Increased power densities in VLSI chips have led to a need to develop cooling methods that can cope with the increased heat produced by such chips. Currently one of the more attractive methods to meet this goal is through the use of two phase flow of a fluid as changing phase of the material allows high heat transfer rates for a low temperature change. To bring this technology to commercialisation a greater understanding of the underlying physics involved at the microscale is required as there is much debate within literature as to what occurs during two phase flow heat transfer at these scales. The work conducted as part of this thesis is a step towards improving the understanding of the mechanisms involved with this process. This thesis describes the fabrication of a novel microchannel structure, which can be used to experimentally characterise two phase heat transfer as it occurs. The final process reported for these microchannels structures provides the basis of a technology for the fabrication of microchannels with increased sensor densities. Two types of microchannel devices have been fabricated for this project. The first device of these was an array of parallel microchannels formed by the reactive ion etching (RIE) of silicon, which was then bonded with Pyrex glass. These microchannels were simple in that sensors were not integrated for local measurement. However the production of these devices incorporated fabrication techniques such as anodic bonding and inductively coupled plasma RIE that were essential to the fabrication of more complex devices. The second device built was a single microchannel that contained an integrated heater and several temperature sensors. The use of wafer bonding enabled the device to take full advantage of both bulk and surface micromachining technology as the placement of the temperature sensors on the channel floor would not be possible with conventional bulk micromachining. The initial microchannel structures demonstrated that wafer bonding could be used to fabricate novel devices, but they highlighted the difficulty of achieving strong anodic bonds due to the presence of dielectric films throughout the fusion bonded wafer stack used in the channel fabrication. To improve the performance of the device the process was optimised through the use of insitu, non-destructive test structures. These structures enabled the uniformity and strength of the bonds to be optimised through visualisation over the whole wafer surface. The integrated sensors enabled temperature measurements to be taken along the channel with a sensitivity 3.60 ΩK-1 while the integrated heater has delivered a controllable and uniform heat flux of 264 kWm-2.

Cette thèse présente la conception et la microfabrication d’une toute nouvelle configuration de pile à combustible en convection naturelle destinée à l’alimentation des appareils électroniques portables qui ne requiert aucun élément d’emballage externe (Pile à combustible sans emballage ou PLFC). On présente aussi les impacts majeurs de l’intégration d’un système de gestion d’eau complet (SGD) qui draine l’eau en surplus à la cathode pour la redistribuer vers l’anode et vers une surface d’évaporation imitant un réservoir d’hydrogène à base d’hydrures. La PLFC est constituée d’une membrane composite combinant un support mécanique de polymère (polyimide – Kapton®) et des chemins de conduction protonique (Nafion®), de collecteurs de courant métalliques et de couches catalytiques poreuses à base de nanoparticules de Pt/C. Le tout est intégré dans un seul feuillet de 50µm d’épaisseur sur une surface de 1cm[indice supérieur 2]. Des méthodes pour manipuler et graver le Kapton ainsi que pour intégrer le Nafion dans des procédés de microfabrication ont dû être développées. Un modèle analytique décrivant les résistances internes de la PLFC a aussi été réalisé. Ce modèle, combiné aux limites de dimensionnement causées par les méthodes de fabrication, a permis d’établir un processus de conception et de dimensionnement. La PLFC développée a démontré une importante augmentation de puissance volumique d’au moins 97% par rapport aux systèmes existants avec des emballages microfabriqués ou non. L’intégration d’un système de drainage de l’eau par des chemins hydrophiles à la cathode combinée à une redistribution d’eau vers l’anode et une surface d’évaporation a permis de doubler la puissance surfacique de la PLFC tout en stabilisant son fonctionnement. Finalement, on démontre dans cette thèse que dans les piles à combustible fonctionnant en convection naturelle, l’assèchement de l’anode joue un rôle prépondérant et que celle-ci doit être humidifiée, même lorsque la cathode est en surplus d’eau. De plus, en utilisant ce surplus pour alimenter un générateur d’hydrogène à base d’hydrures, on pourrait doubler la densité énergétique du système de pile à combustible.

Neste trabalho usamos pulsos de femtossegundos na fabricação de estruturas poliméricas em escala microscópica, através da técnica de fotopolimerização via absorção de dois fótons. Graças ao confinamento espacial da polimerização, resultante do processo de absorção de dois fótons, este método permite a fabricação de microestruturas tridimensionais complexas, com alta resolução, visando diversas aplicações tecnológicas, de fotônica até biologia. Inicialmente, desenvolvemos a técnica de fotopolimerização via absorção de dois fótons, desde a implantação da montagem óptica até a confecção dos sistemas de movimentação e controle do posicionamento do feixe laser. Através da fabricação e caracterização de microestruturas, produzidas em resinas acrílicas, o sistema foi aperfeiçoado permitindo a produção de microestruturas da pordem de 30um com razoável resolução espacial. Uma vez que a maior parte as microestruturas reportadas na literatura são elementos passivos, ou seja, suas propriedades ópticas não podem ser controladas por meios externos, numa segunda etapa deste projeto produzimos microestruturas opticamente ativas. Neste caso, a microfabricação foi feita em resinas acrílicas dopadas Rodamina B, exibindo, portanto, fluorescência quando excitadas com luz de comprimento de onda em torno de 540nm. Finalmente, visando a produção eficiente de estruturas em escala milimétrica para aplicações biológicas, implementamos também um sistema de fotopolomerização via absorção de um fóton. / In this work we used femtosecond pulses to fabricate polymeric structures at microscopic scale, by using the two-photon photopolymerization technique. Due to the spatial confinement of the polymerization, provided by the two-photon absorption, this method allows for the fabrication of complex three-dimensional microstructures, with high resolution, aiming to several technological applications, from photonics to biology. Initially, we developed the two-photon polimerization technique, from the optical setup to the mechanical systems to control the movement and the positioning of the laser beam. Through the fabrication and characterization os microestrutures, produced in acrylic resin, the apparatus was improved, allowing the fabriation of 30-um microstructures with reasonable spatial resolution. Since most the report in the literature are passive elements that is, their optical properties cannot be altered by any external means, in a second stage of this project we fabricated optical active microstructures. In this case, the microfabrication was carried out in acrylic resins doped with Rodamine B, exhibiting, consenquently, fluorescence when excited with light at 540nm. Finally, in order to eficiently produce milimetric structures for biological applications, we also implemented a one-photon polimerization setup.

Microfabrication has given rise to numerous technologies and has resulted in new paradigms for how science and technology has advanced in recent years. Having originated from the microelectronics industry, microfabrication techniques have increasingly been leveraged in the development of various other fields. Such techniques have an increasing presence in the field of medical devices, especially with the advent of microfluidics. The capability that microfluidics lends to miniaturizing and making portable analytical tools was, and still is, extremely useful in the advancement of medical technologies. In this dissertation, we explore novel microfabrication techniques towards the development of next-generation medical devices. We can broadly classify these devices as devices that function in in vitro and in vivo settings. In vitro devices typically function in a non-invasive manner such as when patient samples are processed externally for diagnostic purposes. In vivo medical devices, on the other hand, normally play a role in disease treatment upon implantation into a patient, such as with stents, pacemakers and drug delivery devices. Here we demonstrate how microfabrication techniques can be implemented in the improvement of devices involved in diagnosis and treatment; two important branches of medical sciences that go hand in hand. Firstly, microfabrication and microfluidic techniques were implemented in developing a CD4+ T helper cell counter. This integrated device, where capture and analysis are performed on the same platform, also employs a chemiluminescence-based method of detection. This a rather simple and elegant technique that is amenable for miniaturization in future as it does not require the use of external complex light source (such as for fluorescence imaging) nor the use of image/data analysis methods. The second part of this dissertation describes novel microfabrication techniques for the development of a new class of implantable devices- hydrogel MEMS devices. This technique is comparable to additive manufacturing techniques such as 3D printing. Current 3D printing or fabrication techniques for biocompatible materials normally result in standalone structures. Using our technique, we are not only able to construct microcomponents entirely out of hydrogels but also have the capability to assemble and align various moving components to form a robust MEMS-like device. As these MEMS devices are constructed entirely out of biocompatible PEG-based hydrogels, they are ideal candidates for implantable devices. Once implanted, they can be wirelessly actuated using simple permanent magnets and the operation of the devices do not require onboard power-sources or electronics, which is common for current MEMS-based implantable devices. These devices can also be designed to deliver payloads and this delivery can be actively controlled. We also explore the use of hydrogel MEMS in the in vivo delivery of therapeutics, and assess its efficacy in delivering local, low-doses of a chemotherapeutic drug in a disease model. We envision that these devices, and the technology from which they are borne, will open up a new paradigm in the way implantable devices are developed.

A successful cancer treatment is a combination of early diagnosis and efficient use of anticancer drugs. There is a chance of approximately 70 - 90% of cancer patients surviving if the diagnosis is conducted early. That means if a diagnosis system is in place which can detect multiple types of cancer at an early stage, a potential cancer therapy is most likely to succeed. However, at present, the available biomedical sensors are unable to detect and differentiate between cancerous cells or tumours. They are also not able to provide continuous real-time monitoring of a patient. Additionally, oral anticancer drugs given during chemotherapy, at the moment, suffer from low bioavailability. Also, a variety of these drugs is not targeted in nature. That means the drug will potentially affect areas of the body which do not need it. The low bioavailability of the drug will not only increase the chemotherapy sessions but also makes the entire process more aggravating for the cancer patient. Therefore, there is an absolute need to have innovative and efficient anticancer drug delivery mechanisms. Finally, current biomedical sensors are primarily made up of silicon (Si) or hard substrates based materials. Even if the biomedical sensor is of a flexible material, the material is either a fragile film or flexible but not stretchable polymers such as polyimide (PI). By having a biomedical sensor which is moderately flexible or not flexible at all, a continuous on-body biomedical sensing is not possible in an efficient manner. That is because hard substrates based biomedical sensors would be difficult to be placed on a body at all times. Furthermore, the flexible biomedical sensors currently suffer from problems such as the electrode on top cracking and damaging after few uses rendering them unusable. Hence, a new fabrication process needs to be devised to solve the issues mentioned above. In this work, an attempt is made to utilise zinc oxide (ZnO) nanostructures for biomedical sensing, drug delivery and biomimetics. ZnO nanostructures are synthesised by using a low-cost wet chemistry process known as hydrothermal growth. Due to the inherent biocompatibility and unique electrical/ piezoelectric properties of ZnO, they acted as prime candidates for the applications outlined above. A high-throughput process is used to synthesise ZnO nanowires (NWs) on Si, polyimide-onsilicon (PI/Si) and directly on PI and polydimethylsiloxane (PDMS) substrates. The work utilises a variety of characterization tools. ZnO nanostructures' morphology is characterised by using a Scanning Electron Microscope (SEM), Transmission Electron Microscope (TEM) and Atomic Force Microscope (AFM). X-ray diffraction (XRD) was used to calculate the crystallite size and the crystalline orientation of the nanostructures. A novel fabrication process is developed to allow direct synthesis and direct patterning of metal electrodes on fully flexible, stretchable and bendable PDMS substrates by using standard photolithography. This novel fabrication process makes the PDMS substrates not expand when exposed to temperatures up to 110 °C. Also; the new fabrication process does not cause the PDMS to swell when exposed to various chemicals such as isopropyl alcohol (IPA) or acetone. The fabrication process has created a new paradigm shift in the field of patterning and producing devices directly on flexible and stretchable substrates. The PDMS substrate is further utilised as a sensitive bovine serum albumin (BSA) protein sensor which is capable of detecting up to femtomolar concentrations in just under 5 min of incubation time. Protein biosensing tests were carried out by measuring the change in resistance at 1V bias voltage. The PDMS based biosensor is tested as a protein sensor because proteins are important biomarkers in cancer diagnosis. Also, protein sensors are immensely useful in the detection of bacteria and viruses thereby allowing further expansion to the technology developed herewith. For the first time, ZnO NWs are used to deliver hydrophobic organic dye, Nile red, in a human body like environment. The Nile red simulates an anticancer drug as they share similar surface chemistry. There is an approximately 80% release of Nile red which shows that ZnO NWs can be used as an efficient anticancer drug delivery system with high bioavailability. For the drug delivery experiments, the dynamic dialysis based release of Nile red (Nr) from the ZnO nanowires is carried out by using UV-Visible (UV-Vis) spectroscopy. Fourier Transform Infrared (FTIR) was used to determine the coordination of Nr across the ZnO nanowires. Finally, a novel synthesis process is used to produce individual ZnO NWs on a single ZnO nanoplate (NP) which are named as ZNWNP nanostructures. ZNWNP nanostructures have high hydrophobicity without the need of any functionalization. The hydrophobicity of the hybrid ZnO nanowires on ZnO nanoplate nanostructures (ZNWNP) is characterised by using contact angle goniometry (CAG). Various contact angle theories have been used to calculate the surface free energy (SFE) of the ZNWNP nanostructures. The high hydrophobicity allows these nanostructures to be used for biomimetic applications such self-cleaning, bioinspired sensors and multimodal biosensing. Additionally, ZNWNP nanostructures can be used in biomedical sensors to create multimodal analysis. The multimodal analysis is immensely useful in cancer detection as at least three or more cancer biomarkers can be used to triangulate the diagnosis. The work presented in the thesis aims to utilise ZnO nanostructures for a variety of biomedical applications. The new fabrication process mentioned above has applications not only in biomedicine but also in the flexible electronics industry. The biomimetic nanostructures combined with the biomedical sensor gives rise to a robust multimodal analysis system which can change the course of the cancer diagnosis. That coupled with the usage of ZnO NWs as an effective anticancer drug delivery system gives an immense promise in advancing cancer therapy as a whole and making the entire treatment process less aggravating and less painful for cancer patients.

An emerging demand for the precise manipulation of cells and microparticles for applications in cell biology and analytical chemistry has driven recent development of ultrasonic manipulation technology. Compared to the other major technologies used for cell and particle manipulation, such as magnetic tweezing, optical tweezing and dielectrophoresis, ultrasonic manipulation has shown excellent capabilities and flexibility in a variety of applications with its advantages of versatile, inexpensive and easy integration into microfluidic systems, maintenance of cell viability, and generation of sufficient forces to handle cells with dimensions up to tens of microns and agglomerates of a large number of cells. This thesis reviews current state-of-the-art of ultrasonic manipulation technology and reports the development of various ultrasonic manipulation devices, including simple devices integrated with high frequency (> 20 MHz) ultrasonic transducers for the investigation of biological cells and complex ultrasonic transducer array systems to explore the feasibility of electronically controlled 2-D and 3-D manipulation. Piezoelectric and passive materials, fabrication techniques, characterisation methods and possible applications are discussed. The behaviour and performance of the devices have been investigated and predicted in virtual prototyping with computer simulations, and verified experimentally. Issues associated during the development are highlighted and discussed. To assist long term practical adoption, approaches to low-cost, wafer level batch-production and commercialisation potential are also addressed.

Stored red blood cell (sRBC) morphology is currently scored manually by technicians in a slow labor intensive process prone to error. This project proposes a way to simplify, automate, and expedite the morphology scoring process by using a novel microfluidic device that I designed to facilitate the flow of a single layer of red blood cells (RBCs). The appearance of this flow allows for the capture of a series of high clarity images captured via digital camera coupled to a microscope that are ideally suited for image analysis algorithm-based morphological scoring. During storage, RBCs heterogeneously shift from the form of discocyte to the reversibly altered form of discoechinocyte as storage lesion progresses. Beyond this level of degradation, the cell assumes the form of a spheroechinocyte or spherocyte and becomes irreparably damaged. The microfluidic device and image analysis algorithm developed in this research classified the individual morphology of 5000 RBCs taken from storage into the physiologically relevant category of either “discocyte,” “reversibly changed,” or “irreversibly changed.” This process took only 15 minutes. The accuracy in classification was verified as 92.6% in a separate trial when compared against classification of the same sample images via manual inspection. The morphological distribution of the RBC population remained consistent in both cases. The findings of this project suggest that microfluidic device assisted automated image analysis can provide a quick and effective way to quantitatively estimate the viability of a sRBC population and the extent of storage lesion endured. This technology could provide augmented RBC storage and transfusion research capabilities and have clinical applications, such as the ability to conveniently differentiate between the transfusion qualities of two sRBC units of the same age. / acase@tulane.edu

Prior research focused on CMOS-MEMS integrated oscillator has been done using various foundry compatible integration techniques. In order to compensate the integration compatibility, MEMS resonators built on standard CMOS foundry process could not take full advantage of highest achievable quality factor on chip. System-in-package (SiP) and system-on-chip (SoC) is becoming the next generation of electronic packaging due to the need of multi-functional devices and multi-sensor systems, thus wafer level hybrid integration becomes the key to enable the full assembly of dissimilar devices. In this way, every active circuit and passive component can be individually optimized, so do the MEMS resonators and sustaining amplifier circuits. In this dissertation, GaAs-MEMS integrated oscillator in a hybrid packaging has been fully explored as an important functional block in the RF transceiver systems. This dissertation first presents design, micro-fabrication, simulation, testing and modeling of ZnO piezoelectrically-transduced MEMS resonators. A newly designed rectangular plate with curved resonator body fabricated in-house exhibits a very high Q of more 6,000 in the air for its width-extensional mode resonance at 166 MHz. In addition, a rectangular plate resonator with multiple Phononic Crystal (PC) strip tethers shows low insertion loss of -11.5 dB at 473.9 MHz with a Q of 2722.5 in the air. An oscillator technology with high-Q MEMS resonator as its tank circuit is presented to validate its key functionality as a stable frequency reference across a wide spectrum of frequencies. Particularly, a piezoelectrically-transduced width-extensional mode MEMS resonator is strategically designed to operate at two distinct layout-defined mechanical modal frequencies (259.5MHz and 436.7MHz). These devices were characterized and modeled by an extracted equivalent LCR circuit to facilitate the design of the oscillator using a standard circuit simulator. MEMS resonators have been integrated with the sustaining amplifier circuit at PCB level using wire-bonding technique and coaxial connectors. As shown by the time-domain measurements and frequency-domain measurements, these oscillators are capable of selectively locking into the resonance frequency of the tank circuit and generating a stable sinusoidal waveform. Meanwhile, the phase noise performance is rigorously investigated within a few oscillator designs. At last, 3-D printed hybrid packaging using additive manufacturing and laser machining technique has been developed for integrating a MEMS resonator on a silicon-on-insulator (SOI) substrate and a GaAs sustaining amplifier. Fabrication process and fundamental characterization of this hybrid packaging has been demonstrated. On-wafer probe measurements of a 50 Ω microstrip line on ABS substrate exhibit its insertion loss of 0.028 dB/mm at 5 GHz, 0.187 dB/mm at 20 GHz and 0.512 dB/mm at 30 GHz, and show satisfactory input and output return loss with the 3-D printed package. Parylene N is also experimentally coated on the package for improving water resistance as a form of hermetic packaging.

Electromagnetic microactuators with permanent magnets have many potential applications such as micro-energy scavengers, microswitches, micromirrors and microfluidics. However, many electromagnetic microactuator designs utilize either external permanent magnet or external coil, which do not allow tight integration to other MEMS components and further miniaturization. Furthermore, all of the available permanent magnet microfabrication technologies have some drawbacks and improvements are required. Thus the integrated monolithic electromagnetic microactuator is investigated in this project. The three main components of the electromagnetic actuator have been investigated separately. A novel microfabrication technology called ???Template printing???for the fabrication of polymer bonded permanent magnet has been investigated and developed. It is based on ???Screen printing??? which has its drawbacks on alignment accuracy and poor line definition. This is eliminated in ???Template printing??? by photolithography of the photoresist template. The shape and location of the permanent magnet is defined by the template. A new approach based on the filling of dry magnetic powder and vacuum impregnation has been developed to form the polymer bonded permanent magnet. This allows the use of short pot-life matrix material and the elimination of homogenous mixing. A monolithic electromagnetic microactuator has been fabricated successfully. It consists of a 2-layer planar copper microcoil, surface micromachined polyimide beam and Strontium ferrite/EPOFIX permanent magnet (diameter of 460 ??m and 30 ??m thickness). Large deflection in excess of 100 ??m at 35 mA driving current and magnetic force of 0.39 ??N/mA have been achieved. It compares favourably with other much larger electromagnetic actuators that have been reported. ???Template printing??? has the potential of being a low temperature batch process for the microfabrication of thick polymer bonded permanent magnets with high magnetic properties and low residual stress. The fabrication consistency and the quality of template printed magnet can be improved in future studies.

Ce projet s'inscrit dans le cadre des microtechnologies et de leurs applications. L'application visée ici est la mesure de flux de chaleur (10 mW) à des échelles réduites (<100 nm) afin d'obtenir les caractéristiques thermiques locales de solides. Le microfluwmètre réalisé est constitué d'un actionneur 3D en silicium sur lequel sont intégrés une micropointe de chrome et un système de régulation thermique. Le déplacement dans les trois directions de l'espace est commandé par voie électrostatique et contrôlé par mesure capacitive. La première partie dresse l'état de l'art de la microscopie thermique et la deuxième décrit la conception du dispositif. Les troisième et quatrième parties illustrent la microfabrication du dispositif. La cinquième partie est consacrée au système de commande et de mesure électronique du déplacement. La sixième partie présente les premières caractérisations des prototypes réalisés.