La réalisation des jonctions ultra-minces et fortement dopées est un enjeu majeur pour la continuité de la miniaturisation des dispositifs microélectroniques. Les techniques de production en termes d'implantation ionique et de recuit d'activation doivent évoluer afin de répondre aux exigences du marché de la microélectronique. Le travail de recherche de cette thèse s’inscrit dans le cadre du projet ALDIP (Activation Laser de Dopants implantés par Immersion Plasma) et a pour objectif l’étude et le contrôle du procédé laser pour la réalisation des jonctions ultra-minces sur silicium (cristallin ou préamorphisé par implantation ionique) dopé au bore. En effet, le contrôle in situ du processus de recuit laser s'avère indispensable pour l'industrialisation de ce procédé qui jusqu'au là a fait l'objet de plusieurs études de recherche. Ainsi, le travail réalisé durant cette thèse a permis de mettre en place une méthode de contrôle, in situ, qui a été calibrée afin de la rendre accessible par le milieu industriel. Il s'agit de la méthode RRT (Réflectivité Résolue en Temps). Pour mener ce travail de thèse à terme, nous avons utilisé deux dispositifs expérimentaux comportant chacun un laser UV impulsionnel nanoseconde, un système optique d’homogénéisation et un dispositif RRT. Par ailleurs, plusieurs techniques de caractérisation ex situ ont été employées (TOF-SIMS, MEB, ...) notamment dans l’objectif de calibrer la méthode RRT. Ce travail expérimental a été couplé à une étude de simulation numérique qui a permis de mieux comprendre les paramètres clés du recuit laser et qui s’est souvent avérée en bon accord avec les résultats expérimentaux obtenus. / The realization of highly-doped ultra-shallow junctions became a key point for the reduction of microelectronic devices. Production techniques (implantation and activation annealing) must evolve to meet the market requirements of microelectronics. This job takes part of the ALDIP (Laser Activation of Dopants implanted by Plasma Immersion) project and it is focused on the study and control of the laser process for the realization of ultra-shallow junctions. The in situ control of laser annealing process is indispensable for the industrialization of this technique, which until then was the subject of several research studies. Thus, the work done during this thesis has permitted to set up a control method, in situ, which was calibrated to make it accessible to the industry. This experimental device is based on the RRT method (Time Resolved Reflectivity). In order to carry this work forward, we used two experimental systems based on the RRT method with two different nanosecond laser pulses (UV) and a homogenizer system. In addition, several ex situ characterization techniques were used notably for the purpose of calibrating the RRT method. This experimental work has been coupled with a numerical simulation study which provided a better understanding of the key parameters of the laser annealing. This comparison has often proved to be in a good agreement with experimental results.

In the UK, large quantities of intermediate level waste pose complex radiological remediation challenges. Chemical understanding of uranium in these Mg-rich sludges is vital. Previous studies have examined uranium uptake by calcium carbonate minerals (calcite and aragonite) under conditions pertinent to both natural and anthropogenically perturbed systems. However, research on uranyl uptake by magnesium-rich minerals such as magnesite [MgCO3], brucite [Mg(OH)2], nesquehonite [MgCO3·3H2O] and hydromagnesite-[Mg5(CO3)4(OH)2·4H2O] has not, to the best of our knowledge, been previously conducted. Such experiments will improve our understanding of the mobility of uranium and other actinides in natural lithologies such as dolomitic limestones or mafic igneous emplacements, as well as provide key information applicable to nuclear waste repository strategies involving Mg-rich phases. By two EXAFS techniques, we determined: (1) where uranyl (UO22+) is adsorbed, and (2) how uranyl is attached to the mineral surface. Therefore powder experiments of U(VI) were performed with magnesite, brucite, nesquehonite and hydromagnesite. The second experiment (GIXAFS) consisted of single crystals of magnesite (10.4) and brucite (0001). The powders were reacted in solution pH ~8.5 with U(VI)nitrate for 48 hrs. under ambient PCO2 = -3.5. The single crystals were reacted under ambient and reduced PCO2 ~ -4.5 for 48 hrs. with concentrations of U(VI)chlroride above (500; 50 ppm) and below (5 ppm) solubility of schoepite [UO2(OH)2·H2O]. The GIXAFS measurements were made at χ = 0˚ and χ = 90˚ relative to the synchrotron beam polarisation to uequivocally determine the adsorbate structures. Kd values for Mg-carbonate phases were comparable to or exceeded those published for calcium carbonates. GIXAFS results clearly showed polarisation for both ambient and reduced PCO2. XANES results showed uranyl is oriented with the axial oxygens perpendicular to the mineral surface. This implies, using also X-ray reflectivity and diffuse scatter, local hydrated bayleyite [Mg2(UO2)(CO3)3∙18H2O] and possible rutherfordine-like [UO2CO3] regions, which will be useful to predict uranium behaviour in various remediation processes.

This thesis deals with surface analysis and characterization of optical features of thin films created by hexamethyldisiloxane (HMDSO) plasma polymerization on silicon wafers. The RF plasma industrial deposition equipment was used for the thin layers formation. These thin films serve as protective coatings on the reflective layer in the car light or solar panels. Theoretic part gives basic information about plasma, its occurrence, features, diagnostics and applications. Thin layers, their production and characterization are discussed here, too. Theoretic description of monomer material (including the group of other organosilicones) is also presented here. The FTIR spectroscopy and elipsometry are mentioned as the main methods for thin films characterisation. Because material during its practical use degrades due to external conditions, the influence of them on the thin layer properties is studied using the accelerated aging of created films. Industrial deposition chamber AluMet 1800V made by Leybold Optics, Ltd. installed in Zlin Precision company was used for the thin films production. Thin films were created under different conditions that were selelected near to the real conditions used in technology. Various applied powers (2-5 kW) were used for the deposition under different monomer flows. Further, the influence of oxygen addition on the created film properties was investigated. The deposition process was monitored by optical emission spectroscopy. The spectrometer Jobin Yvon Triax 320 with CCD detector was used. The selected part from every samples set was exposed by UV radiation (48 hours at radiation density of 0.68 W/m2 at 340 nm) to simulate the probable conditions during the layers real use. The surface properties were investigated by measurement of reflected light spectral intensity in the visible range at different angles. The angle between incident and reflected beam was varied in the interval of 40 - 150° with 10° step. The influence of sample preparation conditions as well as their aging effect was studied at the selected angles. Spectral reflectance doesn´t depend significantly on applied discharge power and oxygen addition. The significant shift of reflectance into the red part of spectrum was observed at UV exposed samples more or less independently on the applied discharge power of monomer flow rate. Addition of oxygen during the deposition suppresses this effec significantly. Characterization of thin layer structure was done by FTIR spectroscopy. No significant changes were observed in the structure at different discharge powers of monomer flow rates except total absorption intensities that are proportional to the layr thickness. The oxygen addition, of course, changes the structure significantly. These results are only preliminary because the layers were very thin (deposition conditions were near to the common process standard) and thus the signal/noise ratio was relatively low.

The development of micro and nanoelectronics and nanophotonics needs novel characterization techniques to ensure higher quality of designed devices. The thesis describes a use of Scanning Near-field Optical Microscopy (SNOM) in dimensional control and in local investigation of diverse physical parameters. As example of its potential, the correlation between object topography and reflection measurement of capacitors is shown.

Les photons uniques sont des candidats idéaux pour transporter l’information quantique et l'un des défis majeurs est de pouvoir faire interagir ces photons entre eux via une interface lumière-matière efficace. Dans ce contexte, de nombreux travaux de recherche ont visé à implémenter une interface spin-photon, c’est-à-dire une interface entre les qubits volants (photons) et un qubit stationnaire (spin d’un porteur de charge confiné dans un dispositif à l’état solide). Des possibilités prometteuses ont en particulier été ouvertes suite à la démonstration du phénomène de rotation de polarisation induite par un spin unique. Cette rotation Faraday/Kerr, phénomène magnéto-optique bien connu mais appliqué ici à l’interaction avec un spin unique, permet en principe de transférer l’état quantique d’un spin sur l’état quantique des photons transmis/réfléchis. Néanmoins, ces observations de rotation de polarisation induite par un spin unique étaient restées limitées à des angles de rotation de l’ordre de quelques millidegrés.Pendant cette thèse, j'ai démontré qu’une exaltation géante de l’interaction spin-photon peut être obtenue en exploitant les effets de l’électrodynamique quantique en cavité. Le système étudié est constitué d'une boîte quantique semiconductrice (InAs/GaAs) couplée de façon déterministe à une microcavité optique de type micropilier : cette géométrie de cavité constitue une des interfaces les plus efficaces entre un faisceau incident et un système quantique confiné. De plus, la boîte quantique utilisée ici contient un porteur de charge résident dont le spin peut-être initialisé et mesuré optiquement.Durant cette thèse, j’ai réalisé un montage expérimental permettant d’initialiser l’état de spin confiné à l’intérieur de la boîte quantique et d’analyser la rotation de polarisation induite par ce spin. J'ai pu ainsi démontrer qu'il était possible d'initialiser l'état de spin à l'intérieur de la boîte quantique grâce à un faisceau polarisé circulairement. Ayant un état de spin initialisé, j'ai pu ensuite observer la rotation de polarisation induite par le spin confiné d'environ ± 6 °. Cette rotation macroscopique de la polarisation constitue trois ordres de grandeurs par rapport à l'état de l'art précédent. En parallèle des travaux expérimentaux, j'ai étudié théoriquement le phénomène d'initialisation et de rotation de polarisation dans nos systèmes boîte quantique en microcavité. J'ai pu développer des modèles analytiques permettant d'analyser et de prédire les expériences d'excitation résonante et de rotation de polarisation. Ces travaux théoriques ont notamment permis de déterminer des paramètres réalistes pour laquelle la rotation de polarisation optimale est atteinte permettant d'obtenir une interface spin-photon efficace.Cette nouvelle interface entre photon et mémoire quantique ouvre la voie à un large panel d’expériences pour l’information quantique et la communication quantique longue distance. / Single photons are ideal candidates to carry quantum information and the major challenge that optical quatum computing must face is to engineer photon matter interaction. A promising way to do so is to implement an efficient spin-photon interface making use of the polarization rotation (so-called Faraday or Kerr rotation) induced by a single spin. Thanks to the polarization rotation, it is possible to transfer the spin state into a polarization state. However, observations of Kerr rotation induced by a single spin were reported only recently, with rotation angles in the few 10-3 degree range.Cavity-QED effects are used to demonstrate a giant exaltation of the spin-photon interaction. The device is a single semiconductor quantum dot spin inserted inside a micropillar, a geometry which currently constitutes the most efficient photonic interface between an external laser beam and a confined cavity mode. Further, quantum dots confine a spin state of charge carrier which can be initialized and optically measured.In this thesis, I realized an experimental setup used to initialize a spin state confined in the quantum dot and to analyze the polarization rotation induced by this spin state. I demonstrated that it was possible to initialize the spin state confined in quantum dot with a circularly polarized beam. Having a well-known spin state, I observed the polarization rotation of ± 6 ° induced by a single spin. This macroscopic polarization rotation is three orders of magnitude three orders of magnitude higher than the previous state of artIn parallel of this experimental work, I studied theoretically spin initialization and polarization rotation phenomenon in our systems. I developed analytical models to characterize and predict the resonant excitation and polarization rotation experiences. Thanks to this theoretical work, I determined realistic parameters for the device to realize an optimal spin-photon interface.This novel way of interfacing a flying qubit and a solid-state quantum memory opens the road for a wide range of applications for quantum information processing and long-distance quantum communication.

In the present work, growth and structural characterization of CrB2/TiB2 superlattices on (0001) Al2O3 substrate is studied. The superlattices are grown using a direct current magnetron sputtering (DCMS) system with a base pressure of <9E-7 Torr. For structural characterization X-ray diffraction (XRD), X-ray reflectivity (XRR), transmission electron microscopy (TEM), selected area electron diffraction (SAED), energy dispersive X-ray spectroscopy (EDX), and scanning transmission electron microscopy (STEM) are used. Hardness is measured using nanoindentation technique. For growth of CrB2/TiB2 superlattices it is shown that the sputtering gas pressure of PAr= 4 mTorr, and substrate temperature of T= 600 °C are optimized parameters for growing well-structured superlattices with good interface quality. Superlattices with a layer thickness ratio of Γ= 0.43 (Γ= DTiB2/DCrB2+DTiB2) and a total thickness of 1 μm are deposited with different modulation periods Λ=1, 2, 6, 8, and 10 nm to see the layer-thickness affect on the quality of the structures. XRD and TEM results show that by increasing the modulation period, the quality of superlattices with smooth interfaces increases. The superlattices with modulation period Λ=8 nm is shown to be the best structure having coherent lattice and smooth interfaces up to ~20 periods. The STEM analysis shows that after about 20 periods, grains started to grow at slightly different orientations. A superlattice of TiB2/CrB2(having TiB2 as the first deposited layer) with modulation period Λ=8 nm shows an epitaxial growth of TiB2 on Al2O3 (0001) substrate, however, no big difference between the structure of TiB2/CrB2 and CrB2/TiB2 superlattices is seen. EDX maps and line profiles show that there is a diffusion of CrB2 into TiB2 layers which is a serious problem for obtaining sharp interfaces. STEM also shows that for a small modulation period of Λ=1 nm, there is a faint layered structure, whereas EDX, SAED and XRD indicates a homogenous textures Ti-Cr-B film in this sample. Finally, the hardness measurement shows a hardness value of 29-34 GPa for different modulation periods. The lowest hardness value is related to the sample with modulation period of Λ=1 nm with about 29 GPa, and the highest hardness is related to the sample with Λ=8 nm ith around 34 GPa.

The interfacial structuring of three non-halogenated ionic liquids was examined at the air-liquid interface for both dry and humid condition by analysis of X-ray reflectometry data using a slab model approach. The aim was to investigate the effect of humidity on the air-liquid interface. Pure ionic liquids as well as solutions of 5% w/w and 20% w/w in propylene carbonate were examined. Three different cations were used, a phosphonium cation ([P6,6,6,14]+) and two dialkylimidazolium cations ([C6C1Im]+ and [C10C1Im]+). The anion was bis(mandelato)borate ([BMB]-), which is a non-commercial anion that has been shown to exhibit excellent tribological properties. The results reveal that the presence of ambient water has an impact on the interfacial structure and the layering of all pure ionic liquids, as well as most cases of ionic liquid solutions. Exposure to humidity had the largest response in the case of all pure and diluted solutions of [C6C1Im][BMB], for which a more pronounced layering was observed. The [P6,6,6,14][BMB] solutions did not exhibit any significant changes when exposed to ambient water, with the 20% w/w solution proving to be the most stable. / Gränsskiktsstrukturen hos tre olika icke-halogenerade jonvätskor undersöktes vid luft-vätskegränsskiktet för både torra och fuktiga förhållanden genom analys av data från en röntgen reflektometer med en “slab model approach”. Målet var att undersöka effekten av luftfuktighet på luft-vätskagränsskiktet. Rena jonvätskor såväl som lösningar av 5 och 20 vikt-% utspädda i propylenkarbonat undersöktes. Tre olika katjoner användes, en fosforkatjon ([P6,6,6,14]+) samt två dialkylimidazoliumkatjoner ([C6C1Im]+ och [C10C1Im]+). Anjonen var bis(madelato)borat ([BMB]-), vilket är en icke-kommersiell anjon som har visat bra tribologiska egenskaper. Resultatet visar att närvaron av omgivande vatten har en påverkan på gränsskiktsstrukturen samt skiktning hos alla rena jonvätskor och de flesta utspädda lösningar. Exponering för fuktighet hade den största inverkan på alla rena och utspädda lösningar av [C6C1Im][BMB], för vilka en mer distinkt skiktning kunde observeras. [P6,6,6,14][BMB] lösningar uppvisade inga signifikanta ändringar vid exponering till fuktig luft, där den lösning med 20 vikt-% visade sig vara mest stabil.

The functionalization of surfaces has received attention because the process allows the design and tailoring of substrate surfaces with a new or improved function. "Host-guest" thin film complexes are composed of "host" molecules attached the substrate surface, either through physisorption or covalent bonds, with cavities for the inclusion of desired "guest" molecules for the functionalization of the surface. Two methods for fabricating functional "host-guest" thin films were investigated: Langmuir-Blodgett (LB) deposition and self-assembly monolayer (SAM). Langmuir films were created at the air-water interface using octadecanesulfonic acid (C18S) as the amphiphilic "host" molecules separated by hydrophilic guanidinium (G) spacer molecules, which created a cavity allowing the inclusion of desired "guest" molecules. Surface pressure-area isotherms of the (G)C18S, with and without guests, are characterized by the lift-off molecular areas and are use to determine the proper deposition surface pressure. "Host-guest" Langmuir films are deposited onto silicon substrates using the LB deposition technique. The LB films were then subjected to stability testing using different solvents over increasing periods of time. Grazing-angle incidence X-ray diffraction (GIXD), specular X-ray reflectivity (XRR) and transfer ratio measurements were used to characterize the crystallinity, film thickness, overall film stability and film coverage. The GIXD data revealed that the crystallinity of the deposited film varies with the "guest" molecules and can be disrupted by the functional group on the "guest" molecule through hydrogen bonding. After modeling the XRR data using StochFit, it was discovered that the more polar solvent, tetrahydrofuran (THF), removed the film completely while the nonpolar solvent, hexane, compacted the thin film and increased the electron density. With transfer ratios around 0.95 to 1.05, the deposited films were homogenous. The second method used was self-assembly monolayers, which differs from Langmuir films in that they are created by a spontaneous chemical synthesis from immersing a substrate into a solution containing an active surfactant. Octadecyltrichlorosilane (OTS) was used initially as a molecule to study the self-assembled monolayer procedure. To study a "host-guest" self-assembled monolayer system, a compound is being synthesized from 9-bromoanthracene. This compound would already contain the cavity necessary for the inclusion of "guest" molecules. The solution that contained OTS was composed of a 4:1 mixture of anhydrous octadecane: chloroform. Silicon substrates with a deposited oxide layer were hydroxylated for the surfactant binding chemical reaction to occur. The OTS SAMs were exposed to the same stability tests as the LB films. Surface contact angle measurements were taken of the OTS SAMs before and after the stability tests. The contact angle prior to the stability tests was 110° (±2°). The contact angle after immersion in THF was 101° (±2°) while the contact angle resulting from immersion in hexane was 105° (±2°). From the contact angle measurements, the degradation of the OTS SAMs was less extensive than that of the (G)C18S LB films. / Master of Science

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