementary lithography, we present a new layout decomposition approach with e-beam cutting, which optimizes SADP overlay error and e-beam lithography throughput simultaneously. After the mask layout is defined, optical proximity correction (OPC) is one of the resolution enhancement techniques that is commonly required to compensate the image distortion from the lithography process. We propose an inverse lithography technique to solve the OPC problem considering design target and process window co-optimization. Our mask optimization is pixel based and thus can enable better contour fidelity. In the final physical verification stage, a complex and time-consuming lithography simulation needs to be performed to identify faulty patterns. We provide a classification method based on support vector machine and principle component analysis that detects lithographic hotspots efficiently and accurately. / text

Técnicas experimentais de identificação de sistemas de controle têm despertado interesse na indústria, devido a sua facilidade em se ajustar modelos matemáticos, facilitando a formulação e a resolução de problemas de controle de processos. É proposto o uso de uma técnica experimental de identificação de sistemas, utilizando a estrutura matemática linear ARX. Os parâmetros da estrutura matemática ARX são estimados por meio do algoritmo dos mínimos quadrados recursivo (RLS). A comunicação e a aquisição de dados de redes Fieldbus é feita através do padrão de comunicação OPC. / Experimental system identification techniques are considered interesting by industrial sector due to the simple approach to adjust mathematical models, making it easy the formulation and the solution of process control problems. In this work a computational tool is proposed, the Sintonizador, based on the experimental technic of System Identification, using the linear mathematical structure ARX (Auto-Regressive with eXogenous inputs). The ARX structure parameters are estimated by RLS (Recursive Least Square) algorithm. The data comunication and data aquisition of the fieldbus network has been done through of the OPC comunication standard.

Nas subestações das grandes concessionárias de distribuição de energia elétrica coexistem sistemas de proteção com diferentes tecnologias, formados por relés eletromecânicos, estáticos e digitais, que, em alguns casos, continuarão funcionando por algumas décadas. Essa diversidade de tecnologias implica em sistemas com características de hardware e software diferentes, o que dificulta a implantação de funcionalidades locais e remotas que sejam interoperáveis. Dessa forma, torna-se interessante desenvolver um sistema baseado nas diferentes plataformas de proteção do mercado, com o objetivo de integrar as informações dos relés de proteção de diferentes tecnologias e que se comunicam através de protocolos distintos, criando uma base de dados homogênea. Para isso é necessário realizar uma coleta de dados provenientes dos vários relés de proteção e disponibilizar as informações do sistema de proteção para uma base de dados, através de uma interface de protocolos, onde essas informações possam ser tratadas de maneira uniforme e organizadas de forma estruturada, otimizando a funcionalidade local da instalação e podendo alimentar um sistema central de gestão. / In substations of large electric power distribution companies coexist protection systems with different technologies, comprised of electromechanical, static and digital relays that, in some cases, will continue to work for a few decades. This technology diversity implies in systems with different features of hardware and software, which hampers the implementation of local and remote functionalities that are interoperable. It would be interesting to develop a system based on integrated functional use of different protection platforms on the market, aiming to integrate the information of protective relays from different technologies that communicate with different protocols, creating a homogeneous database. It would be necessary a collection of data from the various protection relays that, through an interface protocols, provide information from the protection system for a database where information can be treated uniformly and organized in a structured manner, optimizing the local functionalities and feeding a central management system.

Nas subestações das grandes concessionárias de distribuição de energia elétrica coexistem sistemas de proteção com diferentes tecnologias, formados por relés eletromecânicos, estáticos e digitais, que, em alguns casos, continuarão funcionando por algumas décadas. Essa diversidade de tecnologias implica em sistemas com características de hardware e software diferentes, o que dificulta a implantação de funcionalidades locais e remotas que sejam interoperáveis. Dessa forma, torna-se interessante desenvolver um sistema baseado nas diferentes plataformas de proteção do mercado, com o objetivo de integrar as informações dos relés de proteção de diferentes tecnologias e que se comunicam através de protocolos distintos, criando uma base de dados homogênea. Para isso é necessário realizar uma coleta de dados provenientes dos vários relés de proteção e disponibilizar as informações do sistema de proteção para uma base de dados, através de uma interface de protocolos, onde essas informações possam ser tratadas de maneira uniforme e organizadas de forma estruturada, otimizando a funcionalidade local da instalação e podendo alimentar um sistema central de gestão. / In substations of large electric power distribution companies coexist protection systems with different technologies, comprised of electromechanical, static and digital relays that, in some cases, will continue to work for a few decades. This technology diversity implies in systems with different features of hardware and software, which hampers the implementation of local and remote functionalities that are interoperable. It would be interesting to develop a system based on integrated functional use of different protection platforms on the market, aiming to integrate the information of protective relays from different technologies that communicate with different protocols, creating a homogeneous database. It would be necessary a collection of data from the various protection relays that, through an interface protocols, provide information from the protection system for a database where information can be treated uniformly and organized in a structured manner, optimizing the local functionalities and feeding a central management system.

Técnicas experimentais de identificação de sistemas de controle têm despertado interesse na indústria, devido a sua facilidade em se ajustar modelos matemáticos, facilitando a formulação e a resolução de problemas de controle de processos. É proposto o uso de uma técnica experimental de identificação de sistemas, utilizando a estrutura matemática linear ARX. Os parâmetros da estrutura matemática ARX são estimados por meio do algoritmo dos mínimos quadrados recursivo (RLS). A comunicação e a aquisição de dados de redes Fieldbus é feita através do padrão de comunicação OPC. / Experimental system identification techniques are considered interesting by industrial sector due to the simple approach to adjust mathematical models, making it easy the formulation and the solution of process control problems. In this work a computational tool is proposed, the Sintonizador, based on the experimental technic of System Identification, using the linear mathematical structure ARX (Auto-Regressive with eXogenous inputs). The ARX structure parameters are estimated by RLS (Recursive Least Square) algorithm. The data comunication and data aquisition of the fieldbus network has been done through of the OPC comunication standard.

Réalisée entre décembre 2009 et décembre 2012 au sein de STMicroelectronics Crolles dans l’équipe RET (résolution enhancement techniques), et en partenariat avec le laboratoire Hubert Curien Saint Etienne de l’université de Lyon, cette thèse s’intitule "Impact de la modification de la source dans l’utilisation de la méthode de cooptimisation masque source en lithographie optique, et application au nœud technologique 20 nm". Durant cette étude, nous avons pu étudier la technique d’optimisation de la source optique en lithographie, appelée généralement SMO afin de l’appliquer aux problématiques de l’industrie. Une première partie du manuscrit traitant de la lithographie optique permettra de mieux comprendre les problématiques liées à cette étude, en présentant les techniques utilisées. En effet, afin de permettre à la lithographie optique de continuer la miniaturisation des composants de microélectronique, il est nécessaire d’optimiser au maximum de nombreux éléments de la lithographie. La forme de la source optique utilisée n’échappe pas à cette règle et l’utilisation de sources étendues, hors axe et plus ou moins complexe permet aujourd’hui la production des technologies de pointes. Une seconde partie s’attardera plus sur l’optimisation de la source à proprement parler. Dans un premier temps, la théorie de la diffraction sera étudiée afin de permettre une meilleure compréhension du problème. Des simulations et des mesures SEM ou microscope électronique à balayage seront présentées pour montrer l’efficacité de la méthode SMO, de l’anglais "Source Mask Optimization". Cette étude donnant lieu au développement de nouvelles méthodes rapides et innovantes d’optimisation de la source, l’étude prendra soin de présenter des résultats obtenus dans le cadre de cette thèse. Ainsi, la méthode de SMO interne basée sur le phénomène de diffraction et créée durant cette thèse sera présentée dans cette étude et les résultats en découlant seront étudiés. L’application de l’optimisation de la source à des problématiques industrielles sera également présentée à travers différentes applications des solutions proposées. Finalement, un legs de connaissance nécessaire sera effectué par la présentation des différents outils développés durant cette thèse. Une troisième partie concernera l’étude de l’outil Flexray permettant la génération des sources optimisées. La thèse ayant donné lieu à une nouvelle technique de décomposition de la source en polynôme de Zernike, cette techniques sera présentée ici. Elle sera ensuite utilisée pour modéliser la dégradation d’une source, ainsi que pour corréler la différence de source avec la divergence du modèle empirique de simulation. L’étude des sources a été mise en place suivant un aspect industrielle, afin de contrôler l’évolution du scanner de façon rapide. De plus, des simulations peuvent être utilisées pour compléter cette étude. Finalement, une dernière partie traitera de la cooptimisation entre la source et différents éléments tels que le masque et la forme final du motif souhaité. En effet, si la forme initiale du motif souhaité joue un rôle important dans la définition de la source, il est possible de modifier cette dernière, ainsi que la forme du masque en lui appliquant un OPC afin d’obtenir de meilleurs résultats. Ces modifications seront étudiées durant le dernier chapitre / Conducted between December 2009 and December 2012 within the RET (resolution enhancement technology) team at STMicroelectronics Crolles and in partnership with Saint-Etienne laboratory Hubert Curien of the University of Lyon, this thesis entitled "Impact of changing the source while using the source mask optimization technique within optical lithography, and application to 20 nm technology node. ". In this thesis, Alleaume Clovis studied the optimization of the source used in optical lithography, technique usually called SMO (for source mask optimization) and applied the technique to the industry through several problems. The first part of the manuscript describe the optical lithography generalities, in order to allow a better understanding of the issues and the techniques used in this study. Indeed, to allow optical lithography to continue the miniaturization of microelectronic components, it is necessary to optimize many aspects of the lithography. The shape of the light source used is no exception to this rule and the use of extended sources, off-axis and more or less complex now enables the production of advanced technologies. The second part will then focus on the source modification and optimization. In a first step, the diffraction theory will be examined to demonstrate the theoretical interest of the thesis, and to allow a better understanding of the problem. Simulations and SEM measurements will be presented to show the effectiveness of SMO method. As this study gave birth to several innovative source optimization techniques, they will be presented. Thus, the method of internal SMO based on the phenomenon of diffraction and created during this thesis will be presented and the results would be studied. The application of the source optimization to industrial problems will also be presented through different applications. Finally, a legacy of knowledge will be done by presenting the different tools developed during this thesis. A third part will deal with the study of tool which generate the source inside the scanner allowing the use of optimized and complex sources. The thesis has given rise to a new source decomposition technique using Zernike polynomial. It will be used in this study to model the degradation of a source, and for correlating the impact of a source modification due to SMO technique on the empirical model stability. The study of sources has been implemented according to industrial aspect to monitor the scanner with a quick method. In addition to the Zernike decomposition method, simulations can be used to complete this study. The forth chapter of this study will talk about this implementation. Finally, the last part of the study will talk about the co-optimization of the source with several elements, such as the mask OPC and the final shape of the desired pattern. Indeed, if the initial shape of the desired pattern plays an important role in defining the source, it is possible to modify the latter design shape, as well as the shape of the mask in order to optimize both the source and the target shape. These changes will be discussed in the last chapter

The purpose of this bachelor's degree project is to address the problem of automation of a storing system complex enough to be able to understand and manage the most important and critical aspects of the storage plant. The plant has been designed and built in a simulation program called Simumatik due to its obvious simplicity in comparison to what it would take to assemble it in the real plant.Therefore, some technical aspects have been integrated in connection with OPC-UA and with programming of CODESYS. Thus, a system with a variety of components has been proposed in aim to get as close as possible to a storing plant and a real distribution. The system includes ten conveyors. The bags are moved from the filling station to a door where the next operator take each bag.In turn, the resolution of the problem has been tackled from a realistic and general point of view so that all the final objectives of automation systems are achieved, such as the design and organization of a plant, control, and supervision.In general terms, the outcome of the final degree project is a deep analysis of current production, and a new storing processes with an automation solution and leveled production line as well. This automation would increase the flexibility of the operator as well as decrease the number of tasks of the operator and therefore it would be more efficient. The project begins by facing a problem in which the limitations are defined beforehand, which meets a complex and new requirement according to the development of a final degree project. This is equivalent to designing a storing plant with all the transport and distribution equipment in combination with sensors that provide information on the system.

De nos jours, l’énergie renouvelable est une solution durable pour remplacer les sources conventionnelles d’énergie. L’utilisation de réseaux photovoltaïques (PV) et d’éoliennes est devenue très populaire. Cependant, de cette énergie gratuite découlent de nouveaux défis. Certains des grands inconvénients de ces alternatives sont représentés par un faible taux de conversion de l'énergie et par la nécessité d'utiliser un système de stockage d'énergie Un autre bémol est aussi celui de l’efficacité réduite du transfert entre les réseaux PV et/ou les éoliennes, et les consommateurs. L’objectif de cette thèse est de présenter et de comparer différentes stratégies de commandes pour les systèmes alimentés par les sources d’énergies renouvelables. Un prototype destiné à des fins d’essais a été conçu. Cette thèse traite de différents aspects tels que la modélisation de panneaux PV, l’observateur non linéaire, un algorithme de contrôle basé sur une recherche du point de puissance maximum (Maximum modélisation d’un convertisseur abaisseur DC/DC,construire un Point Power Point Tracking), un algorithme de contrôle polynôme, la stabilité du système. Le chapitre 2 présente différents modèles de cellule photovoltaïque qui peuvent, en outre, être utilisés dans une boucle de contrôle. Une interface utilisateur graphique est créée pour faciliter le calcul de certains paramètres et de la courbe caractéristique de la tension voltage du panneau PV. De plus, un modèle à espace d’états et un modèle de fonction de transfert de certains convertisseurs DC/DC sont présentés. Le chapitre 3 se concentre sur l’élaboration d’un observateur Takagi-Sugeno (T-S) qui fournit la tension estimée du panneau PV. Ce dernier sera, plus tard, utilisé dans le bloc de commande ou pourra servir pour les diagnostics. Le chapitre 4 compare différents algorithmes MPPT classique, ainsi qu’un algorithme de contrôle avancé qui pourra être utilisé plus tard pour améliorer les performances des boucles de contrôles. Une étude de cas sur une commande de supervision utilisant une cellule à combustion est proposée. Le chapitre 5 est orienté vers une approche plus pratique. Il présente un système de contrôle distribué qui est géré via un serveur OPC. Un algorithme de control polynomial robuste R-S-Test élaboré, validé en simulation et testé sur une plateforme expérimentale. Un système d’acquisition de données enregistre les informations envoyées par chacune des boucles de contrôle et est capable de tracer les données en temps réel. Le chapitre 6 est dédié aux conclusions. Le chapitre 7 présente les codes des logiciels développés et certains schémas qui ont été utilisés durant les simulations. Le chapitre 8 liste la bibliographie. / Nowadays renewable energy is a long term solution for replacing the conventional sources of energy. The use of photovoltaic (PV) arrays and wind turbines has become very popular. Nevertheless, this “free energy” arises new challenges. Some of the big inconveniences of these alternatives are represented by a low conversion rate of the energy and the necessity of using an energy storing system. Another drawback is the reduced transfer efficiency between the PV arrays or/and wind turbines and the consumers. The goal of this thesis is to present and compare different control strategies for systems that are powered by renewable sources of energy. A prototype for testing purposes was designed. This thesis treats different aspects such as PV panel modelling, buck converter modelling, building a non-linear observer, a control algorithm based on maximum power point tracking (MPPT), a polynomial control algorithm, the stability of the system. Chapter 2 presents different photovoltaic cell models that can be further used in control loops. A graphic user interface is created for facilitating the computation of certain parameters and of the power-voltage / current-voltage characteristics of a PV panel. Furthermore, a state space model and a transfer function model of some DC/DC converters are presented. Chapter 3 focuses on elaborating a Takagi-Sugeno (T-S) observer which will provide the estimated voltage of the PV panel. The latter will later be used in the control block or it can serve for diagnosis purposes. Chapter 4 compares different classical MPPT algorithms, as well as advanced control algorithms which may be later used to improve the performances of the control loops. A case study on a supervisory control that uses fuel cells is proposed. Chapter 5 is oriented on a rather practical approach. It presents a distributed control system that is managed via an OPC server. A robust R-S-T polynomial controller is designed, validated in simulation and tested on a prototype. A data acquisition system stores the data sent by each of the control loops and is able to plot data in real time. Chapter 6 is dedicated to the conclusions. Chapter 7 presents the code of the developed software and some schematics that were used during simulations. Chapter 8 lists the bibliography.

Das Opc-Protein ist ein Außenmembranprotein von Meningokokken, das über extrazelluläre Matrixproteine mit Integrinen der Wirtszelle interagiert. Opc ist in Menschen immunogen und induziert bakterizide Antikörper. Das Opc-Protein wurde daher als aussichtsreicher Impfstoff-Kandidat angesehen, da es außerdem relativ gut konserviert ist. Allerdings wird das Opc-Protein nicht von allen Meningokokkenstämmen exprimiert. Einerseits fehlt das opc-Gen in einigen klonalen Komplexen (z.B. ST-8, ST-11, ST-53), andererseits ist die Opc-Expression nicht konstitutiv wegen einer phasenvariablen Transkription, die auf einem Poly-Cytidin-Bereich im Promotor des opc-Gens beruht. In dieser Arbeit wurde die Präsenz des opc-Gens und die Opc-Expression in zwei großen Sammlungen deutscher Meningokokkenisolate von invasiven Erkrankungen (n=1141) und gesunden Trägern (n=792) untersucht. Das opc-Gen war bei 71% der invasiven und 77% der Trägerstämme nachweisbar. Der größte Teil der opc-Gen negativen Stämme gehörte zu den klonalen Komplexen ST-8, ST-11, ST-213, ST-231, ST-334 und ST-53. Der Anteil opc-positiver Stämme, die Opc in vitro exprimieren, war bei den invasiven Stämmen kleiner als bei den Trägerstämmen (13% vs. 29%, p<0,001, Chi-square-Test). Der größere Anteil Opc-exprimierender Trägerstämme ist u.a. am ehesten mit der Überrepräsentation von wenig pathogenen klonalen Komplexen (ST-23, ST-35, ST-198) mit einer hohen Opc-Expressionsrate zu erklären. 24 von den 176 invasiven Stämmen mit einer Anzahl von 11 - 14 Cs in der Promotor-Region, die die Opc-Expression begünstigt, zeigten weder im ELISA noch im Westernblot eine Opc-Expression. Bei 14 dieser 24 Stämme wurde als Ursache ein phasenvariabler, intragenischer Poly-Adenin-Bereich identifiziert, der zu einer Leserasterverschiebung führte. Die Vermutung mehrerer Autoren, dass die Opc-Expression mit dem klinischen Bild der Meningitis verknüpft ist, konnte mit der hier genutzten großen Stammsammlung nicht bestätigt werden. Invasive Stämme, die das Opc-Protein exprimierten, wurden genauso häufig von Patienten mit dem klinischen Bild der Meningitis isoliert wie Stämme, die das Opc-Protein nicht exprimierten (46% vs. 47%, Chi-square-Test: p<0,9). Allerdings gibt es eine starke Assoziation der Gegenwart des opc-Gens mit dem klinischen Merkmal Meningitis. Dieser Befund gibt Anlass zu der Hypothese, dass in vitro und in vivo Expression von Opc sich unterscheiden. Zusammenfassend lässt sich festhalten, dass das Opc-Protein nur in 19,8% aller Isolate (invasive und Trägerstämme zusammengenommen) exprimiert wurde. Es zeigte sich eine Tendenz zu häufigerer Opc-Expression in apathogenen Trägerisolaten. Das Vorhandensein des opc-Gens, nicht aber die in vitro Expression konnten mit dem klinischen Merkmal Meningitis assoziiert werden. Zusätzlich wurde ein weiterer Mechanismus der intragenischen Phasenvariation beschrieben. / Presence of opc was associated with meningitis, mostly because ST-11/ST-8 cc meningococci with low meningitis rates were consistently opc negative. On the other hand, lack of opc did not exclude meningitis. Opc was expressed in only 13% of all invasive isolates. In vitro Opc expression was not associated with meningitis. Limitation: Definite conclusion about expression in vivo is not possible with cultured isolates. Evidence for intragenic opc phase-variation was provided.

<p>This report presents the existence of a set of problems making the growth of the domotic field more difficult. They are mainly the lack of a common communication standard among devices and the existence of a proprietary market, where each provider focuses on developing its own devices, protocols and interfaces.</p><p>There isn’t a convergence criterion in order to overcome this problem by the main domotic providers. Several studies try to overcome this problem by applying different strategies. This study analyses the main strategies followed in that field, concluding with a model that combines them. The model is based on the use of OPC and web services.</p>