The Rapid Thermal Chemical Vapor Deposition (RTCVD) system is an emerging and promising technology in semiconductor manufacturing which possess advantages of rapidly increasing wafer temperature and reducing the thermal budget over traditional batch processing. In recent years, the growth of thin films in the manufacture of semiconductor devices has been widely employed in the industry. Because the influences of processing variables on RTCVD systems may lead to spatial wafer temperature non-uniformity, the precise control of wafer temperature is an important issue up to the present. In this paper the complementary sensitivity function shaping based on H-infinite control theory is applied to design robust controllers for the single-input/single-output (SISO) model of the RTCVD system, the multi-input/multi-output (MIMO) model of the RTCVD system, and the MIMO model with multiplicative uncertainties. Through control the power of the tungsten-halogen lamps, it can achieve the temperature tracking with good uniformity. Finally, the computer simulation results are obviously that the performance of the proposed controllers is satisfactory.

This thesis describes the implementation of Yao’s adaptive robust control to an aircraft control system. This control law is implemented as a means to maintain stability and tracking performance of the aircraft in the face of failures and changing aerodynamic response. The control methodology is implemented as an outer loop controller to an aircraft under nonlinear dynamic inversion control. The adaptive robust control methodology combines the robustness of sliding mode control to all types of uncertainty with the ability of adaptive control to remove steady state errors. A performance measure is developed in to reflect more subjective qualities a pilot would look for while flying an aircraft. Using this measure, comparisons of the adaptive robust control technique with the sliding mode and adaptive control methodologies are made for various failure conditions. Each control methodology is implemented on a full envelope, high fidelity simulation of the F-15 IFCS aircraft as well as on a lower fidelity full envelope F-5A simulation. Adaptive robust control is found to exhibit the best performance in terms of the introduced measure for several different failure types and amplitudes.

Significant research has been initiated recently to devise control strategies that could predict and compensate manufacturing errors using so called explicit Stream-of-Variation(SoV) models that relate process parameters in a Multistage Manufacturing Process (MMP) with product quality. This doctoral dissertation addresses several important scientific and engineering problems that will significantly advance the model-based, active control of quality in MMPs. First, we will formally introduce and study the new concept of compensability in MMPs, analogous to the concept of controllability in the traditional control theory. The compensability in an MMP is introduced as the property denoting one’s ability to compensate the errors in quality characteristics of the workpiece, given the allocation and character of measurements and controllable tooling. The notions of “within-station” and “between-station” compensability are also introduced to describe the ability to compensate upstream product errors within a given operation or between arbitrarily selected operations, respectively. The previous research also failed to concurrently utilize the historical and on-line measurements of product key characteristics for active model-based quality control. This dissertation will explore the possibilities of merging the well-known Run-to-Run (RtR) quality control methods with the model-based feed-forward process control methods. The novel method is applied to the problem of control of multi-layer overlay errors in lithography processes in semiconductor manufacturing. In this work, we first devised a multi-layer overlay model to describe the introduction and flow of overlay errors from one layer to the next, which was then used to pursue a unified approach to RtR and feedforward compensation of overlay errors in the wafer. At last, we extended the existing methodologies by considering inaccurately indentified noise characteristics in the underlying error flow model. This is also a very common situation, since noise characteristics are rarely known with absolute accuracy. We formulated the uncertainty in process noise characteristics using Linear Fractional Transformation (LFT) representation and solved the problem by deriving a robust control law that guaranties the product quality even under the worst case scenario of parametric uncertainties. Theoretical results have been evaluated and demonstrated using a linear state-space model of an actual industrial process for automotive cylinder head machining. / text

This dissertation studies hybrid dc-dc power conversion systems based on multiple-input converters (MICs), or more generally, multiport converters. MICs allow for the integration of multiple distributed generation sources and loads. Thanks to the modular design, an MIC yields a scalable system with independent control in all sources. Additional characteristics of MICs include the improved reliability and reduced cost. This dissertation mainly studies three issues of MICs: efficiency improvement, modeling, and control. First, this work develops a cost-effective design of a highly-efficient non-isolated MIC without additional components. Time-multiplexing (TM) MICs, which are driven by a time-multiplexing switching control scheme, contain forward-conducting-bidirectional-blocking (FCBB) switches. TM-MICs are considered to be subject to low efficiency because of high power loss introduced by FCBB switches. In order to reduce the power loss in FCBB switches, this work adopts a modified realization of the FCBB switch and proposes a novel switching control strategy. The design and experimental verifications are motivated through a multiple-input (MI) SEPIC converter. Through the design modifications, the switching transients are improved (comparing to the switching transients in a conventional MI-SEPIC) and the power loss is significantly reduced. Moreover, this design maintains a low parts-count because of the absence of additional components. Experimental results show that for output power ranging from 1 W to 220 W, the modified MIC presents high efficiency (96 % optimally). The design can be readily extended to a general n-input SEPIC. The same modifications can be applied to an MI-Ćuk converter. Second, this dissertation examines the modeling of TM-MICs. In the dynamic equations of a TM-MIC, a state variable from one input leg is possible to be affected by state variables and switching functions associated with other input legs. In this way, inputs are coupled both topologically and in terms of control actions through switching functions. Coupling among the state variable and the time-multiplexing switching functions complicate TM-MICs’ behavior. Consequently, substantial modeling errors may occur when a classical averaging approach is used to model an MIC even with moderately high switching frequencies or small ripples. The errors may increase with incremental number of input legs. In addition to demonstrating the special features on MIC modeling, this dissertation uses the generalized averaging approach to generate a more accurate model, which is also used to derive a small-signal model. The proposed model is an important tool that yields better results when analyzing power budgeting, performing large-signal simulations, and designing controllers for TM-MICs via a more precise representation than classical averaging methods. Analyses are supported by simulations and experimental results. Third, this dissertation studies application of a decentralized controller on an MI-SEPIC. For an MIC, a multiple-input-multiple-output (MIMO) state-space representation can be derived by an averaging method. Based on the averaged MIMO model, an MIMO small-signal model can be generated. Both conventional method and modern multivariable frequency analysis are applied to the small-signal model of an MI-SEPIC to evaluate open-loop and closed-loop characteristics. In addition to verifying the nominal stability and nominal performance, this work evaluates robust stability and robust performance with the structured singular value. The robust performance test shows that a compromised performance may be expected under the decentralized control. Simulations and experimental results verify the theoretical analysis on stability and demonstrate that the decentralized PI controller could be effective to regulate the output of an MIC under uncertainties. Finally, this work studies the control of the MIMO dc-dc converter serving as an active distribution node in an intelligent dc distribution grid. The unified model of a MIMO converter is derived, enabling a systematical analysis and control design that allows this converter to control power flow in all its ports and to act as a power buffer that compensates for mismatches between power generation and consumption. Based on the derived high-order multivariable model, a robust controller is designed with disturbance-attenuation and pole-placement constraints via the linear matrix inequality (LMI) synthesis. The closed-loop robust stability and robust performance are tested through the structured singular value synthesis. Again, the desirable stability and performance are verified by simulations and experimental results. / text

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In this work VLE data was measured on three different pieces of equipment. Measurements were undertaken in the laboratory of Professor Gmehling in Oldenburg, Germany using two different static cells and in the Thermodynamics Research Unit (TRU), University of Natal, South Africa using a specially designed dynamic still. The three pieces of equipment used are as follows: i.) Static apparatus of Rarey and Gmehling (1993), ii.) Static apparatus of Kolbe and Gmehling (1985) as modified by Fischer and Wilken (2001), and, iii.) Dynamic apparatus ofHarris et al. (2003b). In total 370 data points were measured; fourteen sets of VLE data and eight vapour pressure data sets were measured. The work undertaken in Germany measured the systems hexane (1) + N-methylformarnide (2), benzene (1) + N-methylformamide (2), cWorobenzene (1) + N-methylformarnide (2) and acetonitrile (1) + N-methylformamide (2), at 363.15 K using the equipment of Rarey and Gmehling (1993). The systems CO2 (1) + Napthalene (2) at T = 372.45 K, 403.85 K and 430.65 K and CO2 (1) + Benzoic acid (2) at T= 403.28 K, 432.62 K and 458.37 K were measured on the equipment of Kolbe and GmeWing (1985) (as modified by Fischer and Wilken (2001)). Apart from the CO2 (1) + Napthalene (2) system at T = 372.45 K, all the above-mentioned data are new data. The equipment designed in the TRU was designed to operate between 300 and 700 K and between 1 kPa and 30 MPa. The equipment is of the dynamic recirculating VLE still type (DRVS) and is based on the principles of low-pressure stills. The still is constructed from uniquely machined Stainless-steel components and standard commercial Stainless-steel tubing and valves and is computer controlled to operate either isobarically or isothermally. Vapour pressures were measured on the new equipment for n-heptane, n-decane, n-dodecane, n-hexadecane, l-octadecene, 1-hexadecanol and d,l-menthol at low pressures and for acetone at high pressures. These vapour pressure measurements were used as test systems and ranged from 1.00 kPa to 1 000 kPa and from 308.33 K to 583.90 K. Cyclohexane (1) + ethanol (2) at 40 kPa and n-dodecane (1) + l-octadecene (2) at 26.66 kPa were measured as two isobaric VLE test systems. The VLE data measured for d,l-menthol (1) + l-isomenthol (2) at T= 448.15 K and n-dodecane (1) + l-octadecene (2) at P = 3.0 kPa represent new data measured on the equipment. All the VLE systems were modeled. Two data reduction methods were investigated: i.) the combined (r-rf) method, and, ii.) the direct method (H) method. Several different Gibbs excess models (Wilson, NRTL and UNIQUAC), equations of state (PengRobinson and virial) and mixing rules (Huron-Vidal, Wong-Sandler and Twu-Coon) were used in different combinations to find the best fit for the data. The Maher and Smith (1979) method was used to determine infinite dilution activity coefficients from the very smooth data of the N-methylformamide systems. Excess properties were determined for the CO2 (1) + Napthalene (2) and the CO2 (1) + Benzoic acid (2) systems. Although the equipment of Hams et al. (2003b) was able to measure data at high temperatures and elevated pressures, the precission of the data was not as good as was expected. Measuring the system temperature at elevated temperatures was especially problematic. The problem is attributed to the large mass of Stainless-steel used in the construction of the apparatus. To rectify this problem it is suggested that the equipment be modified to be lighter in weight and only capable of measuring VLE at moderate pressures (less than 3 MPa). / Thesis (Ph.D.)-University of Natal, Durban, 2004.

Large boilers have typically been designed for continuous operation from 60-100% load. With restructuring of electrical supply and in some cases because of local fuel supply constraints, some of these boilers are run for only two shifts per day and this entails warm start ups. A reasonable objective is to bring the plant online as quickly as possible within the equipments constraint and without risk of tripping major plant equipment such as feed pumps and circulation pumps. The project required the development of a model accurate enough to represent the boiler thermal dynamics. The thesis compares the simulated model results with the measured results from a Benson boiler from Majuba power station. The developed model is then used to investigate gain scheduled and robust control approaches to the design of the control system for collector vessel level and evaporator flow rate. Once the control problems are clearly understood, an investigation into fast start up is undertaken. The subject of the start up of Benson boilers has limited open literature. This is because flexibility in plant operation has only recently become an important issues with electricity utilities. The limited research in the field of robust control of start up of Benson boiler has made the extensive work done by both Eitelberg and Boje [2001,2002,2004] state of the art. Most of the research done in this thesis follows from the work done by Eitelberg and Boje. / Thesis (M.Sc.)-University of KwaZulu-Natal, Durban, 2005.

This thesis aims to verify the use of quantitative feedback theory (QFT) as a viable tool for designing power system stabilisers (PSS) for a single machine infinite bus system. The result of the QFT design is verified by simulation of the linear and nonlinear models representing the power system, and also by experimental procedures carried out in a laboratory. QFT falls into the classical control category, and is a frequency domain design method. It is an alternative to other design methods such as root locus and Hoo . The QFT design procedure can be extended to a multimachine system and QFT designs of MIMO systems has gained impetus. From theory, through simulation, and to the final laboratory testing on a single machine, infinite bus system, it will be shown that the application of QFT to robust PSS design does indeed work. QFT is a design method that allows the designer to choose a set of realistic operating points and to produce a design that include those points. Other methods allow the designer to produce a design for single operating point, and one has no idea how the design performs at the other operating points. / Thesis (M.Sc.Eng.)-University of Natal, Durban, 2003.

This thesis investigates the design of damping controllers to alleviate the problem of low frequency electro-mechanical oscillations in power systems. The operating point and network parameters of power systems are continually changing, resulting in changes in system dynamics. The conventional controller design methodology has therefore come under increasing scrutiny for its lack of considerations for robustness. The thesis first outlines the conventional design of a power system stabilizer (PSS) and then applies two robust techniques (Hoo and Quantitative Feedback Theory, QFT) to the design problem. The single machine infinite bus (SMIB) model is used to illustrate the procedure for all three design techniques. The final design is undertaken to illustrate the more important problem of robust multi-machine PSS design using QFT. The design requires linearised models of the multi-machine system. A brief discussion is given on how these can be obtained. An introduction to decentralized control design in QFT is included to support the multi-machine design. Chapter three proceeds through the design steps required to generate a conventional PSS. The technique is shown to be simple for a given set of operating conditions. The controller is shown to be adequately robust over the given set of operating conditions albeit not by design. Chapter four introduces a design technique that directly addresses robustness issues during the controller design. For a restricted range of operating conditions the designed controller demonstrates the desired robustness and performance characteristics. The inherent difficulties with Hoo in PSS design become more apparent as the operating range is extended. Chapter five introduces the second robust controller design technique. QFT is shown to be more adept at dealing with increased operating ranges and changing specifications in the single-machine infinite-bus case. The controller is easy to generate and performs well over the entire range of operating conditions. QFT is also applied to the controller design for a four-machine study system. The design is a marginally more complex than in the single machine case but is still easily accomplished. This thesis confirms previous attempts at solving the design problem using the methods outlined above. The performance of all controllers is assessed for small and large disturbances using non-linear time domain simulations with models developed using PSCAD/EMTDC and MATLAB. / Thesis (M.Sc.)-University of Natal,Durban, 2002.