Nanopositioners have been developed with electrostatic, piezoelectric, magnetic, thermal, and electrochemical actuators. They move with as many as six degrees of freedom; some are composed of multiple stages that stack together. Both macro-scale and micro-scale nanopositioners have been fabricated. A summary of recent research in micropositioning and nanopositioning is presented to set the background for this work. This research project demonstrates that a dual-stage nanopositioner can be created with microelectromechanical systems technology such that the two stages are integrated on a single silicon chip. A nanopositioner is presented that has two stages, one for coarse motion and one for fine motion; both are fabricated by surface micromachining. The nanopositioner has one translational degree of freedom. Thermal microactuators operate both stages. The first stage includes a bistable mechanism: it travels 52 micrometers between two discrete positions. The second stage is mounted on the first stage and moves continuously through an additional 8 micrometers in the same direction as the first stage. Two approaches to the control of the second stage are evaluated: first, an electrical input is transmitted to an actuator that moves with the first stage; second, a mechanical input is applied to an amplifier mechanism mounted on the first stage after completing the coarse motion. Four devices were designed and fabricated to test these approaches; the one that performed best was selected to fulfill the objective of this work. Thermal analysis of the actuators was performed with previously developed tools. Pseudo-rigid-body models and finite element models were created to analyze the mechanical behavior of the devices. The nanopositioners were surface micromachined in a two-layer polysilicon process. Experiments were performed to characterize the resolution, repeatability, hysteresis, and drift of the second stages of the nanopositioners with open-loop control. Position measurements were obtained from scanning electron micrographs by a numerical procedure, which is described in detail. The selected nanopositioner demonstrated 170-nanometer resolution and repeatability within 37 nanometers. The hysteresis of the second stage was 6% of its full range. The nanopositioner drifted 25 nanometers in the first 60 minutes of operation with a time constant of about 6 minutes. The dual-stage nanopositioner may be useful for applications such as variable optical attenuators or wavelength-specific add--drop devices.

The thesis focuses on the development of instruments used for surfaces and nanostructures characterization. Individual techniques of scanning probe microscopy provide different information of the sample surface. The resolution of scanning probe microscopy, providing 3D topography information, reaches subnanometer values or even an atomic level. Therefore, the scanning probe microscopy is one of the most employed method in the field of nanotechnology. The thesis describes the details of development of two scanning probe microscopes intended for measurement under ultra high vacuum conditions. As for the first one, many changes were proposed leading to its better variability, extended functionality and increased user comfort. The second microscope is being design with the aim of its combination with other analytic techniques, especially with scanning electron microscopy. An integral part of scanning probe microscopes is a precise positioning system for navigation of the probe to the selected site. Therefore, the thesis also deals with the development of linear piezoceramic actuators used not only in the ultra high vacuum compatible microscopes but also as a general purpose nanomanipulators.