Rendering shadows of transparent objects in real-time applications is difficult. The number of usable methods is limited by the available computing power. Depth Peeling and Dual Depth Peeling methods are described in this document. These allow rendering of transparent objects without the need of sorting them. Deep Shadow Maps are described as a method for rendering shadows of transparent objects. These methods were used to create an demonstration application. This application provides rendering of transparent objects and their shadows, including colored ones. The Application is build upon OpenGL and Qt framework. Evaluation of rendering speed according to various parameters is also part of this work.

The subject of diploma thesis is new building of sport center. This object is detached building, situated in flat terrain in Brno. Building has a basement and two floors. In the basement is technical facilities of the building and the technical rooms for pool water regulation. Building is divided for two parts. In the first one is swimming pool, dressing rooms, three shops, snack bar and office part of swimming pool. In the second part of building is climbing center, bar and freestyle center or the extreme sports. The object has rectangular plan , the skeleton of the building is made of timber constructions and roofed is by the flat roof.

Ces travaux ont porté dans un premier temps sur la mise en forme et l’étude de la densification de céramiques transparentes de YAG:Nd de grandes dimensions. Le choix des paramètres de coulage sous pression et de compaction isostatique à froid ont permis de contrôler les dimensions et la microstructure des pièces crues élaborées. Le frittage sous vide de ces céramiques a cependant conduit à une hétérogénéité microstructurale entre le coeur et le bord des échantillons. Plus particulièrement, des pores résiduels ont été détectés au coeur des céramiques, altérant les propriétés optiques. Des post-traitements HIP (Hot Isostatic Pressing) ont alors été mis en oeuvre pour mieux contrôler la microstructure des céramiques. Cette voie a démontré son efficacité pour réduire en nombre et en taille les pores résiduels, avec cependant certaines limites concernant notamment la réoxydation des céramiques de grandes dimensions. Finalement, les céramiques élaborées ont montré des performances laser proches de celles des monocristaux de même composition.Dans un second temps, un procédé de coulage en bande pour l’élaboration de céramiques transparentes de YAG multicouches a été développé. Plus particulièrement, un travail original a été mené sur l’étude de l’influence de la formulation des suspensions sur les propriétés mécaniques des bandes céramiques crues. Cette étude a ainsi permis d’élaborer des bandes pouvant être ultérieurement manipulées et transformées. Une céramique multicouche avec une bande centrale dopée en ion Nd3+ d’épaisseur contrôlée a alors pu être mise en forme par thermocompression de bandes de différentes compositions (YAG et YAG:Nd). Après déliantage et frittage, une céramique transparente de type « guide d’onde planaire » a finalement été obtenue. / The first step of this work was focused on the shaping and sintering of large sized Nd:YAG transparent ceramics. The choice of the pressure casting and cold isostatic pressing parameters allowed to control the thickness and the microstructure of the green bodies. However, vacuum sintering of these parts led to a microstructural heterogeneity between the core and the edge of the samples. More particularly, residual pores have been detected in the core of the ceramics, decreasing the optical properties. Then, HIP (Hot Isostatic Pressing) post-treatments were implemented to control the ceramics microstructure. This route helped to reduce the number and size of residual pores. But limitations appeared, especially concerning the large ceramics. Finally, the obtained ceramics showed laser performances close to those of the single crystals of same composition.The second part was devoted to the development of a tape casting process for the elaboration of YAG multilayered transparent ceramics. More particularly, the influence of the slurry formulation on the mechanical properties of the green tapes was studied. This original work allowed the shaping of green tapes with good mechanical properties and a controlled organic content. Then, a multilayered ceramic with a central Nd-doped layer could be elaborated by thermolamination of layers with different compositions (YAG and YAG: Nd). After debinding and sintering, a transparent ceramic planar waveguide was finally obtained.

Transparent polycrystalline aluminum oxide is a promising optical material, particularly in applications that require ballistic protection. However, the rhombohedral crystal structure of alumina limits its transparency due to birefringent scattering. One method of reducing birefringent scattering is to align the particles along the same crystallographic direction, minimizing the refractive index mismatch. This dissertation explores the use of high aspect-ratio platelet-morphology alumina powder in order to process a crystallographically aligned polycrystalline alumina part, with improved optical properties. The optimal hot-pressing parameters of non-pre-aligned platelet alumina were explored, showing that a low pre-load pressure (0MPa), a high maximum temperature (1800°C), a low maximum pressure (10MPa), and a long isothermal hold time (>5hrs) yields dense, transparent parts. These parameters resulted in samples with a high in-line transmission (>65%) despite a large grain size (>60μm). This is due to a high degree of crystallographic orientation, which minimizes the refractive index mismatch between grains, reducing birefringent scattering. Pre-alignment resulted in a further increase in crystallographic orientation, indicating that the pre-alignment procedure effectively aligns the platelets along the same crystallographic orientation. However, pre-alignment resulted in a minimal improvement in optical properties due to the pre-aligned platelets decreasing the densification. Mechanical properties were characterized, resulting in a flexure stress and Vickers hardness of approximately 175MPa and 17GPa, respectively. These low mechanical properties are due to the large grain size. The Vickers hardness was also characterized along different alignment/hot-pressing directions, showing that the hardness matches that of sapphire along corresponding crystallographic directions. Modifications to the Rayleigh-Gans-Debye model were made, accounting for crystallographic orientation. The modified model more closely matches the experimental optical data, illustrating the importance of accounting for crystallographic alignment. This dissertation emphasizes the importance of characterizing optical losses in transparent ceramics and how they relate to the microstructure, as well as the significance of crystallographic alignment in a birefringent transparent ceramic like alumina.

<div> <div> <div> <p>Transparent alumina is a candidate material for ballistic applications where visible or infrared wavelength transmission is required. However, the transparency of polycrystalline alumina can be limited due to the rhombohedral crystal structure being inherently birefringent. Birefringence causes light scattering at grain boundaries and is detrimental to the transparency. It has been shown experimentally that the application of a high magnetic field during processing can lead to crystallographic alignment and the reduction of birefringent light scattering. This alignment method is effective but is limited in terms of scalability. This research addresses these limitations through the use of simple and cost-effective shear and elongational forming processes such as uniaxial warm pressing and direct ink writing (DIW) for the improvement of final sintered transparency. To further support the improvement of these processes as alternatives and to evaluate the possibility of using powder ratios to improve the alignment, this research will also investigate the sintering behavior during hot-pressing of equiaxed and platelet powders. </p> <p>Platelet ceramic-filled thermoplastic blends were developed and formed into sheets through uniaxial warm pressing. The solids loading (30 – 40 vol.%) and platelet diameter (1.2 and 11μm) were varied to compare effects on viscosity, percent reduction, and final alignment. All ceramic- filled thermoplastic polymer blends exhibited pseudoplastic behavior. Crystallographic alignment of green body samples was quantified by the orientation parameter (r) and grain misalignment angle (full width at half maximum, FWHM) obtained from rocking curve analysis. Blends with 11μm diameter platelets displayed a higher temperature sensitivity constant, better flow properties, and higher alignment compared to blends with 1.2μm diameter platelets. Optimal samples produced with blends containing 30 vol.% of 11μm diameter platelets demonstrated an alignment of r = 0.251 +/- 0.017; FWHM = 11.16° +/- 1.16°. A sample with optimal alignment was hot-pressed to transparency and obtained an in-line transmission of 70.0% at 645nm. The final alignment of this pre-aligned hot-pressed sample (r = 0.254 +/- 0.008; FWHM = 11.38° +/- 0.54°) improved when compared to a non-pre-aligned sample (r = 0.283 +/- 0.005; FWHM = 13.40° +/- 0.38°).</p><p>Additionally, the use of direct ink writing, an additive manufacturing technique, as a viable alignment process for producing transparent alumina was investigated. Highly loaded (> 54 vol.%) equiaxed alumina suspensions were developed with platelet additions ranging from 0-20vol.% of the total solids loading. An increase in the amount of platelet powders from 5-20vol.% increased the dynamic yield stress from 104Pa to 169Pa and decreased in the equilibrium storage modulus from 17,036Pa to 13,816Pa. It was found that the DIW process significantly increased the alignment in one orientation when compared to samples cast from the same suspensions and this behavior may be connected to the rheological properties. Lastly, an optical analysis showed that sample developed with 5vol.% platelet suspensions had higher in-line transmission values across the visible spectrum when compared to samples developed with 20vol.% suspensions. A sample cast from a 5vol.% platelet suspensions had the lowest grain alignment but possessed an in-line transmission of 42.8% at 645nm, which was the highest of the samples produced in this study. An optical loss analysis showed, that this sample has the lowest backwards scattering losses due to residual porosity and this result was supported by the density data. It is suggested that the alignment of the DIW samples is more complex and a more advanced texture analysis will need to be conducted to properly characterize the grain alignment.</p><p>Lastly, the densification behavior of equiaxed and platelet powder ratios with no intentional pre-alignment was investigated. An initial sintering investigation identified the optimum maximum pressure selected for the hot-pressing process as 20MPa. Under the selected hot- pressing parameters, the effects of 0, 25, 50, 75, and 100wt.% equiaxed powder additions on the sintering behavior, optical properties, and grain alignment was investigated. The data showed that an increase in the amount of equiaxed powders decreased the initial powder compact displacements rate. Additionally, an increase in the wt.% equiaxed powders from 0wt% to 75wt% decreases the in-line transmission from 70.9% to 40.2%, respectively at 645nm. Lastly, an increase in the wt.% equiaxed powders from 0wt% to 75wt decreased the alignment from (r = 0.321 +/- 0.005; FWHM = 16.26° +/- 0.40°) to (r = 0.509 +/- 0.022; FWHM = 34.63° +/- 2.61°), respectively.</p></div></div></div>

In this thesis, the structural, optical, and electrical properties of wurtzite MgxZn1-xO:Al and MgxZn1-xO:Ga thin films have been investigated in dependence on Mg and dopant concentration. Among the transparent conductive oxides (TCOs), ZnO based compounds have gained renewed interest as a transparent electrode for large scale applications such as defroster windows, at panel displays, touch screens, and thin film solar cells due to low material and processing cost, non-toxicity, and suitable physical properties. In general, these applications require transparent electrodes with lowest possible resistivity of rho < 10^-3 Ohmcm and lower [1]. Recently, it has been reported that Ga and Al doped ZnO thin films can be deposited with respective resistivity of 5x10^-5 Ohmcm [2] and 3 x10^-5 Ohmcm [3] which are similar to the data obtained for other practical TCOs, i.e. the resistivity of about 4x 10^-5 Ohmcm for Sn doped In2O3 (ITO) thin films [4]. Moreover, the bandgap of ZnO can be increased by alloying with Mg offering band alignment between transparent electrode and active (or buffer) layer of the device, e.g. Cu(In,Ga)Se2 solar cells [5]. The tunable bandgap of these transparent electrodes can further increase the efficiency of the devices by avoiding energy losses in the interface region of the layers. From this point of view, this work has been aimed to investigate the doping efficiency and limits in transparent conductive (Mg,Zn)O alloys. For this purpose, the samples investigated in this work have been grown by pulsed-laser deposition (PLD) using a novel, continuous composition spread method (CCS). In general, this method allows to grow thin films with lateral composition gradient(s) [6, 7]. All MgxZn1-xO:Al and MgxZn1-xO:Ga thin films have been deposited on 2-inch in diameter glass, c- or r-plane sapphire substrates using threefold segmented PLD targets in order to grow thin films with two perpendicular, lateral composition gradients, i.e. the Mg composition is varied in one direction whereas the Al/Ga concentration is varied in a perpendicular direction [7, 8]. In order to investigate the influence of the temperature, samples grown at different substrate temperatures in the range of 25 to 600 C were investigated. The optical and electrical measurements have been carried out on (5x 5)mm^2 samples that were cut from the CCS wafers along the respective composition gradients, i.e. Mg and Al/Ga contents. Subsequently, physical properties of thin films have been analyzed for a large range of Al/Ga content between 0.5 and 7 at.%, which corresponds to doping concentrations between 2x 10^20 and 3x 10^21 cm^-3, for different Mg contents x(Mg) ranging from 0.01 to 0.1. It has been found that practically the limiting the dopant concentrations is about 2 x10^21 cm^-3. Further, the electrical data suggests, that the compensating intrinsic defect is doubly chargeable hinting to the zinc vacancy (V_Zn) as microscopic origin. Increasing the dopant concentration above 2 x10^21 cm^-3 leads to a degradation of electrical and structural properties [8]. Further, the influence of growth and annealing temperatures on structural, electrical and optical properties of the films has been studied. For that purpose, Al and Ga doped (2.5 at.% = 1x10^21 cm^-3) Mg0.05Zn0.95O thin films have been chosen from CCS samples grown at T_g = (25 - 600) C . For both doping series, the samples grown at higher temperatures exhibit better crystalline quality compared to the samples grown at lower growth temperatures. As a result, samples grown at higher temperatures reveal higher Hall mobility. For the Al-doping series, the highest free charge carrier density of n = 8.2x 10^20 cm^-3 was obtained for an Mg0.05Zn0.95O:Al thin film grown at 200 C, with corresponding Hall mobility of mu = 13.3 cm^2/Vs, a resistivity of rho = 5.7x10^-4 Ohmcm, and optical bandgap of E_g = 3.8 eV. Interestingly, the free charge carrier density of n = (5 - 8) x 10^20 cm^-3 for samples grown with T_g > 300 C is clearly higher than the value of n = 1.25 x 10^20 cm^-3 that was obtained for the high temperature grown sample, i.e. at T_g = 600 C. Furthermore, for all T_g, Al-doped films have a higher doping efficiency than the Ga-doped counterparts. In order to look deeper into the microscopic origin of this behavior, the samples were post-annealed in vacuum at 400 C. Experimental results showed that the free charge carrier density of Al-doped samples first decreased and saturated afterward with increasing annealing time. On the other hand, the free charge carrier density of the Ga-doped samples first slightly increased and saturated with increasing annealing time. For both doping series, the saturation value of n ~ 1 x 10^20 cm^-3 was very close to the data that has been observed for (i) high temperature grown samples and (ii) the solubility limit of Al in ZnO of 0.3 at.% = 1.2x 10^20 cm^-3, that has been determined by Shirouzu et al. for high temperature grown (T_g > 600 C) Al-doped ZnO [9]. Correspondingly, the optical bandgap also changed, i.e. increased (decreased) for Al- (Ga-) doping series, and approached a constant value of 3.5 0 +- 0.1 eV which is explained by generation of acceptor-like compensating defects, and the solubility limit of the dopants. From XRD data, no secondary phases were found for as-grown and post-annealed films. However, the slight improvement of crystalline quality has been observed on post-annealed samples. Further, it has been shown that the growth and annealing temperatures are important as they strongly affect the metastable state of the solid solution that samples grown at low temperature represent. The low solubility limit of the dopants, i.e. 0.3 at.% for Al in ZnO under equilibrium condition, can be increased by preparing samples by non-equilibrium growth techniques [10]. This is also consistent with experimental results of this work that Al- as well as Ga-doped metastable ZnO and (Mg,Zn)O thin films can be prepared with highest possible doping efficiency for the dopant concentration up to 2.5 at.% when growth or annealing temperatures below 400 C are used.

Transparent conductive oxides (TCOs) are key functional materials in existing and future electro-optical devices in the fields of energy efficiency, energy generation and information technology. The main application of TCOs is as thin films transparent electrodes where a combination of maximum electrical conductivity and transmittance in the visible to nearinfrared spectral range is required. However, due to the interdependence of the optical properties and the free electron density and mobility, respectively, these requirements cannot be achieved simultaneously in degenerately doped wide band-gap oxide semiconductors. Therefore, a detailed understanding of the mechanisms governing the generation of free charge carriers by extrinsic doping and the charge transport in these materials is essential for further development of high performance TCOs and corresponding deposition methods. The present work is aimed at a comprehensive investigation of the electrical, optical and structural properties as well as the elemental composition of (Al,Ga) doped ZnO and Nb doped TiO2 thin films prepared by pulsed DC reactive magnetron sputtering. The evolution of the film properties is studied in dependence of various deposition parameters through a combination of characterization techniques including Hall-effect, spectroscopic ellipsometry, spectral photometry, X-ray diffraction, X-ray near edge absorption, Rutherford backscattering spectrometry and particle induced X-ray emission. This approach resulted in the development of an alternative process control method based on the material specific current-voltage pressure characteristics of the reactive magnetron discharge which allows to precisely control the oxygen deficiency of the sputter deposited films. Based on the experimental data, models have been established that describe the room temperature charge transport properties and the dielectric function of the obtained ZnO and TiO2 based transparent conductors. On the one hand, these findings allow the prediction of material specific electron mobility limits by identifying the dominating charge carrier scattering mechanisms. On the other hand, new insight is gained into the origin of the observed transition from highly conductive to electrically insulating ZnO layers upon the incorporation of increasing concentrations of Al at elevated growth temperatures. Moreover, the Al and Ga dopant activation in ZnO have been quantified systematically for a wide range of Al concentrations and deposition conditions. A direct comparison of the Ga and Al doping efficiency demonstrates that Ga is a more efficient electron donor in ZnO. Further, it has been shown that high free electron mobilities in polycrystalline and epitaxial Nb:TiO2 layers can be achieved by reactive magnetron sputtering of TiNb alloy targets. The suppression of rutile phase formation and the control of the Nb dopant activation by fine tuning the oxygen deficiency have been identified as crucial for the growth of high quality TiO2 based TCO layers.

Organic solar cells offer attractive properties for novel applications and continuous advances in material and concept development have led to significant improvements in device performance. To exploit their full potential (roll-to-roll production of flexible and top-illuminated devices, using e.g. opaque metal foil or textile as substrate), highly transparent, conductive, mechanically flexible, and cost-efficient top electrodes are of great importance. The current standard material indium tin oxide (ITO) is rigid, expensive and requires a high energy / high temperature deposition process, limiting ITO (and other transparent conductive oxides) to bottom electrode applications. This work presents fundamental investigations to understand and control the properties of transparent conductors and documents four different approaches to prepare transparent electrodes on top of efficient small molecule organic solar cells, with the aim to replace ITO. Fullerene C60 layers are investigated as completely carbon-based electrodes. For an optimized doping concentration, sheet resistance and transmittance are improved and efficient solar cells are realized. Since the lateral charge transport is still limited, a combination with a microstructured conductor is suggested. Pulsed laser deposition allows for the first time a damage-free preparation of gallium doped zinc oxide (ZnO:Ga) layers on top of organic devices by careful optimization of the deposition atmosphere. ZnO:Ga electrodes with a transmittance of Tvis = 82.7 % and sheet resistance Rs = 83 Ohm/sq are obtained. The formation of local shunts due to ZnO:Ga droplets is identified and then prevented by a shadow mask between the target and the sample, enabling solar cells with similar efficiency (2.9 %) compared to a reference device using a state-of-the-art metal top contact. Another very promising alternative are intrinsically flexible, ultra-thin silver layers. By introducing an oxide interlayer, the adverse interpenetration of silver and organic materials is prevented and the charge extraction from the solar cells is improved. With a second oxide layer on top, the silver electrode is significantly stabilized, leading to an increased solar cell lifetime of 4500 h (factor of 107). Scanning electron micrographs of Ag thin films reveal a poor wetting on organic and oxide substrates, which strongly limits the electrode performance. However, it is significantly improved by a 1 nm thin seed layer. An optimized Au/Ag film reaches Tvis = 78.1 % and Rs = 19 Ohm/sq, superior to ITO. Finally, silver electrodes blended with calcium show a unique microstructure which enables unusually high transmittance (84.3 % at 27.3 Ohm/sq) even above the expectations from bulk material properties and thin film optics. Such values have not been reached for transparent electrodes on top of organic material so far. Solar cells with a Ca:Ag top electrode achieve an efficiency of 7.2 %, which exceeds the 6.9 % of bottom-illuminated reference cells with conventional ITO electrodes and defines a new world record for top-illuminated organic solar cells. With these electrodes, semi-transparent and large-area devices, as well as devices on opaque and flexible substrates are successfully prepared. In summary, it is shown that ZnO:Ga and thin metal electrodes can replace ITO and fill the lack of high performance top electrodes. Moreover, the introduced concepts are not restricted to specific solar cell architectures or organic compounds but are widely applicable for a variety of organic devices.

The aim of this work was to investigate silver nanowire as well as carbon nanotube networks as transparent conducting electrodes for small molecule organic solar cells. In the framework of the nanowire investigations, a low-temperature method at less than 80 °C is developed to obtain highly conductive networks directly after the deposition and without post-processing. In detail, specific non-conductive organic materials act as a matrix where the nanowires are embedded in such that a mutual attraction based on capillary forces and hydrophobic interaction is created. This process is mediated by the ethanol contained in the nanowire dispersion and works only for sublayer materials which exhibit hydrophobic and hydrophilic groups at the same time. In contrast to high-temperature processed reference electrodes (210 °C for 90 min) without matrix, a slightly lower sheet resistance of 10.8 Ohm/sq at a transparency of 80.4 % (including substrate) is obtained by using polyvinylpyrrolidone as the sublayer material. In comparison to annealed silver nanowire networks, the novel approach yields a performance enhancement in corresponding organic solar cells which can compete with ITO-based devices. Furthermore, a novel approach for scalable, highly conductive, and transparent silver nanowire top-electrodes for organic optoelectronic devices is introduced. By utilizing a perfluorinated methacrylate as stabilizer, silver nanowires with high aspect ratio can be transferred into inert solvents which do not dissolve most organic compounds making this modified dispersion compatible with small molecule and polymer-based organic optoelectronic devices. The inert silver nanowire dispersion yields highly performing top-electrodes with a sheet resistance of 10.0 Ohm/sq at 80.0 % transparency (including substrate) directly after low-temperature deposition at 30 °C and without further post-processing. In comparison to similarly prepared reference devices comprising a thin-metal film as transparent top-electrode, reasonable power conversion efficiencies are demonstrated by spray-coating this dispersion directly on simple, air-exposed small molecule-based organic solar cells. Moreover, a deeper understanding of the percolation behavior of silver nanowire networks has been achieved. Herein, direct measurements of the basic network parameters, including the wire-to-wire junction resistance and the resistance of a single nanowire of pristine and annealed networks have been carried out for the first time. By putting the values into a simulation routine, a good accordance between measurement and simulation is achieved. Thus, an examination of the electrical limit of the nanowire system used in this work can be realized by extrapolating the junction resistance down to zero. The annealed silver nanowires are fairly close to the limit with a theoretical enhancement range of only 20 % (common absolute sheet resistance of approximately 10 Ohm/sq) such that a significant performance improvement is only expected by an enlargement of the nanowire length or by the implementation of new network geometries. In addition, carbon nanotube networks are investigated as alternative network-type, transparent bottom-electrode for organic small molecule solar cells. For that purpose, cleaning and structuring as well as planarization procedures are developed and optimized which maintain the optoelectronic performance of the carbon nanotube electrodes. Furthermore, a hybrid electrode consisting of silver nanowires covered with carbon nanotubes is fabricated yielding organic solar cells with only 0.47 % power conversion efficiency. In contrast, optimized electrodes comprising only carbon nanotubes show significantly higher efficiency. In comparison to identically prepared ITO devices, comparable or lower power conversion efficiencies of 3.96 % (in p-i-n stack), 4.83 % (in cascade cell) as well as 4.81 % (in p-n-i-p architecture) are demonstrated. For an inverted n-i-p stack design, the highest power conversion efficiency of 5.42 % is achieved.

In dieser Arbeit wurden Techniken untersucht, die die zur Verfügung stehende Pulsenergie von Hochleistungslasern effektiv nutzen und in einem Schritt eine Vielzahl einzelner periodisch angeordneter Strukturen herstellen. Dazu wird durch optische Strahlformung ein Laserstrahl mit mehreren Intensitätsmaxima hergestellt. Dazu wurden das Direkte Laserinterferenzstrukturieren (DLIP) und die Microlensarray-Strukturierung (MLAS) genutzt. Beide Verfahren bieten die Möglichkeit, großflächig periodische Strukturen in einem einstufigen Verfahren herzustellen. Beim DLIP werden mit einem Laserpuls, aufgrund von Interferenzeffekten mehrere tausend Linien oder Punkte auf bis zu Quadratzentimeter großen Flächen erzeugt. Microlensarrays (MLA) sind optische Elemente mit einer periodischen Linsenanordnung, die mehrere Brennpunkte aus einem einzigen Laserstrahl erzeugen. Durch die Verwendung als Fokussieroptik können einige tausend Laserpunkte mit einem einzigen Puls erzeugt werden. Anhand verschiedener Materialien werden die Möglichkeiten und Grenzen dieser Techniken untersucht und die Qualität der Strukturen im Hinblick auf die geplante Anwendung untersucht. Die für diese Arbeit genutzten Materialien sind ausschließlich nichtmetallische Werkstoffe. Es werden die Keramiken Hydroxylapatit, Aluminium- und Zirkonoxid, die leitfähigen Dünnschichten aluminium- und bordotiertes Zinkoxid und Indiumzinnoxid auf Glassubstrat und der Kunststoff PET untersucht. Hydroxylapatit ist eine Keramik die aufgrund ihrer guten Biokompatibilität in Knochen- und Zahnimplantaten verwendet wird. Eine Oberflächenstrukturierung ermöglicht eine Verbesserung des Zellwachstums. Aluminium- und Zirkonoxid werden ebenfalls in Gelenkimplantaten verwendet jedoch als Gleitfläche. Eine Strukturierung dieser Flächen verringert möglicherweise Reibung und Verschleiß in ähnlicher Weise wie bei Metallen bereits mehrfach gezeigt. Hier werden aufgrund der benötigten Strukturgrößen mit Perioden von mehreren Mikrometern sowohl DLIP als auch MLAS genutzt. Die leitfähigen Schichten und das PET finden vorrangig in optischer Elektronik Anwendung. Diese findet zunehmende Bedeutung in Form von Solarzellen und Lichtemittierenden Dioden. Die periodische Strukturierung des Substrates oder des beschichteten Substrates bringt ein Beugungsgitter in diese Elemente ein. Bestehende Untersuchungen haben bereits einen positiven Effekt von lithografisch hergestellten Beugungsgittern nachgewiesen. In dieser Arbeit wird untersucht, ob DLIP ebenfalls einen positiven Effekt hat.:1 Einleitung 1 2 Stand der Technik 4 2.1 Verfahren zur Herstellung periodischer Strukturen 4 2.1.1 Überblick 4 2.1.2 Laserabtragende Verfahren 5 2.1.3 Photolithografische Verfahren 16 2.2 Ausgewählte Anwendungen von Oberflächenstrukturen 19 2.2.1 Optimierung der Effizienz von organischer Elektronik 19 2.2.2 Veränderung der biologischen Eigenschaften 25 2.2.3 Veränderung der tribologischen Eigenschaften 27 3 Materialien und Methoden 29 3.1 Verwendete Materialien 29 3.1.1 Eigenschaften der verwendeten Keramiken 29 3.1.2 Eigenschaften der verwendeten transparenten leitfähigen Oxide 30 3.1.3 Eigenschaften des verwendeten Polyethylenterephthalat 31 3.1.4 Übersicht zu allen Materialkennwerten 32 3.2 Experimenteller Aufbau 33 3.2.1 Verwendetes Lasersystem 33 3.2.2 Bestimmung der Ablationsschwellfluenzen 33 3.2.3 Klassischer Laserinterferenzstrukturierungsaufbau 35 3.2.4 Strukturierung mittels Microlensarray (MLA) 37 3.2.5 Übersicht der untersuchten Materialien und Methoden 38 3.3 Charakterisierungsmethoden 39 3.3.1 Charakterisierung der Oberflächentopographie 39 3.3.2 Charakterisierung der optischen Eigenschaften 40 3.3.3 Charakterisierung der elektrischen Eigenschaften 40 3.3.4 Charakterisierung der tribologischen Eigenschaften 41 3.4 Thermische Simulation 41 4 Ergebnisse und Diskussion der Oberflächenstrukturierung 43 4.1 Strukturierung von Keramiken 43 4.1.1 Bestimmung der Ablationsschwellen der Keramiken 43 4.1.2 Direkte Laserinterferenzstrukturierung der Keramiken 46 4.1.3 Microlensarray-Strukturierung der Keramiken 59 4.2 Ergebnisse der Strukturierung der transparenten leitfähigen Oxide 73 4.2.1 Bestimmung der Ablationsschwellen 73 4.2.2 Strukturierung von Aluminiumdotiertem Zinkoxid (AZO) 75 4.2.3 Strukturierung von bordotiertem Zinkoxid (ZnO:B) 89 4.2.4 Strukturierung von Indiumzinnoxid (ITO) 100 4.3 Ergebnisse der Strukturierung von PET 106 4.4 Übersicht der ermittelten Parameter 118 5 Entwicklung neuer Strukturierungskonzepte und deren Möglichkeiten 121 5.1 Vergleich der Strukturierung von Keramiken mit MLAS und DLW 121 5.2 Kombination der DLIP Technik mit einem Galvanometer-Scanner 126 5.3 Konzept zur Integration der DLIP Technik in ein Rolle-zu-Rolle-Herstellungsverfahren 131 5.4 Theoretisch Erreichbare Strukturierungsgeschwindigkeiten der neuen Bearbeitungskonzepte 134 6 Zusammenfassung 136 Literatur 141