"Recently, nanomaterials have been vigorously studied for the development of biosensors. Among them, carbon nanotubes (CNTs) have stimulated enormous interest for constructing biosensors due to their unique physical and chemical properties such as high surface-to-volume ratio, high conductivity, high strength and chemical inertness. Our study is to develop a general design of biosensors based on vertically aligned CNT arrays. Glucose biosensor is selected as the model system to verify the design of biosensors. In the preliminary design, glucose oxidase (GOx) is attached to the walls of the porous alumina membrane by adsorption. Porous highly ordered anodized aluminum oxide (AAO) prepared by two-step anodization are used as templates. Deposited gold on both sides of template surfaces serve as a contact and prevent non-specific adhesion of GOx on the surface. In order to find out optimized thickness of gold coating, the oxidation and reduction (redox) reaction in [Fe(CN)6]3¨C /[Fe(CN)6]4¨C system is monitored by Cyclic Voltammetry (CV). Subsequently, enzymatic redox reaction in glucose solutions is also attempted by CV. We expect protein layers with GOx form a conductive network. However, no obvious enzymatic redox reaction is detected in the voltammogram. To take advantage of the attractive properties of CNTs, the design of enzyme electrodes is modified by attaching CNT onto the sidewalls of AAO template nanopores and then immobilizing GOx to the sidewalls and tips of CNTs. AAO templates provided vertical, parallel, well separated and evenly spacing nanochannels for CNT growth. Cobalt is used as a catalyst to fabricate CNTs. As a result, multi-walled carbon nanotubes (MWCNTs) are fabricated inside the AAO templates by catalytic chemical vapor deposition (CCVD). Characterization of AAO templates and cobalt electrochemical deposition are employed by scanning electron microscope (SEM), and energy dispersive X-ray spectrometry (EDS). Detailed structure and texture of CNTs are examined by transmission electron microscope (TEM). "

Vertically aligned Multiwalled Carbon Nanotubes (MWCNTs) were grown in the pores of Anodized Aluminum Oxide (AAO) templates and investigated for resistive sensor applications. High Sensitivity of 23% to low concentration (100 ppm) of ammonia was observed. An equivalent circuit model was developed to understand the current flow path in the resistive sensor. This helped us in achieving high sensitivities through amorphous carbon (a-C) layer thickness tailoring by employing post-growth processing techniques like plasma etching. A simulation model in MATLAB was developed to calculate the device resistance and the change in the sensitivity as a function of device parameters. The steady state response and transient response of the model to the number of ammonia molecules and its adsorption rate were studied. Effects of oxygen plasma, argon plasma and water plasma etch on thinning of the a-C layer were studied. In order to enhance the sensitivity, the top and bottom a-C layers were replaced by a more conductive metal layer. This also helped in understanding the current flow in the device and in the estimation of the resistivity of the a-C layer.