Energy science is becoming an increasingly important multi-disciplinary area, for not only addressing the worldwide energy crisis, but also realizing desired power sources with advanced features for portable electronic devices and sensor networks. Very recently, based on triboelectric effect and electrostatic induction, a fundamentally new technology, triboelectric nanogenerator, has been demonstrated which shows unique merits. But so far, the main limitation for continuing optimizing their output performance is a lack of fundamental understanding of their core working mechanism. In this thesis research, we first unveil the fundamental theory and output characteristics of triboelectric nanogenerators. Then, we apply the developed theory to the TENG-based self-powered system design. We have developed the first genuine self-powered system to meet mW requirement of personal electronics. The system includes a multilayered TENG, a power management circuit with 60% total efficiency, and a low leakage energy storage device. Our power management circuit provides the total efficiency that is about two magnitudes higher than the traditional direct charging. And the total system performance is 330 times higher than the state-of-art designs. Driven by palm tapping, this power unit can provide a continuous DC electricity of 1.044 mW on average power in a regulated and managed manner that can be universally applied as a standard power source for continuously driving numerous conventional electronics, such as a thermometer, a heart rate monitor (electrocardiograph/ECG system), a pedometer, a wearable electronic watch, a scientific calculator, and a wireless radio-frequency communication system. Our study demonstrates the first power unit that utilizes widely accessible biomechanical energy source to sustainably drive a broad range of commercial mobile and wearable electronic devices. This self-charging unit is a paradigm shift towards infinite-lifetime energy sources that can never be achieved solely by batteries.

Novel technology which can provide new solutions and enable augmented capabilities to CMOS based technology is highly desired. Piezotronic nanodevices and integrated systems exhibit potential in achieving these application goals. By combining laser interference lithography and low temperature hydrothermal method, an effective approach for ordered growth of vertically aligned ZnO NWs array with high-throughput and low-cost at wafer-scale has been developed, without using catalyst and with a superior control over orientation, location/density and morphology of as-synthesized ZnO NWs. Beyond the materials synthesis, by utilizing the gating effect produced by the piezopotential in a ZnO NW under externally applied deformation, strain-gated transistors (SGTs) and universal logic operations such as NAND, NOR, XOR gates have been demonstrated for performing piezotronic logic operations for the first time. In addition, the first piezoelectrically-modulated resistive switching device based on piezotronic ZnO NWs has also been presented, through which the write/read access of the memory cell is programmed via electromechanical modulation and the logic levels of the strain applied on the memory cell can be recorded and read out for the first time. Furthermore, the first and by far the largest 3D array integration of vertical NW piezotronic transistors circuitry as active pixel-addressable pressure-sensor matrix for tactile imaging has been demonstrated, paving innovative routes towards industrial-scale integration of NW piezotronic devices for sensing, micro/nano-systems and human-electronics interfacing. The presented concepts and results in this thesis exhibit the potential for implementing novel nanoelectromechanical devices and integrating with MEMS/NEMS technology to achieve augmented functionalities to state-of-the-art CMOS technology such as active interfacing between machines and human/ambient as well as micro/nano-systems capable of intelligent and self-sufficient multi-dimensional operations.

Energy harvesting and energy storage are two most important technologies in today's green and renewable energy science. As for energy harvesting, the fundamental science and practically applicable technologies are not only essential in realizing the self-powered electronic devices and systems, but also tremendously helpful in meeting the rapid-growing world-wide energy consumptions. Mechanical energy is one of the most universally-existing, diversely-presenting, but usually-wasted energies in the natural environment. Owing to the limitations of the traditional technologies for mechanical energy harvesting, it is highly desirable to develop new technology that can efficiently convert different types of mechanical energy into electricity. On the other hand, the electricity generated from environmental energy often needs to be stored before used to drive electronic devices. For the energy storage units such as Li-ion batteries as the power sources, the limited lifetime is the prominent problem. Hybridizing energy harvesting devices with energy storage units could not only provide new solution for this, but also lead to the realization of sustainable power sources. In this dissertation, the research efforts have led to several critical advances in a new technology for mechanical energy harvesting—triboelectric nanogenerators (TENGs). Previous to the research of this dissertation, the TENG only has one basic mode—the contact mode. Through rational structural design, we largely improved the output performance of the contact-mode TENG and systematically studied their characteristics as a power source. Beyond this, we have also established the second basic mode for TENG—the lateral sliding mode, and demonstrated sliding-based disk TENGs for harvesting rotational energy and wind-cup-based TENGs for harvesting wind energy. In order to expand the application and versatility of TENG by avoid the connection of the electrode on the moving part, we further developed another basic mode—freestanding-layer mode, which is capable of working with supreme stability in non-contact mode and harvesting energy from any free-moving object. Both the grating structured and disk-structured TENGs based on this mode also display much improved long-term stability and very high energy conversion efficiency. For the further improvement of the TENG’s output performance from the material aspect, we introduced the ion-injection method to study the maximum surface charge density of the TENG, and for the first time unraveled its dependence on the structural parameter—the thickness of the dielectric film. The above researches have largely propelled the development of TENGs for mechanical energy harvesting and brought a big potential of impacting people’s everyday life. Targeted at developing sustainable and independent power sources for electronic devices, efforts have been made in this dissertation to develop new fundamental science and new devices that hybridize the nanogenerator-based mechanical energy harvesting and the Li-ion-battery-based energy storage process into a single-step process or in a single device. Through hybridizing a piezoelectric nanogenerator with a Li-ion battery, a self-charging power cell has been demonstrated based on a fundamentally-new mechanical-to-electrochemcial process. The triboelectric nanogenerator as a powerful technology for mechanical energy harvesting has also been hybridized with a Li-ion battery into a self-charging power unit. This new concept of device can sustainably provide a constant voltage for the non-stop operation of electronic devices.

The thesis deals with power harvesting sensors as a source of energy. As the power requirements for microelectronics decreases the environmental energy sources become more perspective. In a few last years batteries reach a higher capacity but there is still problem with their replacement. Power harvesting sensors appears as a good solution for powering microelectronics.