<p>This thesis addresses assembly issues encountered in optical and fluidic microsystem applications.</p><p>In optics, the first subject concerns the active alignment of components in optical fibersystems. A solution for reducing the cost of optical component assembly while retaining submicron accuracy is to integrate the alignment mechanism onto the optical substrate. A polymer V-shaped actuator is presented that can carry the weight of the large components - on a micromechanical scale - and that can generate movement with six degrees of freedom.</p><p>The second subject in optics is the CMOS-compatible fabrication of monocrystalline silicon micromirror arrays that are intended to serve as CMOS-controlled high-quality spatial light modulators in maskless microlithography systems. A wafer-level assembly method is presented that is based on adhesive wafer bonding whereby a monocrystalline layer is transferred onto a substrate wafer in a CMOS-compatible process without needing bond alignment.</p><p>In fluidics, a hybrid assembly method is introduced that combines two separately micromachined structures to create hotwire anemometers that protrude from a surface with minimum interference with the air flow. The assembled sensor enables one to make accurate time-resolved measurements of the wall shear stress, a quantity that has previously been hard to measure with high time resolution. Also in the field of hotwire anemometers, a method using a hotwire anemometer array is presented for measuring the mass flow, temperature and composition of a gas in a duct.</p><p>In biochemistry, a bio-analysis chip is presented. Single nucleotide polymorphism scoring is performed using dynamic allele-specific hybridization (DASH). Using monolayers of beads, multiplexing based on single-bead analysis is achieved at heating rates more than 20 times faster than conventional DASH provides.</p><p>Space and material e±ciency in packaging are the focus of the other two projects in fluidics. The first introduces an assembly based on layering conductive adhesives for the fabrication of miniature polymer electrolyte membrane fuel cells. The fuel cells made with this low-cost approach perform among the best of their type to date. The second project concerns a new cross-flow microvalve concept. Intended as a step towards the mass production of large-flow I/P converters, the silicon footprint area is minimized by an out-of-plane moving gate and in-plane, half-open pneumatic channels.</p>

Scaling down operations and functions into the fascinating micro world not only improve performance, lower costs, and enable easier integration, but also opens the door to new functionalities. This truly multidisciplinary thesis presents novel solutions to current and relevant challenges in the areas of 1) on-chip liquid manipulation which has applications in micro total analysis systems, medical diagnostics, and drug discovery and 2) pressure sensing which has an established market in the automotive and industrial processes industry. Especially in the area of liquid manipulation, the aim was to take advantage of forces and properties dominating on the micro scale whenever possible, rather than compensating for these effects, and to create solutions with universal appeal and application areas. In the area of liquid manipulation, this thesis discusses a novel method of passively synchronizing liquid movement on-chip based on liquid surface tension and device geometry. This technique has potential applications in timing independent processes, liquid-liquid interactions, and digitizing liquid movement. A fast and passive discrete sample micromixer is also presented based on the same principles. A unique way of direct access, bubble tolerant sample interfacing with flow-through microfluidics using a closed-open-closed channel is also introduced. This method can be used to regulate flow on-chip without the need for any moving parts or electrical contact. Moreover, work is presented on two types of out-of-plane electrospray ionization mass spectrometry (ESI-MS) emitter tips which mimic ideal mass spectrometry tips. Fabrication of these tips is uncomplicated and results in robust structures with good performance. In the field of pressure sensing, this thesis investigates a form based resonating principle. The Q factor of the sensor is improved by low pressure encapsulation and structure design. A novel technique for excitation and detection of resonant microsensors using 'burst' technology is also demonstrated. This method involves temporally separating excitation and detection, thereby eliminating crosstalk and the need for electrical feedthroughs. It also allows high voltages to be used with sensitive circuitry and a single electrode to be used for both excitation and detection.

This thesis addresses assembly issues encountered in optical and fluidic microsystem applications. In optics, the first subject concerns the active alignment of components in optical fibersystems. A solution for reducing the cost of optical component assembly while retaining submicron accuracy is to integrate the alignment mechanism onto the optical substrate. A polymer V-shaped actuator is presented that can carry the weight of the large components - on a micromechanical scale - and that can generate movement with six degrees of freedom. The second subject in optics is the CMOS-compatible fabrication of monocrystalline silicon micromirror arrays that are intended to serve as CMOS-controlled high-quality spatial light modulators in maskless microlithography systems. A wafer-level assembly method is presented that is based on adhesive wafer bonding whereby a monocrystalline layer is transferred onto a substrate wafer in a CMOS-compatible process without needing bond alignment. In fluidics, a hybrid assembly method is introduced that combines two separately micromachined structures to create hotwire anemometers that protrude from a surface with minimum interference with the air flow. The assembled sensor enables one to make accurate time-resolved measurements of the wall shear stress, a quantity that has previously been hard to measure with high time resolution. Also in the field of hotwire anemometers, a method using a hotwire anemometer array is presented for measuring the mass flow, temperature and composition of a gas in a duct. In biochemistry, a bio-analysis chip is presented. Single nucleotide polymorphism scoring is performed using dynamic allele-specific hybridization (DASH). Using monolayers of beads, multiplexing based on single-bead analysis is achieved at heating rates more than 20 times faster than conventional DASH provides. Space and material e±ciency in packaging are the focus of the other two projects in fluidics. The first introduces an assembly based on layering conductive adhesives for the fabrication of miniature polymer electrolyte membrane fuel cells. The fuel cells made with this low-cost approach perform among the best of their type to date. The second project concerns a new cross-flow microvalve concept. Intended as a step towards the mass production of large-flow I/P converters, the silicon footprint area is minimized by an out-of-plane moving gate and in-plane, half-open pneumatic channels. / QC 20101019

This thesis presents technological advancements in microfluidics. The overall goals of the work are to develop new miniaturized tests for point-of-care diagnostics and robust super-lubricating surfaces for friction reduction. To achieve these goals, novel materials, surfaces and manufacturing methods in microfluidics have been developed. Point-of-care diagnostic tests are portable miniaturized instruments that downscale and automate medical tests previously performed in the central laboratories of hospitals. The instruments are used in the doctor’s office, in the emergency room or at home as self-tests. By bringing the analysis closer to the patient, the likelihood of an accurate diagnosis, or a quick therapy adjustment is increased. Already today, there are point-of-care tests available on the market, for example blood glucose tests, rapid streptococcus tests and pregnancy tests. However, for more advanced diagnostic tests, such as DNA-tests or antibody analysis, integration of microfluidic functions for mass transport and sample preparation is required. The problem is that the polymer materials used in academic development are not always suited for prototyping microfluidic components for sensitive biosensors. Despite the enormous work that has gone into the field, very few technical solutions have been implemented commercially. The first part of the work deals with the development of prototype point of-care tests. The research has focused on two major areas: developing new manufacturing methods to leverage the performance of existing materials and developing a novel polymer material platform, adapted for the extreme demands on surfaces and materials in miniaturized laboratories. The novel manufacturing methods allow complex 3D channel networks and the integration of materials with different surface properties. The novel material platform is based on a novel off-stoichiometry formulation of thiol-enes (OSTE) and has very attractive material and manufacturing properties from a lab-on-chip perspective, such as, chemically stable surfaces, low absorption of small molecules, facile and inexpensive manufacturing process and a biocompatible bonding method. As the OSTE-platform can mirror many of the properties of commercially used polymers, while at the same time having an inexpensive and facile manufacturing method, it has potential to bridge the gap between research and commercial production. Friction in liquid flows is a critical limiting factor in microfluidics, where friction is the dominant force, but also in marine applications where frictional losses are responsible for a large part of the total energy consumption of sea vessels. Microstructured surfaces can drastically reduce the frictional losses by trapping a layer of air bubbles on the surface that can act as an air bearing for the liquid flow. The problem is that these trapped air bubbles collapse at the liquid pressures encountered in practical applications. The last part of the thesis is devoted to the development of novel low fluidfriction surfaces with increased robustness but also with active control of the surface friction. The results show that the novel surfaces can resist up to three times higher liquid pressure than previous designs, while keeping the same friction reducing capacity. The novel designs represent the first step towards practical implementation of micro-structured surfaces for friction reduction. / <p>QC 20110907</p>

No description available.

No description available.

To make chemical analysis available both practically and economically, one approach is to miniaturise the equipment needed for the analysis. High-performance liquid chromatography (HPLC) is an example of a flow chemistry analysis system where active work is performed to achieve miniaturised systems. In this thesis, the focus is on creating a miniatyrised pump system constructed of pressurised CO2 (PCO) and a microfluidic chip with a restriction channel. The assignment of the PCO is to force a separate medium, which in this case is water, through the remaining system. The pump system will therefore be defined as pressure-driven, which has advantages as pulse-free flows. Utilising the latent energy from the PCO also reduces the need for electrical power, hence allowing a smaller battery. However, the pressure from the carbon dioxide source will gradually decrease as the content is consumed. To obtain continuous pressure, heaters have been integrated into the chip, and thus, the pressure drop can be controlled by changing the viscosity and density of the through-flowing fluid. A cooling table was also used to enable the cooling of the chip and thus further increase the pressure drop. PID control was implemented for the temperature to be adjusted to maintain a constant pressure downstream of the chip. By using this technology, runs of just over 80 minutes have been achieved with a pressure of 60 bar and a flow of 100 µl/min downstream, with a maximal error of around 0.03 bar. Then a chip adapted for water was used to control the water flow. Chips adapted for carbon dioxide placed right after the carbon dioxide source were also tested andruns of just over 10 minutes at 75 bar and 100 µl/min could be achieved with a maximal error closer to 1 bar. The pressure vessel used held a maximum of 100 ml of CO2 at 60 bar. The idea is that the pump system, in the end, will be applied for portable HPLC, and the PCO will then be stored in a cartridge, but in the experiments, a turned-off ISCO pump functioned as a carbon dioxide source.

The field of micro total analysis systems (μTAS) aims at developments toward miniaturized and fully integrated lab-on-a-chip systems for applications, such as drug screening, drug delivery, cellular assays, protein analysis, genomic analysis and handheld point-of-care diagnostics. Such systems offer to dramatically reduce liquid sample and reagent quantities, increase sensitivity as well as speed of analysis and facilitate portable systems via the integration of components such as pumps, valves, mixers, separation units, reactors and detectors. Precise microfluidic control for such systems has long been considered one of the most difficult technical barriers due to integration of on-chip fluidic handling components and complicated off-chip liquid control as well as fluidic interconnections. Actuation principles and materials with the advantages of low cost, easy fabrication, easy integration, high reliability, and compact size are required to promote the development of such systems. Within this thesis, liquid displacement in microfluidic applications, by means of expandable microspheres, is presented as an innovative approach addressing some of the previously mentioned issues. Furthermore, these expandable microspheres are embedded into a PDMS matrix, which composes a novel thermally responsive silicone elastomer composite actuator for liquid handling. Due to the merits of PDMS and expandable microspheres, the composite actuator's main characteristic to expand irreversibly upon generated heat makes it possible to locally alter its surface topography. The composite actuator concept, along with a novel adhesive PDMS bonding technique, is used to design and fabricate liquid handling components such as pumps and valves, which operate at work-ranges from nanoliters to microliters. The integration of several such microfluidic components promotes the development of disposable lab-on-a-chip platforms for precise sample volume control addressing, e.g. active dosing, transportation, merging and mixing of nanoliter liquid volumes. Moreover, microfluidic pumps based on the composite actuator have been incorporated with sharp and hollow microneedles to realize a microneedle-based transdermal patch which exhibits on-board liquid storage and active dispensing functionality. Such a system represents a first step toward painless, minimally invasive and transdermal administration of macromolecular drugs such as insulin or vaccines. The presented on-chip liquid handling concept does not require external actuators for pumping and valving, uses low-cost materials and wafer-level processes only, is highly integrable and potentially enables controlled and cost-effective transdermal microfluidic applications, as well as large-scale integrated fluidic networks for point-of care diagnostics, disposable biochips or lab-on-a-chip applications. This thesis discusses several design concepts for a large variety of microfluidic components, which are promoted by the use of the novel composite actuator. Results on the successful fabrication and evaluation of prototype devices are reported herein along with comprehensive process parameters on a novel full-wafer adhesive bonding technique for the fabrication of PDMS based microfluidic devices. / QC 20100817