Doctor of Philosophy / First part of the thesis is focused on experimental preparation of new hard quaternary amorphous materials Si-B-C-N with high thermal stability. Materials were prepared in the form of thin films using reactive magnetron sputtering. The technique used proved to be suitable for reproducible synthesis of these materials. The Si-B-C-N films were generally found to be amorphous with low compressive stress and good adhesion to silicon or glass substrates. The process and film characteristics were controlled by varying the sputter target composition, the Ar fraction in the N2–Ar gas mixture, the negative rf-induced substrate bias, and the substrate temperature. Main conclusions describe the relationships between process parameters, discharge and deposition characteristics and film properties (elemental composition, chemical bonding structure, material hardness, compressive stress or electrical conductivity of materials prepared). Second part of the thesis is focused on ab-initio simulations of structures of experimentally prepared Si-B-C-N materials. In the performed liquid-quench simulations, the Kohn-Sham equations for the valence electrons are expanded in a basis of plane wave functions, while core electrons were represented using Goedecker-type pseudopotentials. We simplified the ion bombardment process by assuming that the primary impact creates a localized molten region of high temperature and sufficiently short cooling time, commonly referred to as a thermal spike. Main conclusions deal with N2 formation in studied materials, effect of implanted Ar on structure and properties of prepared materials, ability of Si to relieve that part of compressive stress which is caused by implanted Ar, and ability of B to improve thermal stability of Si-B-C-N materials. The calculated results are compared with experiment.

Doctor of Philosophy / First part of the thesis is focused on experimental preparation of new hard quaternary amorphous materials Si-B-C-N with high thermal stability. Materials were prepared in the form of thin films using reactive magnetron sputtering. The technique used proved to be suitable for reproducible synthesis of these materials. The Si-B-C-N films were generally found to be amorphous with low compressive stress and good adhesion to silicon or glass substrates. The process and film characteristics were controlled by varying the sputter target composition, the Ar fraction in the N2–Ar gas mixture, the negative rf-induced substrate bias, and the substrate temperature. Main conclusions describe the relationships between process parameters, discharge and deposition characteristics and film properties (elemental composition, chemical bonding structure, material hardness, compressive stress or electrical conductivity of materials prepared). Second part of the thesis is focused on ab-initio simulations of structures of experimentally prepared Si-B-C-N materials. In the performed liquid-quench simulations, the Kohn-Sham equations for the valence electrons are expanded in a basis of plane wave functions, while core electrons were represented using Goedecker-type pseudopotentials. We simplified the ion bombardment process by assuming that the primary impact creates a localized molten region of high temperature and sufficiently short cooling time, commonly referred to as a thermal spike. Main conclusions deal with N2 formation in studied materials, effect of implanted Ar on structure and properties of prepared materials, ability of Si to relieve that part of compressive stress which is caused by implanted Ar, and ability of B to improve thermal stability of Si-B-C-N materials. The calculated results are compared with experiment.

L’objectif de cette thèse est de développer une nouvelle génération de matériaux céramiques de confinement plasma pour les moteurs à effet Hall en mettant en oeuvre la voie PDCs pour polymer-derived ceramics ou voie des polymères précéramiques.Un état de l’art des différents matériaux de confinement et un bilan des travaux précédemment menés sur ce sujet ont permis de déterminer les paramètres essentiels de tels matériaux et de s’orienter vers l’utilisation des polymères précéramiques commeprécurseurs des matériaux envisagés. Après avoir détaillé les différents protocoles permettant de modifier chimiquement un polymère commercial avec le bore, de mettre en forme les composés obtenus puis de réaliser la pyrolyse pour générer la céramique, des pièces denses céramiques Si-B-(C)-N ont été réalisées avec une teneur variable en bore. Une étude complète allant de la structure chimique des polymères jusqu’aux propriétés des céramiques résultantes a permis de sélectionner la formulation optimale du polymère comme précurseur de céramique. Des composites c-BN/Si-B-(C)-N ont ensuite été préparés parajout de charges, puis mis en forme et caractérisés avant de procéder à un changement d’échelle visant à préparer des bagues céramiques de taille moteur. La dernière partie consiste en une ouverture sur l’utilisation des polymères précéramiques pour la réalisation de pièces denses Si-Al-(C)-N de composition contrôlée avec en particulier une étude sur l’impact de l’aluminium sur les propriétés des polymères et des céramiques. / The main objective is here to develop a new generation of ceramic materials used for plasma confinement in Hall-effect thrusters using the PDCs (polymer-derived ceramics) route. A state of the art of the different confinement materials and a review of the previous work done on this topic allowed to determine the key parameters of such materials and to move towards the use of preceramic polymers as precursors of the materials envisaged. After having detailed the various protocols used to chemically modify a commercial polymer with boron, to shape the compounds obtained and then to convert the polymers into ceramics bypyrolysis, Si-B-(C)-N dense ceramic pieces have been produced with various boron content. A complete study from the chemical structure of the polymers to the properties of the resulting ceramics allowed selecting the optimal formulation of the polymer as a ceramic precursor. c-BN/Si-B-(C)-N composites were then prepared by filler addition, then shaped and characterized before a scale-up to prepare engine-size ceramic rings. The last part consists of an opening on the use of the PDCs route for the realization of dense Si-Al-(C)-N pieces of controlled composition, with a study of the impact of aluminum on the polymers andceramics properties.