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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.
1

Investigation of Short-Channel Behaviors and RF/analog Performance in a Novel Self-Aligned Dual-Channel Source/Drain-Tied MOSFET

Fan, Yi-Hsuan 03 August 2011 (has links)
In this thesis, a novel fully self-aligned bulk-Si device named dual-channel source/drain-tied (DC-SDT) MOSFET with extremely thin (ET) body is proposed. The process utilizes the multiple epitaxial growths of SiGe/Si layers, so the starting material is bulk-Si wafer instead of the SOI wafer. We have investigated the RF/analog performance, and the high temperature induced device stability degradation has also been also investigated. Moreover, we have compared this structure with the other similar transistors such as: body-tied MOSFET (DC-BT MOSFET) and conventional dual-channel MOSFET (DC-SOI MOSFET). Based on the simulation results, for the DC-BT MOSFET, our proposed DC-SDT MOSFET has improved the device performances such as: Ioff decreased 47.6%, switching speed increased 18.1%, S.S. improved 13%, and voltage gain increased 25%. Whereas for the DC-SOI MOSFET, our proposed DC-SDT MOSFET has also improved the device performances such as: Ion increased 11.3%, reduction of lattice temperature 35.7% and 35.5 in the top and bottom channels, voltage gain increased 15%. We not only compared with the above two similar transistors, but also compared to the other mainstream devices, such as: FinFET and Gate-all-around. After the comparisons, we confirm that the proposed DC-SDT MOSFET has better ON-state current and short-channel behaviors. For the scaling, DC-SDT MOSFET can truly become one of the strong candidates.

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