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<p>Ferroelectrics are a group of advanced electronic materialswith a wide variety of properties useful in applications suchas memory devices, resonators and filters, infrared sensors,microelectromechanical systems, and optical waveguides andmodulators. Among the oxide perovskite-structured ferroelectricthin film materials sodium potassium niobate or Na0.5K0.5NbO3(NKN) has recently emerged as one of the most promisingmaterials in microwave applications due to high dielectrictunability and low dielectric loss. This licentiate thesispresents results on growth and structural, optical, andelectrical characterization of Na0.5K0.5NbO3 thin films. Thefilms were deposited by rf-magnetron sputtering of astoichiometric, high density, ceramic Na0.5K0.5NbO3 target ontosingle crystal LaAlO3 and Al2O3, and polycrystalline Pt80Ir20substrates. By x-ray diffractometry, NKN films on c-axisoriented LaAlO3 substrates were found to grow epitaxially,whereas films on hexagonal sapphire and polycrystallinePt80Ir20 substrates were found to be preferentially (00l)oriented. Optical and waveguiding properties of theNa0.5K0.5NbO3/Al2O3 heterostructure were characterized using aprism-coupling technique. Sharp and distinguishable transversemagnetic (TM) and electric (TE) propagation modes wereobserved. The extraordinary and ordinary refractive indiceswere calculated to ne = 2.216±0.003 and no =2.247±0.002 for a 2.0 μm thick film at λ = 632.8nm. This implies a birefringence Δn = ne - no =-0.031±0.003 in the film. The ferroelectric state inNKN/Pt80Ir20 films at room temperature was indicated by apolarization loop with polarization as high as 33.4 μC/cm2at 700 kV/cm, remnant polarization of 9.9 μC/cm2 andcoercive field of 91 kV/cm. Current-voltage characteristics ofvertical Au/NKN/Pt80Ir20 capacitive cells and planar Au/NKN/LaAlO3 interdigital capacitors (IDCs) showed very goodinsulating properties, with the leakage current density for anNKN IDC on the order of 30 nA/cm2 at 400 kV/cm. Rf dielectricspectroscopy demonstrated low loss, low frequency dispersion,and high voltage tunability. At 1 MHz NKN/LaAlO3 showed adissipation factor tan δ of 0.010 and a tunability of 16.5% at 200 kV/cm. For the same structure the frequencydispersion, Δεr, between 1 kHz and 1 MHz was 8.5%.</p><p><b>Key words:</b>ferroelectrics, sodium potassium niobates,thin films, rf-magnetron sputtering, waveguiding, refractiveindex, prism coupling, dielectric tunability</p>

Ferroelectrics are a group of advanced electronic materialswith a wide variety of properties useful in applications suchas memory devices, resonators and filters, infrared sensors,microelectromechanical systems, and optical waveguides andmodulators. Among the oxide perovskite-structured ferroelectricthin film materials sodium potassium niobate or Na0.5K0.5NbO3(NKN) has recently emerged as one of the most promisingmaterials in microwave applications due to high dielectrictunability and low dielectric loss. This licentiate thesispresents results on growth and structural, optical, andelectrical characterization of Na0.5K0.5NbO3 thin films. Thefilms were deposited by rf-magnetron sputtering of astoichiometric, high density, ceramic Na0.5K0.5NbO3 target ontosingle crystal LaAlO3 and Al2O3, and polycrystalline Pt80Ir20substrates. By x-ray diffractometry, NKN films on c-axisoriented LaAlO3 substrates were found to grow epitaxially,whereas films on hexagonal sapphire and polycrystallinePt80Ir20 substrates were found to be preferentially (00l)oriented. Optical and waveguiding properties of theNa0.5K0.5NbO3/Al2O3 heterostructure were characterized using aprism-coupling technique. Sharp and distinguishable transversemagnetic (TM) and electric (TE) propagation modes wereobserved. The extraordinary and ordinary refractive indiceswere calculated to ne = 2.216±0.003 and no =2.247±0.002 for a 2.0 μm thick film at λ = 632.8nm. This implies a birefringence Δn = ne - no =-0.031±0.003 in the film. The ferroelectric state inNKN/Pt80Ir20 films at room temperature was indicated by apolarization loop with polarization as high as 33.4 μC/cm2at 700 kV/cm, remnant polarization of 9.9 μC/cm2 andcoercive field of 91 kV/cm. Current-voltage characteristics ofvertical Au/NKN/Pt80Ir20 capacitive cells and planar Au/NKN/LaAlO3 interdigital capacitors (IDCs) showed very goodinsulating properties, with the leakage current density for anNKN IDC on the order of 30 nA/cm2 at 400 kV/cm. Rf dielectricspectroscopy demonstrated low loss, low frequency dispersion,and high voltage tunability. At 1 MHz NKN/LaAlO3 showed adissipation factor tan δ of 0.010 and a tunability of 16.5% at 200 kV/cm. For the same structure the frequencydispersion, Δεr, between 1 kHz and 1 MHz was 8.5%. <b>Key words:</b>ferroelectrics, sodium potassium niobates,thin films, rf-magnetron sputtering, waveguiding, refractiveindex, prism coupling, dielectric tunability / NR 20140805

Ferroelectric oxides are a group of advanced electronic materials with a wide variety of properties useful in applications such as memory devices, resonators and filters, infrared sensors, microelectromechanical systems, and optical waveguides and modulators. Among the oxide perovskite-structured ferroelectric thin film materials, sodium potassium niobate or Na0.5K0.5NbO3 (NKN) has recently emerged as one of the most promising materials in radio frequency (rf) and microwave applications due to high dielectric tenability and low dielectric loss. This thesis presents results on growth and structural, optical, and electrical characterization of NKN thin films. The films were deposited by rf-magnetron sputtering of a stoichiometric, high density, ceramic Na0.5K0.5NbO3 target onto single crystal LaAlO3 (LAO), Al2O3 (sapphire), SrTiO3, and Nd:YAlO3, and polycrystalline Pt80Ir20 substrates. By x-ray diffractometry, NKN films on c-axis oriented LaAlO3, SrTiO3 and Nd:YAlO3 substrates were found to grow epitaxially, whereas films on r-cut sapphire and polycrystalline Pt80Ir20 substrates were found to be preferentially (00l) oriented. The surface morphology was explored using atomic force microscopy. Optical and waveguiding properties of the Na0.5K0.5NbO3/substrate heterostructures were characterized using prism-coupling technique. Sharp and distinguishable transverse magnetic and electric propagation modes were observed for NKN thicknesses up to 2.0 μm. The extraordinary and ordinary refractive indices were calculated together with the birefringence of the NKN material. The electro-optic effect in transverse geometry was measured in transmission, where the effective linear electro-optic response was determined to reff = 28 pm/V for NKN/Al2O3 with an applied dc field up to 18 kV/cm. The ferroelectric state in NKN films on Pt80Ir20 at room temperature was indicated by a polarization loop with saturated polarization as high as 33.4 μC/cm2 at 700 kV/cm, remnant polarization of 10 μC/cm2, and coercive field of 90 kV/cm. Current-voltage characteristics of vertical Au/NKN/PtIr capacitive cells and planar Au/NKN/LAO interdigital capacitors (IDCs) showed very good insulating properties, with the leakage current density for an NKN IDC on the order of 30 nA/cm2 at 400 kV/cm. Rf dielectric spectroscopy demonstrated low loss, low frequency dispersion, and high voltage tunability. At 1 MHz, NKN/LAO showed a dissipation factor tan δ = 0.010 and a tunability of 16.5 % at 200 kV/cm. For the same structure the frequency dispersion was Δεr = 8.5 % between 1 kHz and 1 MHz. / QC 20100928

Este trabalho visa o projeto, modelagem e fabricação de estruturas multicamadas baseadas em polímeros para aplicações como sensores ópticos integrados. A grande motivação para este trabalho está no fato de que estas estruturas, diferente da geometria Mach-Zehnder, dispensam o uso de litografia pois são completamente planares. Isto permite uma diminuição no custo de fabricação dos dispositivos além de permitir que estruturas mais curtas sejam utilizadas. Em se tratando de óptica integrada, as dimensões reduzidas da estrutura impõem severas penalidades no processo de lançamento de potência óptica na mesma. Por isso, será considerada neste estudo a utilização de prismas para o acoplamento de entrada do acoplador. Esta técnica, além de reduzir drasticamente os problemas de alinhamento decorrentes de acoplamento convencional do tipo \"End Fire\", permite uma transferência de potência óptica superior a 80% entre a fibra e o guia retangular. As variações na transferência de potência entre os guias de ondas da estrutura multicamada serão medidas através de um fotodetetor MSM integrado ao sensor. Este detetor, além de sua extrema facilidade de fabricação e baixos custos, torna o conjunto sensor mais robusto. Em se tratando de uma proposta de plataforma para sensores, serão também investigadas possíveis aplicações para esta estrutura, como por exemplo: refratômetro integrado, sensor de glicose, sensor de adulteração de combustível, etc. A análise das estruturas será efetuada por meio de técnicas de modelagem analíticas (Técnica da Matriz de Transferência - TMT e Teoria de Modos Acoplados - TMA), e numéricas (Método da Propagação de Feixe de Ângulo Largo formulado em Diferenças Finitas - WA-FD-BPM). Esta última permite que a estrutura do fotodetetor seja levada em consideração simultaneamente nas simulações. / This work concerns with design, modeling and fabrication of polymer based planar multilayer structures for integrated optic sensor applications. The motivation for this work is that planar multilayer structures, differently from the Mach-Zehnder geometry, do not require a lithographic process. As a consequence, significantly cheaper and shorter structures can be realized. The reduced dimensions of the structure, by its turn, pose a severe penalty in terms of optical power coupling. Therefore, this investigation will focus primarily on input (and output) prism coupling configuration. This technique, besides reducing the alignment requirements observed for conventional end-fire coupling, allows optical power coupling efficiency as high as 80% from fiber to rectangular waveguide. Any optical power transfer between the waveguides of the multilayer structure will be detected by an MSM photodetector integrated with the sensor. This low cost photodetector, besides improving the structure robustness, is quite ease to fabricate. Since the idea of this work is to develop a platform for integrated optic sensors, it will also be investigated possible applications for this structure, such as: integrated optic refractometer, glucose sensor and fuel adulteration sensor. The analysis of such structures will be carried out by means of analythical (Transfer Matrix Technique-TMT and Coupled Mode Theory-CMT) and numerical (Wide-Angle Finite Difference Beam Propagation Method-WA-FD-BPM) modeling techniques. The WA-FD-BPM technique allows one to simulate the multilayer waveguide and the MSM photodetector simultaneously.

Este trabalho visa o projeto, modelagem e fabricação de estruturas multicamadas baseadas em polímeros para aplicações como sensores ópticos integrados. A grande motivação para este trabalho está no fato de que estas estruturas, diferente da geometria Mach-Zehnder, dispensam o uso de litografia pois são completamente planares. Isto permite uma diminuição no custo de fabricação dos dispositivos além de permitir que estruturas mais curtas sejam utilizadas. Em se tratando de óptica integrada, as dimensões reduzidas da estrutura impõem severas penalidades no processo de lançamento de potência óptica na mesma. Por isso, será considerada neste estudo a utilização de prismas para o acoplamento de entrada do acoplador. Esta técnica, além de reduzir drasticamente os problemas de alinhamento decorrentes de acoplamento convencional do tipo \"End Fire\", permite uma transferência de potência óptica superior a 80% entre a fibra e o guia retangular. As variações na transferência de potência entre os guias de ondas da estrutura multicamada serão medidas através de um fotodetetor MSM integrado ao sensor. Este detetor, além de sua extrema facilidade de fabricação e baixos custos, torna o conjunto sensor mais robusto. Em se tratando de uma proposta de plataforma para sensores, serão também investigadas possíveis aplicações para esta estrutura, como por exemplo: refratômetro integrado, sensor de glicose, sensor de adulteração de combustível, etc. A análise das estruturas será efetuada por meio de técnicas de modelagem analíticas (Técnica da Matriz de Transferência - TMT e Teoria de Modos Acoplados - TMA), e numéricas (Método da Propagação de Feixe de Ângulo Largo formulado em Diferenças Finitas - WA-FD-BPM). Esta última permite que a estrutura do fotodetetor seja levada em consideração simultaneamente nas simulações. / This work concerns with design, modeling and fabrication of polymer based planar multilayer structures for integrated optic sensor applications. The motivation for this work is that planar multilayer structures, differently from the Mach-Zehnder geometry, do not require a lithographic process. As a consequence, significantly cheaper and shorter structures can be realized. The reduced dimensions of the structure, by its turn, pose a severe penalty in terms of optical power coupling. Therefore, this investigation will focus primarily on input (and output) prism coupling configuration. This technique, besides reducing the alignment requirements observed for conventional end-fire coupling, allows optical power coupling efficiency as high as 80% from fiber to rectangular waveguide. Any optical power transfer between the waveguides of the multilayer structure will be detected by an MSM photodetector integrated with the sensor. This low cost photodetector, besides improving the structure robustness, is quite ease to fabricate. Since the idea of this work is to develop a platform for integrated optic sensors, it will also be investigated possible applications for this structure, such as: integrated optic refractometer, glucose sensor and fuel adulteration sensor. The analysis of such structures will be carried out by means of analythical (Transfer Matrix Technique-TMT and Coupled Mode Theory-CMT) and numerical (Wide-Angle Finite Difference Beam Propagation Method-WA-FD-BPM) modeling techniques. The WA-FD-BPM technique allows one to simulate the multilayer waveguide and the MSM photodetector simultaneously.

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