No description available.

No description available.

This study produced and analyzed shaped tungsten wire tips formed through electrochemical etching. Specifically, the cone length and the radius of curvature of the tip were analyzed. Having the tips move dynamically through an electrolytic solution, such as potassium hydroxide, and tuning the initial starting depth of the tungsten wire along with the dynamic speed of the tungsten wire as it passed throughout the solution allowed various types of tip profiles to be produced. The tip's radius of curvature was able to be reproduced with an accuracy between 88 - 92 %. The method provided would be applicable for the production of various styles of liquid-metal ion source (LMIS) probes and scanning probe microscope (SPM) tips.

Scanning probe microscopes (SPMs) are the highest resolution imaging instruments available today and are among the most important tools in nanoscience. Conventional SPMs suffer from several drawbacks owing to their large and bulky construction and to the use of piezoelectric materials. Large scanners have low resonant frequencies that limit their achievable imaging bandwidth and render them susceptible to disturbance from ambient vibrations. Array approaches have been used to alleviate the bandwidth bottleneck; however as arrays are scaled upwards, the scanning speed must decline to accommodate larger payloads. In addition, the long mechanical path from the tip to the sample contributes thermal drift. Furthermore, intrinsic properties of piezoelectric materials result in creep and hysteresis, which contribute to image distortion. The tip-sample interaction signals are often measured with optical configurations that require large free-space paths, are cumbersome to align, and add to the high cost of state-of-the-art SPM systems. These shortcomings have stifled the widespread adoption of SPMs by the nanometrology community. Tiny, inexpensive, fast, stable and independent SPMs that do not incur bandwidth penalties upon array scaling would therefore be most welcome. The present research demonstrates, for the first time, that all of the mechanical and electrical components that are required for the SPM to capture an image can be scaled and integrated onto a single CMOS chip. Principles of microsystem design are applied to produce single-chip instruments that acquire images of underlying samples on their own, without the need for off-chip scanners or sensors. Furthermore, it is shown that the instruments enjoy a multitude of performance benefits that stem from CMOS-MEMS integration and volumetric scaling of scanners by a factor of 1 million. This dissertation details the design, fabrication and imaging results of the first single-chip contact-mode AFMs, with integrated piezoresistive strain sensing cantilevers and scanning in three degrees-of-freedom (DOFs). Static AFMs and quasi-static AFMs are both reported. This work also includes the development, fabrication and imaging results of the first single-chip dynamic AFMs, with integrated flexural resonant cantilevers and 3 DOF scanning. Single-chip Amplitude Modulation AFMs (AM-AFMs) and Frequency Modulation AFMs (FM-AFMs) are both shown to be capable of imaging samples without the need for any off-chip sensors or actuators. A method to increase the quality factor (Q-factor) of flexural resonators is introduced. The method relies on an internal energy pumping mechanism that is based on the interplay between electrical, mechanical, and thermal effects. To the best of the author???s knowledge, the devices that are designed to harness these effects possess the highest electromechanical Qs reported for flexural resonators operating in air; electrically measured Q is enhanced from ~50 to ~50,000 in one exemplary device. A physical explanation for the underlying mechanism is proposed. The design, fabrication, imaging, and tip-based lithographic patterning with the first single-chip Scanning Thermal Microscopes (SThMs) are also presented. In addition to 3 DOF scanning, these devices possess integrated, thermally isolated temperature sensors to detect heat transfer in the tip-sample region. Imaging is reported with thermocouple-based devices and patterning is reported with resistive heater/sensors. An ???isothermal electrothermal scanner??? is designed and fabricated, and a method to operate it is detailed. The mechanism, based on electrothermal actuation, maintains a constant temperature in a central location while positioning a payload over a range of >35??m, thereby suppressing the deleterious thermal crosstalk effects that have thus far plagued thermally actuated devices with integrated sensors. In the thesis, models are developed to guide the design of single-chip SPMs and to provide an interpretation of experimental results. The modelling efforts include lumped element model development for each component of single-chip SPMs in the electrical, thermal and mechanical domains. In addition, noise models are developed for various components of the instruments, including temperature-based position sensors, piezoresistive cantilevers, and digitally controlled positioning devices.

Les microscopes en champ proche permettent d'obtenir la topographie d'un échantillon avec une résolution pouvant atteindre la résolution atomique. Les spectroscopies de rayons-X sont des méthodes de caractérisation qui permettent de déterminer la composition et la structure élémentaire de l'échantillon avec une précision inférieure à l'Ångström. Nous avons choisi de coupler ces deux techniques en collectant localement la luminescence visible issue de l'échantillon par la pointe-sonde d'un microscope à force de cisaillement, constituée d'une fibre optique effilée de faible ouverture. Cette technique a été utilisée pour caractériser des échantillons semiconducteurs micro- et nano-structurés afin d'en obtenir simultanément la topographie et la cartographie de luminescence locale. Afin de pouvoir étendre ce concept à d'autres types de matériaux, la faisabilité de la collecte de la fluorescence X locale a été évaluée avec la microsource. Pour cela la fluorescence X émise par un échantillon a été collectée par un capillaire cylindrique équipant un détecteur EDX. L'influence du diamètre du capillaire sur le niveau de signal a été mesurée. Une simulation numérique a été développée afin d'estimer le niveau de signal obtenu en utilisant un capillaire de 1 µm de diamètre et d'optimiser la géométrie du système. En couplant la microscopie en champ proche et l'analyse XRF, à la lumière de ces résultats, il sera possible d'atteindre 100 nm de résolution latérale en environnement synchrotron et moins de 1 µm à l'aide d'une source de laboratoire. Il serait alors possible de sélectionner un objet particulier sur une surface et d'en faire l'analyse élémentaire. / Scanning Probe Microscopes allow to obtain sample topography up to atomic resolution. X-ray spectroscopies allow elemental and structural analysis of a sample with accuracy better than 1 Å. The lateral resolution is limited by the primary beam diameter, currently a few µm². We have chosen to couple this two technics. Local sample visible luminescence is collected through a low aperture sharp optical fibre, probe of a shear force microscope. This technique was used to characterize microstructured semiconducting samples to achieve simultaneously the surface topography and luminescence mapping. The results were obtained using either synchrotron radiation or a laboratory microsource equipped with a polycapillary lens. To extend this concept to a wider variety of materials, local XRF collection by an EDX detector equipped with a cylindrical X-ray capillary was tested. A cobalt sample irradiated with the microsource was used for technique evaluation. The signal magnitude dependence with the capillary diameter was measured. Modelling and numerical calculations were developed to estimate the signal magnitude that could be detected using a 1 µm diameter capillary. The optimal system geometry was determined. Scanning Probe Microscopy combined to XRF analysis could thereby lead to simultaneous acquisition of sample topography and chemical mapping. The expected lateral resolution using synchrotron radiation is 100 nm while sub 1 µm resolution is realistic with a laboratory source. This technique would allow to point a peculiar micro- or nano-object on the surface and to perform its chemical analysis.