Os equipamentos elétricos instalados em linhas de transmissão e distribuição de energia são normalmente submetidos a condições anormais e intensos campos elétricos, que, eventualmente, levam, entre outros fenômenos, as descargas parciais (DPs). Estas descargas têm sido apontadas como uma das principais causas de falhas de equipamentos e envelhecimento precoce. Portanto, detectar DPs se tornou uma questão importante na busca de uma energia elétrica eficiente e confiável. No que se refere a detecção de DPs existem vários sensores que podem ser aplicados, a exemplos: óptico, magnético ou acústico, e cada um deles apresentando vantagens particulares e limitações. Uma das desvantagens de tais sensores é o custo elevado, o que restringe o monitoramento de DPs no âmbito da distribuição de energia mais especificamente em transformadores de potência. Embora, se o foco do monitoramento é apenas detectar a ocorrência de DPs, uma nova classe de sensores acústicos implementados com piezoeletretos pode ser uma alternativa econômica viável. Deste modo, nesta dissertação, foi investigado o comportamento acústico de tais transdutores expostos a diferentes condições de DPs, onde o sensor piezoelétrico foi utilizado na detecção de DPs produzidas por uma configuração de eletrodos ponta - ponta separados por diferentes gaps de ar (único ou múltiplo) e excitado por altas tensões alternadas. As amplitudes dos sinais registrados foram correlacionadas com a distância do gap e com a amplitude da tensão aplicada. A partir dos resultados obtidos foi possível observar que a intensidade do som das DPs, capturado com o transdutor piezoelétrico, está relacionada com o tamanho do gap e da amplitude da tensão, como relatado na literatura. / Electrical equipment installed in power transmission and distribution lines are usually subjected to abnormal conditions and intense electric fields, which eventually lead, among others phenomena, to partial discharges (PDs). These discharges have been pointed as one of the main causes of equipment failures and premature aging. Therefore, detect PDs became an important issue in the prospect of efficient and reliable electric energy. Concerning PD detection there are several sensors that can be employed e.g. optical, magnetic or acoustic, and each of them presenting particular advantages and limitations. One of the drawback of such sensors is their elevated cost, which restricts the PD monitoring within the distribution of energy more specifically in power transformers. Although, if the intention of monitoring is only to detect the PD occurrence a new class of acoustic sensors implemented with piezoelectrets may be a feasible economic alternative. Therefore, in this work was investigated the acoustic behavior of such transducers exposed to different PD conditions, for instance, the piezoelectret sensor was employed on the detection of PD produced by a single or multiple point-to-point electrode setup with different air gaps excited by high AC voltages. The recorded signals amplitudes were correlated with the gap distance and voltage amplitude applied. Based on the results obtained it was observed that the intensity of the DPs sound, captured with the piezoelectric transducer, is related to the size of the gap and voltage amplitude, as reported in the literature.

Os equipamentos elétricos instalados em linhas de transmissão e distribuição de energia são normalmente submetidos a condições anormais e intensos campos elétricos, que, eventualmente, levam, entre outros fenômenos, as descargas parciais (DPs). Estas descargas têm sido apontadas como uma das principais causas de falhas de equipamentos e envelhecimento precoce. Portanto, detectar DPs se tornou uma questão importante na busca de uma energia elétrica eficiente e confiável. No que se refere a detecção de DPs existem vários sensores que podem ser aplicados, a exemplos: óptico, magnético ou acústico, e cada um deles apresentando vantagens particulares e limitações. Uma das desvantagens de tais sensores é o custo elevado, o que restringe o monitoramento de DPs no âmbito da distribuição de energia mais especificamente em transformadores de potência. Embora, se o foco do monitoramento é apenas detectar a ocorrência de DPs, uma nova classe de sensores acústicos implementados com piezoeletretos pode ser uma alternativa econômica viável. Deste modo, nesta dissertação, foi investigado o comportamento acústico de tais transdutores expostos a diferentes condições de DPs, onde o sensor piezoelétrico foi utilizado na detecção de DPs produzidas por uma configuração de eletrodos ponta - ponta separados por diferentes gaps de ar (único ou múltiplo) e excitado por altas tensões alternadas. As amplitudes dos sinais registrados foram correlacionadas com a distância do gap e com a amplitude da tensão aplicada. A partir dos resultados obtidos foi possível observar que a intensidade do som das DPs, capturado com o transdutor piezoelétrico, está relacionada com o tamanho do gap e da amplitude da tensão, como relatado na literatura. / Electrical equipment installed in power transmission and distribution lines are usually subjected to abnormal conditions and intense electric fields, which eventually lead, among others phenomena, to partial discharges (PDs). These discharges have been pointed as one of the main causes of equipment failures and premature aging. Therefore, detect PDs became an important issue in the prospect of efficient and reliable electric energy. Concerning PD detection there are several sensors that can be employed e.g. optical, magnetic or acoustic, and each of them presenting particular advantages and limitations. One of the drawback of such sensors is their elevated cost, which restricts the PD monitoring within the distribution of energy more specifically in power transformers. Although, if the intention of monitoring is only to detect the PD occurrence a new class of acoustic sensors implemented with piezoelectrets may be a feasible economic alternative. Therefore, in this work was investigated the acoustic behavior of such transducers exposed to different PD conditions, for instance, the piezoelectret sensor was employed on the detection of PD produced by a single or multiple point-to-point electrode setup with different air gaps excited by high AC voltages. The recorded signals amplitudes were correlated with the gap distance and voltage amplitude applied. Based on the results obtained it was observed that the intensity of the DPs sound, captured with the piezoelectric transducer, is related to the size of the gap and voltage amplitude, as reported in the literature.

This paper discusses basic issues of micromachined ultrasonic transducers, including their design and fabrication. First, the acoustic fundamentals of ultrasonic transducers are introduced, and relevant simulation methods are illustrated. Following these topics, important aspects of silicon micromachining are presented. Based on this knowledge, two distinctive micromachining processes for transducer fabrication are proposed. One of them, the bulk process, has been proved to be successful, whereas for the second one, a surface process, some improvements are still needed. Besides these works, an innovative direct bonding technology is also developed. This technology constitutes the basis of the bulk process. Of course, it can also be used for the packaging of other MEMS devices.

Context: Large numbers of bats are killed by collisions with wind turbines and there is at present no accepted method of reducing or preventing this mortality. We designed a system, which detects and records any bats’ activity in and around the surroundings of wind turbines. The system can help to study bats by identifying the species that are present in that particular locality. Objectives: The main objective of this thesis is to design an ultrasound-based IoT system, which detects the bats to prevent them from clashing with wind turbines. The design is based on a study of bats’ behaviors. Methods: The system has been developed using User-Driven Design, UDD, approach. The required functionalities have been embedded into IoT based system. An ultrasonic technology along with other sensors are used. The sensors are intended to activate monitoring during favorable conditions for bat activity. Results: A model of a system has been developed. The model was implemented into a prototype. Recorded bats’ activities are uploaded to a server by employing a suitable app, which informs the user about the activities of bats' various sub-species. Conclusions: A surveillance for bats approaching the wind farms within 80 m has been developed. The monitoring system is activated when the weather conditions are favorable for bat activities.

Les cMUT sont des microsystèmes principalement utilisés pour de l’imagerie médicale. Afin de développer de nouvelles architectures de sondes, intégrer l’électronique de commande devient impératif. Pour y parvenir, la température du procédé de réalisation ne doit pas excéder 400°C. Cela nécessite donc de revoir les procédés et matériaux utilisés. Pour répondre à cette problématique, nous avons utilisé une électrode originale en siliciure de nickel obtenu à 400°C, une couche sacrificielle en nickel et une membrane en nitrure de silicium déposée à 200°C. Des cMUT ont été fabriqués sur un substrat silicium. Ils présentent les caractéristiques souhaitées à savoir une forte fréquence de résonance (16,4MHz), une tension de collapse maitrisée (65V) et un coefficient de couplage électromécanique satisfaisant (0,6). De plus, le procédé développé peut être étendu à d’autres types de substrats. / CMUTs are innovating microsystems for ultrasonic medical imaging. To develop new array architectures, monolithic integration of integrated circuits is required. In this context, microsystems must be achieved using process temperature limited to 400°C. The main objective of this PhD thesis is the development of alternative processes and materials to replace usual ones done at high temperature. We have developed a nickel silicide bottom electrode at 400°C, a metallic sacrificial layer and a silicon nitride membrane deposited at 200°C. The devices, fabricated on silicon substrates, are functional with a high resonance frequency (16.4MHz), a mastered collapse voltage (65V) and an efficient electromechanical coupling coefficient (0.6). Moreover, this low temperature process was successfully applied on other substrates such as glass.

Ultrasonic sensors are well known for various applications such as NDT, ultrasound imaging, and proximity sensing. Conventional ultrasound transducers are bulky, work at notoriously high voltages, and consume significant power. Microfabrication techniques are leading to a paradigm shift in the field of ultrasonics by enabling development of low power - small footprint ultrasound transducers. This work focuses on the development of piezoelectric type flexural mode micromachined ultrasound transducer also known as PMUTs. We start by establishing a system level analytical model of a PMUT and use it to offer insights into scaling of the performance of the transducer with respect to various design parameters. In this analysis we give special attention to residual stresses thus establishing a contrast between membrane type and plate type PMUTs. After going through various steps of material development and microfabrication, we obtain arrays of PMUTs with different designs. PZT thin films deposited by sol-gel method are used as the piezoelectric layer in the multilayer stack. Further, we present a thorough characterization of fabricated PMUTs which includes measurement of the piezoelectric properties of the embedded PZT thin film, electrical impedance of the electromechanical transducer, its vibrational charac-teristics and acoustic radiation from a single PMUT cell. We also develop a pre-amplifier circuit for a PMUT receiver and present its working as a simple proximity sensor. After establishing the repeatability and predictability of our PMUT sensors we delve into application development beyond ultrasound imaging. Experiments and analysis of PMUTs submerged in water show strong structural-acoustic coupling between the PMUT membrane and the surrounding fluid. We hypothesize the applicability of this feature to sense changes in the acoustic environment of a PMUT. To this end, we integrate an array of PMUTs with a micro-fluidic chip and study the changes in the vibrational behaviour of the PMUT in response to change in the air-water ratio in a closed cell around a PMUT membrane. We also present our preliminary results on presence of micro-bubbles in the closed cell around the PMUT.

Thesis (DTech (Electrical Engineering))--Cape Peninsula University of Technology, 2011 / Ultrasonic Velocity Profiling (UVP) is both a method and a device to measure an instantaneous one-dimensional velocity profile along a measurement axis by using Doppler echography. UVP is an ideal technique since it is non-invasive, works with opaque systems, inexpensive, portable and easy to implement relative to other velocity profile measurement methods. Studies have suggested that the accuracy of the measured velocity gradient close to wall interfaces need to be improved. The reason for this is due to, depending on the installation method, distortion caused by cavities situated in front of ultrasonic transducers, measurement volumes overlapping wall interfaces, refraction of the ultrasonic wave as well as sound velocity variations. A new ultrasonic transducer, which incorporates a delay line material optimised for beam forming could reduce these problems (Wiklund, 2007). If these could be addressed, UVP could be used for the measurement of velocity profiles in complex geometries (e.g. contractions, valves, bends and other pipe fittings) where the shape of the velocity profile is critical to derive models for estimating fluid momentum and kinetic energy for energy efficient designs. The objective of this research work was to optimise the UVP system for accurate complex flow measurements by evaluating a specially designed delay line transducer and implementing advanced signal processing techniques. The experimental work was conducted at the Material Science and Technology (MST) group at the Cape Peninsula University of Technology (CPUT). This work also formed part of a collaborative project with SIK - The Swedish Institute for Food and Biotechnology. Acoustic characterisation of the ultrasonic transducers using an advanced robotic setup was done at SI K. Different concentrations of the following non-Newtonian fluids exhibiting different rheological characteristics were used for testing: carboxymethyl cellulose (CMC) solutions, kaolin and bentonite suspensions. Water was used for calibration purposes.

This thesis presents the design and analysis for development of a Capacitive Micromachined Ultrasonic Transducer (CMUT), a novel sensor and actuator, aimed at replacing the conventional piezoelectric transducers for air-coupled ultrasonic imaging applications. These CMUTs are fabricated using the silicon micromachining technology wherein all fabrication is done on the surface of a silicon wafer by means of thin-film depositions, patterning with photolithography and etching. The main emphasis of this study is on developing analytical models that serve as effective design tools for the development of these devices. A desirable goal of such study is to create reasonable mathematical models, obtain analytical solutions, wherever possible, for various measures of transducer performance and provide design aids. A logical start is the lumped parameter modeling wherein the explicit dependence of the physical parameters on the spatial extent of the device is ignored. The system lumped parameters, such as the equivalent stiffness, the equivalent mass, and the equivalent damping are extracted from reasonable analytical or numerical models and subsequently used in the static and dynamic analysis of the device. Useful predictions are made with regard to the key transducer parameters, such as, the pull-in voltage, the static deflection, the dynamic response and the acoustic field produced. The modeling work presented embodies two main objectives: (i) it serves to provide direction in the design phase, and, (ii) it serves to aid in the extraction of critical parameters which affect the device behavior. Comparison of the results with the more rigorous FEM simulations as well as with those present in the existing literature assure that the developed models are accurate enough to serve as useful design tools. The distributed parameter modeling is presented next. Analysis of MEMS devices which rely on electrostatic actuation is complicated due to the fact that the structural deformations alter the electrostatic forces, which redistribute and modify the applied loads. Hence, it becomes imperative to consider the electro-elastic coupling aspect in the design of these devices. An approximate analytical solution for the static deflection of a thin, clamped circular plate caused by electrostatic forces which are inherently nonlinear, is presented. The model is based on the Kirchhoff-Love assumptions that the plate is thin and the deflections and slopes are small. The classical thin-plate theory is adequate when the ratio of the diameter to thickness of the plate is very large, a situation commonly prevalent in many MEMS devices, especially the CMUTs. This theory is used to determine the static deflection of the CMUT membrane due to a DC bias voltage. The thin-plate electro-elastic equation is solved using the Galerkin weighted residual technique under the assumption that the deflections are small in comparison to the thickness of the plate. The results obtained are compared to those obtained from ANSYS simulations and an excellent agreement is observed between the two. The pull-in voltage predicted by our model is close to the value predicted by ANSYS simulations. A simple analytical formula, which gives fairly accurate results (to within 3% of the value predicted by ANSYS simulations) for determination of the pull-in voltage, is also presented. As stated, this formula accounts for the elastic deflection of the membrane due to the coupled interaction with the electrostatic field. The effect of vacuum sealing the backside cavity of a CMUT is investigated in some detail. The presence or absence of air inside the cavity has a marked effect upon the system parameters, such as the natural frequency and the pull-in voltage. The possibility of using sealed CMUT cavities with air inside at ambient pressure is explored. In order to estimate the transducer loss due to the presence of air in the sealed cavity, the squeeze film forces resulting from the compression of the trapped air film are evaluated. Towards this end, the linearized Reynolds equation is solved in conjunction with the appropriate boundary conditions, taking the flexure of the membrane into account. From this analysis, it is concluded that, for a sealed CMUT cavity, the presence of air does not cause any squeeze film damping even when the flexure of the membrane is taken into account (the case of a rigid plate is already known). Although the emphasis of the study undertaken here is not on the physical realization of a working CMUT, a single cell as well as a linear array based on the design presented here, were fabricated (in a foundry elsewhere) in order to verify some of the most fundamental device parameters from experimental measurements. The fabricated devices have been characterized for their resonant frequency, quality factor, and structural integrity. These tests were conducted using the laser Doppler vibrometer and the Focused Ion Beam milling. Having investigated thoroughly the behavior of a single cell, we proceed to demonstrate how these cells can be arranged optimally in the form of an array to provide a comprehensive ultrasonic imaging system. A thorough analysis of the requirements for the array architecture is undertaken to determine the optimal configuration. The design constraints that need to be taken into account for CMUT arrays, especially for NDE applications, are presented. The main issue of designing an array consisting of a large number of CMUT cells required for producing a pressure wave of sufficient strength which is detectable upon reflection from the desired location even after suffering severe attenuation resulting from propagation in various media is addressed. A scalable annular array architecture of CMUT cells is recommended based on the analysis carried out.

Ce travail a pour objectif d’élaborer de manière contrôlée différentes microstructures de (K0,5Na0,5)NbO3 non dopées par différentes mises en forme, bien caractérisées structuralement et microstructuralement, afin d’étudier et d’éclaircir l’influence de la densification et de la taille des grains sur les propriétés piézoélectriques. Il s’agit pour cela de produire des microstructures, avec une composition maitrisée, ayant d’abord des grains de taille micrométrique, ensuite millimétrique et enfin si possible des grains centimétriques de KNN et d’atteindre des densifications allant de 80 % à plus de 95 %. Au-delà de l’ingénierie des microstructures de KNN, l’obtention de monocristaux du composé (K0,5Na0,5)NbO3 de plusieurs mm3, de bonne qualité cristalline et bien caractérisés structuralement et microstructuralement permettrait de caractériser l’ensemble des tenseurs élastiques, diélectriques et piézoélectriques ainsi que de valider des méthodes de caractérisation originales développées au sein du laboratoire GREMAN. / The purpose of this work is to elaborate different controlled microstructures of undoped (K0,5Na0,5)NbO3 by different methods, with full structural and microstructural characterization in order to study and to elucidate the influence of the densification and grain size effect on the piezoelectric properties. For this, it is necessary to produce KNN microstructures with controlled composition, starting with micrometer grain size, then millimeter and if possible centimeter grain size and to attain densification ranging from 80 % up to 95 % of the theoretical one. Beyond the KNN microstructure engineering, the growth of large (K0,5Na0,5)NbO3 single crystals about several mm3 with good crystallinity and full structural and microstructural characterization would enable the elastic, dielectric and piezoelectric tensors to be fully characterized as well as to validate the original characterization methods developed within the GREMAN laboratory.

This paper discusses basic issues of micromachined ultrasonic transducers, including their design and fabrication. First, the acoustic fundamentals of ultrasonic transducers are introduced, and relevant simulation methods are illustrated. Following these topics, important aspects of silicon micromachining are presented. Based on this knowledge, two distinctive micromachining processes for transducer fabrication are proposed. One of them, the bulk process, has been proved to be successful, whereas for the second one, a surface process, some improvements are still needed. Besides these works, an innovative direct bonding technology is also developed. This technology constitutes the basis of the bulk process. Of course, it can also be used for the packaging of other MEMS devices.