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Structural analysis of metalorganic chemical vapor deposited AlN nucleation layers on Si (111)Zang, Keyan, Wang, Lianshan, Chua, Soo-Jin, Thompson, Carl V. 01 1900 (has links)
AlN nucleation layers are being investigated for growth of GaN on Si. The microstructures of high-temperature AlN nucleation layers grown by MOCVD on Si (111) substrates with trimethylaluminium pre-treatments have been studied using atomic force microscopy (AFM) and transmission electron microscopy (TEM). The AFM results show that with TMA pre-treatments, AlN grows in a pseudo-2-dimensional mode because the lateral growth rate of AlN is increased, and the wetting property of the AlN on silicon is improved. Also, no amorphous SiNx layer was observed at the interface with TMA pre-treatments and AlN films with good epitaxial crystalline quality were obtained. Transmission electron diffraction patterns revealed that the AlN and Si have the crystallographic orientation relationship AlN [0001]âSi[111] and AlN[11 2 0] âSi[110]. High resolution transmission electron microscopy indicates a 5:4 lattice matching relationship for AlN and Si along the Si [110] direction. Based on this observation, a lattice matching model is proposed. / Singapore-MIT Alliance (SMA)
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The Effect of Periodic Silane Burst on the Properties of GaN on Si (111) SubstratesZang, Keyan, Chua, Soo-Jin, Thompson, Carl V. 01 1900 (has links)
The periodic silane burst technique was employed during metalorganic chemical vapor deposition of epitaxial GaN on AlN buffer layers grown on Si (111). Periodic silicon delta doping during growth of both the AlN and GaN layers led to growth of GaN films with decreased tensile stresses and decreased threading dislocation densities, as well as films with improved quality as indicated by x-ray diffraction, micro-Raman spectroscopy, atomic force microscopy, and transmission electron microscopy. The possible mechanism of the reduction of tensile stress and the dislocation density is discussed in the paper. / Singapore-MIT Alliance (SMA)
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Metal particle catalyst formation from thin films for the creation of vertically aligned carbon nanotube structuresOlsen, Brian Unknown Date
No description available.
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An investigation of various hydrocarbon sources in the production of carbon nanoparticles via a plasma enhanced chemical vapour deposition technique.Singh, Shivan Royith. January 2010 (has links)
A simple, low cost microwave plasma enhanced chemical vapour deposition (PECVD) technique for the production of carbon nanostructures has been developed in the School‟s Materials Science Laboratory. The technique utilises a conventional microwave oven as an energy source, various hydrocarbons as a carbon source, a metallic aerial as a catalyst and hydrogen to support the process. The input hydrocarbon and the hydrogen flow rate are
independently varied to investigate their effect on the resultant nanostructures. This technique allows for the production of carbon nanotubes (CNTs), onion-like nanostructures structures (ONSs) and amorphous carbon, which has been verified via transmission and scanning electron microscopy. A change in input parameters results in the controllable yield of CNTs versus
ONSs. The formation of amorphous carbon is reduced by controlling the hydrogen flow rate. In further experiments, the thermal conductivity of the ONSs is investigated using the "Lee‟s Disk" method. It was observed that bulk ONS specimens exhibit a thermal conductivity above that of amorphous carbon powder. Insufficient quantities of CNTs were grown using this method to facilitate a comparable thermal conductivity investigation. / Thesis (M.Sc.)-University of KwaZulu-Natal, Durban, 2010.
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Surface reactions of zinc vapour with steel relevant to the Zn-55%Al-1.5%Si hot dip metal coating processWilliams, Joseph James. January 2005 (has links)
Thesis (Ph.D.)--University of Wollongong, 2005. / Typescript. Includes bibliographical references: leaf 191-198.
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Synthesis of strongly correlated oxides and investigation of their electrical and optical propertiesChannam, Venkat Sunil Kumar 14 September 2017 (has links) (PDF)
Strongly correlated oxides are studied widely for the host of unique applications, such as hightemperature superconductivity, colossal magneto resistance, exotic magnetic, charge and orbital ordering, and insulator-to-metal transitions. Transitional metal oxides which form the majority of the correlated oxide systems and oxides of Vanadium, especially VO2 and V2O5 are the two most favourite systems among researchers for several applications. In this thesis, the growth and characterization of VO2 and V2O5 are discussed along with a special focus on the optical property, especially thermochromic properties. Traditionally SMT behaviour and Infrared reflectively was the focus area for VO2 research, and its only until recently that VO2 is being treated as a much more complex system and investigated as highly responsive naturally disordered metamaterial near the phase transition temperature where the material exhibits semiconducting and metallic phase co-existence. Since each phase of VO2 has a distinct optical and electrical properties, controlling the extent of phase transitions by accurate temperature modulation, enables exploitation of the material for new properties like emissivity modulation in the NIR region and for creating IR visible reversible and rewritable patterns. V2O5 is traditionally seen as a high TCR material and regarded as material of choice for application ranging from catalysis, gas sensors to lithium batteries. In this study, however we focus on the optical properties of the material, especially the visible range thermochromic nature of V2O5 coatings synthesised by oxidative annealing of MOCVD grown VOx coatings. The impact of doping and selective oxygen vacancy generation on the thermochromic property are discussed
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Optimization of lead halide perovskite thin films by chemical vapour depositionKlue, Stephen Charles January 2021 (has links)
>Magister Scientiae - MSc / Perovskite solar cells have gained tremendous attention within the past
decade, due to its rapid improvement in power conversion e ciency (PCE),
with the current record cell at 25%. The aim of this study is to create a
repeatable and scalable chemical vapour deposition technique that can be
used to construct perovskite solar cells with a high PCE while maintaining
long-term stability. The technique requires the formation of a uniform and
compact lead halide layer, either PbI2 or PbCl2 that is sequentially converted
into the perovskite structure with the exposure of Methylammonium
iodide (MAI) vapour. The use of CVD with a 5 cm diameter quartz tube
was successfully used to deposit uniform thin lms of both PbI2 and PbCl2
over an area of 6 cm2 with a thickness deviation of 5%. Thickness control
was obtained by varying the amount of source material which allows for
repeatable control within 5% error, without the need for a crystal thickness
monitor.
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Development of a PP-MOCVD System and its Design and Operational Parameters for Uniform Industrial Coatings on 3D ObjectsLee, Darryl Liang Wee January 2014 (has links)
Increase in demand for uniform ceramic coatings on larger industrial components have led to a need for a PP-MOCVD coating system scale up. The objective of this thesis is to develop a fully functional coating system operating in the PP-MOCVD regime that is able to deposit thin film ceramic coatings on commercial or industrial components with complex 3D geometries.
This can be achieved by applying engineering and vacuum science theories, coupled with the established fundamentals of PP-MOCVD. A larger system was designed and assembled around the boundaries set by the dimensions and geometry of a stainless steel water pump impellor acting as the base substrate. Most of the components were sourced off the shelf from vacuum and fluid specialists. Components which were unavailable for various reasons were designed, and machined in-house by the departmental workshop.
Initial test depositions were conducted using small stainless steel disk substrates, heated using a resistive heater similar to the one utilised on the research scale system. The test depositions were performed with the heater and substrate combination placed in strategic locations. This is to test the overall uniformity of precursor flux in the chamber volume. The resulting coating uniformity on the disk surfaces were fair but problems such as the large collection of unreacted precursor on the chamber viewport and valve timing issues had to be addressed.
Before making any improvements to the system, each of the process areas leading to a successful deposition needed to be understood. Five process areas were developed: ‘Liquid Delivery’, ‘Atomization’, ‘Evaporation’, ‘Transport and Reactor Geometry’, and ‘Droplet Management’. Each of the process areas were analysed individually and changes were made to push for a maximum evaporation efficiency.
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The improved system provided opportunities to perform depositions that were once not possible for PP-MOCVD. Two sets of deposition tests were designed and conducted. Firstly, the improvements were justified with a series of depositions using flat stainless steel plates with dimensions 65x65x5mm. The other set of 3D case study depositions involve observing the effects of the operational parameters of PP-MOCVD on the uniformity and penetration depths of the coatings into different sized macro blind trenches.
Five geometric setup conditions were used to justify the improvements made to the system. These are: ‘Substrate positioned in the direct line of spray’, ‘Use of an unheated receptor’, ‘Use of a heated receptor’, ‘Use of an unheated receptor with a non-axial substrate setup’, and “Choked Flow’. As expected, the uniformity of the coatings on both sides of the plate varied significantly when the substrate is placed over the line of sight of the precursor spray. Similarly, the coating produced under the induced choked flow condition resulted in low conformality. The introduction of an unheated receptor plate resulted in an increase in uniformity on both sides of the plate. Further prove that PP-MOCVD is geometry independent is provided by the deposition made with the non-axial substrate placement resulting in a coating of similar result to the unheated receptor. The use of a heated receptor provided a source for a secondary evaporation of the larger precursor droplets collected resulting in an increase in coating thickness while maintaining good conformality.
The effects of temperature, pressure, injection volume, and concentration were explored in the final case study. With maximum depths of 50mm, the macro blind trenches has an aspect ratio of 1:1 and cross-sectional areas of 3x3mm, 9x9mm, and 15x15mm. The final results show that as the temperature rises, the depth penetrated into the trench decreases. This could be due to the change in rate limiting steps as homogeneous reactions begin to increase at higher temperatures. Similar trends were observed with increasing pressure. As the pressure difference between the volume of the trenches and the rest of the chamber decreases, the push needed to
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force the precursor down the trench also decreases, resulting in less depth penetration. The effects of injection volume and concentration observed, can be explained by how much precursor molecules are present during one pulse cycle. The more that is available at any given time, the more likely a reaction will occur and deeper the penetration will get. Of course a ceiling or a limit exists where the molecules in the chamber will get evacuated without being reacted.
The future work made possible as a result of the scaled up system are proposed. These include a scale up of the operational parameters to suit any given substrate geometry, improvements to the heating source to achieve greater thermal uniformity, further improvements to the overall system accessibility, and performing other depositions using different substrate materials and precursor types.
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Thin films deposition for energy efficient windows and solar cellsChen, Shuqun January 2016 (has links)
This work mainly investigates the use of aerosol assisted chemical vapour deposition (AACVD) process to fabricate thin film materials for energy efficient glazing and thin film solar cells applications. Ga-doped ZnO thin films were firstly deposited onto glass substrates by AACVD of zinc and gallium acetylacetonates in methanol. After optimizing the doping concentration, film thickness and heating temperature, ZnO:Ga coatings with high visible transparency (> 80 %) and infrared reflection (up to 48.9 % at 2500 nm) were obtained, which is close to the optical requirements for commercial energy saving glazing. Pyramid-shaped and plate-shaped zinc oxides films were then deposited on glass substrates by AACVD of zinc-acetate-dihydrate, acetic acid and deionized water in methanol. These surface-textured ZnO films exhibited good visible transparency (~70 %), low sheet resistance (~60 Ω sq-1) and ultra large haze factor (up to 98.5 %), which is the most hazy ZnO ever reported and can be potentially used as the front contact in thin-film solar cells. Finally, uniform compact CH3NH3PbI3 perovskite films with high phase purity and micron-sized pinhole-free grains were deposited on glass substrates by a novel two-step and three-step sequential AACVD process. In conclusion, AACVD shows a great potential for the scalable fabrication of ZnO-based and organometallic halide-based thin film materials.
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Electric field assisted chemical vapour deposition processes on titanium dioxide thin films for photocatalysisRomero, Luz January 2014 (has links)
This work investigates the use of the novel electric field assisted chemical vapour deposition (EACVD) process in the production of titanium dioxide thin films for photocatalytic applications on glass substrate. This work looks into the interaction of applied electric fields with the precursor species during the aerosol assisted chemical vapour deposition (AACVD) and atmospheric pressure chemical vapour deposition (APCVD) reaction of Titanium isopropoxide (TTIP) and Titanium (IV) Chloride (TiCl4) with different solvents. The electric field was generated by applying a potential difference between two fluorine-doped tin oxide glass sheets. The electric field was varied between 0 – 3000 Vm-1. The deposited films were analysed and characterized using scanning electron microscopy, X-ray diffraction, Raman spectroscopy, atomic force microscopy, UV-vis spectroscopy, water-contact angles and resazurin photcatalytic testing. It was observed that the application of electric fields produced changes in the morphology, particle size, growth rate, crystal orientation and crystal phases. Generally, films produced under the influence of the electric fields showed higher photo-activity than films produced in absence of electric fields. The deposited films produced from the electric field assisted aerosol chemical vapour deposition (EAACVD) showed higher photo-activity with applied AC electric fields than with applied DC electric fields. Likewise, they showed higher photo-activity than the deposited films produced from the electric field assisted atmospheric pressure chemical vapour deposition (EAAPCVD) with applied AC electric fields. The results obtained were explained by the interaction mechanisms between the electric fields and the precursor species, which differ depending on the CVD technique used. Although titanium dioxide photo-activity is comprised by a combination of factors, it was observed that an optimum can be obtained by varying both experimental conditions and field strength. In particular, optimum results were obtained for deposited films which showed long-shaped particles, reduced particle size and high preferential orientation in the anatase (004) plane. Electric field assisted chemical vapour deposition (EACVD) shows a great potential for the improvement of commercial products available in the market such as self-cleaning and antibacterial surfaces.
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