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Stability Analysis of a MEMS Acceleration Sensor

The electrostatic actuation with its several advantages is the main principle for micro-electro-mechanical systems (MEMS). One major drawback is the nonlinear behavior, which results into instability, known as the electrostatic pull-in effect. This effect might also push a closed-loop configuration into instability and thus makes a linear time-invariant control inapplicable to the system. The paper investigates the stability of an acceleration sensor in closed-loop operation with this setting. A simplified controller adjustment gives a first insight into this topic. Practical implementations saturate on the quantizer's full-scale value, which is also considered in the stability analysis. Numerical phase-plane analysis verifies the stability and shows further surprising results.

Identiferoai:union.ndltd.org:DRESDEN/oai:qucosa:de:qucosa:18661
Date05 February 2007
CreatorsWolfram, Heiko, Dötzel, Wolfram
PublisherTechnische Universität Chemnitz, University of West Bohemia, Pilsen, Czech Republic
Source SetsHochschulschriftenserver (HSSS) der SLUB Dresden
LanguageEnglish
Detected LanguageEnglish
Typedoc-type:conferenceObject, info:eu-repo/semantics/conferenceObject, doc-type:Text
Rightsinfo:eu-repo/semantics/openAccess

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