Particulate contamination during wafer processing is a major concern in the microelectronics industry. The impurities may be generated from holding tanks, shipping containers, filter membranes and photolithographic materials, and hence may be organic and inorganic in nature. In liquids, these particles develop a surface charge, the magnitude and sign of which is unique for a particular solid/liquid combination. The substrate that is processed in liquids also develops a similar surface charge, and if the charge on the substrate and impurity particles are opposite to each other, deposition of impurities onto the substrate is likely to occur. Hence an understanding of the surface charge characteristics may have an impact in developing techniques to control particulate contamination from semiconductor process liquids. In this work, an attempt has been made to elucidate the surface charge characteristics of a variety of organic and inorganic particles in liquids of interest to the semiconductor industry. The techniques of microelectrophoresis and streaming potential using flat plates and filter membranes were used to this end. The data obtained have been utilized to understand and predict particulate contamination from liquids and deposition onto the wafer surfaces. This might in turn be useful in developing filter membranes of interest to the semiconductor industry.

Thesis (Ph.D.)--University of Melbourne, Dept. of Mathematics and Statistics, 2006. / Typescript. Includes bibliographical references (leaves 169-181).

No description available.

Thesis: M.S., Massachusetts Institute of Technology, Department of Mechanical Engineering, 1976 / Includes bibliographical references. / by Geary Y. Yee. / M.S. / M.S. Massachusetts Institute of Technology, Department of Mechanical Engineering

Electroosmotic flow is a convenient mechanism for transporting polar fluid in a microfluidic device. The flow is generated through the application of an external electric field that acts on the free charges that exists in a thin Debye layer at the channel walls. The charge on the wall is due to the chemistry of the solid-fluid interface, and it can vary along the channel, e.g. due to modification of the wall. This investigation focuses on the simulation of the electroosmotic flow (EOF) profile in a cylindrical microchannel with step change in zeta potential. The modified Navier-Stoke equation governing the velocity field and a non-linear two-dimensional Poisson-Boltzmann equation governing the electrical double-layer (EDL) field distribution are solved numerically using finite control-volume method. Continuities of flow rate and electric current are enforced resulting in a non-uniform electrical field and pressure gradient distribution along the channel. The resulting parabolic velocity distribution at the junction of the step change in zeta potential, which is more typical of a pressure-driven velocity flow profile, is obtained. / Singapore-MIT Alliance (SMA)

This thesis describes the synthesis and assembly of metal and semiconductor nanoparticles (NPs). The two research topics include i) hetero-assembly of metal and semiconductor NPs, ii) effect of ionic strength on homo-assembly of gold nanorods (GNRs). First, we present hetero-assembly of GNRs and semiconductor quantum dots (QDs) in a chain using biotin-streptavidin interaction. We synthesized alloyed CdTeSe QDs and modified them with mercaptoundecanoic acid to render them water-soluble and to attach streptavidin. We synthesized GNRs by a seed-mediated method and selectively modified the ends with biotin. Hetero-assembly of QDs and GNRs depended on the size, ligands, and ratio of QDs and GNRs. Second, we controlled the rate of homo-assembly of GNRs by varying the ionic strength of the DMF/water solution. The solubility of polystyrene on the ends of GNRs depended on the ionic strength of the solution, which correlated with the rate of assembly of GNRs into chains.

This thesis describes the synthesis and assembly of metal and semiconductor nanoparticles (NPs). The two research topics include i) hetero-assembly of metal and semiconductor NPs, ii) effect of ionic strength on homo-assembly of gold nanorods (GNRs). First, we present hetero-assembly of GNRs and semiconductor quantum dots (QDs) in a chain using biotin-streptavidin interaction. We synthesized alloyed CdTeSe QDs and modified them with mercaptoundecanoic acid to render them water-soluble and to attach streptavidin. We synthesized GNRs by a seed-mediated method and selectively modified the ends with biotin. Hetero-assembly of QDs and GNRs depended on the size, ligands, and ratio of QDs and GNRs. Second, we controlled the rate of homo-assembly of GNRs by varying the ionic strength of the DMF/water solution. The solubility of polystyrene on the ends of GNRs depended on the ionic strength of the solution, which correlated with the rate of assembly of GNRs into chains.

No description available.

Firing an underwater spark discharge generates an expanding plasma which causes a spherical shockwave to propagate through the surrounding water. The shockwave can have many effects, including resonance effects on bubbles, mechanical destructive effects on solid surfaces and living organisms, and sonochemical oxidative effects on particles and chemical species present in the water. This phenomenon has been shown to improve the efficiency of ink removal in a laboratory flotation deinking cell, while simultaneously decreasing fiber loss. These process improvements are attributed to the sonochemical oxidation of ink particle surfaces, caused by shockwave-induced cavitation. This finding is supported by zeta potential measurements. Sparking was found to reduce the zeta potential of ink particles by up to 20 mV. When sparking was performed during deinking, no effect was found on either ink removal or solids loss. However, when the pulp was pretreated with sparking before flotation, a significant improvement was seen in the brightness gain. Further, fiber loss was decreased by up to 25% in a single flotation stage. The economics of this process are attractive; payback is on the order of three months based on fiber savings alone. Also, at about 1.5 kJ per spark, the power requirements are minimal with respect to the benefit derived.

Thesis (Ph. D.)--Institute of Paper Chemistry, 1967. / Includes bibliographical references (p. 69-71).