Les transducteurs ultrasonores capacitifs micro-usinés peuvent s’adapter à la complexité et à la miniaturisation requise par l’évolution des techniques d’échographie vers l’imagerie intracardiaque ou l’imagerie 3D en temps réel. L’objectif de ce travail de thèse est la réalisation de démonstrateurs pouvant être intégrés dans une sonde cathéter 9Fr pour l’imagerie intracardiaque. Nous proposons, d’évaluer une technologie de micro-usinage de surface a?n de réaliser une architecture reposant sur un couple de membrane en nitrure de silicium faiblement contraint et de couche sacri?cielle en oxyde. Nous abordons la caractérisation électromécanique des transducteurs ultrasonores en proposant une approche mécanique pour la détermination de la tension de collapse et la fréquence de résonance. Di?érentes techniques nous ont permis d’extraire les propriétés mécaniques de la couche structurelle du microsystème. Nous ?nalisons ces travaux sur l’intégration des dispositifs dans la sonde avec un report de connectique sur la face arrière, basée sur des vias traversants et une couche de passivation en nitrure de silicium déposé par PECVD ou de parylène C. / Capacitive Micromachined Ultrasonic Transducers (cMUTs) based on MEMS technology may ?t the complexity and the miniaturization required by ultrasound probes evolution. The objective of this thesis work is to realize a technological test vehicle which can be easily and directly integrated in a 9Fr catheter probe. This document focuses on a surface micromachining process in order to realize a 450nm thick suspended membrane over a 200nm gap. The process lies on a LPCVD low stress silicon nitride membrane and an oxide sacri?cial layer. The electromechanical characterization of the membrane is performed through laser Doppler vibrometry and optical pro?lometry in order to determine the collapse voltage and the natural frequency of the membranes. Material’s mechanical properties being fundamental in any MEMS prediction behavior, dedicated mechanical test structures were characterized in order to extract silicon nitride mechanical properties. In an integration and a ?ip-chip scheme, a through wafer interconnect technology is proposed. Finally, this document ends on the investigation of PECVD silicon nitride and parylene C as a passivation layer.

Capacitive micromachined ultrasonic transducers (CMUTs) have been developed as an alternative to piezoelectric transducers for ultrasonic imaging in non-destructive testing applications. These CMUTs offer substantial advantages over their piezoelectric counterparts, which include a highly miniaturized system, easy integration with electronic control circuitry, a wider bandwidth, and a higher sensitivity. In this thesis, the design, fabrication and characterization of several single and array CMUT devices are reported. Many sizes of CMUTs, aiming to operate at different resonant frequencies, were fabricated using a PolyMUMPs sacrificial technique. An analytical and finite element model was used to further understanding of the physical behaviour of the transducer. The basic functionality of the CMUT devices was investigated through capacitance and electrical impedance measurements. These devices showed greater change in the capacitance and impedance data while operating close to their collapse voltages. This higher change in both capacitance and impedance is a result of a larger membrane displacement. The acoustic output power is directly related to the magnitude of the membrane’s displacement. The transducers performance thus can be enhanced by operating close to their collapse voltage and obtained higher sensitivity. The optical characterization, performed on the single devices and on the 1-D arrays, provided a better understanding of the membrane vibration modes and displacement profiles at different resonant frequency modes. Acoustic measurements were performed to demonstrate the transmission capability of the CMUTs. The generated acoustic signals were detected using a commercial detector. These acoustic experiments demonstrated that these CMUTs can potentially be used as ultrasonic transducers alternative to piezoelectric transducers.

Close integration of front-end electronics and the transducer array within the catheter is critical for successful implementation of CMUT-based intravascular ultrasound (IVUS) imaging catheters to enable next generation imaging tools. Therefore, this research developed and implemented custom-designed electronic circuits and systems integrated with an IC compatible transducer technology for realization of miniature IVUS imaging catheters operating at 10-50 MHz frequency range. In one path of this research, an IC is custom designed in a 0.35-um CMOS process to monolithically integrate with a CMUT array (CMUT-on-CMOS) to realize a single-chip, highly-flexible, forward-looking (FL) IVUS imaging system. The amplifiers that are custom-designed achieved transducer thermal-mechanical noise dominated receive performance in a CMUT-on-CMOS implementation. In parallel to the FL-IVUS effort, for realization of a side-looking IVUS catheter based on an annular phased array, a dynamic receive beamformer IC is custom designed also in a 0.35-um CMOS process. Overall, the circuits and systems developed as part of this dissertation form a critical step in the translation of the research on CMUT-based IVUS catheters into real clinical applications for better management of coronary arterial diseases.

Recent advances in medical imaging have greatly improved the success of cardiovascular and intracardiac interventions. This research aims to improve capacitive micromachined ultrasonic transducers (CMUT) based imaging catheters for intravascular ultrasound (IVUS) and intra-cardiac echocardiography (ICE) for 3-D volumetric imaging through integration of high-k thin film material into the CMUT fabrication and array design. CMUT-on-CMOS integration has been recently achieved and initial imaging of ex-vivo samples with adequate dynamic range for IVUS at 20MHz has been demonstrated; however, for imaging in the heart, higher sensitivities are needed for imaging up to 4-5 cm depth at 20MHz and deeper at 10MHz. Consequently, one research goal is to design 10-20MHz CMUT arrays using integrated circuit (IC) compatible micro fabrication techniques and optimizing transducer performance through high-k dielectrics such as hafnium oxide (HfO2). This thin film material is electrically characterized for its dielectric properties and thermal mechanical stress is measured. Experiments on test CMUTs show a +6dB improvement in receive (Rx) sensitivity, and +6dB improvement in transmit sensitivity in (Pa/V) as compared to a CMUT using silicon nitride isolation (SixNy) layer. CMUT-on-CMOS with HfO2 insulation is successfully integrated and images of a pig-artery was successfully obtained with a 40dB dynamic range for 1x1cm2 planes. Experimental demonstration of side looking capability of single chip CMUT on CMOS system based FL dual ring arrays supported by large signal and FEA simulations was presented. The experimental results which are in agreement with simulations show promising results for the viability of using FL-IVUS CMUT-on-CMOS device with dual mode side-forward looking imaging. Three dimensional images were obtained by the CMUT-on-CMOS array for both a front facing wire and 4 wires that are placed perpendicular to the array surface and ~4 mm away laterally. For a novel array design, a dual gap, dual frequency 2D array was designed, fabricated and verified against the large signal model for CMUTs. Three different CMUT element geometries (2 receive, 1 transmit) were designed to achieve ~20MHz and ~40MHz bands respectively in pulse-echo mode. A system level framework for designing CMUT arrays was described that include effects from imaging design requirements, acoustical cross-talk, bandwidths, signal-to-noise (SNR) optimization and considerations from IC limitations for pulse voltage. Electrical impedance measurements and hydrophone measurements comparisons between design and experiment show differences due to inaccuracies in using SixNy homogenous material in simulation compared to fabricated thin-film stacks (HfO2-AlSi-SixNy). It is concluded that for “thin” membranes the effect of stiffness and mass of HfO2 and AlSi (top electrode) cannot be ignored in the simulation. Also, it is understood that aspect ratio (width to height) <10 will have up to 15% error for center frequency predicted in air when the thin-plate approximation is used for modelling the bending stiffness of the CMUT membrane.

A metasurface or 2D metamaterial composed of a membrane array can support an interesting acoustic wave field. These waves are evanescent in the direction normal to the array and can propagate in the immersion fluid immediately above the metasurface. These waves are a result of the resonant membranes coupling to the fluid medium and propagate with a group and phase speed lower than that of the bulk waves in the surrounding fluid. This work examines and utilizes these evanescent surface waves using Capacitively Micromachined Ultrasonic Transducers (CMUT) as a specific example. CMUT arrays can generate and detect membrane displacement capacitively, and are shown to support the surface waves capable of subwavelength focusing and imaging. A model is developed that can solve for the modes of the membrane array in addition to transiently modeling the behavior of the array. It is found that the dispersive nature of the waves is dependent on the behavior of the modes of the membrane array. Two-dimensional dispersion analysis of the metasurface shows evidence of four distinct frequency bands of surface wave propagation: isotropic, anisotropic, directional band gap, and complete band gap around the first resonant frequency of the membrane. Some of the frequencies in the partial band gap show concave equifrequency contours capable of negative refraction. The dispersion and modal properties are also examined as to how they are affected by basic array parameters. Potential applications of this wave field are examined in the context of subwavelength focusing and imaging. Several methods of acoustic focusing are used on an array consisting of dense grid of membranes and several membranes spatially removed from the structure. Subwavelength acoustic focusing to a resolution of λ/5 is shown in simulations and verified with experiments. An imaging test is also performed in which a subwavelength defect is localized. This fundamental work in characterizing the waves above the membrane metasurfaces is expected to have impact and implications for transducer design, resonant sensors, 2D acoustic lenses, and subwavelength focusing and imaging.

We created an analytical reduced-order model (macromodel) for an electrically actuated circular plate with an in-plane residual stress for applications in capacitive micromachined ultrasonic transducers (CMUTs). After establishing the equations governing the plate, we discretized the system by using a Galerkin approach. The distributed-parameter equations were then reduced to a finite system of ordinary-differential equations in time. We solved these equations for the equilibrium states due to a general electric potential and determined the natural frequencies of the axisymmetric modes for the stable deflected position. As expected, the fundamental natural frequency generally decreases as the electric forcing increases, reaching a value of zero at pull-in. However, strain-hardening effects can cause the frequencies to increase with voltage. The macromodel was validated by using data from experiments and simulations performed on silicon-based microelectromechanical systems (MEMS). For example, the pull-in voltages differed by about 1% from values produced by full 3-D MEMS simulations. The macromodel was then used to investigate the response of an electrostatically actuated clamped circular plate to a primary resonance excitation of its first axisymmetric mode. The method of multiple scales was used to derive a semi-analytical expression for the equilibrium amplitude of vibration. The plate was found to always transition from a hardening-type to a softening-type behavior as the DC voltage increases towards pull-in. Because the response of CMUTs is highly influenced by the boundary conditions, an updated reduced-order model was created to account for more realistic boundary conditions. The electrode was still considered to be infinitesimally thin, but the electrode was allowed to have general inner and outer radii. The updated reduced-order model was used to show how sensitive the pull-in voltage is with respect to the boundary conditions. The boundary parameters were extracted by matching the pull-in voltages from the macromodel to those from finite element method (FEM) simulations for CMUTs with varying outer and inner radii. The static behavior of the updated macromodel was validated because the pull-in voltages for the macromodel and FEM simulations were very close to each other and the extracted boundary parameters were physically realistic. A macromodel for CMUTs was then created that includes both the boundary effects and an electrode of finite thickness. Matching conditions ensured the continuity of displacements, slopes, forces, and moments from the composite to the non-composite regime of the CMUT. We attempted to validate this model with results from FEM simulations. In general, the center deflections from the macromodel fell below those from the FEM simulation, especially for relatively high residual stresses, but the first natural frequencies that accompany the deflections were very close to those from the FEM simulations. Furthermore, the forced vibration characteristics also compared well with the macromodel predictions for an experimental case in which the primary resonance curve bends to the right because the CMUT is a hardening-type system. The reduced-order model accounts for geometric nonlinear hardening, residual stresses, and boundary conditions related to the CMUT post, allows for general design variables, and is robust up to the pull-in instability. However, even more general boundary conditions need to be incorporated into the model for it to be a more effective design tool for capacitive micromachined ultrasonic transducers. / Ph. D.

Recent clinical studies have demonstrated that photoacoustic imaging (PAI) provides important diagnostic information for breast cancer staging. Despite these promising studies, PAI remains an unfeasible option for clinics due to the cost to implement, the required large modification in user conduct and the inflexibility of the hardware to accommodate other applications for the incremental enhancement in diagnostic information. The research described in this dissertation addresses these issues by designing attachments to clinical ultrasound probes and incorporating custom detectors into commercial ultrasound scanners. The ultimate benefit of these handheld devices is to expand the capability of current ultrasound systems and facilitate the translation of PAI to enhance cancer diagnostics and neurosurgical outcomes. Photoacoustic enabling devices (PEDs) were designed as attachments to two clinical ultrasound probes optimized for breast cancer diagnostics. PAI uses pulsed laser excitation to create transient heating (<1°C) and thermoelastic expansion that is detected as an ultrasonic emission. These ultrasonic emissions are remotely sensed to construct noninvasive images with optical contrast at depths much greater than other optical modalities. The PEDs are feasible in terms of cost, user familiarity and flexibility for various applications. Another possible application for PAI is in assisting neurosurgeons treating aneurysms. Aneurysms are often treated by placing a clip to prevent blood flow into the aneurysm. However, this procedure has risks associated with damaging nearby vessels. One of the developed PEDs demonstrated the feasibility to three-dimensionally image tiny microvasculature (<0.3mm) beyond large blood occlusions (>2.4mm) in a phantom model. The capability to use this during surgery would suggest decreasing the risks associated with these treatments. However, clinical ultrasound arrays are not clinically feasible for microsurgical applications due to their bulky size and linear scanning requirements for 3D. Therefore, capacitive micromachined ultrasound transducer (CMUT) two-dimensional arrays compatible with standard ultrasound scanners were used to generate real-time 3D photoacoustic images. Future probes, designed incorporating CMUT arrays, would be relatively simple to fabricate and a convenient upgrade to existing clinical ultrasound equipment. Eventually, a handheld tool with the ability to visualize, in real-time 3D, the desired microvasculature, would assist surgical procedures. The potential implications of PAI devices compatible with standard ultrasound equipment would be a streamlined cost efficient solution for translating photoacoustics into clinical practice. The practitioner could then explore the benefits of the enhanced contrast adjunctive to current ultrasound applications. Clinical availability of PAI could enhance breast cancer diagnostics and cerebrovascular surgical outcomes.

Présentés pour la première fois en 1994, les transducteurs ultrasonores capacitifs micro- usinés, ou CMUTs (Capacitive Micromachined Ultrasonic Transducers), représentent une technologie alternative aux matériaux piézoélectriques pour la transduction électroacoustique. En particulier, leur souplesse de conception et leur haut degré de miniaturisation en font des candidats privilégiés pour le développement de sondes mixtes complexes alliant thérapie et imagerie par ultrasons. C’est dans ce contexte que s’est inscrit ce travail de thèse, dédié au développement d’une première sonde CMUT mixte. Le document débute par une présentation générale de la technologie et du contexte du projet. Puis, le développement est présenté, en commençant par les étapes préliminaires de modélisation numérique jusqu’aux caractérisations les plus avancées du prototype fabriqué. Les résultats démontrent l’intérêt de la technologie pour les applications visées. / Presented for the first time in 1994, capacitive micromachined ultrasonic transducers (CMUT) are a promising alternative to the piezoelectric technology for electroacoustic transduction. Particularly, their intrinsic design flexibility and miniaturization capability are strong advantages for the manufacturing of high-end Ultrasound-guided Focused Ultrasound (USgFUS) probes. The work presented in this Ph.D. dissertation is devoted to the f irst development of a USgFUS CMUT probe. After a general introduction of the CMUT technology and the context of this research project, the development is reported starting from the preliminary numerical studies to the most advanced characterizations of the fabricated device. The first results demonstrate the benefits of this technology for the targeted applications.

3D display technology is limited by the user's ability to interact with displays without being connected to external equipment. In order to feel tactile feedback in conjunction with displays, ultrasonic sound pressure fields have been created; however, ceramic transducers interfere with the user's immersive experience. We have created transparent ultrasonic transducers using capacitive micromachined ultrasonic transducer (CMUT) and piezoelectric micromachined ultrasonic transducer (PMUT) technology that allow the user to remain immersed in the experience while interacting with the display. Individual transparent piezoelectric transducers made with indium tin oxide (ITO) and polyvinylidene fluoride (PVDF) generate 66.9dB with 91.6% transparency. Samples were phased and modulated using a field programmable gate array (FPGA) in a 36-element array.

Medical ultrasound technology accounts for over half of all imaging tests performed worldwide. In comparison to other methods, ultrasonic imaging is more portable and lower cost, and is becoming more accessible to remote regions where traditionally no medical imaging can be done. However, conventional ultrasonic imaging systems still rely on expensive PZT-based ultrasound probes that limit broader applications. In addition, the resolution of PZT based transducers is low due to the limitation in hand-fabrication methods of the piezoelectric ceramics. Capacitive Micromachined Ultrasonic Transducers (CMUTs) appears as an alternative to the piezoelectric (PZT) ceramic based transducer for ultrasound medical imaging. CMUTs show better ultrasound transducer design for batch fabrication, higher axial resolution of images, lower fabrication costs of the elements, ease of fabricating large arrays of cells using MEMS fabrication, and the extremely important potential to monolithically integrate the 2D transducer arrays directly with IC circuits for real-time 3D imaging. Currently most efforts on CMUTs are silicon based. Problems with current silicon-based CMUT designs include low pressure transmission and high-temperature fabrication processes. The pressure output from the silicon based CMUTs cells during transmission are too low when compared to commercially available PZT transducers, resulting in relatively blurry ultrasound images. The fabrication of the silicon-based cells, although easier than PZT transducers, still suffers from inevitable high temperature process and require specialized and expensive equipment. Manufacturing at an elevated temperature hinders the capability of fabricating front end analog processing IC circuits, thus it is difficult to achieve true 3D/4D imaging. Therefore novel low temperature fabrication with a low cost nature is needed. A polymer (Parylene) based CMUTs transducer has been investigated recently at UCF and aims to overcome limitations posted from the silicon based counterparts. This thesis describes the numerical simulation work and proposed fabrication steps of the Parylene based CMUT. The issue of transducer cost and pressure transmission is addressed by proposing the use of low cost and low temperature Chemical Vapor Deposition (CVD) fabrication of Parylene-C as the structural membrane plus graphene for the membrane electrodes. This study focuses mainly on comparing traditional silicon-based CMUT designs against the Parylene-C/Graphene CMUT based transducer, by using MEMS modules in COMSOL. For a fair comparison, single CMUT cells are modeled and held at a constant diameter and the similar operational frequency at the structural center. The numerical CMUT model is characterized for: collapse voltage, membrane deflection profile, center frequency, peak output pressure transmission over the membrane surface, and the sensitivity to the change in electrode surface charge. This study took the unique approaches in defining sensitivity of the CMUT by calculating the membrane response and the change in the electrode surface charge due to an incoming pressure wave. Optimal design has been achieved based on the simulation results. In comparison to silicon based CMUTs, the Parylene/Graphene based CMUT transducer produces 55% more in volume displacement and more than 35% in pressure output. The thesis has also laid out the detailed fabrication processes of the Parylene/Graphene based CMUT transducers. Parylene/Graphene based ultrasonic transducers can find wide applications in both medical imaging and Non destructive evaluation (NDE).