<p>  </p> <p>Integration of functional thin films on flexible substrates has piqued interests owing to the needs of flexible devices. Selecting a suitable flexible substrate is crucial for such integration. Recently, muscovite mica has been developed as a flexible platform for functional thin film epitaxy growth. Mica can be easily peeled off due to the weak van der Waals interaction between different layers of mica, along with other advantages including cheap, high elasticity and thermal stability, biocompatible, <em>etc</em>. On the other hand, vertically aligned nanocomposites (VANs) have been attractive because of their unique anisotropic structures, which can achieve physical property anisotropy, easy tunability, out-of-plane strain engineering as well as combined multifunctionality. However, limited work on the integration of nanocomposite thin films on mica with tunable physical properties has been reported due to growth challenges. </p> <p>In this dissertation, different ceramic-metal VAN systems integrated on mica substrates towards different functionalities using pulsed laser deposition (PLD) have been demonstrated. The first chapter is on the integration of BaTiO3-Au nanocomposite system on mica. Tunable optical properties have been achieved by controlling the geometries of the Au nanostructures between nanoparticles and nanopillars by varying the growth temperature. The laser energy was also found to play a role in terms of the Au pillar dimension. The second chapter is on the integration of BaZrO3-Co VAN system on mica towards flexible spintronics. Tunable, anisotropic ferromagnetic property has been realized by controlling the aspect ratio of the Co pillars. The third chapter is on integration of BaTiO3-Fe VAN system on mica towards multiferroics. Different buffer layers have been tried out to facilitate the growth of VAN structure. Room temperature ferroelectric and anisotropic ferromagnetic properties of the films have been confirmed. The last chapter is focused on multiphase nitride-metal nanocomposite design and integration, with films showing unique optical and magnetic properties. The reliability and stability of the physical properties of the films have been verified though bending tests. The growth mechanism and criteria of ceramic-metal nanocomposite on mica have also been discussed. These demonstrations all pave a new way towards the integration and design of multifunctional nanocomposites towards flexible nanodevices.</p>

<p>Functional oxide-based thin films have attracted much attention owing to their broad applications in modern society. The multifunction tuning in oxide thin films is critical for obtaining enhanced properties. In this dissertation, four new nanocomposite thin film systems with highly textured growth have been fabricated by pulsed laser deposition technique. The functionalities including ferromagnetism, ferroelectricity, multiferroism, magnetoelectric coupling, low-field magnetoresistance, transmittance, optical bandgap and dielectric constants have been demonstrated. Besides, the tunability of the functionalities have been studied via different approaches.</p> <p>First, varies deposition frequencies have been used in vertically aligned nanocomposite BaTiO₃:YMnO₃ (BTO:YMO) and BaTiO₃:La_0.7Sr_0.3Mn₃(BTO:LSMO) thin films. In both systems, the strain coupling effect between the phases are affected by the density of grain boundaries. Increasing deposition frequency generates thinner columns in BTO:YMO thin films, which enhances the anisotropic ferromagnetic response in the thin films. In contrast, the columns in BTO:LSMO thin films become discontinuous as the deposition frequency increases, leading to the diminished anisotropic ferromagnetic response. Coupling with the ferroelectricity in BTO, the room temperature multiferroic properties have been obtained in these two systems.</p> <p> Second, the impact of the film composition has been demonstrated in La_0.7Ca_0.3MnO₃ (LCMO):CeO₂thin film system, which has an insulating CeO₂in ferromagnetic conducting LCMO matrix structure. As the atomic percentage of the CeO₂increases, enhanced low-field magnetoresistance and increased metal-to-insulator transition temperature are observed. The thin films also show enhanced anisotropic ferromagnetic response comparing with the pure LCMO film.</p> <p> Third, the transition metal element in Bi₃MoM_TO₉(M_T, transition metals of Mn, Fe, Co and Ni) thin films have been varied. The thin films have a multilayered structure with M_T-rich pillar-like domains embedded in Mo-rich matrix structure. The anisotropic magnetic easy axis and optical properties have been demonstrated. By the element variation, the optical bandgaps, dielectric constants as well as anisotropic ferromagnetic properties have been achieved. </p> <p> The studies in this dissertation demonstrate several examples of tuning the multifunctionalities in oxide-based nanocomposite thin films. These enhanced properties can broaden the applications of functional oxides for advanced nanoscale devices.</p><br>

<p>Devices that can process more information in reduced dimensions are essential for an increasingly information- and efficiency-driven future. To this end, nanocomposites are promising due to their inherent multifunctional properties and special behavior at the nanoscale. Vertically aligned nanocomposites (VANs) are particularly interesting because of their ability to self-assemble into anisotropic nanostructures and high density of heterointerfaces – characteristics which introduce unique functionalities and offer exciting new avenues for device applications. However, a vast majority of VAN systems are currently fabricated on single-crystal oxide substrates, which may be cost-prohibitive at large scales and are generally incompatible with the prevalent device fabrication techniques. Thus, integration of VAN thin films on silicon becomes a critical step toward implementing VANs in a well-established semiconductor manufacturing industry. </p> <p>In this dissertation, the viability of oxide-metal and nitride-metal VAN thin films integrated on silicon substrates has been demonstrated through a set of unique buffer layer designs. For the first three systems presented in this dissertation, namely, LaSrFeO₄-Fe, BaTiO₃-Au, and BaTiO₃-Fe, microstructural and physical property (i.e. electrical, magnetic, and optical) analyses confirm their successful epitaxial growth on silicon, with only minor differences compared to their counterparts grown on single-crystal oxide substrates. For the fourth system, a new and robust TiN-Fe VAN has been proposed and demonstrated. The new TiN-Fe VAN system on Si exhibits superior magnetic properties and unusual optical properties. With further growth optimization and/or patterning techniques, VAN thin film integration on silicon presents itself as a feasible and cost-effective approach to designing electronic, spintronic, photonic, and sensing devices.</p>

<p dir="ltr">Metamaterials are artificially engineered nanoscale systems with a three-dimensional repetitive arrangement of certain components, and present exceptional optical properties for applications in nanophotonics, solar cells, plasmonic devices, and more. Self-assembled oxide-metal vertically aligned nanocomposites (VANs), with metallic phase as nanopillars embedded in the matrix oxide, have been recently proposed as a promising candidate for metamaterial applications. However, precise microstructural control and the structure-property relationships in VANs are still in high demand. Thus, by employing multiple approaches for structural design, this dissertation attempts to investigate the mechanisms of nanostructure evolutions and the corresponding optical responses.</p><p dir="ltr">In this dissertation, the precise control over the nanostructures has been demonstrated through morphology tuning, nanopillar orderings, and strain engineering. Firstly, Au, a well-known plasmonic mediator, has been selected as the metallic phase that forms nanopillars. Based on the previously proposed strain compensation model which describes the basic formation mechanism of VAN morphology, two oxides were then considered: La_0.7Sr_0.3MnO₃(LSMO) and CeO₂. In the first two chapters of this dissertation, LSMO was considered due to its similar lattice (a_LSMO= 3.87 Å, a_Au= 4.08 Å) and its enormous potential in nanoelectronics and spintronics. Deposited on SrTiO₃ (001) substrate through pulsed laser deposition (PLD), LSMO-Au nanocomposites exhibit ideal VAN morphology as well as promising hyperbolic dispersions in response to the incident illuminations. By substrate surface treatment of annealing at 1000°C, and variation of STO substate orientations from (001), to (111) and (110), the improved and tunable in-plan orderings of Au nanopillars have been successfully achieved. In the third chapter, a new oxide-metal VAN system of <a href="" target="_blank">CeO₂</a>-Au (a_CeO2= 5.411 Å, and a_CeO2/= 3.83 Å) has been deposited. The intriguing 45° rotated in-plan epitaxy presents an unexpected update to the strain compensation model, and tuning of Au morphology from nanopillars, nanoantennas, to nanoparticles also shows an effective modulation of the LSPR responses. COMSOL simulations have been exploited to reveal the relationships between Au morphologies and optical responses. In the last chapter, the two VAN systems of LSMO-Au and CeO₂-Au have been combined to form a complex layered VAN thin film. Investigations into the strain states, the nature of complex interfaces, and the according hybrid properties, show dramatic possibilities for further strain engineering. In summary, this dissertation has provided multiple routes for highly tailorable oxide-metal nanocomposite designs. And the two proposed material systems present great potential in optical metamaterial applications including biosensors, photovoltaics, super lenses, and more.</p>