I propose to develop a new method for the synthesis of metal matrix composites (MMC) using aerosol reactants in a radio frequency (RF) plasma torch. An inductivelycoupled RF plasma torch (ICPT) may potentially be designed to maintain laminar flow and a radial temperature distribution. These two properties provide a method by which a succession of metal layers can be applied to the surface of SiC fibers. In particular, the envisaged method provides a means to fully bond any desired metal to the surface of the SiC fibers, opening the possibility for MMCs in which the matrix metal is a highstrength steel. A crucial first step in creating the MMC is to test the feasibility of constructing an ICPT with completely laminar flow in the plasma region. In this work, a magnetohydrodynamic (MHD) model is used along with a computational fluid dynamic (CFD) software package called FLUENT© to simulate an ICPT. To solve the electromagnetic equations and incorporate forces and resistive heating, several userdefined functions (UDF) were written to add to the functionality of FLUENT©. Initially, an azimuthally-symmetric, two-dimensional model was created to set a test baseline for operating in FLUENT© and to verify the UDF. To incorporate coil angle and current leads, a fully three dimensional model UDF was written. Preliminary results confirm the functionality of the code. Additionally, the results reveal a non-mixing, laminar flow outer region for an axis-symmetric ICPT.

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Pour répondre aux besoins des nouvelles techniques de caractérisation sur site in-situ et temps réel, l’unité NOVA de l’INERIS en partenariat avec les laboratoires LP3 et GREMI, a entamé des travaux pour étudier deux approches afin d’améliorer les performances de la technique Laser-Induced Breakdown Spectroscopy (LIBS) pour l’analyse des aérosols. LIBS est une technique optique de spectroscopie atomique. Elle consiste à focaliser un faisceau laser impulsionnel sur un échantillon à analyser créant ainsi un plasma. L’émission optique du plasma contient alors la signature des éléments chimiques présents dans l’échantillon. La première approche concerne la détermination de la composition chimique relative (stoechiométrique) d’aérosols sans étalonnage. En effet, l’étalonnage présente des problèmes pratiques. Pour ce faire, les spectres expérimentaux enregistrés lors de l’analyse des particules d’alumine (Al2O3) suspendues dans de l’hélium (He) ont été comparés à des spectres théoriques calculés pour un plasma contenant les mêmes éléments, à l’Équilibre Thermodynamique Local (ETL). L’ajustement des spectres simulés sur les spectres expérimentaux nous a permis de déterminer correctement la composition chimique relative des éléments présents dans le plasma. L’évolution temporelle du plasma a permis de valider l’ETL, et ainsi estimer la meilleure plage temporelle permettant la détermination de la composition relative de l’aérosol. La deuxième approche utilise une cellule radiofréquence (RF) à pression réduite comme piège à particules pour analyser des aérosols contenant des nanoparticules. Un tel piège permet d’améliorer la détection en concentrant spatialement les particules. Les paramètres optimaux d’utilisation de ce système ont été étudiés. Cette étude a permis d’établir que l’émission continue du plasma est fortement réduite dès ses premiers instants de vie. Le volume d’échantillonnage de ce système a été évalué et la limite de détection a été estimée de manière théorique. / New issues related to process control and workplace surveillance accompany the emergence of nanotechnology industry. This involves the development of new real-time and in-situ characterization techniques. In this context, the NOVA unit from the INERIS institute collaborated with LP3 and GREMI laboratories to study two approaches aiming to enhance the LIBS technic performances. The first approach used a flow cell to determine the relative elemental composition of an aerosol with a calibration-free procedure. The recorded spectra were compared to theoretical spectra calculated for a plasma in the Local Thermodynamic Equilibrium LTE. The best agreement between recorded and computed spectra allowed the determination of the relative composition with a good agreement with the reference value, for an alumina aerosol. The study of the temporal evolution of the plasma allowed the estimation of a temporal range within which the LTE hypothesis was verified. The second approach used a low-pressure radiofrequency plasma generated in an inert gas as a particle trap to analyse aerosols and nanoparticles. The use of such a system allowed the enhancement of particles detection by concentrating them spatially. We determined the optimal parameters for the LIBS analysis using this system. Furthermore, we established the plasma continuum was attenuated even at very low time delays. We evaluated the sampling volume of this new system and compared it to case of LIBS analysis on air. Finally, we estimated the detection limits of this system when analysing nanoparticles.

The theoretical part of the thesis is focused on surface treatments, their evaluation from the point of view visual properties, plasma-enhanced chemical vapor deposition and analysis of thin layers prepared by plasma polymerization. The experimental part of the thesis deals with surface treatment of stainless steel AISI 304. Thin layers of pp-HMDSO (plasma-polymer) and of DLC are deposited on the steel´s surface for the purpose of preparing transparent layer, which protect steel´s surface against of making finger prints visible. As an objective method is chosen an immersion test in artificial sweat solution according to standard ČSN EN ISO 105-E04. Evaluation of the test is measured by a gloss-meter and by a colorimeter. Prepared layers are identificated by FTIR method.

On this thesis work, design and construction of an up to date complete RF excitation system was intended. This excitation system is mainly based on highly efficient switching power generators and proper coupling of the power to the object plasma. This new excitation system design should answer the demands of today&#039 / s progressed CO2 lasers on various power ranges. Though it could be used by a large variety of applications including RF plasma and RF heating, on the first occasion in order to define design considerations, this system is to be exploited by RF excited fast flow and RF excited slab CO2 laser constructions.

Le dépôt chimique en phase vapeur assisté par plasma hors équilibre thermodynamique est largement étudié pour la synthèse de couches minces fonctionnelles. Pour certaines applications, la multifonctionnalité est un prérequis, ce qui peut être réalisé à l’aide d’un certain nombre de méthodes, dont le dépôt par plasma de couches minces nanocomposites. En utilisant un réacteurinjecteur, des précurseurs liquides avec ou sans nanoobjets peuvent être injectés dans la décharge sous la forme d’aérosols en régime pulsé, ce qui donne lieu à des plasmas transitoires avec des propriétés fondamentales qui dépendent du temps. L’impact de l’injection de pulses d’argon dans un plasma RF d’argon à basse pression a récemment été étudié par spectroscopie d’émission optique. La présente étude s’inscrit comme une suite à ce travail et vise à caractériser le procédé en présence de pulses de pentane pour le dépôt de couches minces hydrocarbonées, d’une part, et de pulses de pentane et de nanoparticules d’oxyde de zinc pour le dépôt de couches minces hydrocarbonées avec des nanoinclusions d’oxyde métallique, d’autre part. Dans la première partie, les résultats montrent que l’augmentation de la quantité d’aérosol injectée dans le plasma RF d’argon, obtenue en augmentant soit la fréquence des impulsions, soit la quantité de liquide injectée pendant une impulsion, influence différemment les variations transitoires de la pression d’opération et de la tension d’auto-polarisation sur le substrat pendant chaque impulsion. Dans la gamme des conditions expérimentales étudiées, la vitesse de dépôt des revêtements CxHy augmente avec la quantité de précurseur injecté. Cependant, en corrélant ces données avec les caractéristiques de l’aérosol obtenue par diffusion de la lumière, il s’avère que la taille des gouttelettes joue un rôle important dans la cinétique du dépôt et dans l’évolution des propriétés des couches déposées. Dans la seconde partie, les données montrent que des couches minces formées de nanoparticules de ZnO imbriquées dans une matrice CxHy peuvent être formées en remplaçant le pentane par une solution colloïdale. Dans ces conditions, la vitesse de dépôt et la quantité de nanoparticules injectées dans la couche peuvent être contrôlée en ajustant la fréquence des impulsions et la quantité de précurseur injectée pendant une impulsion. / Plasma-enhanced chemical vapor deposition in non-equilibrium plasmas is widely studied for the synthesis of functional thin films. For some applications, multifunctionality is a prerequisite, which can be achieved using several methods, including plasma deposition of nanocomposite thin films. Using a reactor-injector, liquid precursors with or without nanoobjects can be injected into the discharge as pulsed aerosols, giving rise to transient plasmas with time-dependent fundamental properties. The impact of injecting argon pulses into a low-pressure RF argon plasma has recently been studied by optical emission spectroscopy. The present study is a follow-up to this work and aims to characterize the process in the presence of pentane pulses for the deposition of thin hydrocarbon layers, on the one hand, and pentane pulses and zinc oxide nanoparticles for the deposition of thin hydrocarbon layers with metal oxide nanoinclusions, on the other hand. In the first part, the results show that increasing the amount of aerosol injected into the RF argon plasma, obtained by increasing either the pulse frequency or the amount of liquid injected during a pulse, influences differently the temporal variations of the operating pressure and self-bias voltage on the substrate during each pulse. In the range of experimental conditions studied, the deposition rate of CxHy coatings increases with the amount of precursor injected. However, by correlating these data with the characteristics of the aerosol obtained by light scattering, it turns out that the size of the droplets plays an important role on the thin-film deposition kinetics and on the evolution of the properties of the plasma-deposited layers. In the second part, the data show that thin films formed of ZnO nanoparticles embedded in a CxHy matrix can be formed by replacing pentane with a colloidal solution. Under these conditions, the deposition rate and the quantity of nanoparticles injected into the layer can be controlled by adjusting the frequency of the pulses and the quantity of precursor injected during a pulse.

This thesis presents results of the corrosion layers removal which could be found on the archaeological artefact surfaces. The low pressure low temperature plasma reduction was used for this purpose. Brass samples were chosen for this study. Two different ways have been used to form model corrosion layers. Several sets of corrosion layers were prepared in laboratory in two different corrosion atmospheres, namely ammonia atmosphere and atmosphere of hydrochloric acid. These samples were placed into desiccator. Small quantities of sand were added to some sets of samples so samples with sandy incrustation were prepared. The corrosion layers had been usually formed during four weeks. The second way, which was used to prepare model corrosion layer, was the natural corrosion in soil or compost. In this case, the corrosion layers had been formed approximately 2 years. The samples were treated in the low pressure (150 Pa) cylindrical Quartz reactor (90 cm long and 9.5 cm in diameter) with a pair of external copper electrodes connected via the matching network to a radiofrequency generator (13.56 MHz). The flows of working gases were set by independent mass flow controllers. Whole system was continuously pumped by the rotary oil pump which was separated from the discharge reactor by liquid nitrogen trap with aluminium chips eliminating dust and reactive species from the gas flow. Each sample was placed on a glass holder at the reactor center. Plasma was generated in pure hydrogen or in mixture of hydrogen and argon. Total flow of working gas was 50 sccm. Different ratios of gas mixture were tested, the ratio 30 sccm hydrogen and 20 sccm argon flows was the best. RF discharge was used in a continuous and pulsed regime. Pulsed mode was carried out with various duty cycle at the frequency of 1000 Hz. There were two ways of temperature monitoring. The sample temperature during the treatment was monitored by a K-type thermocouple installed inside the sample in the first case. Thermometer optical probe was connected to the sample surface by a small stainless plate and allowed continuous sample temperature monitoring in the second way. Safe object temperature for copper and copper alloys is 100–120 °C. To avoid exceeding this temperature, power control or the duty cycle in pulse mode were automatically controlled if thermometer optical probe was used. Plasma chemical treatment is based on generation of reactive atomic hydrogen in plasma discharge. The main reactions during reduction were reactions between oxygen and chloride contained in the corrosion layer and the hydrogen ions and neutral atoms generated in the plasma. These reactions create an unstable OH radical, which emits light in the region of 306–312 nm. This radiation was detected by the optical emission spectroscopy using Ocean Optics HR4000 spectrometer with 2400 gr/mm grating. Data obtained from this method were used to calculate rotational temperatures and integral intensity of OH radicals that were used for the process monitoring. Corrosion layer was not completely removed during the reduction, but due to the reactions which occur in the plasma corrosion layer became brittle and after plasma chemical treatment can be removed easily. The SEM-EDS material analyses were carried out before and after treatment of some samples. Some samples were analysed by XRD analysis. EDS analysis showed that amount of oxygen and chloride was decreased, mainly at 400 W pulse mode.