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Study on the Conduction Mechanism of Organic Light-Emitting Diode Using One-Dimensional Discontinuous ModelMIZUTANI, Teruyoshi, MORI, Tatsuo, KANEKO, Kazue, CHO, Don-Chan, OGAWA, Takuya 01 June 2002 (has links)
No description available.
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Red EL Properties of OLED Having Hole Blocking LayerLEE, Duck-Chool, MIZUTANI, Teruyoshi, MORI, Tatsuo, KIM, Hyeong-Gweon 20 July 2000 (has links)
No description available.
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Color tuning of organic light emitting devicesJokinen, K. (Karoliina) 08 August 2017 (has links)
Abstract
This thesis reports the investigation of color tuning of two types of organic light emitting devices, transistors (OLETs) and diodes (OLEDs). Voltage tunable two color light emission was demonstrated for OLETs. For OLEDs, two kinds of color tuning methods were presented. For these, color tuning was realized using thermal annealing which changes the light emission color of the devices permanently.
The two color light emission of the OLETs, employing a three-layer heterostructure device configuration, occurs in red and green. The device structure was first utilized for producing red light emission originating from a light emission layer made of Alq3:DCM that was deposited between the hole and electron transport layers made of DH-4T and DFH-4T, respectively. After modifying the fabrication process in order to raise the device performance by acquiring smoother active layers green light could also be produced by the devices. Green light emission originated from the electron transport layer. This took place during the electron transport mode, while the red emission was apparent while hole transport was active. The color of the light emission was therefore demonstrated as being tunable by voltage.
For OLEDs, devices with one active polymeric layer, undoped and doped, were investigated. The undoped OLEDs had the light emission layer made of blue light emitting polyfluorene PFO. The OLEDs suffered from keto-defects shifting their light emission color from blue to greenish shade, a common problem occurring in widely used blue light emitting polyfluorenes. The work conducted and reported in this thesis demonstrated that thermal annealing can be used for diminishing this undesired green emission. For the doped OLEDs with the light emission layer made of a PFO:F8BT blend, color tuning was realized using thermal annealing as well. As a result of exposure to thermal treatment, the light emission color of these devices which was green as fabricated was converted to white. The phenomenon behind this effect was explained by phase separation between the host and dopant polymers of the light emission layer. / Tiivistelmä
Tässä väitöskirjatyössä tutkitaan orgaanisten valoa emittoivien transistoreiden (OLET) ja diodien (OLED) värinsäätöä. Työssä tehtiin kolmikerrosrakenteisia OLETeja, jotka kykenevät emittoimaan valoa kahdella värillä ja joiden emittointiväri on jännitesäädettävissä. OLEDien osalta toteutettiin kaksi erilaista värinsäätömenetelmää, joissa molemmissa hyödynnettiin kuumennusta pysyvän värinvaihdon aikaansaamiseksi.
Tutkitut OLETit emittoivat punaista ja vihreää valoa. Aluksi tutkittiin vastaavia komponentteja, jotka emittoivat vain punaista valoa. Näissä komponenteissa punaisen valon tuotti keskimmäinen valoemitterinä toiminut kerros (Alq3:DCM), jonka ala- ja yläpuolella olivat aukko- ja elektronijohtavat kerrokset (DH-4T ja DFH-4T). Komponenteilla saatiin tuotettua myös vihreää valoa, kun valmistusprosessia kehitettiin tasaisempien aktiivisten materiaalikerrosten valmistamiseksi. Vihreän valon todettiin olevan elektronijohtavan kerroksen tuottamaa. Kaksiväriemittoiva OLET tuotti vihreää valoa ollessaan elektronijohtavassa tilassa, ja punaista valoa aukkojohtavassa tilassa, emittointivärin ollessa näin jännitesäädettävissä.
Työssä tutkittujen OLEDien valon emittointi perustui polymeerikerrokseen, joka oli toisissa OLEDeissa seostamaton ja toisissa seostettu. Seostamattomien OLEDien aktiivinen kerros oli tehty sinistä valoa tuottavasta polyfluoreenista (PFO), jossa usein ilmenee keto-virheitä, joiden vuoksi PFO:sta tehtyjen OLEDien valo muuttuu sinisestä vihertäväksi. Työssä osoitettiin, että kuumennusta voidaan käyttää sinisen emittointivärin palauttamiseen. Seostettujen OLEDien (PFO:F8BT) osalta kuumennusta käytettiin komponenttien emittointivärin muuttamiseksi alkuperäisestä emittointiväristä vihreästä valkoiseksi. Tämä ilmiö selitettiin valoa emittoivan kerroksen polymeerien välisellä faasierkaantumisella.
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Porous Metal Oxides and Their ApplicationsTien, Wei-Chen 15 July 2012 (has links)
Porous metal oxides formed by supercritical carbon dioxide (SCCO2) treatments at low temperature were used for displays, solar cells, and light emitting diodes (LEDs) applications. The SCCO2 fluid, also known as green solvents, exhibits low viscosity, low surface tension and high diffusivity as gases, and high density and solubility same with liquids. In this thesis, we successfully fabricated porous antimony-doped tin oxide (ATO) and porous indium tin oxide (ITO) by the SCCO2 treatments. In addition, the treatment can also be used to improve the work function and surface energy of ITO anode of an organic LED (OLED). The performance of the OLEDs was drastically enhanced in comparison with that of the devices without any ITO surface treatments.
First, the porous ATO films were formed by the SCCO2 treatment for absorption of silver molecules in silver electro deposition devices. The porosity, resistivity and average optical transmittance of the porous ATO film in visible wavelength were 43.1%, 3 £[-cm and 90.4%, respectively. For the silver electro deposition devices with the porous ATO film, the transmittance contrast ratio of larger than 12 in visible spectrum was obtained at an operating voltage of 1.5 V. Furthermore, for the 0.25 cm2 device, the switching time of 4.5 seconds was achieved by applying a square-wave voltage ranging from 1.5 to -0.2 V between the electrodes.
On the other hand, the porous ITO with low refractive index was prepared by SCCO2/IPA treatment on gel-coated ITO thin films. The high refractive index of the ITO film was achieved by long-throw radio-frequency magnetron sputtering technique at room temperature. The index contrast (£Gn) was higher than 0.6 between porous ITO and sputtered ITO films. The large £Gn is useful for fabricating conductive anti-reflection (AR) and high reflection (HR) structures using the porous ITO on sputtered ITO bilayers. The weighted average reflectance and transmittance of 4.3% and 83.1% were achieved for the double-layer ITO AR electrode with a sheet resistance of 1.1 K£[/¡E. For HR structures, the reflectance and sheet resistance were 87.9% and 35 £[/¡E with 4 periods ITO bilayers.
Finally, the SCCO2 treatments with strong oxidizer H2O2 were proposed to modify surface property of ITO anode of a fluorescent OLED. The highest work function and surface energy of 5.5 eV and 74.8 mJ/m2 was achieved by the SCCO2/H2O2 treatment. For the OLED with 15 min SCCO2 treatment at 4000 psi, the turn-on voltage and maximum power efficiency of 6.5 V and 1.94 lm/W were obtained. The power efficiency was 19.3% and 33.8% higher than those of the OLEDs with oxygen plasma treated and as-cleaned ITO anodes.
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Role of polythiophene- based interlayers from electrochemical processes on organic light-emitting diodes / Die Wirkung von elektrochemisch dotierten Polythiophenpufferschichten auf organische LeuchtdiodenZhang, Fapei 05 January 2004 (has links) (PDF)
In this work, well-defined and stable thin films based on polythiophene and its derivative, are employed as the hole-injection contact of organic light-emitting diodes (OLED). The polymer films are obtained by the electropolymerization or the electrochemical doping/dedoping of a spin-coated layer. Their electrical properties and energetics are tailored by electrochemical adjustment of their doping levels in order to improve the hole-injection from the anode as well as the performance of small molecular OLEDs. By using dimeric thiophene and optimizing the electrodeposition parameters, a thin polybithiophene (PbT) layer is fabricated with well-defined morphology and a high degree of smoothness by electro-polymerization. The introduction of the semiconducting PbT contact layer improves remarkably the hole injection between ITO anode and the hole- transport layer (NPB) due to its favourable energetic feature (HOMO level of 5.1 eV). The vapor-deposited NPB/Alq3 bilayer OLEDs with a thin PbT interlayer, show a remarkable reduction of the operating voltage as well as enhanced luminous efficiency compared to the devices without PbT. Investigations have also been made on the influence of PbT thickness on the efficiency and I-V feature as well as device stability of the OLED. It is demonstrated that the use of an electropolymerization step into the production of vapor deposited molecular OLED is a viable approach to obtain high performance OLEDs. The study on the PbT has been extended to poly(3,4-ethylenedioxythiophene) (PEDT) and the highly homogenous poly(styrenesulfonate) (PSS) doped PEDT layer from a spin-coating process has been applied. The doping level of PEDT:PSS was adjusted quantitatively by an electrochemical doping/dedoping process using a p-tuoluenesulfonic acid containing solution, and the redox mechanism was elucidated. The higher oxidation state can remain stable in the dry state. The work function of PEDT:PSS increases with the doping level after adjusting at an electrode potential higher than the value of the electrochemical equilibrium potential (Eeq) of an untreated film. This leads to a further reduction of the hole-injection barrier at the contact of the polymeric anode/hole transport layer and an ideal ohmic behavoir is almost achieved at the anode/NPB interface for a PEDT:PSS anode with very high doping level. Molecular Alq3-based OLEDs were fabricated using the electrochemically treated PEDT:PSS/ITO anode, and the device performance is shown to depend on the doping level of polymeric anode. The devices on the polymer anode with a higher Eeq than that for the unmodified anode, show a reduction of operating voltage as well as a remarkable enhancement of the luminance. Furthermore, it is found that the operating stability of such devices is also improved remarkably. This originates from the removal of mobile ions such as sodium ions inside the PEDT:PSS by electrochemical treatment as well as the planarization of the ITO surface by the polymer film. By utilizing an Al/LiF cathode with an enhanced electron injection and together with a high Eeq- anode, a balanced injection and recombination of hole and electron is achieved. It leads to a further reduction of the operating voltage and to a drastic improvement of EL efficiency of the device as high as 5.0 cd/A. The results demonstrate unambiguously that the electrochemical treatment of a cast polymer anode is an effective method to improve and optimize the performance of OLEDs. The method can be extended to other polythiophene systems and other conjugated polymers in the fabrication of the OLEDs as well as organic transistors and solar cells.
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Development Of Fluorescent OLED And Analysis Of Integrated Optofluidic Lab-on-a Chip SensorNarayan, K 04 1900 (has links) (PDF)
Optofluidics is a new branch within photonics which attempts to unify concepts from optics and microfluidics. Unification of photonics and microfluidics enable us to carry out analysis of fluids through highly sensitive optical sensing device. These optical sensing devices are contained within a microchip, wherein light is made to pass through analyte (fluids of few nanoliters). The interaction between light and fluid gives rise to highly sensitive diagnostic systems.
In this work the fabrication and performance characterization of a fluorescent green OLED for optofluidic applications is presented. The effect of thickness variation of hole injection (CuPc) and hole blocking (BCP) layers on the performance of fluorescent green organic light emitting diodes (OLEDs) have been studied. Even though these two organic layers have opposite functions, yet there is a particular combination of their thicknesses when they function in conjunction and luminous efficiency and power efficiency are maximized. The optimum thickness of CuPc layer, used as hole injection layer and BCP used as hole blocking layer were found to be 18 nm and 10 nm respectively. It is with this delicate adjustment of thicknesses, charge balancing was achieved and luminous efficiency and power efficiency were optimized. Such OLEDs with higher luminance can be monolithically integrated with other optical and fluidic components on a common substrate and can function as monolithically integrated internal source of light in optofluidic sensors.
In this work the analysis of a fully integrated optofluidic lab-on-a-chip sensor for refractive index and absorbance based sensing using fluorescent green organic light emitting diode (OLED) as a light source is also presented. This device consists of collinear input and output waveguides which are separated by a microfluidic channel. When light is passed through the analyte contained in the fluidic gap an optical power loss due to absorption of light takes place. Apart from absorption a mode-mismatch between collinear input and output waveguide also occurs. The degree of mode-mismatch, quantum of optical power loss due to absorption of light by the
fluid forms the basis of our analysis. Detection of minutest change in refractive index and
changes in concentration of species contained in the analyte is indicative of sensitivity.
Various parameters which influence the sensitivity of the sensor are mode spot size, refractive index of the fluid, molar concentration of the species contained in the analyte, width of the fluidic gap, waveguide geometry. By correlating various parameters, an optimal fluidic gap distance corresponding to a particular mode spot size to achieve the best sensitivity for refractive index based sensing and absorbance based sensing have been determined.
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Steigerung der Effizienz und Leuchtdichtehomogenität von organischen Leuchtdioden mittels Druck- und LaserprozessenPhilipp, André 03 June 2019 (has links)
Der Schwerpunkt dieser Arbeit liegt auf der Entwicklung von Technologien und Prozessen, welche die Marktakzeptanz organischer Leuchtdioden (OLED) durch Steigerung der Effizienz und Leuchtdichtehomogenität erhöhen. Dazu werden die Fertigungskosten durch neuartige Herstellungsverfahren reduziert und die Realisierung von effizienten, großflächigen (> 300×300 mm2) und homogen leuchtenden OLED-Modulen in beliebiger Modulform ermöglicht. Um dies zu erreichen, wurden folgende drei Ansätze verfolgt:
1. Die Optimierung der Strukturierung dünner Schichten bei Substraten für die organische Elektronik unter Verwendung der Technologien Siebdruck und Laserablation. Es werden neuartige Druckpasten auf ihre Eigenschaften hin untersucht und deren Eignung für die Substratstrukturierung bei OLEDs mittels Testmodulen elektro-optisch charakterisiert. Weiterhin steht die Verringerung der parasitären Leckströme durch einen optimierten Laserablationsprozess zur Grundelektrodenstrukturierung und einer Variation der Dicke der Löchertransportschicht im Fokus.
2. Die Realisierung einer schattenmasken- und photolithografiefreien seriellen elektrischen Verschaltung von mehreren kleinen OLED-Segmenten zu einem großen Gesamtmodul. Dazu werden ein Verfahren für die Erzeugung einer elektrischen Verbindung zwischen Top- und Grundelektrode sowie zwei hochinnovative Verfahren zur Separation einer vollflächig abgeschiedenen Topelektrode entwickelt und auf ihre Eignung hin validiert.
3. Die Verbesserung der Lichtauskopplung aus OLED-Modulen mittels einer modulinternen Streuschicht. Es werden fünf unterschiedliche Streupartikelarten und zwei Matrixmaterialien untersucht und deren Auswirkungen auf die Lichtauskopplung anhand von OLED-Testmodulen charakterisiert.
Die entwickelten Verfahren und Prozessen basieren auf den Technologien Siebdruck und Laserablation, sind explizit für die Fertigung flexibler Module auf Basis von Trägermaterialien wie Dünnglas oder Polymerfolien sowie einem Rolle-zu-Rolle-Herstellungsverfahren geeignet und können direkt in eine großserientechnische Herstellung von OLED-Modulen überführt werden. / The focus of this work is upon the development of technologies and processes to increase the efficiency and brightness homogeneity of organic light-emitting diodes (OLEDs) in order to improve their market acceptance. Additionally, manufacturing costs will be reduced by adopting the new processes and it will be shown that the production of efficient, large-area (up to 300 × 300 mm2) and uniformly bright
OLED modules of an arbitrary shape is possible. To achieve this, three approaches were followed:
1. The optimization of the structuring of thin layers on substrates for organic
electronics using screen printing and laser ablation. To achieve this, the properties of novel printing pastes were determined, and their suitability for structuring substrates was assessed using results from the electro-optical characterization of test modules. Furthermore, the parasitic leakage current was minimized by optimizing the laser ablation process used for the structuring of the bottom electrode, together with the thickness of the hole transport layer.
2. The electrical connection in series of several small OLED segments to make a larger module without the need for shadow masks or photolithographic processes was studied. This included the development of a technique to connect the top and bottom electrodes, as well as two highly innovative methods to produce a completely separated top electrode using structuring by laser ablation. The suitability of these methods for OLED production was confirmed.
3. A scattering layer within the modules was developed to improve the light outcoupling. Five types of scattering particle in two different matrix materials were examined, and the effects of the resulting scattering layer on the outcoupling from an OLED test module were characterized.
The newly developed processes make use of screen printing and laser ablation and are thus well suited to the production of flexible OLED modules using support materials such as thin glass or polymer foils with roll-to-roll processing. Accordingly, such technologies could readily be transferred to the large volume production of OLED modules.
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Role of polythiophene- based interlayers from electrochemical processes on organic light-emitting diodesZhang, Fapei 22 January 2004 (has links)
In this work, well-defined and stable thin films based on polythiophene and its derivative, are employed as the hole-injection contact of organic light-emitting diodes (OLED). The polymer films are obtained by the electropolymerization or the electrochemical doping/dedoping of a spin-coated layer. Their electrical properties and energetics are tailored by electrochemical adjustment of their doping levels in order to improve the hole-injection from the anode as well as the performance of small molecular OLEDs. By using dimeric thiophene and optimizing the electrodeposition parameters, a thin polybithiophene (PbT) layer is fabricated with well-defined morphology and a high degree of smoothness by electro-polymerization. The introduction of the semiconducting PbT contact layer improves remarkably the hole injection between ITO anode and the hole- transport layer (NPB) due to its favourable energetic feature (HOMO level of 5.1 eV). The vapor-deposited NPB/Alq3 bilayer OLEDs with a thin PbT interlayer, show a remarkable reduction of the operating voltage as well as enhanced luminous efficiency compared to the devices without PbT. Investigations have also been made on the influence of PbT thickness on the efficiency and I-V feature as well as device stability of the OLED. It is demonstrated that the use of an electropolymerization step into the production of vapor deposited molecular OLED is a viable approach to obtain high performance OLEDs. The study on the PbT has been extended to poly(3,4-ethylenedioxythiophene) (PEDT) and the highly homogenous poly(styrenesulfonate) (PSS) doped PEDT layer from a spin-coating process has been applied. The doping level of PEDT:PSS was adjusted quantitatively by an electrochemical doping/dedoping process using a p-tuoluenesulfonic acid containing solution, and the redox mechanism was elucidated. The higher oxidation state can remain stable in the dry state. The work function of PEDT:PSS increases with the doping level after adjusting at an electrode potential higher than the value of the electrochemical equilibrium potential (Eeq) of an untreated film. This leads to a further reduction of the hole-injection barrier at the contact of the polymeric anode/hole transport layer and an ideal ohmic behavoir is almost achieved at the anode/NPB interface for a PEDT:PSS anode with very high doping level. Molecular Alq3-based OLEDs were fabricated using the electrochemically treated PEDT:PSS/ITO anode, and the device performance is shown to depend on the doping level of polymeric anode. The devices on the polymer anode with a higher Eeq than that for the unmodified anode, show a reduction of operating voltage as well as a remarkable enhancement of the luminance. Furthermore, it is found that the operating stability of such devices is also improved remarkably. This originates from the removal of mobile ions such as sodium ions inside the PEDT:PSS by electrochemical treatment as well as the planarization of the ITO surface by the polymer film. By utilizing an Al/LiF cathode with an enhanced electron injection and together with a high Eeq- anode, a balanced injection and recombination of hole and electron is achieved. It leads to a further reduction of the operating voltage and to a drastic improvement of EL efficiency of the device as high as 5.0 cd/A. The results demonstrate unambiguously that the electrochemical treatment of a cast polymer anode is an effective method to improve and optimize the performance of OLEDs. The method can be extended to other polythiophene systems and other conjugated polymers in the fabrication of the OLEDs as well as organic transistors and solar cells.
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Großflächige Abscheidung organischer Leuchtdioden und Nutzung optischer Verfahren zur in situ ProzesskontrolleEritt, Michael 28 January 2011 (has links) (PDF)
In der vorliegenden Arbeit wird die großflächige Abscheidung von organischen Leuchtdioden (OLED) für Beleuchtungsanwendungen in einer neuartigen Beschichtungsanlage vorgestellt. Ausgehend von den speziellen Anforderungen an gleichförmige Schichtdickenverteilung und hohe Abscheideraten für die organischen Schichten, sind die Verfahren der thermischen Vakuumverdampfung (VTE) und der organischen Dampfphasenabscheidung (OVPD) auf Substraten der Größe 370 x 470 mm² unter Fertigungsbedingungen kombiniert. Die Quellensysteme der Anlage wurden hinsichtlich der Verteilung des Materialauftrages und der Oberflächenrauigkeit qualifiziert. Die Kontrolle der Schichteigenschaften ist bei der organischen Dampfphasenabscheidung durch Variation der Parameter Substrattemperatur und Abscheiderate in einem weiten Bereich möglich. Die in situ Kontrolle der Schichtdicke mittels spektroskopischer Reflektometrie wird vorgestellt. Ein Messsystem ist in die Beschichtungsanlage integriert und abgeschiedene Schichten charakterisiert worden. Die Arbeit zeigt, dass die genaue Bestimmung der Dicke einzelner Schichten oder ganzer Schichtstapel mit diesem Verfahren möglich ist und zur ex situ Ellipsometrie vergleichbare Ergebnisse liefert. Um robuste OLED-Bauelemente herzustellen, wird eine organische Kurzschlussunterdrückungsschicht eingeführt, die konform mittels der OVPD-Technologie abgeschieden wird. Die strombegrenzenden Eigenschaften dieser Schicht wirken Defektströmen innerhalb der OLED entgegen. Die reproduzierbare Herstellung von 100 x 100 mm² großen, weißes Licht emittierenden OLED-Modulen mit mittleren Leistungseffizienzen von über 13 lm/W zeigt das Potential dieser Technologie. / The thesis deals with the large area deposition of organic light-emitting diodes (OLED) for lighting applications with a novel deposition tool. The special needs of film thicknesses homogeneity and high deposition rates for organic layers request the combination of thermal vacuum deposition (VTE) and organic vapour phase deposition (OVPD) processes to fabricate OLEDs on 370 x 470 mm² substrates. The deposition sources are qualified regarding layer homogeneity and morphology of the deposition processes. The layer properties are controlled in a wide range by the variation of the organic vapour phase deposition parameters: substrate temperature and deposition rate. The in situ determination of the substrate thickness is shown by the application of spectroscopic reflectometry. The thesis demonstrates the thickness analysis of single and multi-layer stacks by reflectometry. The data fit well to ex situ ellipsometry. Robust OLED devices with an additional short-circuit protection layer deposited by OVPD technology are introduced. The current limiting properties of this layer reduce the leakage currents in the OLED device. The fabrication of 100 x 100 mm² white emitting OLED modules with power efficiencies about 13 lm/W shows the great potential of the manufacturing technology.
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Großflächige Abscheidung organischer Leuchtdioden und Nutzung optischer Verfahren zur in situ ProzesskontrolleEritt, Michael 11 November 2010 (has links)
In der vorliegenden Arbeit wird die großflächige Abscheidung von organischen Leuchtdioden (OLED) für Beleuchtungsanwendungen in einer neuartigen Beschichtungsanlage vorgestellt. Ausgehend von den speziellen Anforderungen an gleichförmige Schichtdickenverteilung und hohe Abscheideraten für die organischen Schichten, sind die Verfahren der thermischen Vakuumverdampfung (VTE) und der organischen Dampfphasenabscheidung (OVPD) auf Substraten der Größe 370 x 470 mm² unter Fertigungsbedingungen kombiniert. Die Quellensysteme der Anlage wurden hinsichtlich der Verteilung des Materialauftrages und der Oberflächenrauigkeit qualifiziert. Die Kontrolle der Schichteigenschaften ist bei der organischen Dampfphasenabscheidung durch Variation der Parameter Substrattemperatur und Abscheiderate in einem weiten Bereich möglich. Die in situ Kontrolle der Schichtdicke mittels spektroskopischer Reflektometrie wird vorgestellt. Ein Messsystem ist in die Beschichtungsanlage integriert und abgeschiedene Schichten charakterisiert worden. Die Arbeit zeigt, dass die genaue Bestimmung der Dicke einzelner Schichten oder ganzer Schichtstapel mit diesem Verfahren möglich ist und zur ex situ Ellipsometrie vergleichbare Ergebnisse liefert. Um robuste OLED-Bauelemente herzustellen, wird eine organische Kurzschlussunterdrückungsschicht eingeführt, die konform mittels der OVPD-Technologie abgeschieden wird. Die strombegrenzenden Eigenschaften dieser Schicht wirken Defektströmen innerhalb der OLED entgegen. Die reproduzierbare Herstellung von 100 x 100 mm² großen, weißes Licht emittierenden OLED-Modulen mit mittleren Leistungseffizienzen von über 13 lm/W zeigt das Potential dieser Technologie. / The thesis deals with the large area deposition of organic light-emitting diodes (OLED) for lighting applications with a novel deposition tool. The special needs of film thicknesses homogeneity and high deposition rates for organic layers request the combination of thermal vacuum deposition (VTE) and organic vapour phase deposition (OVPD) processes to fabricate OLEDs on 370 x 470 mm² substrates. The deposition sources are qualified regarding layer homogeneity and morphology of the deposition processes. The layer properties are controlled in a wide range by the variation of the organic vapour phase deposition parameters: substrate temperature and deposition rate. The in situ determination of the substrate thickness is shown by the application of spectroscopic reflectometry. The thesis demonstrates the thickness analysis of single and multi-layer stacks by reflectometry. The data fit well to ex situ ellipsometry. Robust OLED devices with an additional short-circuit protection layer deposited by OVPD technology are introduced. The current limiting properties of this layer reduce the leakage currents in the OLED device. The fabrication of 100 x 100 mm² white emitting OLED modules with power efficiencies about 13 lm/W shows the great potential of the manufacturing technology.
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