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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.

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Spelling suggestions: "subject:"aplasma processinduced damage"" "subject:"aplasma progerininduced damage""

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A Study on Plasma Process-Induced Damage during Fabrication of Si Devices and Methodology for Optical Measurement / Siデバイス製造過程におけるプラズマプロセス誘起ダメージとその光学的測定方法論の研究

Matsuda, Asahiko 23 May 2013 (has links)
京都大学 / 0048 / 新制・課程博士 / 博士(工学) / 甲第17788号 / 工博第3767号 / 新制||工||1576(附属図書館) / 30595 / 京都大学大学院工学研究科航空宇宙工学専攻 / (主査)教授 斧 髙一, 教授 木村 健二, 教授 立花 明知 / 学位規則第4条第1項該当 / Doctor of Philosophy (Engineering) / Kyoto University / DFAM
Plasma etching
Plasma process-induced damage
Silicon devices
Spectroscopic ellipsometry
Photoreflectance spectroscopy
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