The electrostatic actuation with its several advantages is the main principle for micro-electro-mechanical systems (MEMS). One major drawback is the nonlinear behavior, which results into instability, known as the electrostatic pull-in effect. This effect might also push a closed-loop configuration into instability and thus makes a linear time-invariant control inapplicable to the system. The paper investigates the stability of an acceleration sensor in closed-loop operation with this setting. A simplified controller adjustment gives a first insight into this topic. Practical implementations saturate on the quantizer's full-scale value, which is also considered in the stability analysis. Numerical phase-plane analysis verifies the stability and shows further surprising results.
| Identifer | oai:union.ndltd.org:DRESDEN/oai:qucosa:de:qucosa:18661 |
| Date | 05 February 2007 |
| Creators | Wolfram, Heiko, Dötzel, Wolfram |
| Publisher | Technische Universität Chemnitz, University of West Bohemia, Pilsen, Czech Republic |
| Source Sets | Hochschulschriftenserver (HSSS) der SLUB Dresden |
| Language | English |
| Detected Language | English |
| Type | doc-type:conferenceObject, info:eu-repo/semantics/conferenceObject, doc-type:Text |
| Rights | info:eu-repo/semantics/openAccess |
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