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Optimal precursor behavior during Chemical Vapor Deposition (CVD) is crucial for reproducible synthesis of high quality thin films. Desirable precursor properties include: 1) volatility and thermal stability at <180 °C (10 - 100 millitorr vapor pressure at atmospheric pressure) 2) low decomposition temperature (350-550 °C) to metal oxide with minimal organic ligand contamination and 3) ambient stability and minimal toxicity. Optimal selection and usage of CVD precursors is implemented by synthesis and characterization studies. Additionally, precursor synthesis and characterization studies render the development of novel precursors, which are specifically engineered for the CVD process. Lead bis-tetramethylheptadione [Pb(thd)₂], lead bis-heptafluorodimethyloctadione [Pb(fod)₂], and zirconium tetrakis-tetramethylheptadione [Zr(thd)₄], which are lead and zirconium precursors for CVD of Pb(Zr_xTi_1-x)O₃ thin films, and T8- hydridospherosiloxane, which is a silica precursor, were synthesized and purified. Free ligand was the predominant impurity from the lead and zirconium precursor syntheses, and the T8 synthesis produced several byproducts including T10-hydridospherosiloxane and a polymer. The lead and zirconium precursors were purified by recrystallization from toluene, and the T8 was purified by extracting the byproducts with pentane. Purity of Pb(thd)₂, Pb(fod)₂ and Zr(thd)₄ was confirmed by melting point determination, carbon and hydrogen elemental analysis and proton nuclear magnetic resonance spectrometry (NMR). Purity of T8 was confirmed by proton NMR. Isothermal gravimetric analysis (TGA) was used to study volatility and thermal stability of the precursors. The Zr(thd)₄ isotherms ranged from 180-260 °C, the Pb(thd)₂ and Pb(fod)₂ isotherms were 80-200 °C, and the T8 isotherms were 80-140 °C. Vapor pressure was calculated from TGA data, with use of diffusion equations. Precursors exhibited vapor pressure ranging from 0.2 - 600 millitorr, over their respective vaporization temperature ranges. Enthalpy of vaporization was calculated from Arrhenius plots of vapor pressure as a function of temperature. The Zr(thd)₄ and T8 were observed to be thermally stable over the temperature ranges and durations of experiments. The Pb(thd)₂ and Pb(fod)₂ are not thermally stable over the vaporization temperatures, and undergo oligomerization when heated at high vaporization temperatures. Addition of a polyether adduct to the lead precursor was proposed to inhibit oligomer formation at high vaporization temperatures. Precursor decomposition studies were executed in sealed quartz tubes. Products of decomposition were examined by infrared spectrometry, mass spectrometry, and solid state NMR spectrometry. Metal oxide formation from decomposition of precursors was observed at; 300-350 °C for T8, 350-550 °C for Zr(thd)₄, 250-350 °C for Pb(thd)₂, and 300 °C for Pb(fod)₂. Lead fluoride became the dominant phase of Pb(fod)₂ decomposition products above 300 °C. Intermediate decomposition products of all the precursors were documented and discussed. Synthesis and/or isolation of intermediate decomposition products of Zr(thd)₄ , Zr2O(thd)₄, was proposed as a novel precursor for ZrO₂ deposition. / Master of Science

Metal oxide nanocrystals have attracted significant interests due to their unique chemical, physical, and electrical properties which depend on their size and structure. In this study, a continuous flow microreactor system was employed to synthesize metal oxide nanocrystals in aqueous solution. Assembly of nanocrystals is considered one of the most promising approaches to design nano-, microstructures, and complex mesoscopic architectures. A variety of strategies to induce nanocrystal assembly have been reported, including directed assembly methods that apply external forces to fabricate assembled structures. In this study ZnO nanocrystals were synthesized in an aqueous solution using a continuous flow microreactor. The growth mechanism and stability of ZnO nanocrystals were studied by varying the pH and flow conditions of the aqueous solution. It was found that convective fluid flow from Dean vortices in a winding microcapillary tube could be used for the assembly of ZnO nanocrystals. The ZnO nanocrystal assemblies formed three-dimensional mesoporous structures of different shapes including a tactoid, a retangle and a sphere. The assembly results from a competing interaction between electrostatic forces caused by surface charge of nanocrystals and collision of nanocrystals associated with Dean vortices. The as synthesized colloidal ZnO nanocrystals or assembly were directly deposited onto a substrate to fabricate ZnO nanostructured surfaces. The rectangular assembly led to flower-like ZnO nanostructured films, while the spherical assembly resulted in amorphous ZnO thin film and vertical ZnO nanowire (NW) arrays. In contrast to the formation of flower structure or amorphous thin film, only colloidal ZnO nanocrystals were used as the building blocks for forming vertical ZnO NW arrays. This study demonstrates the versatility of the microreactor-assisted nanomaterial synthesis and deposition process for the production of nanostrucuturesres with various morphologies by tuning the physical parameters while using the same chemical precursors for the synthesis. ZnO flower structure was coated on a microwick structure to improve the capillary flow. The coated microwick structure showed an enhanced capillary rise, which was attributed to the hydrophilic property and geometrical modification of ZnO nanostructure. Two-phase boiling heat transfer was performed using ZnO nanostructured surfaces. ZnO nanocoating altered the important characteristics including surface roughness and wettability. Hydrophilic nature of the ZnO nanocoating generally enhanced the boiling heat transfer performance, resulting in higher heat transfer coefficient (HTC), higher critical heat flux (CHF), and lower surface superheat comparing to the bare surface. Octahedral SnO and porous NiO films, fabricated by a continuous flow microreactor system, were suggested as potential boiling surfaces for the high porosity and irregularity of their structures. / Graduation date: 2013

Today there is a great deal of interest in the development of gas sensors for various applications like monitoring of toxic gases, detection in oil reservoirs, mines, homes etc. Solid-state gas sensors have many advantages over the conventional analytical methods and hence are widely used. Amongst them, semiconducting metal-oxides based sensors are popular due to many advantages like low cost, small size, high sensitivity and long life. The present thesis reports a detailed work of TiO2 (Titania) thin film fabrication based on sol-gel method, study of their crystallization behavior and surface morphology, and characterizing them for alcohol sensing properties Sol-gel method is a wet chemical technique with many advantages over the conventional methods and offers a high degree of versatility to modify the film properties. Titania thin films were made with titanium isopropoxide as the precursor and ethanol and isopropanol as the solvents. Also effect of surfactants(PEG and CTAB) on the sol properties and film properties have experimentally examined. A in-house gas sensor testing setup has been designed and fabricated to characterize the sensors. Sensors with three different electrode configurations and also two different electrode material have been tested. The electrode geometry and material play a significant role on the sensing behavior and results for the same have been discussed.

Thin film nanostructures may be defined as assemblies, arrays, or randomly distributed nanoparticles, nanowires, or nanotubes, which together form a layer of materials supported on a substrate surface. Because such nanostructures are supported on a substrate surface, their potential applications cover a wide area in optical, magnetic, electrochemical, electromagnetic, and optoelectronic devices. The focus of the present thesis is the development of methodologies to grow certain thin film nanostructures of some transition metal oxides (TMOs), including copper oxides and LixCoO2, through CVD, sol-gel, and electromagnetic radiation-mediated approaches. The work towards this objective can be divided into three parts: first, the design, synthesis, and systematic identification of novel metalorganic precursors of copper (monometallic) and Li and Co (bimetallic); second, the growth of nanostructured oxides thin films using these precursors; and third, the application of electromagnetic radiation to control or tailor the growth of as grown nanostructures. The underlying growth mechanisms substantiated by appropriate evidence have been put forward, wherever found relevant and intriguing. It may be added that the principal objective of the work reported here has been to explore the several ideas noted above and examine possibilities, rather than to study any specific one of them in significant detail. It is hoped earnestly that this has been accomplished to a reasonable extent. Chapter 1 reviews briefly the reports available in the literature on three specific methods of growing thin films nanostructures, namely chemical vapour deposition, sol-gel processing and light-induced approach. The objective of this chapter has been to provide the background of the work done in the thesis, and is substantiated with a number of illustrative examples. Some of the fundamental concepts involved, viz., plasmons and excitons, have been defined with illustration wherever found relevant in the context of the work. Chapter 2 describes the various techniques used for synthesis and characterisation of the metalorganic complexes as well as of the thin films. This chapters covers mostly experimental details, with brief descriptions of the working principles of the analytical procedures adopted, namely, infrared spectroscopy, mass spectroscopy, elemental analysis, and thermal analysis for characterisation of the metalorganic complexes. This is followed by a similarly brief account of techniques employed to characterize the thin films prepared in this work, viz., glancing incidence X-ray diffraction (GIXRD), field-emission scanning electron microscopy (FESEM), atomic force microscopy (AFM), electrostatic force microscopy (EFM), transmission electron microscopy (TEM), glancing incidence infra-red spectroscopy (GIIR) and, UV-visible spectroscopy. The metalorganic chemical vapour deposition (MOCVD) systems built in house and used for growth of films are described in detail. The topics in the different sections of the chapter are accompanied by pertinent diagrams. Chapter 3 deals with the design, synthesis and characterisation of novel polynuclear complexes of copper and cobalt. Keeping in mind the various advantages such as low toxicity, ease of synthesis, non-pyrophoricity, and low temperature volatility, of environmentally benign complexes based on biologically compatible such as triethanolamine, diethanolamine, the objective has been to synthesize complexes containing triethanolamine and diethanolamine of transition metals such as cobalt and copper, and to investigate their applicability in MOCVD processes as a novel class of precursors. With the notion of ‘better’ and efficient design of precursors, an attempt has been made, through a semi-empirical modeling, to understand the correlation between volatility and various intrinsic molecular parameters such as lattice energy, vibrational-rotational energy, and internal symmetry. Chapter 4 discusses the growth of nanoporous Cu4O3-C composite films through the MOCVD process employing Cu4(deaH)(dea)(oAc)5.(CH3)2CO as the precursor. The various characteristic aspects of as-grown films, such as their crystallinity, morphology, and composition have been covered elaborately in various sections of this chapter. The chapter describes the efficient guiding and confining of light exploiting the photonic band gap of these nanoporous films, which indicates the potential usefulness of these and similar films as optical waveguides. A model described in the literature on absorbing photonic crystals, wherein a periodically modulated absorption entails an inevitable spatial modulation of dispersion, i.e., of the index contrast to open a photonic band gap, has been used to calculate the indices of refraction of one of these nanoporous films. The chapter also reports briefly the preliminary electrochemical investigations carried out on a typical film, examining the notion of its application as the anode in a Li-ion rechargeable battery. Chapter 5 describes the synthesis of nanocrystalline LixCoO2 films by the sol-gel method. Reports available in literature indicate that the various phases of LixCoO2 are extremely sensitive to processing temperature, making it difficult to control dimensionality of a given phase using temperature as one of process parameters. We have investigated the possibility of using incoherent light to tailor the particle size/shape of this material. The as-grown and irradiated films were characterised by X-ray diffraction, and by microscopic and spectroscopic techniques.Optical spectroscopy was carried out in order to gain insight into the physico-chemical mechanism involved in such structural and morphological transformation. Chapter 6 deals with the synthesis of self-assembled nanostructures from the pre-synthesized nanocrystals building blocks, through optical means of exciton formation and dissociation. It has been demonstrated that, upon prolonged exposure to (incoherent) ultraviolet-visible radiation, LixCoO2 nanocrystals self-assemble into acicular architectures, through intermediate excitation of excitons. Furthermore, it has been shown that such self-assembly occurs in nanocrystals, which are initially anchored to the substrate surface such as that of fused quartz. This new type of process for the self-assembly of nanocrystals, which is driven by light has been investigated by available microscopic and spectroscopic techniques. Chapter 7 describes the stabilisation of chemically reactive metallic lithium in a carbonaceous nanostructure, viz., a carbon nanotube, achieved through the MOCVD process involving a lithium-alkyl moiety. This moiety is formed in situ during deposition through partial decomposition of a metalorganic precursor synthesized in house, which contains both lithium and cobalt. It is surmised that the stabilization of metallic Li in the nanostructure in situ occurs through the partial decomposition of the metalorganic precursor. Quantitative X-ray photoelectron spectroscopy carried out on such a film reveals that as much as 33.4% metallic lithium is trapped in carbon. Lastly, Chapter 8 briefly highlights the outlook for further investigations suggested by the work undertaken for this thesis. Novel precursors derived from biologically compatible ligands can open up possibility of growing new type of micro/nano-structures, and of unusual phases in the CVD grown films. Furthermore, it is proposed that the novel method of growth and alignment of nanocrystals through irradiation with incoherent light, employed for the specific material LixCoO2, may be employed for various other metallic and semiconducting materials.