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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.
1

Development of a control algorithm for a dynamic gas mixing system

Lovelady, April 16 August 2006 (has links)
An algorithm was developed to control the partial pressures of N2, O2, and CO2 in a gas mixing tank. The gases were premixed before being introduced into the low pressure Mars Dome. As an attempt to reduce the effects of pressure, the number of moles of the component gases was calculated and used to determine when gases needed to be added to the system or when gas concentrations needed to be diluted. There were two trial runs during each of the two experiments carried out. The total pressures in both the mixing tank and the Mars Dome remained within their limits of constraint during both trials. For the mixing tank, the pressure was maintained between 170kPa and 180kPa with a setpoint of 175kPa. Gas composition was evaluated at 67kPa and 33kPa in the Mars Dome. Again the pressure remained within its range of ±5kPa of its setpoint. Adequate control of the partial pressures of N2, and O2 were achieved in the mixing tank and the Mars Dome. With respect to the control of CO2, the algorithm was unable to maintain the partial pressure within the operational limits specified. The tendency was for CO2 to linger above its setpoint. Moreover, at 33kPa the CO2 sensor in the Mars Dome began to reflect a lower concentration of CO2 in the system than what was reported by the gas chromatograph or the CO2 sensor in the mixing tank. While sufficient control of the partial pressures was achieved, there are modifications to be made that should further tighten the control limits of the system. Such modifications include recalibrating the sensors in the system and adjusting gas flow rates.
2

Dynamic, In-Situ Pressure Measurements during CMP

Osorno, Andres 26 September 2005 (has links)
A rotational setup for measuring interfacial fluid pressure and temperature was successfully constructed. Interfacial fluid measurements were performed with various slurries, slurry flow rates, and pad topographies. It was experimentally determined that the pad topography has the biggest effect in pressure and temperature distribution. This was also confirmed by tilt experiments ran in a rotational environment. For all cases, the edge high conditioned pad displayed the most changes during the experiments. For an edge high conditioned pad, the fluid pressure was found to be mostly subambient reaching levels of up to 42 kPa at the center of the fixture, and dissipating towards the edges. The pressure maps appear to be almost center symmetric. The pressure was found to be positive during the first second of contact, and rapidly turn subambient. The Subambient pressures stabilize after about 5 seconds, and their suction force was found to slow the rotating platen significantly. Suction forces were confirmed by displacement observed during the tilt experiments. The fixtures center was sucked down into the pad up to 20 m, and tends to tilt towards the leading edge. Interfacial temperatures were also found to vary with pad geometry. The edge-high conditioned pad exhibited changes of up to 4 C, concentrated at the center. The relative position and shape of these temperature rises matches the results observed in the pressure experiments. Temperature takes a longer time to reach equilibrium, up to 30 seconds in most measurements.

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