A major challenge in the manufacturing of micro and nano devices is the cleaning, rinsing, and drying of very small structures. Without a technology for in situ and real-time monitoring and controlling, the rinse processes that account for a significant fraction of the total processing steps use a large amount of water and energy perhaps unnecessarily. This "blind" processing approach leads to waste that can have significant economic and environmental impacts. An electrochemical residue sensor (ECRS) has been developed and is aimed at in situ and real-time measurement of residual contamination inside the micro and nano structures. Using this technology, the mechanisms and bottlenecks of cleaning, rinsing, and drying can be investigated and the processes can be monitored and controlled.An equivalent circuit model was developed to assist the design of the sensor; its validity was proved by the first prototype. The simulation results and the experimental data predicted a good sensitivity in a wide range of operational frequency. To use the sensor in a practical rinse tank setup, the sensor-on-wafer prototype was designed and fabricated. Both the fab-scale and the lab-scale tests were performed and results illustrated many successes. The sensor is the first and the only available technology that provides the in situ and real-time cleanness information in the microstructures during the rinse processes. The sensor results distinguished four different types of rinse processes and showed high sensitivity to the ionic concentration change in the microstructures. The impacts of cleaning and rinsing parameters such as flow rate, temperature, cleaning solution concentrations, and process time on the sulfuric acid rinsing efficiency were investigated by using the sensor. The investigation discovered that sulfuric acid rinsing is a two-stage process: a flow-control stage and a desorption-control stage. A comprehensive rinse model was developed to correlate the transport process and the trench impedance that is the sensor's signal. This model combined with the experimental data proved that increasing flow rate in the overflow rinse has a low efficiency for the rinse processes controlled by the surface reactions. The model, for the first time, shows the dynamics of the charging of the silicon dioxide surface and the dynamics of the potential build-up in the solution. It also discovered that the cation rinsing is a challenge if the cation adsorbs on or reacts with the surface.

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Typical surface preparation consists of exposure to cleaning chemical to remove contaminants followed by rinsing with ultra-pure water which is followed by drying. Large quantities of water, various chemicals, and energy are used during rinsing and drying processes. Currently there is no in-situ metrology available to determine the cleanliness of micro- and nano-structures as these processes are taking place. This is a major technology gap and leads to over use of resources and adversely affects the throughput.Surface preparation of patterned wafers by batch processing becomes a major challenge as semiconductor fabrication moves deeper in submicron technology nodes. Many fabs have already employed single wafer tools. The main roadblock for single-wafer tools is their lower throughput. This obstacle is eased by introduction of multi chamber tools. To reduce cycle time and resource utilization during rinse and dry processes without sacrificing surface cleanliness and throughput, in-situ metrology is developed and used to compare typical single wafer spinning tools with immersion tools for rinsing of patterned wafers. This novel metrology technology includes both hardware for an in-situ measurement and software for process data analysis. Successful incorporation of this metrology will eliminate dependency on external analysis techniques such as Inductively Coupled Mass Spectroscopy (ICPMS), Scanning Electron Microscope (SEM), and Tunneling Electron Microscope (TEM), and will lead to fast response time.In this study the electro-chemical residue sensor (ECRS) was incorporated in a lab scale single-wafer spinning and single- wafer immersion tool. The ECRS was used to monitor dynamics of rinsing of various cleans such as ammonium peroxide mixture (APM), hydrochloric peroxide mixture (HPM), and sulfuric peroxide mixture (SPM). It was observed that different cleaning chemicals impact the subsequent rinse not only through adsorption and desorption but also through surface charge. The results are analyzed by using a comprehensive process model which takes into account various transport mechanisms such as adsorption, desorption, diffusion, convection, and surface charge. This novel metrology can be used at very low concentration with very high accuracy. It is used to study the effect of the key process parameters such as flow rate, spin rate, temperature, and chemical concentration.

Denna studie har utförts på Calamo AB som arbetar med elektropolering och betning av rostfritt stål. Efter ytbehandlingssteget krävs sköljning av godset för att avlägsna kemikalierester vilket medför att stora mängder surt sköljvatten uppstår. Idag används våtkemisk fällningsanläggning för att rena sköljvattnet. Det befintliga reningsverket kräver flertalet tillsatser samtidigt som mängden slam som går till deponi är stor. Företaget vill utreda miljönyttan med att installera en vakuumindunstare för att ersätta det befintliga reningsverket som reningsmetod samt se över möjligheten att minska sin vattenförbrukning i samband med sköljning av gods för att bland annat kunna reducera storleken på indunstaren, minska belastningen på reningsstegen samt reducera mängden avfall. Studiens mål var att kartlägga uppkomsten av förorenat sköljvatten, identifiera potentiella vattenbesparande åtgärder och hur dessa åtgärder påverkar effektiviteten hos reningsanläggningarna. Samt visa hur installation av en vakuumindunstare förändrar företagets miljöpåverkan och utreda om det finns möjligheter att återanvända eller återvinna kemikalier och metaller från processen. Kartläggning och flödesmätningar av sköljvattenbehovet utfördes med hjälp av information av personal på Calamo samt en ultraljudsmätare. Vattenbesparande åtgärder, påverkan på reningsanläggning samt möjligheter till återvinning av kemikalier undersöktes genom litteraturstudie samt modellering i Excel. Utredningen av miljönyttan genom att ersätta befintligt reningsverk med vakuumindunstare utfördes med hjälp av LCA-värden hämtade från databasen SimaPro 8.0.4. Flera olika förslag på vattenbesparande åtgärder studerades och dessa gav en total vattenreduktion till reningsverket på mellan 5 - 81 % beroende på hur många samt vilka åtgärder som vidtogs. Enligt miljöberäkningarna genererar vakuumindunstaren 3 gånger högre utsläpp av koldioxidekvivalenter och 7 gånger större behov av icke förnyelsebar energi jämfört med det befintliga reningsverket. Genom att installera sprutskölj med motströmsteknik i stycke, sammankoppla befintliga sköljkar i avdelningarna betning, AVFKA samt automaten och installera sparsköljstank i alla avdelningar uppnås en reduktion av förorenat vatten till reningsstegen på 81%, vilket ytterligare kan optimeras genom installation av jonbytare, återanvändning av varmt vatten från renrum. Dessutom ökar föroreningshalten med 61% då dessa åtgärder vidtas vilket gynnar reningseffektiviteten i reningsanläggningarna och därav rekommenderas detta alternativ. Även kemikalieanvändningen och förluster av metalljoner reduceras avsevärt i processen genom användningen av sparskölj. Att installera vakuumindunstare rekommenderas inte på grund av dess stora energianvändning, dock kan andra resultat uppstå då andra LCA-värden används samt genom andra antaganden och hänsyn till kemikalie- och metallåtervinning istället för deponi. / This study has been carried out at Calamo AB, which works with electropolishing and pickling of stainless steel. After the surface treatment step, rinsing of the material is required to remove chemical residues, which results in large amounts of acid rinse water. Today, wet chemical precipitation plant is used to clean the rinse water. The existing treatment plant requires most additives, while the amount of sludge that goes to landfill is large. The company wants to investigate the environmental benefits of installing a vacuum evaporator to replace the existing sewage treatment plant as a purification method and to review the possibility of reducing its water consumption in connection with rinsing of goods in order to reduce the size of the evaporator, reduce the load on the purification steps and reduce the amount of waste. The aim of the study was to map the emergence of polluted rinse water, identify potential water-saving measures and how these measures affect the efficiency of the treatment plants. And show how the installation of a vacuum evaporator changes the company's environmental impact and investigate whether there are opportunities to reuse or recycle chemicals and metals from the process. Mapping and flow measurements of the rinse water requirement were performed using information from staff at Calamo and an ultrasonic meter. Water-saving measures, impact on treatment plant and opportunities for recycling of chemicals were investigated through literature study and modeling in Excel. The study of the environmental benefits by replacing existing treatment plants with vacuum evaporators was carried out using LCA values obtained from the database SimaPro 8.0.4. Several different proposals for water-saving measures were studied and these gave a total water reduction to the treatment plant of between 5 - 81% depending on how many and what measures were taken. According to the environmental calculations, the vacuum evaporator generates 3 times higher emissions of carbon dioxide equivalents and 7 times the need for non-renewable energy compared to the existing treatment plant. By installing spray rinse with countercurrent technology in one piece, interconnecting existing rinses in the cuttings departments, AVFKA as well as the dispenser and installing sparse rinse tank in all departments, a reduction of contaminated water to the purification steps of 81% is achieved, which can be further optimized by installation of ion exchangers, reuse of hot water from clean room. In addition, the pollutant content increases by 61% as these measures are taken, which favors the purification efficiency of the treatment plants and hence this option is recommended. The use of chemicals and losses of metal ions are also considerably reduced in the process through the use of savings rinses. Installing vacuum evaporators is not recommended due to its large energy use, however, other results may arise when other LCA values are used, as well as through other assumptions and considerations for chemical and metal recycling instead of landfill.

Submitted by Divisão de Documentação/BC Biblioteca Central (ddbc@ufam.edu.br) on 2018-10-17T15:36:45Z No. of bitstreams: 2 license_rdf: 0 bytes, checksum: d41d8cd98f00b204e9800998ecf8427e (MD5) Dissertação versão final com a ficha catalográfica.pdf: 2316676 bytes, checksum: 9a738df673703c0cd716ee88cdb0e7bc (MD5) / Approved for entry into archive by Divisão de Documentação/BC Biblioteca Central (ddbc@ufam.edu.br) on 2018-10-17T15:36:56Z (GMT) No. of bitstreams: 2 license_rdf: 0 bytes, checksum: d41d8cd98f00b204e9800998ecf8427e (MD5) Dissertação versão final com a ficha catalográfica.pdf: 2316676 bytes, checksum: 9a738df673703c0cd716ee88cdb0e7bc (MD5) / Made available in DSpace on 2018-10-17T15:36:56Z (GMT). No. of bitstreams: 2 license_rdf: 0 bytes, checksum: d41d8cd98f00b204e9800998ecf8427e (MD5) Dissertação versão final com a ficha catalográfica.pdf: 2316676 bytes, checksum: 9a738df673703c0cd716ee88cdb0e7bc (MD5) Previous issue date: 2017-05-08 / CNPq - Conselho Nacional de Desenvolvimento Científico e Tecnológico / The objective of the present study is to develop allometric equations to estimate the biomass and the volume of commercial wood in plantations of Acacia mangium Willd, in savanna area, aiming to assist the planning and management of planted forests in the state of Roraima. For fresh biomass, 85 trees were harvested, from which samples of the trunk, branches, leaves and roots were obtained to obtain the water content and carbon content. A total of 221 trees were harvested to obtain the volumetric data from a combination of the Hohenadl and Smalian methods, distributed in 10 plantations of different ages. Six models were tested to adjust the total fresh and commercial volume biomass data. The average total biomass stock for individual tree was 338 ± 31.07 kg, generating an estimate of 433.56 t ha-1, with the weighted water content of 0.43 and carbon was 0.48. The equations developed to estimate the total fresh biomass, above the soil, below the soil and the trunk showed good adjustment. It is possible to use the general equation (M = 0,4103 * DAP2,3315; N = 85; R2 = 0,96; Syx(%) = 1,73) to accurately estimate the total fresh biomass of all the plantations under study. The Husch model was also the one that presented the best fit for the commercial volume data for plantations of all ages, and the use of the general equation (V = 0,000185 * DAP2,42695; N = 221; R2 = 0,92; Syx(%) = 1,6; Uncertainty = 3,1%) because it presents low uncertainty. In view of this the equations developed in this work are precise tools to estimate the fresh biomass and commercial volume of the Acacia mangium plantations in Roraima. / O objetivo do presente estudo é desenvolver equações alométricas para estimar a biomassa e o volume de madeira comercial em plantios de Acacia mangium Willd, em área de savana, visando auxiliar o planejamento e a gestão de florestas plantadas, no estado de Roraima. Para biomassa fresca foram abatidas 85 árvores, das quais foram retiradas amostras do tronco, galhos, folhas e raízes para a obtenção do teor de água e teor de carbono. Foram cubadas 221 árvores para a obtenção dos dados volumétricos, a partir da combinação dos métodos de Hohenadl e Smalian, distribuídas em 10 plantios com idades diferentes. Foram testados seis modelos para ajustar os dados de biomassa fresca total e de volume comercial. O estoque médio de biomassa total para árvore individual foi de 338±31,07 kg, gerando uma estimativa de 433,56 t há-1, com o teor ponderado de água de 0,43 e de carbono foi de 0,48. As equações desenvolvidas para estimar a biomassa fresca total, acima do solo, abaixo do solo e do tronco apresentaram bom ajuste. Sendo possível utilizar a equação geral (P = 0,4103 *, DAP2,3315; N = 85; R2 = 0,96; Syx(%) = 1,73) para estimar com precisão a biomassa frescal total de todos os plantios em estudo. O modelo de Husch também foi o que apresentou melhor ajuste para os dados de volume comercial para os plantios de todas as idades, sendo recomendada a utilização da equação geral (V = 0,000185 * DAP 2,42695; N = 221; R2 = 0,92; Syx(%) = 1,6; Incerteza = 3,1%) por apresentar baixa incerteza. Diante disto as equações desenvolvidas neste trabalho são ferramentas precisas para estimar a biomassa fresca e o volume comercial dos plantios de Acacia mangium em Roraima.

In the present study, the recovery of the indigo dyeing rinsing wastewater originating from a denim textile mill to the degree of reuse quality, which generally requires nanofiltration (NF), was investigated. In order to control flux decline and hence to maintain an efficient NF / coagulation, microfiltration (MF) and sequential MF plus ultrafiltration (UF) pretreatment process alternatives were tested. All pretreatment alternatives were optimized to reduce chemical oxygen demand (COD) and color load to NF. Coagulation process was investigated using the coagulants, aluminum sulfate (Al2(SO4)3.18H2O) and ferric chloride (FeCl3.6H2O) by running a series of jar tests. The results showed that coagulation process did not provide an effective and efficient pretreatment due to high dose of coagulant requirement. MF tests run by using 0.45, 2.5 and, 8 &micro / m membranes indicated that MF through 0.45 &micro / m pore-sized membrane is the best process providing 64% color and 29% COD removals, leading to a color value of 2493 Pt-Co and COD of 892 mg /L in the permeate. Application of sequential MF+UF filtration provided a significant benefit over single MF in terms of rejections and also permeate flux. UF applied after MF provided additional 62% color and 4% COD removals leading to 960 Pt-Co color and 856 mg/L COD. NF tests conducted using pretreated wastewater via single MF and sequential MF+UF indicated that single MF is the best pretreatment to NF and this treatment scheme provided 99% color, 97% COD and 80 % conductivity removals and satisfied reuse criteria.

Dans un contexte réglementaire incitant fortement les industriels à la réduction de la pollution à la source, l’application de stratégies telles que des bonnes pratiques environnementales et un meilleur contrôle des procédés constituent une réponse aux enjeux environnementaux. Le traitement de surface par voie aqueuse est une activité grande consommatrice d’eau et de produits chimiques et donc génératrice de rejets aqueux pollués. L’objectif de ce travail est de proposer à ce secteur d’activité une méthodologie simple de limitation des flux de pollution ainsi que de la consommation en eau. Cette méthodologie se base notamment sur le postulat que l’entraînement est le principal vecteur de pollution au sein d’une chaîne de traitement de surface.Des études expérimentales ont permis, d’une part de créer une méthode rapide de calcul de l’entraînement et, d’autre part, de montrer et de quantifier l’influence de la forme et de la rugosité des pièces traitées, du temps d’égouttage, de la tension superficielle des solutions de traitement ou encore du type et de la durée du rinçage des pièces sur l’entraînement.L’ensemble de ces éléments, intégrés à la méthodologie de minimisation de la pollution, permet d’une part de réaliser un diagnostic de la chaîne mais aussi d’estimer l’impact d’une modification de cette chaîne sur la consommation spécifique en eau, le bilan de pollution ainsi que sur la qualité des rinçages. Cette méthodologie aide ainsi à limiter les consommations d’eau et de réactifs non seulement sur la chaîne mais également en station de détoxication, diminuant ainsi les impacts environnementaux et les coûts de fonctionnement. / Currently, via the prevention principle, environmental regulations incite industries to implement strategies to reduce the pollution at the source (ICPE, IPPC, IED). Industries are sometimes lost in front of various proposed technical solutions. The application of cleaner production strategies such as good operational procedures and good practices of management allow to answer these constraints.The metal finishing activity uses a lot of water and chemicals and thus generates polluted effluents. The objective of this work is to propose a simple methodology of limitation of the pollution flows and of the water specific consumption of metal finishing workshops.Then, experimental studies have allowed, on one hand, to create an easy method of the drag-out calculation and, on the other hand, to show and to quantify the influence of different parameters on the drag-out, from a qualitative and quantitative point of view. They are, for example, the shape and the roughness of the treated pieces, the draining time, the superficial tension of the treatment solutions but also the stirring type and duration of rinsing.All these elements, integrated into the methodology of pollution minimization, allow to realize a diagnosis of the process line. Moreover, it permits to estimate the impact of a modification of this installation on the specific consumption of water, on the pollution balance assessment and on the rinsing quality. So, this methodology can help to optimize and to limit consumptions of water and chemicals not only on the process line but also in wastewater treatment plant, so decreasing the environmental impacts and the running costs.

Goal of the diploma thesis is to explain what does the term of controlled horizontal drilling mean and where it can be performed. Furthermore, it wants to show what to pay attention to during designing as well as during the actual pilot drill. Additionally, to show that pilot drill cannot be performed based on the project in all scenarios. Theoretical part of the thesis explains how the technology works and which auxiliaries are necessary to successfully perform controlled pressure. This technology is explained step by step in the practical part of the thesis to show how to proceed during the realization of controlled pressure.

This thesis deals with the design of automated system of electroplating. The first part is centered on designing the technological process for this electroplating and the setout of operating vats. It also deals with the project of mechanical construction, electrical system, with the computing procedure and the optimum choice of gear for galvanic line model. The work includes the design of a DC motor controller, the computing procedure and the construction of heating element for vats heater simulation. The last part of this thesis offers an insight to the control system and the assembled program. In the addendum, the photo of the realized model, the wiring scheme, and the programme transcript for control galvanic line model can be found.