Abstract High quality epitaxial growth of undoped ZnSe, ZnSxSe1-x and ZnSe-ZnS strained quantum well structures were successfully grown on n-type (100)-oriented silicon substrates at 150 ºC in a horizontal cold-wall quartz reactor by low-pressure metalorganic atomic layer epitaxy (MOALE) at a pressure of 30 Torr for the first time. Dimethylzinc [Zn(CH3)2, DMZn], hydrogen selenide (H2Se) and hydrogen sulfur (H2S) were used as the reactants. ALE is a suitable technique for the growth of ultra thin semiconductors because it provides accuracy monolayer control of the deposited film thickness, low growth temperature and uniform growth over a large area by its¡§ self-limiting mechanism ¡¨via supplying source materials in a flow pulse sequences alternatively over the substrate. Idea one monolayer per cycle was obtained in wide range of parameters such as substrate temperatures, mole flow rate and pulse duration of reactants. From X-ray diffraction pattern, (400)-oriental single crystal epilayers of ZnSe are evidenced. The surface morphologies of ZnSe in the ALE temperature region 150 - 200 ¢J, extensively smooth and mirror-like surface were obtained. PL spectra of ZnSe epilayer is dominated by the strong near-band-edge at 2.8 eV with FWHM of 36 meV. Schottky diodes were fabricated from the undoped ZnSe layer and the electrical properties were measured at room temperature. From the current-voltage (I-V) characteristics, a high reverse breakdown voltage (>40 V) and an excellent low cut-in voltage of 0.6 - 0.8 V were obtained. On the basis of the observed ZnSe/Si epitaxial film properties, the material is suitable for fabrication of ZnSe-based blue light emitting diodes and for application in direct-current thin-film electroluminescence. The lattice of the ZnSxSe1-x layer with a sulfur content around 93% was found to have the best match to the Si substrate, as confirmed by the good layer thickness, uniformity, surface morphology and narrow linewidth of the X-ray diffraction rocking curve with a minimal FWHM of about 0.16 degree. In addition, strong near-band-edge and weak deep-level emissions in the longer wavelength region dominate PL spectra of the ZnS0.93Se0.07 epilayer at 300K. With respect to Schottky diodes, Au/n-ZnS0.93Se0.07/Al, has a high breakdown voltage, over 40 V at 400 nA and a low cut-in voltage of 0.68 V. The highest Hall mobility of the ZnS0.93Se0.07 is 347 cm2/v-sec. These results indicate a good lattice-match of ZnS0.93Se0.07/Si as a result of low numbers of interface and epitaxial layer defects. The lower temperature of ZnSe-ZnS strained quantum well structures, 150 ºC would be lowed enough to eliminate 3-D growth related to the lattice mismatch between ZnSe and ZnS. A good epitaxy and crystallinity was carried out by X-ray diffraction. The formation of the strained quantum well structure is evident from the periodic behavior of each fluctuation profile by SIMS. At least 25 periodic thickness of the ALE growth samples shows a strong blue emissions and nearly neglects the deep-level emission at room temperature. The phenomenon of quantum size effects and the ¡§ blue-shift ¡¨ was evidenced as the well width increases. The results of the PL measurements were found to correlate well with the theoretical one, parabolic well-strain mode. Schottky diodes were fabricated from the Au/ZnSe-ZnS SMQW/n-Si/Al, a high reverse breakdown voltage over 40 (at 20 µA) and an extremely low cut-in voltage of 80 - 120 mV were obtained. The I-V characteristics of the heterojunction are more suitable for the fabrication of the direct-current thin film electroluminescent (EL) device.

Atomic Layer Epitaxy is a stepwise deposition process by supplying the sources materials alternatively. This deposition technique provides the monolayer control of film thickness and the uniform film growth over a large area. ZnSxSe1-x layers were grown epitaxially onto Si and GaAs substrate by using DMZn and H2S , H2Se gases for the reactant source. Owing to the self-limiting characteristics of ALE process, ZnSxSe1-x monolayers could be deposited over a wide range of temperature within growth window. In this study, for obtaining high crystalline quality ZnSxSe1-x epitaxial films, various growth conditions were investigated including substrate temperature, the flow rate of DMZn, H2S and H2Se, H2 purge duration and pulse duration etc.. A thermodynamic analysis based the calculation of Seki et. al [6], was used to investigate the effects by varying the substrate temperature, input mole ratio of group VI source gases on equilibrium partial pressure, solid composition and solid-vapor distribution relation of this alloy. The interaction parameter of ZnSxSe1-x, £[, was estimated by using the delta-lattice parameter (DLP) model suggested by Stringfellow [39]. Finally, it shows that the thermodynamic analysis provides a useful guideline for the growth of ZnSxSe1-x alloy on Si and GaAs substrates.

Made available in DSpace on 2016-06-02T20:34:08Z (GMT). No. of bitstreams: 1 1951.pdf: 5829403 bytes, checksum: 71b2aeaac3ff3cb7d2f3ba4a25d21975 (MD5) Previous issue date: 2008-03-13 / Financiadora de Estudos e Projetos / This work describes studies on the underpotential deposition (UPD) of selenium, zinc, as well for Zn/Se systems deposited on polycrystalline Pt electrodes in acid solutions. The effects of Zn presence in the Se dissolution process were also investigated in the UPD and bulk potential range, 0.6 and 0.03 V respectively. The measurements were carried out using cyclic voltammetry and electrochemical quartz crystal microbalance (EQCM). Furthermore Lead sulfide (PbS) multilayers were grown on a single crystal Ag(111) substrate by Electrochemical Atomic Layer Epitaxy (ECALE) method. For Zn UPD in sulfuric acid, two different processes were observed, which are attributed to the dissolution of submonolayer of Znads and H-atoms adsorbed on the electrode surface. For Se UPD was observed that hydrogen desorption were completely inhibited indicating that Se film recovered the Pt surface. The deposition of UPD Se in perchloric acid solution showed the transference of 4 electrons with 1.4 and 1.12 active sites of Pt occupied by 1 Se ad-atom in the UPD and bulk potential range, respectively. In the evaluation of the Se monolayers dissolution process formed at 0.03 V during 2000 s a process not mentioned in the literature it was observed which was evaluated by the technique MECQ. The experimental results obtained by this technique allowed to end that the dissolution process occurred by two stages, and the first involved the participation of 6e-. The dissolution mechanism with 6e- happens with the participation of water in the dissolution process of Se, leading to the formation of an oxygenated selenium compound which in next step undergo slow oxidation and is dissolved as soluble Se(VI) species. Then the total dissolution process of Se occurs in a six-electron transfer reaction. For Se deposition in the Zn presence the dissolution charges associated with Se UPD increase, indicating that the presence of Zn favors the deposition of UPD Se. In the case of PbS multilayers on Ag (111) the voltammetric analysis of the first PbUPD and SUPD peaks indicates a mechanism of two-dimensional growth, which is consistent with epitaxial growth. Electrochemical stripping measurements indicate that the amount of Pb and S deposited in a given number of cycles is a function of the number of cycles employed, again suggesting a layer-by-layer growth. This result indicates that the amount of Pb and S in these films corresponds to the stoichiometric 1:1 ratio, indicating the formation of a compound. / Este trabalho descreve os estudos da deposicao em regime de subtensao (DRS) de Se, Zn, assim como para sistemas Zn/Se depositados sobre eletrodos policristalinos de Pt em solucoes acidas. Os efeitos da presenca de Zn no processo de dissolucao de Se tambem foram investigados em uma regiao de potenciais de DRS e deposicao massiva 0,6 V e 0,03 V, respectivamente. As medidas foram realizadas usando voltametria ciclica e microbalanca eletroquimica de cristal de quartzo (MECQ). Alem disso, multicamadas de sulfeto de chumbo (PbS) foram crescidas sobre substrato de Ag(111) utilizando o metodo de deposicao eletroquimica de camadas atomicas epitaxiais (ECALE). Para a DRS de Zn em meio de acido sulfurico dois processos distintos foram observados os quais foram atribuidos a submonocamadas de Znads e atomos de H adsorvidos sobre a superficie do eletrodo. Para a DRS do Se observou-se a inibicao completa da dessorcao de hidrogenio o que indicou recobrimento total da superficie de Pt por ad-atomo de Se. A deposicao de Se em meio de acido perclorico mostrou a transferencia de 4 eletrons com 1,4 e 1,12 sitios da Pt ocupados por cada ad-atomo de Se, em potenciais de deposicao em DRS e sobretensao, respectivamente. Na avaliacao do processo de dissolucao das monocamadas de Se formadas a 0,03 V e por um tempo de deposicao de 2000 s um processo nao mencionado na literatura foi observado o qual foi avaliado pela tecnica MECQ. Os resultados experimentais obtidos por esta tecnica permitiram concluir que o processo de dissolucao do Se ocorria por duas etapas, sendo que a primeira envolvia a participacao de uma 6 eletrons e a segunda de 4 eletrons. O mecanismo de dissolucao com 6 eletrons ocorre com a participacao de agua no processo de dissolucao do Se, levando a formacao de compostos de Se oxigenados, os quais em uma etapa posterior sofrem uma oxidacao lenta e se dissolvem como especies soluveis de Se(VI). Entao o processo total de dissolucao de Se ocorre em uma reacao de transferencia de 6 eletrons. Ja para a deposicao de Se na presenca de Zn pode-se concluir, devido ao aumento da carga de dissolucao da DRS de Se, que a presenca de Zn favorece o processo de deposicao do Se. No caso das multicamadas de PbS o estudo voltametrico das primeiras camadas de Pb DRS e S DRS indicam um mecanismo de crescimento bidimensional, que e consistente com o crescimento epitaxial. As cargas medidas no processo de dissolucao das camadas indicaram que a quantidade de Pb e S depositados para um dado numero de ciclos e uma funcao do numero de ciclos realizados, sugerindo novamente um crescimento camada por camada Este resultado sugere que a quantidade de Pb e S nos filmes possuem uma relacao estequiometrica de 1:1, indicando a formacao de um composto.

Zur Präparation von hochwertigen Heterostrukturen aus Übergangsmetallperowskiten wurde eine Anlage zur metallorganischen Aerosol-Deposition mit Wachstumskontrolle durch in-situ Ellipsometrie aufgebaut. Durch numerische Anpassung der in-situ Ellipsometrie kann man den beim Wachstum stattfindenden Transfer der $ e_{g} $-Elektronen zwischen unterschiedlich dotierten Perowskit-Manganaten erfassen. Im Verlauf des Wachstums von Übergittern aus $ \mathrm{LaMnO_{3}} $ (LMO) und $ \mathrm{SrMnO_{3}} $ (SMO) variiert die Längenskala, über die die $ e_{g} $-Elektronen delokalisieren, in einem Bereich von $ 0.4\, \mathrm{nm} $ bis $ 1.4 \, \mathrm{nm} $. Mit der neu eingeführten Atomlagenepitaxie (ALE) kann man die Chemie von Perowskit-Grenzflächen vollständig definieren. Am Beispiel von gestapelten $ \mathrm{SrO-SrTiO_{3}} $ (STO) Ruddlesden-Popper-Strukturen und LMO/SMO-Übergittern wird dieses Verfahren erprobt. Mit der in-situ Ellipsometrie kann man Defekte in der SrO-STO-Abfolge vorhersagen, die in anschließenden strukturellen Untersuchungen mit Transmissionselektronenmikroskopie (TEM) erkennbar sind. Außerdem lässt sich die Sr/Ti-Stöchiometrie mit einer Genauigkeit von $ 1.5\, \mathrm{\%} $ festlegen. In Bezug auf das Wachstum von LMO und SMO kann man über die in-situ Ellipsometrie Veränderungen der Mn-Valenzen erkennen und so auf ein zweidimensionales Wachstum jeder halben Perowskitlage schließen. Die in dieser Arbeit etablierte Depositionstechnologie erlaubt das systematische Studium der magnetischen Eigenschaften von Heterostrukturen aus verschieden dotierten Lanthan-Strontium-Manganaten ($ \mathrm{La_{1-x}Sr_{x}MnO_{3}} $ (LSMO(x)). Zunächst wird das magnetische Verhalten von Doppellagen aus dem ferromagnetischen LSMO(0.3) und verschiedenen antiferromagnetischen LSMO(x)-Lagen ($ x=0.6-1.0 $) untersucht. Für $ x>0.6 $ beobachtet man ein erhöhtes Koerzitivfeld und eine Verschiebung der Hysterese entlang der Feldachse (exchange bias (EB)). Als Funktion der Sr-Dotierung zeigen die durch das STO-Substrat verspannten LSMO(x)-Filme einen Übergang vom Antiferromagneten des G-Typs ($ x>0.95 $) zum Antiferromagneten des A-Typs ($ x \leq 0.95 $). Dieser Übergang wird von einer Halbierung der EB-Amplitude begleitet. Für LSMO(0.3)/SMO-Strukturen registriert man eine Abnahme der EB-Amplitude, wenn die epitaktischen Verzerrungen mit zunehmender Dicke der SMO-Lagen relaxieren. Bei Änderungen der tetragonalen Verzerrung der Manganat-Filme kommt es zu einer Modifikation der Balance zwischen den magnetischen Kopplungen in der Filmebene und senkrecht dazu. Dadurch verändern sich die Eigenheiten des Spin-Glases an der Grenzfläche und damit das magnetische Verhalten der Heterostruktur. LMO/SMO-Übergitter auf STO (001) zeigen eine zuvor noch nicht beobachtete Phänomenologie. Wenn die LMO/SMO-Bilagendicke $ \Lambda $ 8 Monolagen übersteigt, bemerkt man zwei separate ferromagnetische Signaturen. Die Tieftemperaturphase (LTP) hat eine Curie-Temperatur $ T_{C}^{L}=180\, \mathrm{K}-300 \, \mathrm{K} $, die mit $ \Lambda $ kontinuierlich abfällt, die Hochtemperaturphase (HTP) hat eine Curie-Temperatur $ T_{C}^{H}=345 \, \mathrm{K} \pm 10 \, \mathrm{K} $, die keine systematische Abhängigkeit von $ \Lambda $ besitzt. LTP und HTP sind magnetisch entkoppelt. Das Skalierungsverhalten des magnetischen Momentes der HTP mit der Bilagendicke und der Zahl von Wiederholungen der LMO/SMO-Einheit deutet auf einen Grenzflächencharakter der HTP. Außerdem besitzt die HTP eine große magnetische Anisotropieenergie, die Literaturwerte für dünne Manganatfilme um zwei Größenordnungen übersteigt. Beim Wachstum auf $ \mathrm{(La_{0.3}Sr_{0.7}) (Al_{0.65}Ta_{0.35})O_{3}} $ (LSAT), das eine kleinere Gitterkonstante als STO besitzt, verschwindet die HTP. Zur Erklärung der HTP stellt man ein Modell vor, bei dem die HTP an der chemisch scharfen SMO/LMO-Grenzfläche lokalisiert ist. Das STO-Substrat führt zu epitaktischen Zugspannungen, die die $ e_{g} $-Elektronen in den an den SMO/LMO-Grenzflächen befindlichen $ \mathrm{MnO_{2}} $-Lagen auf die $ d_{x^{2}−y^{2}} $-Orbitale zwingen. Dadurch ist der Austausch zu den in c-Richtung benachbarten $ \mathrm{MnO_{2}} $-Lagen sehr schwach und der magnetische Austausch findet vorwiegend in der Ebene statt. Durch den Ladungstransfer liegt in der $ \mathrm{MnO_{2}} $-Lage an der SMO/LMO-Grenzfläche ein $ \mathrm{Mn^{4+}} $-Anteil von $ x \approx 0.4 $ vor. Durch den Doppelaustausch bildet sich in dieser Ebene dann eine zweidimensionale ferromagnetische Phase, die die HTP darstellt.

Jádrem této disertační práce bylo studovat optické a elektrické charakteristiky tenkovrstvých elektroluminiscenčních součástek řízených střídavým proudem (ACTFEL) a zejména vliv procesu stárnutí luminiforů na jejich optické a elektrické vlastnosti. Cílem této studie měl být příspěvek ke zvýšení celkové účinnosti luminoforů, vyjádřené pomocí jasu, účinnosti a stability. Vzhledem k tomu, že současnou dominantní technologií plochých obrazovek je LCD, musí se další alternativní technologie plošných displejů porovnávat s LCD. Výhodou ACTFEL displejů proti LCD je lepší rozlišení, větší teplotní rozsah činnosti, větší čtecí úhel, či možnost čtení při mnohem vyšší intenzitě pozadí. Na druhou stranu je jejich nevýhodou vyšší energetická náročnost, problém s odpovídající barevností tří základních barev a podstatně vyšší napětí nutné pro činnost displeje. K dosažení tohoto cíle jsme provedli optická, elektrická a optoelektrická měření ACTFEL struktur a ZnS:Mn luminoforů. Navíc jsme studovali vliv dotování vrstvy pomocí KCl na chování mikrostruktury a na elektroluminiscenční vlastnosti (zejména na jas a světelnou účinnost) ZnS:Mn luminoforů. Provedli jsme i některá, ne zcela obvyklá, měření ACTFEL součástek. Vypočítali jsme i rozptylový poměr nabitých barevných center a simulovali transportní charakteristiky v ACTFEL součástkách. Studovali jsme vliv stárnutí dvou typů ZnS:Mn luminoforů (s vrstvou napařenou či získanou pomocí epitaxe atomových vrstev) monitorováním závislostí svítivost-napětí (L-V), velikost vnitřního náboje - elektrické pole luminoforu (Q-Fp) a kapacitance-napětí (C-V) ve zvolených časových intervalech v průběhu stárnutí. Provedli jsme krátkodobá i dlouhodobá měření a pokusili jsme se i o vizualizaci struktury luminoforu se subvlnovým rozlišením pomocí optického rastrovacího mikroskopu pracujícího v blízkém poli (SNOM). Na praktickém případu zeleného Zn2GeO4:Mn (2% Mn) ACTFEL displeje, pracujícího při 50 Hz, jsme také studovali stabilitu svítivosti pomocí měření závislosti svítivosti na napětí (L-V) a světelné účinnosti na napětí (eta-V). Přitom byl zhodnocen význam těchto charakteristik. Nezanedbatelnou a neoddělitelnou součástí této práce je i její pedagogický aspekt. Předložený text by mohl být využit i jako učebnice pro studenty na mé univerzitě v Lybii.