Mask Projection micro Stereolithography (MPuSLA) is an additive manufacturing process used to build physical components out of a photopolymer resin. Existing MPuSLA technology cut the CAD model of part into slices by horizontal planes and the slices are stored as bitmaps. A layer corresponding to the shape of each bitmap gets cured. This layer is coated with a fresh layer of resin by lowering the Z-stage inside a vat holding the resin and the next layer is cured on top of it. In our Thick-film MPuSLA(TfMPuSLA) system, incident radiation, patterned by a dynamic mask, passes through a fixed transparent substrate to cure photopolymer resin. The existing MPuSLA fabrication models can work only for controlling the lateral dimension, without any control over the thickness of the cured part. The proposed process plan controls both the lateral dimensions and the thickness of profile of the cured part. In this thesis, a novel process planning for TfMPuSLA method is developed, to fabricate films on fixed flat substrate. The process of curing a part using this system is analytically modeled as the column cure model. It is different from the conventional process - layer cure model. Column means that a CAD model of part is discretized into vertical columns instead of being sliced into horizontal layers, and all columns get cured simultaneously till the desired heights. The process planning system is modularized into geometrical, chemical, optical, mathematical and physical modules and validated by curing test parts on our system. The thesis formulates a feasible process planning method, providing a strong basis for continued investigation of MPuSLA technology in microfabrication, such as micro lens fabrication.

Thesis (Ph. D.)--University of Missouri-Columbia, 2007. / The entire dissertation/thesis text is included in the research.pdf file; the official abstract appears in the short.pdf file (which also appears in the research.pdf); a non-technical general description, or public abstract, appears in the public.pdf file. Title from title screen of research.pdf file (viewed on January 30, 2008) Vita. Includes bibliographical references.

Thesis (M. S.)--Mechanical Engineering, Georgia Institute of Technology, 2008. / Committee Chair: King, William; Committee Member: Graham, Samuel; Committee Member: Hesketh, Peter

Thesis (Ph. D.)--Ohio State University, 2005. / Title from first page of PDF file. Document formatted into pages; contains xviii, 226 p.; also includes graphics (some col.). Includes bibliographical references (p. 206-226). Available online via OhioLINK's ETD Center

Thesis (Ph. D.)--Ohio State University, 2007. / Title from first page of PDF file. Includes bibliographical references (p. 198-205).

Nanoelectrodes are defined as electrodes which have a critical dimension on the order of nanometres. Due to their smaller dimensions they have a reduced iR drop and enhanced mass transport, which results in the rapid establishment of an enhanced steady-state diffusion profile and a greater Faradaic current density, along with a smaller relative double layer capacitance, which together give a significantly increased signal to noise ratio compared to macroelectrodes. This potentially makes nanoelectrodes better sensors and analytical tools than macroelectrodes in terms of their having lower limits of detection and faster detection times. However, due to difficulties with fabrication most nanoelectrode designs are highly irreproducible which has inhibited their characterisation and commercial development. The Mount group has previously reported the design, fabrication and characterisation of a novel nanoelectrode design in conjunction with Engineers from the Scottish Microelectronic Centre (SMC). Microsquare Nanoband Edge Electrode arrays (MNEEs) consist of an array of cavities with nanoscale Pt bands (formed by sandwiching the metal between insulating layers) exposed around their perimeter. MNEEs are fabricated using a photolithographic process so can be reproducibly made in large quantities to high fidelity. The purpose of this work is to develop our understanding of the fundamental electrochemical behaviour of MNEEs for biosensing. First, a quantitative analysis of the cyclic voltammograms (CVs) and Electrochemical Impedance Spectroscopy (EIS) of macroelectrodes, microelectrodes and MNEE are compared and discussed. Second, their fundamental response is compared in terms of their biosensing properties by using a pre-established impedimetric biosensing protocol developed on macroelectrodes. This protocol uses a PNA probe to detect the mecA cassette of methicillin resistant staphylococcus aureus (MRSA). The procedure has been optimised and compared for macroelectrodes, microelectrodes and MNEE so as to compare their performances as biosensors. It was observed that MNEE’s: (a) form thiol films faster than electrodes with larger dimensions, determined by kinetic studies of 6-mercaptohexan-1-ol film formation (b) form films with different packing structures dependant on the electrode bulk to edge ratio (c) can detect the same concentration of target in less time than larger electrodes because of their increased sensitivity. The film packing has also been quantitatively investigated using EIS and it can be seen that films formed n MNEE were better able to incorporate target DNA into their more splayed out structure. Unique to this project has been the establishment of a protocol to form heterogeneous carbazole-alanine hydrogel matrices on nanoelectrodes, whose polymerisation is initiated by a pH swing at the electrode surface induced by the oxidation of hydroquinone. The gels growth pattern follows the diffusion field at the electrode and can be monitored using EIS. This also gives a measure of the permeability of the gel by fitting to the correct equivalent circuit. The gel structure has been imaged using light microscopy, confocal microscopy and scanning electrochemical microscopy (SEM). The results give a visual demonstration that MNEE has enhanced diffusion at the corners of the cavities, which is in agreement with previously published simulations, and give evidence as to the onset of hemispherical diffusion and the conditions at which the diffusion field between neighbouring electrodes begin to overlap, a phenomenon which can be observed visually and correlated to changes in the EIS data. Hydrogels have been grown chronopotentiometrically at different currents and the permittivity (through the diffusion coefficients) has been measured of redox couples through gels grown at different speeds. It was found that the hierarchical structure of the hydrogels can be tuned; potentially opening the door to a new breed of tuneable, biocompatible anti-biofouling matrices on bio-functionalised electrodes. The system was characterised using the same MRSA detection protocol as optimised for the MNEE and the target DNA was found to be able to permeate through the hydrogels and bind to the probe, which resulted in a significant change in impedance.

Cells in living organisms are constantly experiencing a variety of mechanical cues. From the stiffness of the extra cellular matrix to its topography, not to mention the presence of shear stress and tension, the physical characteristics of the microenvironment shape the cells’ fate. A rapidly growing body of work shows that cellular responses to these stimuli constitute regulatory mechanisms in many fundamental biological functions. Substrate strains were previously shown to be sensed by cells and activate diverse biochemical signaling pathways, leading to major remodeling and reorganization of cellular structures. The majority of studies had focused on the stretching avoidance response in near-uniform strain fields. Prior to this work, the cellular responses to complex planar strain fields were largely unknown. In this thesis, we uncover various aspects of strain sensing and response by first developing a tailored lab-on-a-chip platform that mimics the non-uniformity and complexity of physiological strains. These microfluidic cell stretchers allow independent biaxial control, generate cyclic stretching profiles with biologically relevant strain and strain gradient amplitudes, and enable high resolution imaging of on-chip cell cultures. Using these microdevices, we reveal that strain gradients are potent mechanical cues by uncovering the phenomenon of cell gradient avoidance. This work establishes that the cellular mechanosensing machinery can sense and localize changes in strain amplitude, which orchestrate a coordinated cellular response. Subsequently, we investigate the effect of multiple changes in stretching directions to further explore mechanosensing subtleties. The evolution of the cellular response shed light on the interplay of the strain avoidance and the newly demonstrated strain gradient avoidance, which were found to occur on two different time scales. Finally, we extend our work to study the influence of cyclic strains on the early stages of cancer development in epithelial tissues (using MDCK-RasV12 system), which was previously largely unexplored. This work reveals that external mechanical forces impede the healthy cells’ ability to eliminate newly transformed cells and greatly promote invasive protrusions, as a result of their different mechanoresponsiveness. Overall, not only does our work reveal new insights regarding the long-range organization in population of cells, but it may also contribute to paving the way towards new approaches in cancer prevention treatments.

abstract: In the past decades, single-cell metabolic analysis has been playing a key role in understanding cellular heterogeneity, disease initiation, progression, and drug resistance. Therefore, it is critical to develop technologies for individual cellular metabolic analysis using various configurations of microfluidic devices. Compared to bulk-cell analysis which is widely used by reporting an averaged measurement, single-cell analysis is able to present the individual cellular responses to the external stimuli. Particularly, oxygen consumption rate (OCR) and extracellular acidification rate (ECAR) are two key parameters to monitor heterogeneous metabolic profiles of cancer cells. To achieve multi-parameter metabolic measurements on single cells, several technical challenges need to be overcome: (1) low adhesion of soft materials micro-fabricated on glass surface for multiple-sensor deposition and single-cell immobilization, e.g. SU-8, KMPR, etc.; (2) high risk of using external mechanical forces to create hermetic seals between two rigid fused silica parts, even with compliance layers; (3) how to accomplish high-throughput for single-cell trapping, metabolic profiling and drug screening; (4) high process cost of micromachining on glass substrate and incapability of mass production. In this dissertation, the development of microfabrication technologies is demonstrated to design reliable configurations for analyzing multiple metabolic parameters from single cells, including (1) improved KMPR/SU-8 microfabrication protocols for fabricating microwell arrays that can be integrated and sealed to 3 × 3 tri-color sensor arrays for OCR and ECAR measurements; (2) design and characterization of a microfluidic device enabling rapid single-cell trapping and hermetic sealing single cells and tri-color sensors within 10 × 10 hermetically sealed microchamber arrays; (3) exhibition of a low-cost microfluidic device based on plastics for single-cell metabolic multi-parameter profiling. Implementation of these improved microfabrication methods should address the aforementioned challenges and provide a high throughput and multi-parameter single cell metabolic analysis platform. / Dissertation/Thesis / Doctoral Dissertation Electrical Engineering 2017

Neste trabalho investigamos as modificações na morfologia superficial e estrutura de filmes finos de silício amorfo hidrogenado, resultantes da irradiação com pulsos ultracurtos de femtossegundos (150 fs, 775 nm e 1 kHz). Os processos de microfabricação foram conduzidos varrendo, a velocidade constante, um feixe laser com diferentes fluências (1,8 a 6,2 MJ/m2) sobre a amostra. Os espectros de transmissão apresentaram queda para amostras irradiadas, cujas imagens de microscopia eletrônica de varredura mostraram estruturas superficiais condizentes com o fenômeno de LIPSS (Laser Induced Periodic Surface Structures). Uma análise estatística das imagens de microscopia de força atômica foi realizada com um programa que identifica e caracteriza os domínios (picos) produzidos pela microfabricação. O histograma de altura da amostra irradiada com uma fluência de 3,1 MJ/m2 mostrou que a altura média dos picos produzidos é de 15 nm, menor que o centro da distribuição de alturas para uma amostra não irradiada. Porém, para fluências acima de 3,7 MJ/m2 a morfologia é dominada pela formação de agregados. Medidas de espectroscopia Raman revelaram a formação de uma fração de silício cristalino, após a irradiação com pulsos de femtossegundos, de até 77% para 6,2 MJ/m2. Determinamos ainda uma diminuição da dimensão dos nanocristais produzidos com o aumento da fluência do laser de excitação. Portanto, nossos resultados mostram que há um compromisso entre as propriedades obtidas pela microfabricação (transmissão, distribuição de picos, fração de cristalização e tamanho dos nanocristais produzidos) que deve ser levado em conta ao aplicar a técnica de microestruturação com laser de femtossegundos. / In this work we investigated surface morphology and structural modification on hydrogenated amorphous silicon (a-Si:H) thin films, resulting from femtosecond laser irradiation (150 fs, 775 nm and 1 kHz). Microfabrication processes were carried out scanning sample´s surface, at constant speed, with distinct laser fluencies (from 1.8 to 6.2 MJ/m2). A decrease was observed in the transmission spectra of irradiated samples, whose scanning electron microscopy images revealed surface structures compatible with the Laser Induced Periodic Surface Structure (LIPSS) phenomenon. A statistical analyzes of Atomic Force Microcopy images was performed using a specially developed software, that identifies and characterizes the domains (spikes) produced by the laser irradiation. The height histogram for a sample irradiated with 3.1 MJ/m2 reveals that the average height of the produced spikes is at 15 nm, which is smaller than the center of height distribution for non-irradiated sample. For fluencies higher than 3.7 MJ/m2, however, aggregation of the produced spikes dominates the sample morphology. Raman spectroscopy revealed the formation of a crystalline fraction of 77% for laser fluence irradiation of 6.2 MJ/m2, as well as a decrease in size of the produced crystals as a function of fluence. Therefore, our results indicate that there is a compromise of the sample transmission, spikes distribution, crystallization fraction and size of nanocrystals obtained by fs-laser irradiation, which has to be taken into consideration when using this material processing method.

Orientador: Jacobus Willibrordus Swart / Dissertação (mestrado) - Universidade Estadual de Campinas, Faculdade de Engenharia Eletrica e de Computação / Made available in DSpace on 2018-08-13T00:28:58Z (GMT). No. of bitstreams: 1 DellaLucia_FelipeLorenzo_M.pdf: 2225962 bytes, checksum: 809ea9b9a2b7ea0c114f8fa449a539a1 (MD5) Previous issue date: 2009 / Resumo: Este trabalho tem como objetivo desenvolver a tecnologia de microbolômetros resistivos que serão utilizados como sensores de infravermelho. Para isso, foi realizado um projeto inicial de dispositivo constituído de cálculos matemáticos e simulações computacionais a fim de prever o comportamento do dispositivo e ajustar parâmetros de processo de fabricação de modo a aperfeiçoar seu desempenho. De posse dos dados do projeto, foi realizada a fabricação. Foram fabricados microbolômetros resistivos de Silício Policristalino (Si-poli) em membranas suspensas para aumentar a isolação térmica do material resistivo. Ouro Negro (poroso) foi evaporado de forma a funcionar como camada absorvedora de radiação infravermelha. Eventuais problemas ocorridos durante a fabricação foram relatados, sanados e realimentados ao processo de fabricação de forma a simplificar e aperfeiçoar ao máximo a fabricação. Imagens realizadas por microscópio eletrônico de varredura e cortes realizados utilizando Feixe de Íons Focalizado mostram os detalhes da fabricação, indicando os materiais utilizados e a forma na qual a membrana de Si-poli está isolada do substrato. As medidas realizadas nos dispositivos fabricados revelam uma responsividade de 1,8 V/W, TCR de -0,95%/K, tempo de resposta de 13 ms e detectividade de 5,66.105 cm.Hz1/2.W-1. Apesar de algumas destas características não se encontrarem dentro dos parâmetros projetado, outras se assemelham às características de dispositivos comerciais e publicados na literatura. Como resultado deste trabalho, um ambiente favorável foi preparado para o desenvolvimento deste tipo de dispositivo. Matrizes de dispositivos poderão também ser desenvolvidas de forma a produzirem imagens em infravermelho que poderão ser utilizadas em diversas aplicações diferentes. / Abstract: This work has as a main goal to develop the resistive microbolometers technology that will be used as infrared sensors. In order to do so, an initial device design was performed using mathematical calculations and computational simulations were accomplished to predict the behavior and adjust the fabrication process parameters of this device to improve its performance. After the simulations, the fabrication was performed. Using Polysilicon as active element of the resistive microbolometers, suspended membranes were fabricated to enhance thermal isolation. Gold Black (porous) was evaporated to work as an infrared radiation absorber. Some problems that occurred during the fabrication were reported, solved and provided feedback to simplify and improve the fabrication. Some Scanning Electron Microscopy images and cuts using Focused Ion Beam show some fabrication details, indicating the materials used and how the Polysilicon membrane is isolated from the substrate. The measurements performed in the fabricated device show that the responsivity is about 1.8 V/W, the TCR is about -0.95%/K, the response time is 13 ms and the specific detectivity is 5,66.105 cm.Hz1/2.W-1. Although some of these characteristics are not within the designed parameters, others are similar to the characteristics of commercial devices and devices found in literature. As a result of this work, a favorable environment was prepared to the development of this kind of device. Arrays of devices can also be developed in order to produce infrared images which may be used in many different applications. / Mestrado / Eletrônica, Microeletrônica e Optoeletrônica / Mestre em Engenharia Elétrica