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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.

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Novel molecular ion implantation technology for proximity gettering in silicon wafer for CMOS image sensor / CMOSイメージセンサ用Siウェーハにおける近接ゲッタリングのための新規分子イオン注入技術

Hirose, Ryo 23 March 2020 (has links)
京都大学 / 0048 / 新制・課程博士 / 博士(工学) / 甲第22442号 / 工博第4703号 / 新制||工||1734(附属図書館) / 京都大学大学院工学研究科原子核工学専攻 / (主査)教授 斉藤 学, 教授 神野 郁夫, 准教授 松尾 二郎 / 学位規則第4条第1項該当 / Doctor of Philosophy (Engineering) / Kyoto University / DFAM
proximity gettering technology
silicon wafer
molecular ion implantation
CMOS image sensor
ion implantation defect
500

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