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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.
1

Depth profiling of ultra-shallow implants in silicon

Al-Harthi, Salim January 2001 (has links)
No description available.
2

Development of a Low-Energy Ion Scattering Surface Analysis System Using a Time-of-Flight Method / Development of an Ion-Scattering System

Cervin, Andrew Claude January 1981 (has links)
An ion scattering surface analysis system using TOF energy-analysis of the scattered ions was improved with a duoplasmatron ion source and new data-handling electronics. The new source gave greater beam current and stability. The new electronics were: a timing filter amplifier and constant fraction discriminator. Much work was done on alignment of the sample in the beam and reduction of the spot size. To add to the flexibility of the beam guidance system a new pair of steering plates was added. Some of the test spectra are presented to show the operation of the system. Relevant material on various aspects of the system are presented in the appendices. / None / Master of Engineering (ME)
3

Development of Reactive Ion Scattering Spectrometry (RISS) as an Analytical Surface Characterization Technique

Joyce, Karen Elaine January 2008 (has links)
Reactive ion scattering spectrometry (RISS) utilizing low energy (tens of eV) polyatomic ions was employed to characterize self-assembled monolayers (SAMs) on gold. The terminal composition of halogenated SAMs, chemisorption motifs of disulfide and diselenide SAMs, and electron transfer properties of molecular wire containing SAMs were interrogated to develop the versatility of RISS as an analytical surface characterization technique.Novel halogen terminated SAMs were examined for their ability to convert translational to vibrational energy of colliding projectile ions. A general increasing energy deposition trend correlated with increasing terminal mass with the exception of the iodine functionality. Increased amounts of surface abstractions and sputtering from C12I suggest competitive ion-surface interactions account for less than predicted energy deposition results. Mixed films of CH2Br and CH3 terminal groups elucidated interfacial surface crowding discerned by energy deposition results.Thiol and disulfide based SAMs were shown by RISS comparisons to be dissimilar in structure. Terminal orientation, however, was the same based on ion-surface reactions, disproving the proposed dimer model of disulfide SAMs. Ion-surface reactions and electron transfer properties of disulfide surfaces suggested greater percentages of c(4x2) superlattice structure than in thiol SAMs. Based on increased hydrogen reactivity, decreased methyl reactivity, and increased energy deposition results, diselenide based SAMs were more disordered than S-Au based SAMs. Electron transfer results monitored through total ion currents (TIC) showed Se-Au contacts are more conductive than S-Au attachments.Molecular wire candidates whose electron transfer capabilities are difficult to characterize by traditional techniques were characterized by RISS after being doped into matrix SAMs. Electron transfer properties were dependent on the isolating SAM matrix, dipole moments of the wires, and the potential applied to the surface. Changes in surface voltage dictated molecular wire geometry and electron transfer. Wires were annealed into preferential geometries by colliding ions, but did not operate as switches.While not related to the advancement of RISS, structural elucidation of the pharmaceutical carvidioliol was investigated by collision-induced dissociation, surface-induced dissociation, sustained off-resonance irradiation, and sustained off-resonance irradiation-resonant excitation and through gas-phase hydrogen/deuterium exchange. This molecule fragmented easily by all methods and demonstrated the chemical specificity of gas-phase hydrogen/deuterium exchange experiments.
4

Hloubkové profilování multivrstev metodou LEIS / Depth profiling of multilayers by LEIS

Strapko, Tomáš January 2019 (has links)
Diplomová práce se zabývá vytvořením modelu, který by umožnil lepší interpretaci hloubkových profilů měřených metodou LEIS. Obtížnost interpretace těchto profilů je dána vysokým podílem vícenásobně odražených projektilů v meřených spektrech. Tyto projektily nepřináší užitečnou informaci z dané hloubky. Naproti tomu jednonásobně odražené projektily nesou přesnější informaci o složení a tloušťce vrstev. V této práci vytvořený model se snaží určit příspěvek jednonásobně odražených částic k celkovému tvaru spektra a na základě něj i hloubkový profil vzorku.
5

A Collisional Mechanism in the Ion-Solid Interaction Which Enhances Scattering Yields Near 180⁰

Holland, Orin Wayne 12 1900 (has links)
In the course of experiments using uniaxial double alignment channeling to investigate radiation damage in single crystals, an anomalously large ion-scattering yield from the near surface of disordered or simulated disordered solid targets was observed. The chronology of the discovery of this new ion-solid effect and its explanation are presented along with experiments detailing the dependence of the new effect upon ion type and energy, as well as target atomic number and density. Targets included a spectrum of polycrystalline elemental targets in a range Z = 29 to Z = 82. Also, the influence of the effect upon scattering yields from an aligned Au(110) single crystal is demonstrated.
6

Numerical Calculations of Ion Scattering in Solids

Kwok, K. 04 1900 (has links)
<p> The motion of energetic charged particles inside a crystalline solid is strongly dependent upon the orientation of the ion beam and target. This effect is commonly known as the "channeling" effect. In this report, the development of a computer code is presented which simulates the 3-D ion scatterings experienced by energetic particles moving in a crystalline solid. A Monte Carlo technique is incorporated in the code to calculate scattering angles, range distribution, backscattering distribution and angular distribution of incident ions. The Thomas-Fermi interatomic potential is used for binary collision process and the continuum potential is used for the potentials experienced by the channeled ions inside crystal lattices. </p> / Thesis / Master of Engineering (MEngr)
7

Development of a Low Energy Ion Mass Spectrometer

Karapetsas, Spyridon 02 1900 (has links)
<p> The interaction mechanisms of an ion beam with a solid target are identified. Basic parameters associated with ion scattering, charge neutralization, inelastic energy losses and secondary ion production are described. Low energy (1-20 kev) experimental studies on these topics are reviewed. A low energy ion mass spectrometer is described. The ion beam is generated by an existing kev ion accelerator and is directed to a newly constructed UHV target chamer. The energy and angular distributions of the backscattered particles are measured with a hemispherical electrostatic analyser and a channeltron detector. A high precision goniometer allows target rotation about two perpendicular axes by angles of 180° and 90° with an accuracy and repeatability of 0.1°. The interaction chamber is bakeable to 250°c and was designed for an ultimate pressure of 10^-11 torr. The data acquisition system chamber scans the energy spectrum automatically so that the radiation dosage at the target is equalized for all channels. </p> / Thesis / Master of Engineering (MEngr)
8

Characterization of Self-Assembled Monolayers by Low Energy Reactive Ion Scattering: Influences of Terminal Group Composition and Structure on Ion-Surface Interaction

Yang, Xi January 2006 (has links)
Low energy (tens of eV) polyatomic cations were used as probes for characterization of monolayers of spontaneously chemisorbed thiols on gold. Characteristics including chemical composition, surface order and orientation of the self-assembled monolayers (SAMs) can be derived by monitoring the products of projectile ion neutralization, surface-induced dissociation (SID), and ion-surface reactions.To study the influence of the terminal group chemical structures and orientations of the SAMs on ion-surface interactions, a series of semi-fluorinated alkane thiols with difluoromethylenes buried underneath hydrocarbon terminal groups were examined (CH3CF2CH2− and CH3CH2CF2−). Compared to terminally fluorinated SAMs, they showed more projectile ion neutralization and less internal to vibrational energy deposition into precursor ions. Projectile ion-hydrocarbon reactions decreased significantly when difluoromethylenes are one or two bonds away from the terminal group. Furthermore, ion-surface reaction results on surfaces with odd and even chain lengths suggested that they have similar terminal methyl orientations to their hydrocarbon counterparts.Mixed monolayers of CF3CF2(CH2)14SH (F-SAMs) and CH3(CH2)15SH (H-SAMs) with systematically changing electron transfer, energy deposition and ion-surface reaction were prepared using mixed thiols solution and micro-contact printing (μ-CP). The solution mixture system showed linear variations in electron transfer and energy deposition with different F-SAM surface concentrations, while non-linear changes occur for ion-surface reaction suggesting strong lateral interactions between the two components. These interactions are minimized in the μ-CP system containing domains of each thiol. Energy deposition on the patterned surfaces varies non-linearly with changing F-SAM concentration which differs from the homogenously mixed system.To explore SID with a 90 collision angle, eV SID of a series of protonated peptide ions were performed in an in-line sector Time-Of-Flight (TOF) mass spectrometer. The results were compared to keV collision-induced dissociation (CID) data collected with the same instrument. Fragmentation efficiency for SID was higher than CID for those peptides. In addition to the excellent control over laboratory collision energies with SID, different amount of energy deposition can be achieved when varying surface composition, e.g. using mixed F-SAM/H-SAM.Reactive ion scattering spectrometry (RISS) results provided more in-depth knowledge of low energy ion-surface interactions that will promote usage of RISS as a novel surface characterization technique.
9

Nízkoenergiový rozptyl iontů inertních plynů na zlatých strukturách / Low Energy Ion Scattering on Gold Structures

Joch, Vítězslav January 2011 (has links)
This diploma thesis deals with comparison of experimental and simulated low energy ion scattering spectra. There is a theoretical description of basic principles of low energy ion scattering and description of the spectrometer, which is situated at Institute of physical engineering. It is shown, how to prepare samples using the colloidal gold solution. The deposition of gold nanoparticles is characterized. The usage and meaning of time and energy spectra of low energy ion scattering is explained. There is also shown the effect of channeling in Si substrate.
10

Strukturierte NV-Qubits durch hochaufgelöste räumlich-selektive Einzelionenimplantation

Raatz, Nicole 02 September 2021 (has links)
Hochaufgelöste räumlich-selektive Einzelionenimplantation ist eine Schlüsseltechnologie um Festkörper-Qubits herzustellen. Der in dieser Arbeit verwendete Nanoimplanter benutzt zur Kollimation eines niederenergetischen Ionenstrahls auf Nanometerebene eine Rasterkraftmikroskop-(AFM-)Spitze, welche mit einer Nanoapertur ausgestattet ist. Diese Technik wurde bereits für verschiedene Quantenanwendungen genutzt. In dieser Arbeit wird sie auf die Erzeugung strukturierter Stickstoff-Fehlstellen-(NV-)Zentren weiterentwickelt und optimiert. Dies umfasst unter anderem die Installation eines neuen AFM-Systems, welches den Aufbau mit zwei nützlichen Funktionen aufrüstet: die In-situ-Aperturvermessung und die Untersuchung von Ionen-sensitiven Fotolacken. Weiter werden die zwei wichtigsten limitierenden Faktoren der räumlichen Auflösung durch Simulationen und Experimente detailliert untersucht. Die Ergebnisse geben Aufschluss über optimale Nanoaperturen und Implantationsbedingungen. Streueffekte an der AFM-Spitze und Gitterführungen in Diamant können dadurch maßgeblich reduziert werden. Weiter werden NV-limitierende Effekte durch mehrere Ausheizschritte sowie Ionen- und Elektronenbestrahlungen untersucht. Zuletzt werden erstmals diamantbasierte Ionendetektoren hergestellt, welche mit Kapazität- und Strom-Spannungs-Messungen, durch Röntgenbestrahlung und Ionenstrahl-induzierter Ladung (IBIC) charakterisiert werden. Die Ergebnisse zeigen, dass die angefertigten Detektoren die Bedingungen für eine deterministische Implantation erfüllen, so dass dieses Prinzip zukünftig in den Nanoimplanter integriert werden kann. / High-resolution spatial-selective single ion implantation is a key technology to produce solid state qubits. The nanoimplanter used in this work collimates a low-energy ion beam at the nanometer level using an atomic force microscope (AFM) tip, which is provided with a nanoaperture. This technique has already been used for various quantum applications. In this thesis it is further developed and optimized for the generation of structured nitrogen vacancy (NV) centers. This includes the installation of a new AFM system, which upgrades the setup with two useful functions: in-situ aperture measurement and the investigation of ion sensitive photoresists. Furthermore, the two most significant limiting factors of spatial resolution are studied in detail by simulations and experiments. The results indicate optimized nanoapertures and implantation conditions. Scattering effects at the AFM tip and ion channeling in diamond can be significantly reduced. Moreover, NV-limiting effects are investigated by several heating steps as well as ion and electron irradiations. Finally, novel diamond based ion detectors are manufactured, that are characterized by capacitance and current-voltage measurements, by X-ray irradiation and ion beam induced charge (IBIC). The results show these detectors fulfill the conditions for a deterministic implantation, so that this concept can be integrated into the nanoimplanter in the future.

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