Inaug. Diss.--Stockholm. / Added t.p., with thesis note, inserted at p. 33. Bibliography: p. [95]-96.

Thesis (Ph. D.)--Columbia University, 1939. / Vita. Bibliography: p. 38.

The continuous improvement in the semiconductor industry has been successfully achieved by the reducing dimensions of CMOS (complementary metal oxide semiconductor) technology. For the last four decades, the scaling down of physical thickness of SiO₂ gate dielectrics has improved the speed of output drive current by shrinking of transistor area in front-end-process of integrated circuits. A higher number of transistors on chip resulting in faster speed and lower cost can be allowable by the scaling down and these fruitful achievements have been mainly made by the thinning thickness of one key component - Gate Dielectric - at Si based MOSFET (metal-oxide-semiconductor field effect transistor) devices. So far, SiO2 (silicon dioxide) gate dielectric having the excellent material and electrical properties such as good interface (i.e., Dit ~ 2x10¹⁰ eV⁻¹cm⁻²), low gate leakage current, higher dielectric breakdown immunity (≥10MV/cm) and excellent thermal stability at typical Si processing temperature has been popularly used as the leading gate oxide material. The next generation Si based MOSFETs will require more aggressive gate oxide scaling to meet the required specifications. Since high-k dielectrics provide the same capacitance with a thicker film, the leakage current reduction, therefore, less the standby power consumption is one of the huge advantages. Also, it is easier to fabricate during the process because the control of film thickness is still not in the critical range compared to the same leakage current characteristic of SiO₂ film. HfO₂ based gate dielectric is considered as the most promising candidate among materials being studied since it shows good characteristics with conventional Si technology and good device performance has been reported. However, it has still many problems like insufficient thermals stability on silicon such as low crystallization temperature, low k interfacial regrowth, charge trapping and so on. The integration of hafnium based high-k dielectric into CMOS technology is also limited by major issues such as degraded channel mobility and charge trapping. One approach to overcome these obstacles is using alternative substrate materials such as SiGe, GaAs, InGaAs, and InP to improve channel mobility. High electron mobility in the III-V materials has attracted significant attention for a possible application as a channel material in metal/oxide/semiconductor (MOS) transistors. One of the main challenges is that III-V MOSFETs generally lack thermodynamically stable insulators of high electrical quality, which would passivate the interface states at the dielectric/substrate interface and unpin the Fermi level. To address this issue, various dielectric, such as Si/SiO₂, Ge, SiGe, SiN and Al₂O₃, were considered as an interface passivation layer (IPL). Atomic Layer Deposited (ALD) Al₂O₃ has demonstrated superior IPL characteristics compared to the other candidates due to its high dielectric constant and interface quality. However, defect density in Al₂O₃ is still too high even as several cleaning methods such as NH₄OH, (NH₄)₂S and F treatment have been developed, which limits the performance of III-V MOSFETs. In the first part of this study, theoretical approaches to understand the motivation and requirements as an high-k gate dielectric or interfacial layer, and properties of ALD beryllium oxide (BeO) for Si and III-V MOS devices have been investigated. The second part of this study focuses on the precursor synthesis and fundamental material characterization of ALD BeO thin film using physical, optical and electrical analysis. Film properties such as self-cleaning reaction and oxygen diffusion barrier will be presented. At the third part, depletion mode transistor and self-aligned MOSFETs using ALD BeO on Si and InP high mobility substrates have been investigated. And as for the final part of this study, the density functional theory of Be(CH₃)₂ precursor, electromagnetics, and thermodynamics were investigated to understand the reaction mechanism and self-cleaning reaction, and to evaluate the gate dielectrics such as Al₂O₃, BeO, SiO₂, and HfO₂. / text

No campo da medicina, a radiação ionizante é utilizada tanto para fins terapêuticos como para fins diagnósticos, englobando assim um amplo intervalo de doses de diferentes tipos de radiações. Para assegurar que a finalidade da prática esteja sendo alcançada, são necessários estudos detalhados de detectores e dispositivos que respondam a diferentes tipos de radiações. Neste trabalho foi realizada a caracterização dosimétrica de amostras de BeO utilizando as técnicas de termoluminescência (TL) e luminescência opticamente estimulada (OSL) comparando-se as respostas para as radiações alfa, beta e X e propondose um sistema adequado para sua utilização em monitoração de feixes destas radiações. Dentre os principais resultados obtidos estão: alta sensibilidade à radiação beta para ambas as técnicas empregadas, boa reprodutibilidade das respostas TL e OSL (coeficientes de variação inferiores a 5%), uma dependência energética máxima da radiação X de 28% para técnica TL, e de apenas 7% para a técnica OSL, dentro dos intervalos de energia estudados. As características dosimétricas obtidas neste trabalho mostram a possibilidade de aplicação das amostras de BeO em dosimetria das radiações ionizantes X, alfa e beta, considerando os intervalos de dose empregados, pelas técnicas de TL e OSL. Pelos resultados obtidos, as amostras de BeO apresentaram sua utilização potencial para dosimetria de feixes de radiodiagnóstico e radioterapia. / In the medical field, the ionizing radiation is used both for therapeutic and diagnostic purposes, in a wide range of radiation doses. In order to ensure that the objective is achieved in practice, detailed studies of detectors and devices in different types of radiations beams are necessary. In this work a dosimetric characterization of BeO samples was performed using the techniques of thermoluminescence (TL) and optically stimulated luminescence (OSL) by a comparision of their response for alpha, beta and X radiations and the establishment of an appropriated system for use in monitoring of these radiations beams. The main results are: the high sensitivity to beta radiation for both techniques, good reproducibility of TL and OSL response (coefficients of variation lower than 5%), maximum energy dependence of the X radiation of 28% for the TL technique, and only 7% for the OSL technique, whithin the studied energy range. The dosimetric characteristics obtained in this work show the possibility of applying BeO samples to dosimetry of alpha, beta and X radiations, considering the studied dose ranges, using the TL and OSL techniques. From the results obtained, the samples of BeO showed their potential use for beam dosimetry in diagnostic radiology and radiotherapy.

No campo da medicina, a radiação ionizante é utilizada tanto para fins terapêuticos como para fins diagnósticos, englobando assim um amplo intervalo de doses de diferentes tipos de radiações. Para assegurar que a finalidade da prática esteja sendo alcançada, são necessários estudos detalhados de detectores e dispositivos que respondam a diferentes tipos de radiações. Neste trabalho foi realizada a caracterização dosimétrica de amostras de BeO utilizando as técnicas de termoluminescência (TL) e luminescência opticamente estimulada (OSL) comparando-se as respostas para as radiações alfa, beta e X e propondose um sistema adequado para sua utilização em monitoração de feixes destas radiações. Dentre os principais resultados obtidos estão: alta sensibilidade à radiação beta para ambas as técnicas empregadas, boa reprodutibilidade das respostas TL e OSL (coeficientes de variação inferiores a 5%), uma dependência energética máxima da radiação X de 28% para técnica TL, e de apenas 7% para a técnica OSL, dentro dos intervalos de energia estudados. As características dosimétricas obtidas neste trabalho mostram a possibilidade de aplicação das amostras de BeO em dosimetria das radiações ionizantes X, alfa e beta, considerando os intervalos de dose empregados, pelas técnicas de TL e OSL. Pelos resultados obtidos, as amostras de BeO apresentaram sua utilização potencial para dosimetria de feixes de radiodiagnóstico e radioterapia. / In the medical field, the ionizing radiation is used both for therapeutic and diagnostic purposes, in a wide range of radiation doses. In order to ensure that the objective is achieved in practice, detailed studies of detectors and devices in different types of radiations beams are necessary. In this work a dosimetric characterization of BeO samples was performed using the techniques of thermoluminescence (TL) and optically stimulated luminescence (OSL) by a comparision of their response for alpha, beta and X radiations and the establishment of an appropriated system for use in monitoring of these radiations beams. The main results are: the high sensitivity to beta radiation for both techniques, good reproducibility of TL and OSL response (coefficients of variation lower than 5%), maximum energy dependence of the X radiation of 28% for the TL technique, and only 7% for the OSL technique, whithin the studied energy range. The dosimetric characteristics obtained in this work show the possibility of applying BeO samples to dosimetry of alpha, beta and X radiations, considering the studied dose ranges, using the TL and OSL techniques. From the results obtained, the samples of BeO showed their potential use for beam dosimetry in diagnostic radiology and radiotherapy.

Kompakte faseroptische Sonden bieten viel Potential bei der dosimetrischen Qualitätssicherung, speziell in der Protonentherapie. Neben der im Vergleich zu Ionisationskammern hohen Ortsauflösung erlaubt die Unempfindlichkeit gegenüber elektromagnetischen Wechselfeldern die Anwendung parallel zur Echtzeit-Bildgebung mittels Magnetresonanztomographie. Die untersuchte Sonde besteht aus einem kleinen Volumen des Luminophors Berylliumoxid, das über eine Glasfaser an Einzelphotonensensoren gekoppelt ist. Zur Korrektur der Dosisunterschätzung der BeO-Sonde, die bei hohem linearen Energietransfer auftritt, wird das restreichweitenabhängige Verhältnis zweier spektraler Anteile des Lumineszenzlichts betrachtet. Darüber hinaus erlaubt die hohe Zeitauflösung des Messsignals bei Abgleich der Photonenzählrate mit dem Bestrahlungsplan die Rekonstruktion des Strahlprofils. Dies ermöglichte neben der energie- und tiefenabhängigen Quantifizierung der Strahlbreite auch eine Analyse des erwähnten spektralen Verhältnisses innerhalb des Strahlprofils. Dazu wurden Messungen in einem Wasserphantom bei verschiedenen Tiefen und Protonenenergien durchgeführt. Als Referenz wurden Tiefendosiskurven mit einer Ionisationskammer aufgenommen, die auch mit einer einfachen Berechnung der dreidimensionalen Dosisverteilung auf Grundlage des Bestrahlungsplans verglichen wurden.

In Medizin und Technik besteht ein Bedarf an flexiblen, miniaturisierten Dosisleistungs-messgeräten mit hoher Ortsauflösung für den Einsatz in Strahlungsfeldern hoher Dosisleistung und Dosisleistungsgradienten. Lichtwellenleiterbasierte Dosisleistungsmess-systeme können diese Anforderungen erfüllen. Sie bestehen aus einem strahlungssensitiven Leuchtstoff, welcher über einen flexiblen Lichtleiter an einen Lichtdetektor gekoppelt ist. Die Eliminierung des dominierenden Störeinflusses, des bei Bestrahlung des Lichtleiters generierten Stem-Effekts, ist eine inhärente Herausforderung aller lichtwellenleiter¬basierten Dosisleistungsmesssysteme. In der vorliegenden Arbeit wird ein solches System unter Verwendung der Lumineszenz der gewebeäquivalenten Detektormaterialien Berylliumoxid und Lithiumtetraborat realisiert. Der Schwerpunkt liegt dabei auf der Untersuchung von Methoden der Stem-Eliminierung unter Nutzung der zeitlichen Charakteristik der Lumineszenzmaterialien sowie der zeitlichen Struktur des Strahlungsfeldes oder einer modulierten optischen Stimulation. Eine performante Ausleseelektronik auf FPGA-Basis ermöglicht Echtzeit-Messungen mit einer Abtastung von 10 ns. Verschiedene Auswertemethoden generieren aus den Rohdaten in Zeitstempelform eine stem-unabhängige, dosisleistungsproportionale Detektorantwort. / In medicine and technology there is a demand for flexible, miniaturized dose rate measurement systems with high spatial resolution for the application in radiation fields of high dose rates and dose rate gradients. Fiber optic coupled dosimeters can meet these requirements. They consist of a radiation sensitive luminescent material which is connected to a light detector with a flexible light guide. The elimination of the dominant perturbation, which is the stem effect generated by irradiation of the light guide, is one inherent challenge of all fiber optic dosimeters. In the present work such a system is realized, using the luminescence of the two tissue equivalent detector materials beryllium oxide and lithium tetraborate. The main focus is on the investigation of methods of stem elimination, exploiting the temporal characteristics of the luminescent materials, as well as the time structure of the irradiation or a modulated optical stimulation. For this purpose, capable FPGA-based read out electronics are employed, which enable real time measurements with 10 ns sampling. Different methods of analysis process the time stamp raw data and generate a stem-free, dose rate proportional detector response.

Viele Festkörperdosimetriesonden haben eine hohe räumliche und zeitliche Auflösung. Jedoch zeigt ihr Messsignal Quench-Effekte beim Einsatz in Protonenstrahlungsfeldern mit hohem linearen Energietransfer (LET). Ohne eine Korrektur dieses verminderten Messeffekts würde dies zu einer Unterschätzung der Dosis führen. In dieser Arbeit wurde ein Messsystem entwickelt, das auf einem an eine Lichtleitfaser gekoppelten sensitiven Volumen aus Berylliumoxid basiert, dessen Lumineszenzlicht während der Messung spektral geteilt wird. Dadurch entsteht eine zusätzliche Information, die eine Aussage über die Restreichweite und somit über den LET von Protonen am Messort ermöglicht. Es konnte gezeigt werden, dass das Signalverhältnis der beiden spektralen Anteile stark mit der Restreichweite von initial monoenergetischen Protonen korreliert. Auf dieser Basis wurde eine Korrekturfunktion implementiert, welche die Dosisunterschätzung für Protonen mit Anfangsenergien kleiner als 145 MeV gut ausgleicht. Eine beobachtete Abhängigkeit der Signalverhältnisbasierten Dosiskorrektur von der initialen Protonenenergie führt jedoch dazu, dass die Korrektur für initial höherenergetische Protonen bei hohem LET weiterhin eine unterschätzte Dosis liefert.:1 Einleitung 2 Physikalische Grundlagen zur Dosimetrie in Photonen- und Protonenfeldern 2.1 Strahlungsfeldgrößen 2.2 Wechselwirkungen von Photonen mit Materie 2.3 Wechselwirkungen geladener Teilchen mit Materie 2.4 Wichtige Größen der Dosimetrie und dosimetrische Konzepte 2.5 BeO-basierte Faser-Dosimetriesonden 3 Material und Methoden 3.1 Verwendetes Messsystem 3.2 Dosis-Kalibrierung des Messsystems im Photonen-Referenzfeld 3.3 Messungen im Protonenfeld an der UPTD 3.4 LET-abhängige Korrektur des Messeffekts 3.5 Verifikation 4 Ergebnisse 4.1 Dosis-Kalibrierung im Photonen-Referenzfeld 4.2 Messungen im Protonenfeld 4.3 LET-abhängige Korrektur des Messeffekts 4.4 Verifikation 5 Diskussion 6 Zusammenfassung / Many solid dosemeters offer high spatial and temporal resolution. However, a common problem is their quenching in regions of high linear energy transfer (LET) during measurements in proton beams. This leads to reduced measurement signal, and thus, to dose underestimation. Hence, a dose correction is necessary. In this work a dosimetric system was developed which is based on a fiber coupled sensitive volume of beryllium oxide. Its radioluminescence signal is split into two spectral parts during measurement. Thereby one can obtain additional information that enables access to the values of residual range and LET of proton beams at the point of measurement. It could be shown that there exists a strong correlation between the signal ratio of both spectral parts of luminescence and the residual range of monoenergetic proton beams. Based on this, a correction function was implemented which allows for the adjustment of dose underestimation for measurements in proton beams of initial energies less than 145 MeV. Nevertheless, the signal ratio based correction function was observed to be dependent on the initial proton beam energy. Hence, the underestimation of the dose remains in the case of higher initial proton energies in regions of high LET.:1 Einleitung 2 Physikalische Grundlagen zur Dosimetrie in Photonen- und Protonenfeldern 2.1 Strahlungsfeldgrößen 2.2 Wechselwirkungen von Photonen mit Materie 2.3 Wechselwirkungen geladener Teilchen mit Materie 2.4 Wichtige Größen der Dosimetrie und dosimetrische Konzepte 2.5 BeO-basierte Faser-Dosimetriesonden 3 Material und Methoden 3.1 Verwendetes Messsystem 3.2 Dosis-Kalibrierung des Messsystems im Photonen-Referenzfeld 3.3 Messungen im Protonenfeld an der UPTD 3.4 LET-abhängige Korrektur des Messeffekts 3.5 Verifikation 4 Ergebnisse 4.1 Dosis-Kalibrierung im Photonen-Referenzfeld 4.2 Messungen im Protonenfeld 4.3 LET-abhängige Korrektur des Messeffekts 4.4 Verifikation 5 Diskussion 6 Zusammenfassung

In Medizin und Technik besteht ein Bedarf an flexiblen, miniaturisierten Dosisleistungs-messgeräten mit hoher Ortsauflösung für den Einsatz in Strahlungsfeldern hoher Dosisleistung und Dosisleistungsgradienten. Lichtwellenleiterbasierte Dosisleistungsmess-systeme können diese Anforderungen erfüllen. Sie bestehen aus einem strahlungssensitiven Leuchtstoff, welcher über einen flexiblen Lichtleiter an einen Lichtdetektor gekoppelt ist. Die Eliminierung des dominierenden Störeinflusses, des bei Bestrahlung des Lichtleiters generierten Stem-Effekts, ist eine inhärente Herausforderung aller lichtwellenleiter¬basierten Dosisleistungsmesssysteme. In der vorliegenden Arbeit wird ein solches System unter Verwendung der Lumineszenz der gewebeäquivalenten Detektormaterialien Berylliumoxid und Lithiumtetraborat realisiert. Der Schwerpunkt liegt dabei auf der Untersuchung von Methoden der Stem-Eliminierung unter Nutzung der zeitlichen Charakteristik der Lumineszenzmaterialien sowie der zeitlichen Struktur des Strahlungsfeldes oder einer modulierten optischen Stimulation. Eine performante Ausleseelektronik auf FPGA-Basis ermöglicht Echtzeit-Messungen mit einer Abtastung von 10 ns. Verschiedene Auswertemethoden generieren aus den Rohdaten in Zeitstempelform eine stem-unabhängige, dosisleistungsproportionale Detektorantwort. / In medicine and technology there is a demand for flexible, miniaturized dose rate measurement systems with high spatial resolution for the application in radiation fields of high dose rates and dose rate gradients. Fiber optic coupled dosimeters can meet these requirements. They consist of a radiation sensitive luminescent material which is connected to a light detector with a flexible light guide. The elimination of the dominant perturbation, which is the stem effect generated by irradiation of the light guide, is one inherent challenge of all fiber optic dosimeters. In the present work such a system is realized, using the luminescence of the two tissue equivalent detector materials beryllium oxide and lithium tetraborate. The main focus is on the investigation of methods of stem elimination, exploiting the temporal characteristics of the luminescent materials, as well as the time structure of the irradiation or a modulated optical stimulation. For this purpose, capable FPGA-based read out electronics are employed, which enable real time measurements with 10 ns sampling. Different methods of analysis process the time stamp raw data and generate a stem-free, dose rate proportional detector response.