We investigate the design, fabrication, and experimental characterization of high quality factor photonic crystal nanobeam cavities, with theoretical quality factors of \(1.4 × 10^7\) in silicon, operating at ~1550 nm. By detecting the cross-polarized resonantly scattered light from a normally incident laser beam, we measure a quality factor of nearly \(7.5 × 10^5\). We show on-chip integration of the cavities using waveguides and an inverse taper geometry based mode size converters, and also demonstrate tuning of the optical resonance using thermo-optic effect. We also study coupled cavities and show that the single nanobeam cavity modes are coupled into even and odd superposition modes. Using electrostatic force and taking advantage of the highly dispersive nature of the even mode to the nanobeam separation, we demonstrate dynamically reconfigurable optical filters tunable continuously and reversibly over a 9.5 nm wavelength range. The electrostatic force, obtained by applying bias voltages directly to the nanobeams, is used to control the spacing between the nanobeams, which in turn results in tuning of the cavity resonance. The observed tuning trends were confirmed through simulations that modeled the electrostatic actuation as well as the optical resonances in our reconfigurable geometries. Finally we demonstrate reconfiguration of coupled cavities by using optical gradient force induced mechanical actuation. Propagating waveguide modes that exist over wide wavelength range are used to actuate the structures and in that way control the resonance of a localized cavity mode. Using this all-optical approach, more than 18 linewidths of tuning range is demonstrated. Using an on-chip temperature self-referencing method that we developed, we determined that 20% of the total tuning was due to optomechanical reconfiguration and the rest due to thermo-optic effects. By operating the device at frequencies higher than the thermal cut-off, we show high speed operation dominated by just optomechanical effects. Independent control of mechanical and optical resonances of our structures, by means of optical stiffening, is also demonstrated. / Engineering and Applied Sciences

Cutting tools are subject to extreme environment during processing, with hightemperatures and pressures. CVD coatings are used to increase lifetime andperformance of the WC/Co composite. Residual stresses in the coatings areinteresting as they may be destructive or constructive for the material duringoperation. Blasting is used to change the as-deposited tensile stress to compressive.The usefulness of X-ray diffraction (XRD) and nanobeam diffraction (NBD) forcharacterization of strains in the different coating layers has been investigated. XRDwith different anode materials has been used to determine the macrostress in thelayers and an attempt was done to calculate the average microstrain and crystallitesize. NBD was used to study the microstrain within single grains of the differentmaterials. A specimen preparation method has been developed for the studiedsamples using the FIB.The XRD analysis shows that the measurement condition is of great importanceduring stress measurements. The macrostress of the different samples show that theZrCN type coating is less stressed than the TiCN type coating after deposition. It isalso shown that the ZrCN type coating is less affected by the blasting. Determinationof microstrain and crystallite size from XRD needs further development.The NBD is a good method to evaluate microstrain within single grains, or betweengrains oriented in the same zone axis. The analyses show more strain within thegrains after blasting. The measurements indicate more strain variation in the Al2O3layer in the TiCN system compared to the ZrCN system.

京都大学 / 0048 / 新制・課程博士 / 博士(工学) / 甲第17985号 / 工博第3814号 / 新制||工||1584(附属図書館) / 80829 / 京都大学大学院工学研究科電子工学専攻 / (主査)教授 川上 養一, 教授 藤田 静雄, 准教授 浅野 卓 / 学位規則第4条第1項該当 / Doctor of Philosophy (Engineering) / Kyoto University / DFAM

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