This work was focused on the characterization of microparticles with particular emphasis on waterborne pathogens which pose a great health risk to human lives. The goal of this study was to develop microfluidic systems for enhanced characterization and isolation of bioparticles. Insulator-based dielectrophoresis (iDEP) is a promising technique for analyzing, characterizing and isolation of microparticles based on their electrical properties. By employing insulator-based constrictions within the microchannel in combination with microelectrodes within the vicinity of the electrodes, dielectrophoretic performance is enhanced. In this study, three dimensional insulator-based dielectrophoresis devices are fabricated using our in-house developed 3D micromachining technique. This technology combines the benefits of electrode-based DEP, insulator-based DEP, and three dimensional insulating features with the goal of improving trapping efficiency of biological species at low applied signals and fostering wide frequency range operation of the microfluidic device. The dielectric properties of bacteria as well as submicron polystyrene beads are discussed and the impact of these results on the future development of iDEP microfluidic systems is explored. / Master of Science

This thesis reports development of three different high performance, low g-sensitive micromachined gyroscopes having single, double, and quadruple masses. The single mass gyroscope (SMG) is developed for comparison of its performance with the double mass gyroscope (DMG) and quadruple mass gyroscope (QMG). DMG is a tuning fork gyroscope, diminishing the effects of unpredictable g-loadings during regular operation, while QMG is a twin tuning fork gyroscope, developed for a uniform and minimized g-sensitivity. DMG and QMG use novel ring spring connections for merging the masses in drive modes, providing uniform and anti-phase drive mode vibrations that minimize the cross-coupling and the effects of intrinsic and extrinsic accelerations on the scale factor and bias levels of the gyroscopes. The sense mode of each mass of the multi-mass gyroscopes is designed to have higher resonance frequencies than that of the drive mode for possible matching requirements, and these sense modes have dedicated frequency tuning electrodes for frequency matching or tuning. Detailed performance simulations are performed with a very sophisticated computer model using the ARCHITECT software. These gyroscopes are fabricated using a standard SOIMUMPs process of MEMSCAP Inc., which provides capacitive gaps of 2 &micro / m and structural layer thickness of 25 &micro / m. Die sizes of the fabricated gyroscope chips are 4.1 mm x 4.1 mm for the single mass, 4.1 mm x 8.9 mm for the double mass, and 8.9 mm x 8.9 mm for the quadruple mass gyroscope. Fabricated gyroscopes are tested with dedicated differential readout electronics constructed with discrete components. Drive mode resonance frequencies of these gyroscopes are in a range of 3.4 kHz to 5.1 kHz. Depending on the drive mode mechanics, the drive mode quality (Q) factors of the fabricated gyroscopes are about 300 at atmospheric pressure and reaches to a value of 2500 at a vacuum ambient of 50 mTorr. Resolvable rates of the fabricated gyroscopes at atmospheric pressure are measured to be 0.109 deg/sec, 0.055 deg/sec, and 1.80 deg/sec for SMG, DMG, and QMG, respectively. At vacuum, the respective resolutions of these gyroscopes improve significantly, reaching to 106 deg/hr with the SMG and 780 deg/hr with the QMG, even though discrete readout electronics are used. Acceleration sensitivity measurements at atmosphere reveal that QMG has the lowest bias g-sensitivity and the scale factor g sensitivity of 1.02deg/sec/g and 1.59(mV/(deg/sec))/g, respectively. The performance levels of these multi-mass gyroscopes can be even further improved with high performance integrated capacitive readout electronics and precise sense mode phase matching.

This thesis reports the development of a wide-bandwidth high-sensitivity mode-decoupled MEMS gyroscope showing robustness against ambient pressure variations. The designed gyroscope is based on a novel 2 degrees of freedom (DoF) sense mode oscillator, which allows increasing the operation bandwidth to the amount required by tactical-grade and inertial-grade operations while reaching the mechanical sensitivity of near matched-mode vibratory gyroscopes. Thorough theoretical study and finite element simulations verify the high performance operation of the proposed 2 DoF sense mode oscillator design. The designed gyroscope is fabricated using the in-house developed silicon-on-glass (SOG) micromachining technology at METU Microelectronics (METU-MET) facilities. The fabricated gyroscope measures only 5.1 x 4.6 mm square. The drive mode oscillator of the gyroscope reaches quality factor of 8760 under 25 mTorr vacuum environment, owing to high quality single crystal silicon structural layer. The sense mode bandwidth is measured to reach 2.5 kHz at 40 V proof mass voltage. When the fabricated gyroscope is operated with a relatively wide bandwidth of 1kHz, measurements show a relatively high raw mechanical sensitivity of 131 uV/(deg/s). Fabricated gyroscope is hybrid connected to external closed-loop drive mode amplitude control and open-loop sense mode readout electronics developed at METU-MEMS research group, to form a complete angular rate measurement system (ARMS). The scale factor of the ARMS is measured to be 13.1 mV/(deg/s) with a maximum R square nonlinearity of 0.0006 % and a maximum percent deviation nonlinearity of 0.141 %, while the maximum deviation of the scale factor for large vacuum level variations between 40 mTorr to 500 mTorr is measured to be only 0.38 %. The bias stability and angle random walk of the gyroscope are measured to be 131 deg/h and 1.15 deg/ rooth, respectively. It is concluded that, the mechanical structure can be optimized to show its theoretical limits of sensitivity with improvements in fabrication tolerances. The proposed 2 DoF sense mode oscillator design shows the potential of tactical-grade operation, while demonstrating extreme immunity to ambient pressure variations, by utilizing an optimized mechanical structure and connecting the gyroscope to dedicated low-noise electronics.

This thesis study presents the design, simulation, micro fabrication, and testing steps of microelectromechanical systems (MEMS) based electromagnetic micro power generators. These generators are capable of generating power using already available environmental vibrations, by implementing the electromagnetic induction technique. There are mainly two objectives of the study: (i) to increase the bandwidth of the traditional micro generators and (ii) to improve their efficiency at low frequency environmental vibrations of 1-100 Hz where most vibrations exist. Four main types of generators have been proposed within the scope of this thesis study. The first type of generator is mainly composed of 20 parylene cantilevers on which coils are fabricated, where the cantilevers are capable of resonating with external vibrations with respect to a stationary magnet. This generator has dimensions of 9.5&times / 8&times / 6 mm3, and it has been shown that 0.67 mV of voltage and 56 pW of power output can be obtained from a single cantilever of this design at a vibration frequency of 3.45 kHz. The second type generator aims to increase the bandwidth of the traditional designs by implementing cantilevers with varying length. This generator is sized 14&times / 12.5&times / 8 mm3, and the mechanical design and energy generation concept is similar to the first design. The test results show that by using 40 cantilevers with a length increment of 3 &amp / #956 / m, the overall bandwidth of the generator can be increased to 1000 Hz. It has also been shown that 9 mV of constant voltage and 1.7 nW of constant power output can be obtained from the overall device in a vibration frequency range of 3.5 to 4.5 kHz. The third type is a standard large mass coil type generator that has been widely used in the literature. In this case, the generator is composed of a stationary base with a coil and a magnet-diaphragm assembly capable of resonating with vibrations. The fabricated device has dimensions of 8.5&times / 7&times / 2.5 mm3, and it has been considered in this study for benchmarking purposes only. The test results show that 0.3 mV of voltage and 40 pW of power output can be obtained from the fabricated design at a vibration frequency of 113 Hz. The final design aims to mechanically up-convert low frequency environmental vibrations of 1-100 Hz to a much higher frequency range of 2-3 kHz. This type of generator has been implemented for the first time in the literature. The generator is composed of two parts / a diaphragm-magnet assembly on the top, and 20 cantilevers that have coils connected in series at the base. The diaphragm oscillates by low frequency environmental vibrations, and catches and releases the cantilevers from the tip points where magnetic nickel (Ni) areas are deposited. The released cantilevers then start decaying out oscillations that is at their damped natural frequency of 2-3 kHz. It has been shown with tests that frequency up-conversion is realized in micro scale. The fabricated device has dimensions of 8.5&times / 7&times / 2.5 mm3, and a maximum voltage and power output of 0.57 mV and 0.25 nW can be obtained, respectively, from a single cantilever of the fabricated prototype at a vibration frequency of 113 Hz.

This thesis study presents the design, simulation, and fabrication of a low frequency electromagnetic micro power generator. This power generator can effectively harvest energy from low frequency external vibrations (1-100 Hz). The main objective of the study is to increase the efficiency of the previously proposed structure in METU-MEMS Center, which uses the frequency up-conversion technique to harvest energy from low frequency vibration. The proposed structure has been demonstrated by constructing several macro scale prototypes. In one of the constucted prototypes, the diaphragms are connected to a fixed frame via metal springs. The upper diaphragm having lower resonance frequency carries a magnet, and the lower diaphragm carries a hand wound coil and a magnetic piece for converting 6 Hz external vibrations up to 85 Hz, resulting a maximum voltage and power levels of 11.1 mV and 5.1 &micro / W, respectively. In an improved prototype, the metal springs are replaced with rubber ones, providing higher energy conversion efficiency and flexibility to tune the resonance frequency of both diaphragms to desired values. This prototype provides 104 &micro / W maximum power and 37.7 mV maximum voltage in response to vibration levels of 30 Hz. The proposed structure is also suitable to be realized by using microfabrication techniques. Hence, the structure to be microfabricated is studied and optimized for this purpose. When scaled to microelectromechanical dimensions, the expected maximum power and voltage from the 10 x 8.5 x 2.5 mm3 generator is 119 nW and 15.2 mV, respectively. A microfabrication process has also been designed for the proposed generator structure. According to this process, the structure consists of a stack of two pieces, each carrying different diaphragms. The diaphragms are made of parylene, and the coil and the magnetic piece are electroplated copper and nickel, respectively. As a result of this study, a new topology is proposed for harvesting energy at low frequency vibrations by the frequency up-conversion technique, and an efficiency improvement is expected with more than three orders of magnitude (119 nanoWatts output for the same size) compared to the study realized in our laboratory in converting low frequency (70-150 Hz) environmental vibrations to electrical energy.

This thesis presents analysis, design, implementation, and testing of electrostatically actuated MEMS microvalves. The microvalves are specifically designed for lab-on-a-chip applications to achieve leakage ratios below 0.1 at pressure levels in the order of 101 kPa. For this purpose, two different microvalves are presented in the study. In the proposed designs, electrostatic actuation scheme is utilized to operate the microvalves in normally open and normally closed modes. Characterization of normally open microvalves show that, microvalves with radii ranging between 250

The growing demand for wireless communication systems is driving the integration of radio frequency (RF) front-ends on the same chip with multi-band functionality and higher spectral efficiency. Microelectromechanical systems (MEMS) have an overarching applicability to RF communications and are critical components in facilitating this integration process. Among a variety of RF MEMS devices, piezoelectric MEMS resonators have sparked significant research and commercial interest for use in oscillators, filters, and duplexers. Compared to their bulky quartz crystal and surface acoustic wave (SAW) counterparts, MEMS resonators exhibit impressive advantages of compact size, lower production cost, lower power consumption, and higher level of integration with CMOS fabrication processes. One of the promising piezoelectric MEMS resonator technologies is the aluminum nitride (AlN) contour mode resonator (CMR). On one hand, AlN is chemically stable and offers superior acoustic properties such as large stiffness and low loss. Furthermore, CMRs offer low motional resistance over a broad range of frequencies (few MHZ to GHz), which are lithographically-definable on the same silicon substrates. To date, RF MEMS resonators (include CMRs) have been extensively studied; however, one aspect that was not thoroughly investigated is how to modulate/tune their equivalent parameters to enhance their performance in oscillators and duplexers. The goal of this thesis is to investigate various modulation methods to improve the thermal stability of the resonator, its “effective” quality factor when used in an oscillator, and build completely novel non-reciprocal components. Broadly defined, modulation refers to the exertion of a modifying or controlling influence on something, herein specifically, the resonator admittance. In this thesis, three categories of modulation methods are investigated: thermal modulation, force modulation, and external electronic modulation. Firstly, the AlN CMR’s center frequency can be tunned by the applied thermal power to the resonator body. The resonator temperature is kept constant (for example, 90 °C) via a temperature sensor and feedback control such that the center frequency is stable over the whole operation temperature range of interest (e.g. –35 to 85 °C). The maximum power consumption to sustain the maximum temperature difference (120 ºC in this thesis) between resonator and ambient is reduced to a value as low as 353 μW – the lowest ever reported for any MEMS device. These results were attained while simultaneously maintaining a high quality factor (up to 4450 at 220 MHz device). The feedback control was implemented by either analog circuits or via a microprocessor. The analog feedback control, which innovatively utilized a dummy resistor to compensate for temperature gradients, resulted in a total power consumption of 3.8 mW and a frequency stability of 100 ppm over 120 ºC. As for the digital compensation, artificial neural network algorithm was employed to facilitate faster calibration of look-up tables for multiple frequencies. This method attained a frequency stability of 14 ppm over 120 ºC. The second modulation method explored in this thesis is based on the use of an effective external force to enhance the 3-dB quality factor of AlN CMRs and improve the phase noise performance of resonator-based oscillators. The force modulation method was embodied in a two-port device, where one of the two ports is used as a one-port resonator and the other is driven by an external signal to effectively apply an external force to the first port. Through this technique, the quality factor of the resonator was boosted by 140 times (up to 150,000) and the phase noise of the corresponding oscillator realized using the resonator was reduced by 10 dBc/Hz. Lastly, a novel magnetic-free electrical circulator topology that facilitates the development of in-band full duplexers (IBFD) for simultaneous transmit and receive (STAR) is proposed and modeled. Fundamentally, a linear time-invariant (LTI) filter network parametrically modulated via a switching matrix is used to break the reciprocity of the filter. The developed model accurately predicts the circulator behavior and shows very good agreement with the experimental results for a 21.4 MHz circulators built with MiniCircuit filter and switch components. Furthermore, a high frequency (1.1 GHz) circulator was synthesized based on AlN MEMS bandpass filters and CMOS RF switches, hence showing a compact approach that can be used in handheld devices. The modulation frequency and duty cycle are optimized so that the circulator can provide up to 15 dB of isolation over the filter bandwidth while good power transfer between the other two ports is maintained. The demonstrated device is expected to intrinsically offer low noise and high linearity. The combination of the first two modulation methods facilitates the implementation of monolithic, temperature-stable, ultra-low noise, multi-frequency oscillator banks. The third modulation technique that was investigated sets the path for the development of CMOS-compatible in-band full duplexers for simultaneous transmit and receive and thus facilitates the efficient utilization of the electromagnetic spectrum. With the aid of all these three modulation approaches, the author believes that a fully integrated, multi-frequency, spectrum-efficient transceiver is enabled for next-generation wireless communications.

Modern smartphone technology has created a myriad of opportunities in the field of RF and Microwave. Specifically, Chipless RFID sensor, compact microwave filter, antenna based on a microstrip structure, and many more. In this thesis, innovative ideas for the industrial and biomedical device has been explored. The work presents the reconfigurable filter design, Switch-beam antenna, Microwave interferometer, X-band Rotman Lens antenna, Ultra-wideband antenna based on SIW resonator, L-band Stepped Frequency Continuous Wave antenna, development of a wireless sensor system for environmental monitoring, Indoor Air Quality monitoring, and Wildfire Monitoring based on the modulated scattering technique (MST). The MST sensor probes are based on the scattering properties of small passive antennas and radiate part of the impinging electromagnetic field generated by an interrogating antenna, which also acquires the backscattered signal as information. The MST probes are able to deliver data without a radio frequency front end. They use a simple circuit that alternatively terminates the antenna probe on suitable loads to generate a low modulation signal on the backscattered electromagnetic wave. The antenna presented in this work has been designed in ADS Software by Keysight Technologies. The designed antenna has been assessed numerically and experimentally. The experimental measurement data demonstrate the effectiveness of the individual system. Simultaneously, the MST sensor system has been proposed to obtain the best performance in communication range, load efficiency, and power harvesting. The MST sensor has been fabricated and assessed in practical scenarios. The proposed prototype, able to provide a communication range of about 15 m, serves as a proof-of-concept. The acquired measurements of MST demonstrate the accuracy of the data without radio frequency front end or bulky wired connection with the same efficiency of standard wireless sensors such as radio frequency identifier (RFID) or wireless sensor networks (WSN).

Cancer progression and physiological changes within the cells are accompanied by alterations in the biophysical properties. Therefore, the cell biophysical properties can serve as promising markers for cancer detection and physiological activities. To aid in the investigation of the biophysical markers of cells, a microfluidic chip has been developed which consists of a constriction channel and embedded microelectrodes. Single-cell impedance magnitudes at four frequencies and entry and travel times are measured simultaneously during their transit through the constriction channel. This microchip provides a high-throughput, label-free, automated assay to define biophysical signatures of malignant cells and monitor the therapeutic efficacy of drugs. Here, we monitored the dynamic cellular biophysical markers in response to sphingosine kinase inhibitors (SphKIs), and compared the effectiveness of drug delivery using Poly(lactic-co-glycolic acid) (PLGA) nanoparticles (NPs) loaded with SphKIs versus conventional delivery. Cells treated with SphKIs showed significantly higher impedance magnitudes at all four frequencies. The bioelectrical parameters extracted using a model also revealed that the highly aggressive breast cells treated with SphKIs shifted electrically towards that of a less malignant phenotype; SphKI-treated cells exhibited an increase in cell-channel interface resistance and a significant decrease in specific membrane capacitance. Furthermore, SphKI-treated cells became slightly more deformable as measured by a decrease in their channel entry and travel times. We observed no significant difference in the bioelectrical changes produced by SphKI delivered conventionally or with NPs. However, NPs-packaged delivery of SphKI decreased the cell deformability. In summary, the results showed that while the bioelectrical properties of the cells were dominantly affected by SphKIs, the biomechanical properties were mainly changed by the NPs. / Master of Science

Microelectromechanical systems (MEMS) devices have been increasing in popularity for radio frequency (RF) and microwave communication systems due to the ability of MEMS devices to improve the performance of these circuits and systems. This interdisciplinary field combines the aspects of lithographic fabrication, mechanics, materials science, and RF/microwave circuit technology to produce moving structures with feature dimensions on the micron scale (micro-structures). MEMS technology has been used to improve switches, varactors, and inductors to name a few specific examples. Most MEMS devices have been fabricated using planar micro fabrication techniques that are similar to current integrated circuit (IC) fabrication techniques. These techniques limit the thickness of individual layers to a few microns, and restrict the structures to have planar and not vertical features. One micro fabrication technology that has not seen much application to microwave MEMS devices is LIGA, a German acronym for X-ray lithography, electroforming, and moulding. LIGA uses X-ray lithography to produce very tall structures (hundreds of microns) with excellent structural quality, and with lateral feature sizes smaller than a micron. These unique properties have led to an increased interest in LIGA for the development of high performance microwave devices, particularly as operating frequencies increase and physical device size decreases. Existing work using LIGA for microwave devices has concentrated on statically operating structures such as transmission lines, filters, couplers, and antennas. This research uses these unique fabrication capabilities to develop dynamically operating microwave devices with high frequency performance. This thesis documents the design, fabrication and testing of LIGA-MEMS variable capacitors that exploit the vertical dimension. Also included are methods to improve both the reliable fabrication and operation of these devices as well as material property characterization. Variable capacitors can be found in systems such as voltage-controlled oscillators, filters, impedance matching networks and phase shifters. Important figures-of-merit for these devices include the quality factor (Q), tuning range and tuning voltage. Two different types of variable capacitors are presented, a pull-away design and a design based on the principle of leveraged bending. The pull-away style variable capacitors were found to have high Q-factors, especially the devices fabricated using a thick gold device layer. As an example, the small gold half capacitance electrode design features a Q-factor of 95 at an operating frequency of 5.6 GHz and a tuning ratio of 1.36:1 with a tuning voltage range of 0 to 7.8 V. The design based on leveraged bending significantly improves the tuning ratio to a value of 1.9:1 while still maintaining a high Q-factor similar to those found in the pull-away style designs. A further increase in tuning ratio to a value of approximately 2.7:1 would be possible, based on simulated results, by simply changing the angle of the capacitance electrode in the layout. To improve device performance and fabrication reliability, modifications were made to both the fabrication process and the device layout. In the fabrication process the exposure step, electroplating step, and the etching process were modified to improve the quality of the resulting devices. In the layout, anti-stiction measures were introduced that reduce the contact area during collapse. To improve device characterization as well as the feedback link between simulation and fabrication, a set of test structures called VM-TEST was developed to accurately determine the important mechanical material properties of thick electroplated layers. These structures utilize the measurement of the pull-in voltage in cantilever and fixed-fixed beams, along with measured structure dimensions, to accurately extract the mechanical properties. Both nickel and gold test structures were analyzed with extracted Young’s modulus values of 186.2 and 60.8 GPa respectively. Also presented is a study of the gap shape in cantilever and fixed-fixed beams that significantly reduces the pull-in voltage while still maintaining a required maximum actuator displacement. It was shown that in the case of cantilever beam actuators, an approximately 40% reduction in pull-in voltage is possible, and in the case of fixed-fixed beam actuators, an approximately 30% reduction is possible by simply varying the shape of the gap between the beam and actuator electrode. These results can be used to significantly reduce the pull-in voltage of future designs. These promising results show that the LIGA fabrication process is capable of producing high performance dynamically operating RF MEMS devices, by exploiting the vertical dimension, not typically performed in most existing RF MEMS designs.