Wireless micro-sensors can enjoy popularity in biomedical drug-delivery treatments and tire-pressure monitoring systems because they offer in-situ, real-time, non-intrusive processing capabilities. However, miniaturized platforms severely limit the energy of onboard batteries and shorten the lifespan of electronic systems. Ambient energy is an attractive alternative because the energy from light, heat, radio-frequency (RF) radiation, and motion can potentially be used to continuously replenish an exhaustible reservoir. Of these sources, solar light produces the highest power density, except when supplied from indoor lighting, under which conditions the available power decreases drastically. Harnessing thermal energy is viable, but micro-scale dimensions severely limit temperature gradients, the fundamental mechanism from which thermo piles draw power. Mobile electronic devices today radiate plenty of RF energy, but still, the available power rapidly drops with distance. Harvesting kinetic energy may not compete with solar power, but in contrast to indoor lighting, thermal, and RF sources, moderate and consistent vibration power across a vast range of applications is typical. Although operating conditions ultimately determine which kinetic energy-harvesting method is optimal, piezoelectric transducers are relatively mature and produce comparatively more power than their counterparts such as electrostatic and electromagnetic kinetic energy transducers. The presented research objective is to develop, design, simulate, fabricate, prototype, test, and evaluate CMOS ICs that harvest ambient kinetic energy in periodic and non-periodic vibrations using a small piezoelectric transducer to continually replenish an energy-storage device like a capacitor or a rechargeable battery. Although vibrations in surrounding environment produce abundant energy over time, tiny transducers can harness only limited power from the energy sources, especially when mechanical stimulation is weak. To overcome this challenge, the presented piezoelectric harvesters eliminate the need for a rectifier which necessarily imposes threshold limits and additional losses in the system. More fundamentally, the presented harvesting circuits condition the transducer to convert more electrical energy for a given mechanical input by increasing the electromechanical damping force of the piezoelectric transducer. The overall aim is to acquire more power by widening the input range and improving the efficiency of the IC as well as the transducer. The presented technique in essence augments the energy density of micro-scale electronic systems by scavenging the ambient kinetic energy and extends their operational lifetime. This dissertation reports the findings acquired throughout the investigation. The first chapter introduces the applications and challenges of micro-scale energy harvesting and also reviews the fundamental mechanisms and recent developments of various energy-converting transducers that can harness ambient energy in light, heat, RF radiation, and vibrations. Chapter 2 examines various existing piezoelectric harvesting circuits, which mostly adopt bridge rectifiers as their core. Chapter 3 then introduces a bridge-free piezoelectric harvester circuit that employs a switched-inductor power stage to eliminate the need for a bridge rectifier and its drawbacks. More importantly, the harvester strengthens the electrical damping force of the piezoelectric device and increases the output power of the harvester. The chapter also presents the details of the integrated-circuit (IC) implementation and the experimental results of the prototyped harvester to corroborate and clarify the bridge-free harvester operation. One of the major discoveries from the first harvester prototype is the fact that the harvester circuit can condition the piezoelectric transducer to strengthen its electrical damping force and increase the output power of the harvester. As such, Chapter 4 discusses various energy-investment strategies that increase the electrical damping force of the transducer. The chapter presents, evaluates, and compares several switched-inductor harvester circuits against each other. Based on the investigation in Chapter 4, an energy-investing piezoelectric harvester was designed and experimentally evaluated to confirm the effectiveness of the investing scheme. Chapter 5 explains the details of the IC design and the measurement results of the prototyped energy-investing piezoelectric harvester. Finally, Chapter 6 concludes the dissertation by revisiting the challenges of miniaturized piezoelectric energy harvesters and by summarizing the fundamental contributions of the research. With the same importance as with the achievements of the investigation, the last chapter lists the technological limits that bound the performance of the proposed harvesters and briefly presents perspectives from the other side of the research boundary for future investigations of micro-scale piezoelectric energy harvesting.

Wireless micro-sensors can enjoy popularity in biomedical drug-delivery treatments and tire-pressure monitoring systems because they offer in-situ, real-time, non-intrusive processing capabilities. However, miniaturized platforms severely limit the energy of onboard batteries and shorten the lifespan of electronic systems. Ambient energy is an attractive alternative because the energy from light, heat, radio-frequency (RF) radiation, and motion can potentially be used to continuously replenish an exhaustible reservoir. Of these sources, solar light produces the highest power density, except when supplied from indoor lighting, under which conditions the available power decreases drastically. Harnessing thermal energy is viable, but micro-scale dimensions severely limit temperature gradients, the fundamental mechanism from which thermo piles draw power. Mobile electronic devices today radiate plenty of RF energy, but still, the available power rapidly drops with distance. Harvesting kinetic energy may not compete with solar power, but in contrast to indoor lighting, thermal, and RF sources, moderate and consistent vibration power across a vast range of applications is typical. Although operating conditions ultimately determine which kinetic energy-harvesting method is optimal, piezoelectric transducers are relatively mature and produce comparatively more power than their counterparts such as electrostatic and electromagnetic kinetic energy transducers. The presented research objective is to develop, design, simulate, fabricate, prototype, test, and evaluate CMOS ICs that harvest ambient kinetic energy in periodic and non-periodic vibrations using a small piezoelectric transducer to continually replenish an energy-storage device like a capacitor or a rechargeable battery. Although vibrations in surrounding environment produce abundant energy over time, tiny transducers can harness only limited power from the energy sources, especially when mechanical stimulation is weak. To overcome this challenge, the presented piezoelectric harvesters eliminate the need for a rectifier which necessarily imposes threshold limits and additional losses in the system. More fundamentally, the presented harvesting circuits condition the transducer to convert more electrical energy for a given mechanical input by increasing the electromechanical damping force of the piezoelectric transducer. The overall aim is to acquire more power by widening the input range and improving the efficiency of the IC as well as the transducer. The presented technique in essence augments the energy density of micro-scale electronic systems by scavenging the ambient kinetic energy and extends their operational lifetime. This dissertation reports the findings acquired throughout the investigation. The first chapter introduces the applications and challenges of micro-scale energy harvesting and also reviews the fundamental mechanisms and recent developments of various energy-converting transducers that can harness ambient energy in light, heat, RF radiation, and vibrations. Chapter 2 examines various existing piezoelectric harvesting circuits, which mostly adopt bridge rectifiers as their core. Chapter 3 then introduces a bridge-free piezoelectric harvester circuit that employs a switched-inductor power stage to eliminate the need for a bridge rectifier and its drawbacks. More importantly, the harvester strengthens the electrical damping force of the piezoelectric device and increases the output power of the harvester. The chapter also presents the details of the integrated-circuit (IC) implementation and the experimental results of the prototyped harvester to corroborate and clarify the bridge-free harvester operation. One of the major discoveries from the first harvester prototype is the fact that the harvester circuit can condition the piezoelectric transducer to strengthen its electrical damping force and increase the output power of the harvester. As such, Chapter 4 discusses various energy-investment strategies that increase the electrical damping force of the transducer. The chapter presents, evaluates, and compares several switched-inductor harvester circuits against each other. Based on the investigation in Chapter 4, an energy-investing piezoelectric harvester was designed and experimentally evaluated to confirm the effectiveness of the investing scheme. Chapter 5 explains the details of the IC design and the measurement results of the prototyped energy-investing piezoelectric harvester. Finally, Chapter 6 concludes the dissertation by revisiting the challenges of miniaturized piezoelectric energy harvesters and by summarizing the fundamental contributions of the research. With the same importance as with the achievements of the investigation, the last chapter lists the technological limits that bound the performance of the proposed harvesters and briefly presents perspectives from the other side of the research boundary for future investigations of micro-scale piezoelectric energy harvesting.

Vibration energy harvesters, or energy scavengers, recover mechanical energy from their surrounding environment and convert it into useable electricity as sustainable self-sufficient power sources to drive micro-to milli-Watt scale power electronics in small, autonomous, wireless devices and sensors. Using semiconducting, organic piezoelectric nanomaterials are attractive in low-cost, high resistance to fatigue, and environmentally friendly applications. Significantly, the deposition processes of sputtering ZnO (zinc oxide) thin films with high c-axis preferred orientation and electrospun PVDF (polyvinylidene fluoride) nanofibers with high piezoelectric £]-phase crystallisation are controlled at room temperature. Thus they don¡¦t have the necessity of post-annealed and electrical repoling process to obtain an excellent piezoelectricity, and are suitable for all flexible substrates such as PET (polyethylene terephthalate) and PI (polyimide). These works are divided into two parts. Part 1: Flexible piezoelectric harvesters based on ZnO thin films for self-powering and broad bandwidth applications. A new design of Al (aluminum)/PET-based flexible energy harvester was proposed. It consists of flexible Al/PET conductive substrate, piezoelectric ZnO thin film, selectively deposited UV (ultraviolet)-curable resin lump structures and Cu (copper) foil electrode. The design and simulation of a piezoelectric cantilever plate was described by using commercial software ANSYS FEA (finite element analysis) to determine the optimum thickness of PET substrate, internal stress distribution, operation frequency and electric potential. With the optimum thickness predicted by developed accurate analytical formula analysis, the one-way mechanical strain that is efficient to enhance the induced electric potential can be controlled within the piezoelectric ZnO layer. In addition, the relationship among the model solution of piezoelectric cantilever plate equation, vibration induced electric potential and electric power was realized. ZnO thin film of high (002) c-axis preferred orientation with an excellent piezoelectricity was deposited on the Al/PET by RF (radio-frequency) magnetron sputtering in room temperature. Al was sputtered on the PET substrate as the bottom electrode because of its low sheet resistance, superior adhesion with PET, and lattice constants matching with ZnO thin film. The selectively deposited UV-curable resin lump structures as proof mass were directly constructed on flexible piezoelectric plate using electrospinning with a stereolithography technique. One individual harvester achieves a maximum OCV (open-circuit voltage) up to 4V with power density of 1.247 £gW/cm2. This self-powered storage system can drive the warning signal of the LED (light emitting diode) module in both resonant and non-resonant conditions. We also succeeded in accomplishing a broad bandwidth harvesting system with operating frequency range within 100 Hz to 400 Hz to enhance powering efficiency. This system comprises four units of individual ZnO piezoelectric harvester in the form of a cantilever structure connected in parallel, and rectifying circuit with storage module. In addition, a modified design of a flexible piezoelectric energy-harvesting system with a serial bimorph of ZnO piezoelectric thin film was presented to enhance significantly higher power generation. This high-output system was examined at 15 Hz. The maximum DC (direct current) voltage output voltage with loading was 3.18 V, and the maximum DC power remained at 2.89 £gW/cm2. Furthermore, in order to examine the deformation between interfaces and the adhesion mechanism of multi-layer flexible electronics composites (e.g., ITO (indium tin oxide)/PET, Al/PET, ZnO/ITO/PET, and ZnO/Al/PET), nanoscratching and nano-indention testing (nanoindenter XP system) were conducted to analyze the adhesion before and after the vibration test. The plastic deformation between the ductile Al film and PET substrate is observed using SEM (scanning electron microscopy). Delamination between the ZnO and Al/PET substrate was not observed. This indicates that Al film provides excellent adhesion between the ZnO thin film and PET substrate. Part 2: Pre-strained piezoelectric PVDF nanofiber array fabricated by near-field electrospining on cylindrical process for flexible energy conversion. In various methodologies of energy harvesting from ambient sources, one-dimensional nanoharvesters have been gaining more attention recently. However, these nanofibers fabricated by micro-forming technologies may not easily control their structural diameter and length. This study originally presented the HCNFES (hollow cylindrical near-field electrospining) process to fabricate permanent piezoelectricity of PVDF piezoelectric nanofibers. Under high in-situ electric poling and strong mechanical stretching effect during HCNFES process, large PVDF nanofiber array with high piezoelectric £]-phase crystallisation was demonstrated. These pre-strained piezoelectric PVDF nanofibers fabricated by HCNFES with high process flexibility at low cost, availability in ultra-long lengths, various thicknesses and shapes can be applied at power scavenge, sensing and actuation. Firstly, PVDF nanofibers lay on a PET substrate, silver paste was applied at both ends of fibers to fix their two ends tightly on a Cu foil electrode pair. The entire structure was packaged inside a thin flexible polymer to maintain its physical stability. Repeatedly stretching and releasing the nanoharvester (NH 1) with a strain of 0.05% at 5 Hz vibration created a maximum peak voltage and current of -50 mV and -10 nA in forward connection, respectively. Secondly, a total of 44 parallel nanofibers have been fabricated and transferred onto an IDT (interdigital) electrode with 64 electrode pairs as a nanohavester (NH 2) to amplify current outputs under repeated mechanical vibration and impact tests. Under a repeated maximum strain of 0.14% at 6 Hz vibration, a peak current of 39 nA and peak voltage of 20.2 mV have been measured. Impact testing at 15 Hz, peak current of 130 nA has been collected with a voltage of 24.4 mV. Finally, the single PVDF fiber as nanoharvester (NH 3) with a strain of 0.05-0.1% at 5 Hz vibration created a maximum peak voltage and current of -45 mV and -3.9 nA, respectively. The maximum power remained at 18.45 pW/cm2 with a load resistor of 6.8 M£[. Based on the mechanism of converes piezoelectric effect, ANSYS software with coupled field analysis was used to realize piezoelectric actuation behavior of the PVDF fibers. From the observation of actuation property, a fixed-fixed single nanofiber was tested under different DC voltage supply. Comparing the polarized fiber with non-polarized fibers, the measurement of the center displacements as a function of electric field was conducted and characterized.

Ce travail est consacré à l’étude et à la mise au point de récupérateurs d’énergie intégrés à une suspension automobile afin par exemple d’alimenter soit un microcontrôleur, soit des capteurs, soit de réaliser le contrôle santé des pièces ou encore de rendre l’amortisseur au sein d’une suspension d’un véhicule semi-actif autonome en fonction du niveau d’énergie disponible. Compte tenu des types de déplacement disponible dans la suspension, il est naturel de s’orienter vers des techniques électromagnétiques pour la récupération d’énergie liée aux grands déplacements et vers des techniques piézoélectriques pour les vibrations. L’utilisation de tels systèmes s’avère cependant complexe et un certain nombre de points techniques doivent être résolus pour les mettre en œuvre. En premier lieu, une parfaite connaissance des techniques de conversion piézoélectrique et électromagnétique est nécessaire. Dans ce but, le langage Bond Graph est utilisé et appliqué avec succès sur l’ensemble du système de suspension ainsi que sur les récupérateurs d’énergie en raison de sa capacité à traduire les effets physiques et les échanges énergétiques au sein de systèmes multiphysiques. D’autre part, des confrontations simulation/expérience sont réalisées en laboratoire sur chacun des récupérateurs d’énergie piézoélectrique et électromagnétique, afin de s’assurer du bon fonctionnement de ces systèmes lors de leurs intégrations dans un véhicule réel. Ainsi, des défauts de nature différente comme la force magnétique déformant le mouvement de translation de l’amortisseur, la mauvaise conduction des lignes de champ magnétique ou les endommagements du matériau piézoélectrique lors d’essais répétés, sont analysés dans les premiers démonstrateurs afin d'être ensuite corrigés. Enfin, un modèle global de suspension automobile intégrant simultanément les deux sous-systèmes de récupération d’énergie est étudié. Afin de compléter cette analyse, une modélisation du circuit de restitution et du stockage d’énergie est également proposée et permet une étude qualitative et quantitative des performances des systèmes de récupération d’énergie piézoélectrique et électromagnétique. Les résultats issus de ces modèles sont exploités dans le but de concevoir des récupérateurs d’énergie s’adaptant au mieux au domaine de l'automobile. Pour conclure, des tests sur route avec le récupérateur d’énergie piézoélectrique démontrent la validité de l’analyse théorique et la faisabilité des techniques développées. / This work is devoted to the study and the development of energy harvesters integrated in an automobile suspension, for example to supply either a microcontroller or sensors, or to perform an health check of parts or render semi-active the shock absorber within a suspension of an autonomous vehicle according to the level of energy available. Given the types of displacement available in the suspension, it is natural to move towards electromagnetic techniques for energy recovery related to large displacements and to piezoelectric techniques for vibrations. However, the use of such systems is complex and a number of technical issues need to be addressed to implement them. First, a perfect knowledge of piezoelectric and electromagnetic conversion techniques is required. To this end, the Bond Graph language is used and successfully applied to the entire suspension system as well as energy harvesters because of its ability to translate physical effects and energy exchanges into multiphysics systems. Furthermore, simulation / experiment confrontations are carried out in the laboratory on each of the piezoelectric and electromagnetic energy harvesters, to ensure the proper functioning of these systems during their integration into a real vehicle. Thus, defects of different nature such as the magnetic force deforming the translation movement of the damper, the poor conduction of the magnetic field lines or the damage of the piezoelectric material during repeated tests, are analyzed in the first demonstrators in order to be corrected. Finally, a global model of automobile suspension simultaneously integrating the two subsystems of energy recovery is studied. To complete this analysis, a modeling of the circuit of restitution and energy storage is also proposed and allows a qualitative and quantitative study of the performances of piezoelectric and electromagnetic energy recovery systems. The results from these models are used to design energy recovery systems that best fit the automotive field. To conclude, road tests with the piezoelectric energy harvesters demonstrate the validity of the theoretical analysis and the feasibility of the techniques developed.

La récupération d'énergie par élément piézoélectrique est une technique prometteuse pour les futurs systèmes électroniques nomades autoalimentés. L'objet de ce travail est d’analyser des approches simples et agiles d’optimisation de la puissance produite par un générateur piézoélectrique. D'abord le problème de l’optimisation de l’impédance de charge d’un générateur piézoélectrique sismique est posé. Une analyse du schéma équivalent global de ce générateur a été menée sur la base du schéma de Mason. Il est démontré que la puissance extraite avec une charge complexe adaptée puisse être constante quelle que soit la fréquence et que de plus elle est égale à la puissance extraite avec la charge résistive adaptée du même système sans pertes. Il est montré toutefois que la sensibilité de cette adaptation à la valeur de la réactance de la charge la rend difficilement réaliste pour une application pratique. Une autre solution pour améliorer l’énergie extraite est de considérer un réseau de générateurs positionnés en différents endroits d’une structure. Des simulations sont proposées dans une configuration de récupération d’énergie de type directe sur une plaque encastrée. Les générateurs piézoélectriques, associés à la technique SSHI, ont été reliés selon différentes configurations. Les résultats attestent que l’énergie produite ne dépend pas de façon critique de la manière dont sont connectés les éléments. Toutefois l’utilisation d’un seul circuit SSHI pour l’ensemble du réseau dégrade l’énergie extraite du fait des interactions entre les trop nombreuses commutations. Enfin une nouvelle approche non-linéaire est étudiée qui permet l’optimisation de l’énergie extraite tout en gardant une grande simplicité et des possibilités d’auto alimentation. Cette technique appelée S3H pour « Synchronized Serial Switch Harvesting » n’utilise pas d’inductance et consiste en un simple interrupteur en série avec l’élément piézoélectrique. La puissance récupérée est le double de celle extraite par les méthodes conventionnelles et reste totalement invariante sur une large gamme de résistances de charge. / Piezoelectric energy harvesting is a promising technique for battery-less miniature electronic devices. The object of this work is to evaluate simple and robust approaches to optimize the extracted power. First, a lightweight equivalent circuit derived from the Mason equivalent circuit is proposed. It’s a comprehensive circuit, which is suitable for piezoelectric seismic energy harvester investigation and power optimization. The optimal charge impedance for both the resistive load and complex load are given and analyzed. When complex load type can be implemented, the power output is constant at any excitation frequency with constant acceleration excitation. This power output is exactly the maximum power that can be extracted with matched resistive load without losses. However, this wide bandwidth optimization is not practical due to the high sensitivity the reactive component mismatch. Another approach to improve power extraction is the capability to implement a network of piezoelectric generators harvesting on various frequency nodes and different locations on a host structure. Simulations are conducted in the case of direct harvesting on a planar structure excited by a force pulse. These distributed harvesters, equipped with nonlinear technique SSHI (Synchronized Switching Harvesting on Inductor) devices, were connected in parallel, series, independently and other complex forms. The comparison results showed that the energy output didn’t depend on the storage capacitor connection method. However, only one set of SSHI circuit for a whole distributed harvesters system degrades the energy scavenging capability due to switching conflict. Finally a novel non-linear approach is proposed to allow optimization of the extracted energy while keeping simplicity and standalone capability. This circuit named S3H for “ Synchronized Serial Switch Harvesting” does not rely on any inductor and is constructed with a simple switch. The power harvested is more than twice the conventional technique one on a wide band of resistive load.