Electrodes in a solid oxide fuel cell (SOFC) must possess both adequate porosity and electronic conductivity to perform their functions in the cell. They must be porous to permit rapid mass transport of reactant and product gases and sufficiently conductive to permit efficient electron transfer. However, it is nearly impossible to simultaneously control porosity and conductivity using conventional design and fabrication techniques. In this dissertation, computational design and performance optimization of microarchitectured SOFCs is first investigated in order to achieve higher power density and thus higher efficiency than currently attainable in state-of-the-art SOFCs. This involves a coupled multiphysics simulation of mass transport, electrochemical charge transfer reaction, and current balance as a function of SOFC microarchitecture. Next, the fabrication of microarchitectured SOFCs consistent with the computational designs is addressed based on anode-supported SOFC button cells using the laser ablation technique. Finally, the performance of a fabricated SOFC unit cell is characterized and compared against the performance predicted by the computational model. The results show that the performance of microarchitectured SOFCs was improved against the baseline structure and measured experimental data were well matched to simulation results.

The need for post-CMOS nanoelectronics has led to the investigation of innovative device structures and materials. Graphene, a zero bandgap semiconductor with ballistic transport properties, has great potential to extend diversification and miniaturization beyond the limits of CMOS. The goal of this work is to study the growth of graphene on SiC using the novel method of selective graphitization. The major contributions of this research are as follows - First, epitaxial graphene is successfully grown on selected regions of SiC not capped by AlN deposited by molecular beam epitaxy. This contribution enables the formation of electronic-grade graphene in desired patterns without having to etch the graphene or expose it to any detrimental contact with external chemicals. Etching of AlN opens up windows to the SiC in desirable patterns for subsequent graphitization without leaving etch-residues (determined by XPS). Second, the impact of process parameters on the growth of graphene is investigated. Temperature, time, and argon pressure are the primary growth-conditions altered. A temperature of 1400oC in 1 mbar argon for 20 min produced the most optimal graphene growth without significant damage to the AlN capping-layer. Third, first-ever electronic transport measurements are achieved on the selective epitaxial graphene. Hall mobility of about 1550 cm2/Vs has been obtained to date. Finally, the critical limitations of the selective epitaxial graphene growth are enumerated. The advent of enhanced processing techniques that will overcome these limitations will create a multitude of opportunities for applications for graphene grown in this manner. It is envisaged to be a viable approach to fabrication of radio-frequency field-effect transistors.

Microfluidic technology has been grown rapidly in the past decade. Microfluidics can find wide applications in multiple fields such as medicine, electronics, chemical and biology. Micro-pumping is an essential part of a microfluidic system. This thesis presents the optimization process of AC electro-thermal micropump with respect to the geometry of electrode array and channel height.The thesis first introduces the theories of AC electrokinetic including dielectrophoresis, AC electro-osmosis (ACEO) and AC electro-thermal (ACET). Also presented are the basic theory and governing equations of microfluidics, the continuity equation, the Navier-Stokes equation, and the conservation of energy equation. AC electro-thermal effect results from the interplays between electric field, temperature field and fluid mechanics. Since the governing equations are highly non-linear, numerical simulation is extensively used to understand the effects of factors such as the electrode dimensions and channel height. By interfacing finite element analysis software COMSOL Multiphysics with Matlab, to the simulation model is able to scan the geometry variables so as to find the optimal micropump design. The optimization has been performed with respect to flow rate and power efficiency of the micropump.

Thèse de doctorat : Sciences. Dispositifs de l'électronique intégrée : Ecole Centrale de Lyon : 2003. / 215 réf.

Habilitation à diriger des recherches : Sciences physiques : Lille 1 : 2003. / Synthèse de travaux. N° d'ordre (Lille 1) : 400. Curriculum vitae. Bibliogr. p. 97-100. Liste des publications.

Thèse doctorat : Sciences. Dispositifs de l'électronique intégrée : Ecole Centrale de Lyon : 2003. / Titre provenant de l'écran-titre. 215 réf.

Thèse doctorat : Automatique, Traitement du signal, Génie Informatique : Nancy 1 : 2004. / Titre provenant de l'écran-titre.

Current MEMS development is driven by the need to develop various 'Miniaturized Total Chemical Analysis Systems ([mu]TAS), biological and chemical sensing, drug delivery, molecular separation, microfiltration, amplification, and sequencing systems. In this work, the use of flexural plate wave devices as an actuator has been investigated.This research was done with the aim of developing a platform to build FPW devices for use in System-On-Chip applications. It is well known that acoustic forces generated by a flexural plate wave (FPW) device can cause fluid motion, by the principle of acoustic streaming. Also the proven ability of FPW devices to cause mixing, filtration and to work as a chemical-biological sensor can be used towards building a micromachined [mu]TAS. The effects of the IDT finger width, spacing, aperture, membrane thickness, and driving conditions on the device performance was studied to understand the impact of IDT design on device performance.

As the superparamagnetic limit is reached, the magnetic storage industry looks to circumvent the barrier by implementing patterned media (PM) as a viable means to store and access data. Chemical mechanical polishing (CMP) is a semiconductor fabrication technique used to planarize surfaces and is investigated as a method to ensure that the PM is polished to surface roughness parameters that allow the magnetic read/write head to move seamlessly across the PM. Results from this research have implications in feasibility studies of utilizing CMP as the main planarization technique for PM fabrication. Benchmark data on the output parameters of the CMP process, for bit patterned media (BPM), based on the machine process parameters, pad properties, and slurry characteristics are optimized. The research was conducted in a systematic manner in which the optimized parameters for each phase are utilized in future phases. The optimum results from each of the phases provide an overall optimum characterization for BPM CMP. Results on the CMP machine input parameters indicate that for optimal surface roughness and material removal, low polish pressures and high velocities should be used on the BPM. Pad characteristics were monitored by non destructive technique and results indicate much faster deterioration of all pad characteristics versus polish time of BPM when compared to IC CMP. The optimum pad for PM polishing was the IC 1400 dual layer Suba V pad with a shore hardness of 57, and a k-groove pattern. The final phase of polishing evaluated the slurry polishing properties and novel nanodiamond (ND) slurry was created and benchmarked on BPM. The resulting CMP output parameters were monitored and neither the ND slurry nor the thermally responsive polymer slurry performed better than the commercially available Cabot iCue slurry for MRR or surface roughness. Research results indicate CMP is a feasible planarization technique for PM fabrication, but successful implementation of CMP for planarizing PM must address the high initial start up cost, increase in the number of replacement pads, and increase in polishing time to reach the required surface roughness for magnetic storage devices.

The following dissertation addresses the study of nano-magnetic devices configured to produce logic machines through magnetostatic coupling interactions. The ability for single domain magnets to reliably couple through magnetostatic interactions is essential to the proper functionality of Magnetic Cellular Automata (MCA) devices (p. 36). It was significant to explore how fabrication defects affected the coupling reliability of MCA architectures. Both ferromagnetic and anti-ferromagnetic coupling architectures were found to be robust to common fabrication defects. Experiments also verified the functionality of the previously reported MCA majority gate [1] and a novel implementation of a ferromagnetic MCA majority gate is reported. From these results, the study of clocking Magnetic Cellular Automata (MCA) interconnect architectures was investigated (p. 54). The wire architectures were saturated under distinct directions of an external magnetic field. The experimental results suggested ferromagnetic coupled wires were able to mitigate magnetic frustrations better than anti-ferromagnetic coupled wires. Simulations were also implemented supporting the experimental results. Ferromagnetic wires were found to operate more reliably and will likely be the primary interconnects for MCA. The first design and implementation of a coplanar cross wire system for MCA was constructed which consisted of orthogonal ferromagnetic coupled wires (p. 68). Simulations were implemented of a simple crossing wire junction to analyze micro-magnetic dynamics, data propagation, and associated energy states. Furthermore, two systems were physically realized; the first system consisted of two coplanar crossing wires and the second was a more complex system consisting of over 120 nano-magnetic cells. By demonstrating the combination of all the possible logic states of the first system and the low ground state achieved by the second system, the data suggested coplanar cross wire systems would indeed be a viable architecture in MCA technology. Finally, ongoing research of an unconventional method for image processing using nano-magnetic field-based computation is presented (p. 79). In magnetic field-based computing (MFC), nano-disks were mapped to low level segments of an image, and the magnetostatic coupling of magnetic dipole moments was directly related to the saliency of a low level segment for grouping. A proof of concept model for two MFC systems was implemented. Details such as the importance of fabricating circular nano-magnetic cells to mitigate shape anisotropy, experimental coupling analysis via Magnetic Force Microscopy, and current results from a complex MFC system is outlined.