Ultrasonic transducers are used in many fields of daily life, e.g. as parking aids or medical devices. To enable their usage also for mass applications small and low- cost transducers with high performance are required. Capacitive, micro-machined ultrasonic transducers (CMUT) offer the potential, for instance, to integrate compact ultrasonic sensor systems into mobile phones or as disposable transducer for diverse medical applications. This work is aimed at providing fundamentals for the future commercialization of CMUTs. It introduces novel methods for the acoustic simulation and characterization of CMUTs, which are still critical steps in the product development process. They allow an easy CMUT cell design for given application requirements. Based on a novel electromechanical model for CMUT elements, the device properties can be determined by impedance measurement already. Finally, an end-of-line test based on the electrical impedance of CMUTs demonstrates their potential for efficient mass production.

Air-borne ultrasonic transducers are optimised to achieve a maximal sound pressure in a frequency range around 100 kHz. Moreover, the radiation of a high acoustic power is desired, which requires a large transducer area. Within this dissertation the ultrasonic transducers are, therefore, optimised to operate in the resonance mode. Using this operating point the maximal force is fed into the transducer while it is charged with the lowest loss possible. Many applications of air-borne ultrasound need a sufficient bandwidth in addition to a high sound pressure, that s why the swinging mass of the transducer has to be minimised. For these reasons, air-borne capacitive and piezoelectric film transducers take centre stage of these examinations. New network models of the stripe membrane and the pre-stressed stripe plate are derived to optimise these ultrasonic transducers. Besides its mechanical tension and its bending stiffness, the new network model of the pre-stressed and pressure loaded stripe plate takes also the stiffness caused by the shape of the plate into account. The examined transducers achive a maximal piston velocity around 1 m/s. / Ultraschallwandler für Anwendungen in Luft werden zur Bereitstellung eines maximalen Schalldrucks im Frequenzbereich um 100 kHz optimiert. Sie sollen außerdem die Abstrahlung einer großen Schallleistung zulassen, was eine große Wandlerfläche voraussetzt. Deshalb werden in dieser Arbeit die Ultraschallsender für den Resonanzbetrieb optimiert, wo man die maximale Krafteinspeisung bei minimalen Verlusten einstellt. Viele Anwendungen von Ultraschall in Luft benötigen neben einem hohen Schalldruckpegel auch eine ausreichende Bandbreite, wozu die schwingende Masse der Wandler zu minimieren ist. Deshalb stehen kapazitive und piezoelektrische Folienwandler im Resonanzbetrieb im Vordergrund der Untersuchungen. Zur Optimierung dieser Ultraschallsender werden die Netzwerkmodelle der Streifenmembran und der gespannten Streifenplatte abgeleitet. Neben der mechanischen Spannung und der Biegesteifigkeit berücksichtigt das Netzwerkmodell der gespannten und statisch druckbelasteten Streifenplatte die Formversteifung. Die untersuchten Wandler erreichen eine maximale Kolbenschnelle um 1 m/s.