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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.

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Spelling suggestions: "subject:"inductive coupled chlorine plasmas""

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A Study of Plasma-Induced Surface Roughness and Ripple Formation during Silicon Etching in Inductively Coupled Chlorine Plasmas / 誘導結合塩素プラズマを用いたシリコンエッチングにおけるプラズマ誘起表面ラフネスとリップル形成に関する研究

Nakazaki, Nobuya 23 March 2016 (has links)
京都大学 / 0048 / 新制・課程博士 / 博士(工学) / 甲第19687号 / 工博第4142号 / 新制||工||1639(附属図書館) / 32723 / 京都大学大学院工学研究科航空宇宙工学専攻 / (主査)教授 斧 髙一, 教授 稲室 隆二, 教授 青木 一生 / 学位規則第4条第1項該当 / Doctor of Philosophy (Engineering) / Kyoto University / DFAM
plasma etching
plasma-induced surface roughness
ripple formation
silicon etching
inductively coupled chlorine plasmas
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