In today’s communication devices, the need for high performance inductors is increasing as they are extensively used in RF integrated circuits (RFICs). This need is even more pronounced for variable inductors as they are widely required in tunable filters, voltage controlled amplifiers (VCO) and low noise amplifiers (LNA). For RFICs, the main tuning elements are solid state varactors that are used in conjunction with invariable inductors. However, they have limited linearity, high resistive losses, and low self resonant frequencies. This emphasizes the need for developing another tuning element that can be fabricated monolithically with ICs and can offer high range of tuning. Due to the ease of CMOS integration and low cost silicon based IC fabrication, the inductors currently used are a major source of energy loss, therefore driving the overall quality factor and performance of the chip down. During the last decade there has been an increase in research in RF MicroelectroMechanical Systems (RF MEMS) to develop high quality on chip tunable RF components. MEMS capacitors were initially proposed to substitute the existing varactors, however they can not be easily integrated on top of CMOS circuits. RF MEMS variable inductors have recently attracted attention as a better alternative. The research presented here explores using porous anodic alumina (PAA) in CMOS and MEMS fabrication. Due to its low cost and low temperature processing, PAA is an excellent candidate for silicon system integration. At first, PAA is explored as an isolation layer between the inductor and the lossy silicon substrate. Simulations show that although the dielectric constant of the PAA is tunable, the stress produced by the required thicker layers is problematic. Nevertheless, the use of PAA as a MEMS material shows much more promise. Tunable RF MEMS inductors based on bimorph sandwich layer of aluminum PAA and aluminum are fabricated and tested. A tuning range of 31% is achieved for an inductance variation of 5.8 nH to 7.6 nH at 3 GHz. To further improve the Q, bimorph layers of gold and PAA are fabricated on Alumina substrates. A lower tuning range is produced; however the quality factor performance is greatly improved. A peak Q of over 30 with a demonstrated 3% tuning range is presented. Depending on the need for either high performance or tunability, two types of tunable RF MEMS inductors are presented. Although PAA shows promise as a mechanical material for MEMS, the processing parameters (mainly stress and loss tangent) need to be improved if used as an isolation layer. To our knowledge, this is the first time this material has been proposed and successfully used as a structural material for MEMS devices and CMOS processes.

In today’s communication devices, the need for high performance inductors is increasing as they are extensively used in RF integrated circuits (RFICs). This need is even more pronounced for variable inductors as they are widely required in tunable filters, voltage controlled amplifiers (VCO) and low noise amplifiers (LNA). For RFICs, the main tuning elements are solid state varactors that are used in conjunction with invariable inductors. However, they have limited linearity, high resistive losses, and low self resonant frequencies. This emphasizes the need for developing another tuning element that can be fabricated monolithically with ICs and can offer high range of tuning. Due to the ease of CMOS integration and low cost silicon based IC fabrication, the inductors currently used are a major source of energy loss, therefore driving the overall quality factor and performance of the chip down. During the last decade there has been an increase in research in RF MicroelectroMechanical Systems (RF MEMS) to develop high quality on chip tunable RF components. MEMS capacitors were initially proposed to substitute the existing varactors, however they can not be easily integrated on top of CMOS circuits. RF MEMS variable inductors have recently attracted attention as a better alternative. The research presented here explores using porous anodic alumina (PAA) in CMOS and MEMS fabrication. Due to its low cost and low temperature processing, PAA is an excellent candidate for silicon system integration. At first, PAA is explored as an isolation layer between the inductor and the lossy silicon substrate. Simulations show that although the dielectric constant of the PAA is tunable, the stress produced by the required thicker layers is problematic. Nevertheless, the use of PAA as a MEMS material shows much more promise. Tunable RF MEMS inductors based on bimorph sandwich layer of aluminum PAA and aluminum are fabricated and tested. A tuning range of 31% is achieved for an inductance variation of 5.8 nH to 7.6 nH at 3 GHz. To further improve the Q, bimorph layers of gold and PAA are fabricated on Alumina substrates. A lower tuning range is produced; however the quality factor performance is greatly improved. A peak Q of over 30 with a demonstrated 3% tuning range is presented. Depending on the need for either high performance or tunability, two types of tunable RF MEMS inductors are presented. Although PAA shows promise as a mechanical material for MEMS, the processing parameters (mainly stress and loss tangent) need to be improved if used as an isolation layer. To our knowledge, this is the first time this material has been proposed and successfully used as a structural material for MEMS devices and CMOS processes.

No description available.

Nanoestructuras de alumina anódica porosa (AAP) têm sido tradicionalmente fabricadas por duas etapas de anodização a temperaturas relativamente baixas (de 0 até 5°C), e usadas como máscaras ideais para formação de vários materiais nanoestruturados. Neste sentido, o objetivo do trabalho foi estudar sistematicamente a formação e a fabricação de nanoestruturas de AAP autoorganizadas por uma só etapa de anodização e posterior aplicação na síntese de nanopartículas e nanofios metálicos. As nanoestruturas auto-organizadas de AAP foram obtidas por apenas uma etapa de anodização em ácido oxálico (H2C2O4) a temperatura ambiente; diferentemente dos processos convencionais onde são utilizados duas ou mais etapas de anodização. As características estruturais dos filmes de AAP foram moduladas através do controle dos parâmetros da concentração da solução, temperatura e potencial de polarização. O procedimento principal, para a obtenção de AAP auto-organizadas apenas por uma etapa de anodização, foi o pós-processamento de abertura dos poros através de um processo de corrosão química. Os resultados obtidos neste trabalho mostraram que o diâmetro médio dos poros apresentou uma dependência linear com a temperatura, potencial e tempo de corrosão química e foi constante em relação à concentração da solução eletrolítica. No entanto, a análise estrutural via microscopia eletrônica de varredura (MEV), mostrou que a circularidade e a ordem dos nanoporos sobre a superfície anodizada melhoraram com o aumento da concentração do eletrólito. A estrutura de AAP com um arranjo hexagonal de poros regularmente distribuídos foi obtida quando a anodização foi realizada em 0,3M de H2C2O4, a 45V e 20°C de temperatura seguido de uma corrosão química a temperatura de 17°C por 102 minutos. Adicionalmente foram obtidos nanopartículas e nanofios metálicos utilizando-se as nanoestruturas de AAP como moldes. Como os filmes de AAP são isolantes a obtenção das nanopartículas e nanofios foi realizado através de um processo de eletrodeposição de corrente alternada (CA). Os resultados deste trabalho mostraram que nanoestruturas de AAP autoorganizadas podem ser fabricadas por uma etapa de anodização controlando o tempo de corrosão química. Os resultados apresentados neste trabalho mostram-se vantajosos em relação aos reportados na literatura, já que normalmente as nanoestruturas de AAP são obtidas mediante processos de anodização em duas etapas e tempos longos de anodização. / Nanostructures of porous anodic alumina (PAA) have been traditionally manufactured by two steps anodization at relatively low temperatures (0 to 5°C) and used as templates suitable for the formation of various nanostructured materials. In this sense, the goal of this work was the fabrication of self-organized porous Anodic alumina nanostructures (AAP) by a one anodization step and subsequent application in the synthesis of metal nanowires and nanoparticles. The self-organized nanostructures of PAA were obtained by just one anodization step in oxalic acid (H2C2O4) at ambient temperature unlike to conventional processes where they are used two or more anodization steps. The structural characteristics of PAA films were modulated through control of the solution concentration, temperature and potential of polarization. The key procedure to obtain the periodic organized PAA by only one step anodization was the post-processing of pore opening through a process of corrosion chemistry. The results of this work showed that the average diameter of pores presented a linear dependence with temperature, time of chemical corrosion, polarization potential and it was constant relative to the concentration of the electrolyte solution. However, the structural analysis via scanning electron microscopy (SEM) showed that the roundness and the order of nanoporos over the anodized surface improved with the electrolyte concentration increasing. The PAA structure with a hexagonal arrangement of pores was obtained when the anodization was held in 0.3 M of H2C2O4, 45V, and 20°C of temperature followed by a chemical corrosion at 17°C of temperature for 102 minutes. Additionally it was obtained nano particles and nano metal wires using the PAA structures as molds. Since the PAA films are insulating, the nanoparticles and nanowire were obtained through an electrodeposition process using alternating current. The results of this work have shown that self-organized PAA nanostructures can be fabricated by one anodization step controlling the time of chemical etching process. The results presented in this work are advantageous in relation to reported in the literature, since normally the structures of PAA are obtained by two step anodization and for long anodization time.

Nanoestructuras de alumina anódica porosa (AAP) têm sido tradicionalmente fabricadas por duas etapas de anodização a temperaturas relativamente baixas (de 0 até 5°C), e usadas como máscaras ideais para formação de vários materiais nanoestruturados. Neste sentido, o objetivo do trabalho foi estudar sistematicamente a formação e a fabricação de nanoestruturas de AAP autoorganizadas por uma só etapa de anodização e posterior aplicação na síntese de nanopartículas e nanofios metálicos. As nanoestruturas auto-organizadas de AAP foram obtidas por apenas uma etapa de anodização em ácido oxálico (H2C2O4) a temperatura ambiente; diferentemente dos processos convencionais onde são utilizados duas ou mais etapas de anodização. As características estruturais dos filmes de AAP foram moduladas através do controle dos parâmetros da concentração da solução, temperatura e potencial de polarização. O procedimento principal, para a obtenção de AAP auto-organizadas apenas por uma etapa de anodização, foi o pós-processamento de abertura dos poros através de um processo de corrosão química. Os resultados obtidos neste trabalho mostraram que o diâmetro médio dos poros apresentou uma dependência linear com a temperatura, potencial e tempo de corrosão química e foi constante em relação à concentração da solução eletrolítica. No entanto, a análise estrutural via microscopia eletrônica de varredura (MEV), mostrou que a circularidade e a ordem dos nanoporos sobre a superfície anodizada melhoraram com o aumento da concentração do eletrólito. A estrutura de AAP com um arranjo hexagonal de poros regularmente distribuídos foi obtida quando a anodização foi realizada em 0,3M de H2C2O4, a 45V e 20°C de temperatura seguido de uma corrosão química a temperatura de 17°C por 102 minutos. Adicionalmente foram obtidos nanopartículas e nanofios metálicos utilizando-se as nanoestruturas de AAP como moldes. Como os filmes de AAP são isolantes a obtenção das nanopartículas e nanofios foi realizado através de um processo de eletrodeposição de corrente alternada (CA). Os resultados deste trabalho mostraram que nanoestruturas de AAP autoorganizadas podem ser fabricadas por uma etapa de anodização controlando o tempo de corrosão química. Os resultados apresentados neste trabalho mostram-se vantajosos em relação aos reportados na literatura, já que normalmente as nanoestruturas de AAP são obtidas mediante processos de anodização em duas etapas e tempos longos de anodização. / Nanostructures of porous anodic alumina (PAA) have been traditionally manufactured by two steps anodization at relatively low temperatures (0 to 5°C) and used as templates suitable for the formation of various nanostructured materials. In this sense, the goal of this work was the fabrication of self-organized porous Anodic alumina nanostructures (AAP) by a one anodization step and subsequent application in the synthesis of metal nanowires and nanoparticles. The self-organized nanostructures of PAA were obtained by just one anodization step in oxalic acid (H2C2O4) at ambient temperature unlike to conventional processes where they are used two or more anodization steps. The structural characteristics of PAA films were modulated through control of the solution concentration, temperature and potential of polarization. The key procedure to obtain the periodic organized PAA by only one step anodization was the post-processing of pore opening through a process of corrosion chemistry. The results of this work showed that the average diameter of pores presented a linear dependence with temperature, time of chemical corrosion, polarization potential and it was constant relative to the concentration of the electrolyte solution. However, the structural analysis via scanning electron microscopy (SEM) showed that the roundness and the order of nanoporos over the anodized surface improved with the electrolyte concentration increasing. The PAA structure with a hexagonal arrangement of pores was obtained when the anodization was held in 0.3 M of H2C2O4, 45V, and 20°C of temperature followed by a chemical corrosion at 17°C of temperature for 102 minutes. Additionally it was obtained nano particles and nano metal wires using the PAA structures as molds. Since the PAA films are insulating, the nanoparticles and nanowire were obtained through an electrodeposition process using alternating current. The results of this work have shown that self-organized PAA nanostructures can be fabricated by one anodization step controlling the time of chemical etching process. The results presented in this work are advantageous in relation to reported in the literature, since normally the structures of PAA are obtained by two step anodization and for long anodization time.

Submitted by Milena Rubi (milenarubi@ufscar.br) on 2017-08-16T17:03:58Z No. of bitstreams: 1 FERRO_Leticia_2016.pdf: 31138746 bytes, checksum: e2ec63a4c8fe8750b322f5f59e152466 (MD5) / Approved for entry into archive by Milena Rubi (milenarubi@ufscar.br) on 2017-08-16T17:04:05Z (GMT) No. of bitstreams: 1 FERRO_Leticia_2016.pdf: 31138746 bytes, checksum: e2ec63a4c8fe8750b322f5f59e152466 (MD5) / Approved for entry into archive by Milena Rubi (milenarubi@ufscar.br) on 2017-08-16T17:04:12Z (GMT) No. of bitstreams: 1 FERRO_Leticia_2016.pdf: 31138746 bytes, checksum: e2ec63a4c8fe8750b322f5f59e152466 (MD5) / Made available in DSpace on 2017-08-16T17:04:19Z (GMT). No. of bitstreams: 1 FERRO_Leticia_2016.pdf: 31138746 bytes, checksum: e2ec63a4c8fe8750b322f5f59e152466 (MD5) Previous issue date: 2016-03-31 / Coordenação de Aperfeiçoamento de Pessoal de Nível Superior (CAPES) / Porous anodic alumina (PAA) has been used as platform for the manufacture of optical sensors. Itshows chemical resistance, thermal stability, hardness, biocompatibility, high surface area which facilitates interaction with the analyte and good morphological organization with the possibility to manipulate its pore size. Furthermore, PAA shows optical responses characterized by Fabry-Pérot interferences that can be obtained by photoluminescence and reflectance spectroscopy. Besides the surface of the AAP can be modified by Layer-by-Layer technique (LbL) in order to enhance optical sensors. Changes in Fabry-Pérot interferences can be monitored and analyzed as sensor responses. In this work, LbL film were deposited using hydrochloride polyallylamine (PAH) and glucose oxidase (GOx) for the purpose of manufacturing an optical biosensor for glucose detection. A protective bilayer of PAH and poly (vinyl sulfonic acid) (PVS) was assembled. The growth of the films were monitored by photoluminescence and total reflectance techniques. In addition, biosensor tests were carried out by immersing PAA in glucose solutions with different concentrations in order to check for changes in Fabry-Pérot oscillations. Analyzing the results, orderly growth of LbL film and biosensor response were verified. Results of the biosensor test were characterized by displacements of Fabry-Pérot interferences to shorter wavelengths and by multivariate analysis. Limit of detection determined by qualitative analysis of the Fabry-Pérot oscillations was 0.1 mol.L-1 to both PAA without surface modification and modified PAA. By using partial least squares (PLS) regression, it was possible to determine glucose from 0.1 mol.L-1 with PAA without modification and 0.01 mol.L-1 for PAA with LbL film. Furthermore, it was also verified the viability of using chemometrics to examine Fabry-Pérot interferences obtained with the PAA as an alternative method shown in the literature, which involves concepts of Fabry-Pérot equation. / A alumina anódica porosa (AAP) vem sendo utilizada como plataforma na fabricação de sensores ópticos por apresentar resistência química, estabilidade térmica, dureza, biocompatibilidade, grande área superficial que facilita a interação com o analito e boa organização morfológica com a possibilidade de se manipular as dimensões de seus poros. Além disso, a AAP apresenta respostas ópticas caracterizadas pelas interferências de FabryPérot, que podem ser obtidas por espectroscopia de fotoluminescência e de reflectância. A superfície da AAP ainda pode ser modificada pela técnica de deposição por camadas, Layerby-Layer (LbL), com o intuito de se aprimorar esses sensores ópticos, sendo que mudanças nas interferências de Fabry-Pérot podem ser acompanhadas e analisadas como resposta do sensor. Neste trabalho, houve a deposição de filmes LbL de polialilamina hidroclorada (PAH) e de glicose oxidase (GOx), contendo um colchão de PAH e de ácido poli(vinil sulfônico) (PVS), com a finalidade de fabricação de um biossensor óptico de glicose. O crescimento dos filmes foi acompanhado por fotoluminescência e reflectância total. Além disso, testes dos biossensores foram realizados imergindo a AAP em soluções de glicose com concentrações diferentes a fim de se verificar alterações nas oscilações apresentadas nos espectros. A partir dos resultados obtidos foram verificados o crescimento ordenado do filme LbL e a resposta do biossensor, que foi caracterizada pelo deslocamento das interferências de Fabry-Pérot para comprimentos de onda menores e por análise multivariada. O limite de detecção determinado através da análise qualitativa das oscilações de Fabry-Pérot foi de 0,1 mol.L-1 de glicose, tanto para a AAP sem modificação superficial, quanto para a modificada. Com o emprego da regressão por mínimos quadrados parciais (PLS, do inglês “partial least squares”) foi possível a determinação de glicose a partir de 0,1 mol.L-1 para a AAP sem modificação e de 0,01 mol.L-1 para a AAP com filme LbL. Além disso, foi verificada também a viabilidade de se utilizar a quimiometria para analisar as interferências de Fabry-Pérot obtidas com a AAP como um método alternativo do apresentado na literatura, que envolve conceitos da equação de Fabry-Pérot.

Tato diplomová práce je zaměřená na výrobu Au-PANI-Au nanodrátů. Prezentovaná výroba nanodrátů je založená na elektrochemické depozici různých kovů a polymerizaci polyanilínu do porézních šablon z porézní anodické aluminy připravených anodizací hliníku. Teoretická část pojednává o základech elektrochémie a porézní anodické aluminy.

Made available in DSpace on 2016-06-02T20:15:29Z (GMT). No. of bitstreams: 1 5309.pdf: 3730919 bytes, checksum: 93ee556b234e55e307b64b2308314c2e (MD5) Previous issue date: 2013-04-18 / In this project we studied the porous anodic alumina as a possible application in gas sensors with high sensitivity. Initially we seek a configuration of anodic porous alumina (PA) and the type of gas or vapor in which both matched with great sensitivity by observing the photoluminescence of this material. Furthermore we sought to understand the mechanism of detecting the substance to a broader reach and optimizing the use of alumina sensor. A manufacturing already well tested with oxalic acid, only changing the anodization time for the same voltage or current density, was adopted for a small variation of samples with good ordering. Samples were also produced with and without pore opening. The optical properties of the porous film thus obtained were investigated by photoluminescence (PL) emitted perpendicularly to these pores, while the film was subjected to a controlled atmosphere of vapor of ethanol or methanol. The control parameters of temperature and vapor concentration was possible by the construction and use of a thermostated cell adapted to a spectrofluorimeter. The spectrum of each sample was monitored with time since deposition of alcohols in the cell was made with micro-syringe into the liquid phase and then evaporate. This perpendicular direction of luminescence emission of alumina allowed the oscillation of the already known PL presents peaks with much more defined and so much more resolution for changes in wavelength. Furthermore, it expressed the presence of the TE and TM modes separately in luminescence for some samples made at a higher concentration of oxalic acid in the electrolyte. The sensitivity to ethanol vapor for this PL technique allows detection of ethanol concentrations much smaller than the other until now achieved by using porous silicon. Based on studies about the source of the luminescence of the material and the construction of the interference pattern produced by the film type Fabry-Perot, a hypothesis was constructed for the modification of luminescence by ethanol vapor. Adsorption of molecules of ethanol/methanol by its hydroxide OH-, in the color centers F+ along the surfaces of the pores, modifies the average longitudinal position of the sources of luminescence in a critical geometry (near total internal reflection), which changes rapidly the reflectivity of the interface pores/air, altering the entire Fabry-Perot system for this adopted configuration, i.e., PL perpendicular to the pores. The simple change of the luminescence emission from frontal to lateral direction of the film provided an peak oscillation with lasers devices width, without the need to optically confine this film, as in the case of porous silicon sensors. This configuration may have contributed to or be reason for the great sensitivity (relative to the optical porous sensors for ethanol as the porous silicon) as it uses the part of the luminescence that interacts with more pores exposed to ethanol vapor. The reversible behavior and with better response just at room temperature, qualifies the PA system for construction of curves calibration, as well for various types of use in sensor which interfere very little in vapor concentration. The temporal behavior of the spectrum of a sample, under ethanol vapor, may be due to a rapid change in reflectivity of the interface pores/air for this selected PL "grazing", at an angle close to the internal total internal reflection. The change in reflectivity for this type of Fabry- Perot system and confined causes changes in both the shape of the spectrum oscillation, similar to the change in the coefficient of finesse, as in the displacement of the peak position in wavelengths. / No presente projeto estudamos a alumina anódica porosa como uma possível aplicação em sensores gasosos de grande sensibilidade. Inicialmente buscamos uma configuração da alumina anódica porosa e o tipo de gás ou vapor em que ambos se combinassem com grande sensibilidade ao se observar a fotoluminescência deste material. Além disso, buscamos entender o mecanismo de detecção da substancia para um alcance mais amplo e otimização do uso da alumina como sensor. Uma fabricação já muito testada com o ácido oxálico mudando apenas o tempo de anodização para uma mesma voltagem ou densidade de corrente foi adotada para uma pequena variação de amostras com bom ordenamento. Foram ainda produzidas amostras com e sem abertura dos poros. As propriedades ópticas do filme de poros assim obtido foram investigadas pela fotoluminescência (PL) emitida perpendicularmente a estes poros enquanto se submetia o filme a uma atmosfera controlada de vapor de etanol ou metanol. O controle nos parâmetros de concentração do vapor e temperatura foi possível pela construção e uso de uma célula termostatizada adaptada a um espectrofluorímetro. O espectro de cada amostra foi monitorado com o tempo uma vez que a deposição dos álcoois na célula foi feita com micro-seringa em fase liquida para então se evaporar. Esta direção perpendicular da emissão da luminescência da alumina permitiu que a oscilação da PL já conhecida se apresentasse agora com picos muito mais definidos e, portanto bem mais resolução para as alterações em comprimentos de onda. Além disso, manifestou a presença separável dos modos TE e TM na luminescência para algumas amostras feitas em maior concentração de ácido oxálico no eletrólito. A sensibilidade ao vapor de etanol para esta técnica de PL permitiu perceber concentrações de etanol muito menores que as outras até então alcançadas usando silício poroso. Construiu-se também uma hipótese para a modificação da luminescência pelo vapor de etanol baseando-se nos estudos sobre a fonte da luminescência deste material e da construção do padrão de interferência tipo Fabry-Perot que o filme produz. A adsorção das moléculas de etanol/metanol pelo seu hidróxido OH, nos centros de cor F+ ao longo das superfícies dos poros, modifica a posição média longitudinal das fontes da luminescência numa geometria critica (próximo da reflexão interna total), que muda rapidamente a refletividade da interface poros/ar, alterando todo o sistema Fabry-Perot para esta configuração adotada, i.e., PL perpendicular aos poros. A simples mudança da emissão da luminescência frontal do filme para a lateral forneceu uma oscilação de picos com largura de dispositivos lasers sem que se necessitasse confinar opticamente este filme como no caso de sensores de silício poroso. Esta configuração pode ter contribuído ou ser a responsável pela grande sensibilidade (em relação aos sensores porosos ópticos para etanol como o de silício poroso) já que usa a parte da luminescência que interage com mais poros expostos ao vapor de etanol. O comportamento reversível e com melhor resposta justamente em temperatura ambiente, qualifica o sistema AAP para se construir curvas de calibração, assim como para diversos tipos de uso em sensores que interferem muito pouco na concentração do vapor. O comportamento temporal do espectro de uma amostra, sob vapor de etanol, pode ser devido a uma mudança mais rápida na refletividade da interface poros/ar para esta PL rasante escolhida que está em um angulo interno próximo do da reflexão interna total. A alteração na refletividade para este tipo de sistema Fabry-Perot e confinado provoca mudanças tanto na forma da oscilação do espectro semelhante à mudança no coeficiente de finesse como no deslocamento da posição dos picos em comprimentos de onda.

Porézní anodická alumina (PAA) je oxidová vrstva vytvořená anodickou oxidací hliníku, která má široké průmyslné využití. Její popularita zaznamenala exponenciální nárůst zejména v oblasti nanotechnologií, k čemu přispělo objevení jejího samouspořádání do struktury o nanorozměrech připomínající včelí plástev. Její jednoduchá příprava a laditelné vlastnosti z ní tvoří levný způsob výroby nanostruktur. Ve stejném duchu se tato disertační práce zabývá metodami přípravy funkčních nanostruktur za využití PAA. První část je zaměřena na výrobu pole nanosloupců z oxidu titaničitého (TiO2) a jejich možné použití jako fotoanody pro štěpení vody. TiO2 nanostloupce jsou tvořeny anodizací hliníkové vrstvy na titanovém substrátu, také nazývanou PAA-asistovaná anodizace. Táto studie demonstruje elektrochemické vlastnosti a fotoelektrochemickou aktivitu nano sloupců vytvořených z dusíkem obohacených substrátů, které byly následně různě termálně modifikovány. Hlavním poznatkem studie je, že špatné vlastnosti jsou způsobeny dutou morfologií nanosloupců. Tento poznatek vedl k rozsáhle studii zabývající se dopadem anodizačných podmínek na morfologii ale i stabilitu vytvořených nanosloupců, jejímž výsledkem byla nová strategie anodizace. Druhá část prezentuje výrobní proces přípravy uspořádané vrstvy zlatých nanočástic na transparentním substrátu pro jejich použití jako optického senzoru využívající efekt rezonance lokalizovaných povrchových plasmonů. Základem této multidisciplinární metody je využití kombinace samouspořádání PAA k výrobě šablony a následného procesu řízeného smáčení v pevné fázi tenké vrstvy zlata. Táto práce detailně popisuje technologické aspekty přípravy; od samotné výroby šablon z hliníku, přes vytváření zlatých nanočástic, až po jejich přenos na transparentní substrát. Na závěr této práce jsou kompozity z nanočástic charakterizovány, přičemž je porovnána jejich citlivost na změnu indexu lomu okolí a jejich stálost. Ze závěrů vyplývá, že tato poměrně velkoplošná a levná metoda je konkurence schopná i v oblasti senzorické citlivosti.

Στην παρούσα διδακτορική διατριβή μελετάται η ανάπτυξη λεπτών υμενίων πορωδών ανοδικών οξειδίων του αλουμινίου (αναφέρονται και ως πορώδης ανοδική αλουμίνα) σε υπόστρωμα πυριτίου. Επιπλέον, εξετάζεται η ανάπτυξη εφαρμογών που αφορούν τη χρήση της πορώδους αλουμίνας ως μάσκα και ως μήτρα για την δημιουργία νανονημάτων ή κβαντικών τελειών (νανονησίδων) στο Si. Το πρώτο κεφάλαιο πραγματεύεται τη θεωρία και τους μηχανισμούς που διέπουν την ανάπτυξη πορωδών υμενίων, που προέρχονται από ανοδική οξείδωση (ανοδίωση) τόσο φύλλων αλουμινίου, όσο και υμενίων αλουμινίου σε υπόστρωμα πυριτίου. Επιπροσθέτως, παρατίθεται ο ρόλος που διαδραματίζουν οι ηλεκτροχημικές συνθήκες ανοδίωσης, όπως το pH, η θερμοκρασία και η εφαρμοζόμενη τάση, στα τελικά δομικά χαρακτηριστικά των πορωδών υμενίων. Στο δεύτερο κεφάλαιο παρουσιάζονται τα τεχνολογικά βήματα διεργασιών που αφορούν την προετοιμασία των δειγμάτων τα οποία πρόκειται να ανοδιωθούν, και δίνονται λεπτομέρειες για την πειραματική διάταξη η οποία χρησιμοποιείται κατά την ανοδίωση. Στο τρίτο κεφάλαιο μελετώνται εκτενώς, τρεις παράγοντες που έχουν σημαντική επίδραση στα τελικά δομικά χαρακτηριστικά των πορωδών υμενίων. Κατά τους δύο πρώτους, εξετάζεται η επίδραση του πάχους του προς ανοδίωση υμενίου αλουμινίου πάνω στο Si, καθώς και ο περιορισμός του σε επιφάνειες μερικών τετραγωνικών μικρομέτρων πάνω στο Si, στο μέγεθος και την πυκνότητα των πόρων. Ο τρίτος παράγοντας αφορά το ρόλο της ανοδίωσης του υμενίου του αλουμινίου σε δύο και τρία στάδια σε συνδυασμό με τη χημική εγχάραξή του μετά από κάθε στάδιο ανοδίωσης, στην ανάπτυξη εξαγωνικής συμμετρίας στην κατανομή των πόρων. Το τέταρτο κεφάλαιο, πραγματεύεται την ανάπτυξη εφαρμογών που συνδέονται με τη χρήση της πορώδους αλουμίνας ως μάσκα και ως μήτρα για τη δημιουργία νανοδομών επάνω στο πυρίτιο. Ως εκ τούτου παρουσιάζεται η δημιουργία νανονησίδων Cr, Ti, νανοστηλών Si, και νανονημάτων Au, πάνω στο Si, εφαρμογές στις οποίες τα πορώδη ανοδικά υμένια χρησιμοποιήθηκαν ως ενδιάμεσο στάδιο. Στο πέμπτο κεφάλαιο παρατίθεται η ανάπτυξη διαμέσου της πορώδους αλουμίνας, εξαγωνικά διατεταγμένων νανονησίδων SiO2 στο Si. Επίσης, παρουσιάζεται ο ηλεκτρικός χαρακτηρισμός διατάξεων οι οποίες αποτελούνται από την εν λόγω δομή. Σε ένα επιπλέον βήμα, οι νανονησίδες SiO2 χρησιμοποιούνται για την ανάπτυξη νανοκρυσταλλιτών Si στο εσωτερικό τους μέσω της τεχνικής της ιοντικής σύνθεσης. Τα σημαντικότερα αποτελέσματα και συμπεράσματα που προέκυψαν από την εκπόνηση της παρούσας διδακτορικής διατριβής συνοψίζονται στα εξής: • Βελτίωση της εξαγωνικής συμμετρίας στην κατανομή των πόρων, μέσω ανοδίωσης σε δύο ή τρία στάδια σε συνδυασμό με χημική εγχάραξη του προς ανοδίωση αλουμινίου έπειτα από κάθε στάδιο ανοδίωσης. • Αύξηση της πυκνότητας των πόρων των ανοδικών υμενίων κατά μία τάξη μεγέθους, με περιορισμό του προς ανοδίωση αλουμινίου σε προεπιλεγμένες περιοχές στο Si, επιφάνειας μερικών τετραγωνικών μικρομέτρων. • Ανάπτυξη διατεταγμένων νανοδομών Ti και Cr σε υπόστρωμα Si χρησιμοποιώντας λεπτά υμένια πορώδους αλουμίνας πάνω σε Si. Ιδιαίτερα οι δομές Cr, μπορούν να χρησιμοποιηθούν ως μεταλλική νανοδομημένη μάσκα για την εγχάραξη με ενεργά ιόντα του υποστρώματος Si και τη δημιουργία νανοστηλών Si πάνω σε αυτό. Η δημιουργία νανοστηλών Si, βρίσκει πληθώρα εφαρμογών στη Νανοηλεκτρονική, σε αισθητήρες, Nανοφωτονική, μνήμες κ.τ.λ. • Οι πυκνότητες διεπιφανειακών καταστάσεων που προέκυψαν από τον ηλεκτρικό χαρακτηρισμό της διεπιφάνειας υμενίων πορώδους αλουμίνας με το πυρίτιο, και της διεπιφάνειας πορώδους αλουμίνας – νανονησίδων SiO2 με το πυρίτιο. Οι τιμές που υπολογίστηκαν είναι ενθαρρυντικές, αν ληφθεί υπόψη ο ηλεκτροχημικός τρόπος παρασκευής των εν λόγω σύνθετων υμενίων πάνω στο πυρίτιο. • Ανάπτυξη μεμονωμένων νανοκρυσταλλιτών Si ενσωματωμένων σε νανονησίδες SiO2. Για το σκοπό αυτό συνδυάστηκαν δύο διαφορετικές τεχνολογίες, εκείνη της ιοντικής σύνθεσης και εκείνη της ανάπτυξης νανονησίδων SiO2 διαμέσου λεπτών υμενίων πορώδους αλουμίνας απευθείας σε υπόστρωμα Si. Τέτοιες δομές νανοκρυσταλλιτών έχουν εφαρμογές σε διατάξεις μη πτητικών μνημών, όπου η κατανεμημένη αποθήκευση φορτίου στους νανοκρυσταλλίτες ευνοεί τη χρήση λεπτότερων οξειδίων πύλης και τη δυνατότητα σμίκρυνσης του πάχους των οξειδίων αυτών χωρίς να μειώνεται ο χρόνος αποθήκευσης φορτίου. / In the present thesis, the growth of porous anodic alumina films on Si substrate was studied extensively. Potential applications of porous anodic alumina films formed directly on Si, regarding the use of porous membranes as mask or template for various nanostructures growth directly on Si, are discussed. Chapter one deals with the theory and mechanisms governing porous anodic alumina film growth, either on porous anodic films formed by anodization of aluminum foils, or on porous anodic films developed on Si substrates. Additionally, the effect of different factors (pH, temperature, applied voltage) on the final structural characteristics is presented. In chapter two, the preliminary processing steps regarding sample preparation before the anodization procedure are quoted. Moreover, details about the experimental set-up and the electrochemical conditions used during the sample anodization in the current work are given. In chapter three, the influence of three different factors, in the final structural characteristics, is investigated. Primarily, the impact of the initial aluminum thickness deposited on Si substrate, and secondly the confinement of the aluminum film in areas of a few μm2, in the pore size and pore density are studied. Finally, the influence of the third factor is associated with a three-step instead of a two-step anodization, in combination with an in-between step of aluminum chemical etching, on the ordering and the uniformity of the pores. The deposition of Ti and Cr nanodots arrays on Si, using the porous alumina membrane as a masking layer, is investigated in chapter four. Furthermore, the Ti nanodots are used for the electrodeposition of Au nanodots and nanowires inside the porous alumina films. Additionally, the Cr dots are used as metallic nanostructured mask for the Si etching by reactive ion etching process, that leads to the formation of Si nanopillars on Si substrate. In chapter five the growth of hexagonally ordered SiO2 dots on Si through porous anodic alumina membranes, in various acidic electrolytes, is studied. Moreover, the electrical characterization of the interface of porous alumina film/Si and porous alumina film with SiO2 dots in pore bottoms/ Si is presented. Finally, in the present thesis the technology of fabrication of Si nanocrystals embedded in SiO2 dots arrays through porous alumina membranes on Si substrate is developed for the first time. This was achieved by the combination of ion beam synthesis with the already existing technology of porous anodic alumina growth on Si substrates. The nanocrystals are electrically isolated from the substrate. This technique is promising as an application in non-volatile memory devices. The main achievements accomplished through this study are summarized as follows: • The optimization of pores ordering by developing the porous alumina membrane in two or three processing steps in combination with the chemical etching of Al film, lying above the porous membrane, following each anodization cycle. • The increase of porous density by the confinement of porous alumina film in areas of a few μm2 on Si. • The development of Ti, Cr and nanodots arrays, directly on Si, through porous alumina membranes. The use of Cr nanodots as nanostructured masking layer for the formation of Si nanopillars, formed by etching of Si substrate with RIE, on Si. • The density of interface stages results from the electrical characterization of porous alumina with or without SiO2 dots at each pore bottom, with the Si substrate. The results are encouraging, keeping in mind that the pore membranes and SiO2 dots were electrochemically grown directly on Si substrate. • The development of distinct Si nanocrystalls, embedded in SiO2 dots, combining for the first time two different technologies, that is the fabrication of porous anodic alumina films directly on Si substrate, as well as the ion beam synthesis technique. The proposed technique is promising for the fabrication of non-volatile memory devices.