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Acoustic Simulation and Characterization of Capacitive Micromachined Ultrasonic Transducers (CMUT)

Ultrasonic transducers are used in many fields of daily life, e.g. as parking aids or medical devices. To enable their usage also for mass applications small and low- cost transducers with high performance are required. Capacitive, micro-machined ultrasonic transducers (CMUT) offer the potential, for instance, to integrate compact ultrasonic sensor systems into mobile phones or as disposable transducer for diverse medical applications.

This work is aimed at providing fundamentals for the future commercialization of CMUTs. It introduces novel methods for the acoustic simulation and characterization of CMUTs, which are still critical steps in the product development process. They allow an easy CMUT cell design for given application requirements. Based on a novel electromechanical model for CMUT elements, the device properties can be determined by impedance measurement already. Finally, an end-of-line test based on the electrical impedance of CMUTs demonstrates their potential for efficient mass production.

Identiferoai:union.ndltd.org:DRESDEN/oai:qucosa.de:bsz:14-qucosa-225933
Date25 July 2017
CreatorsKlemm, Markus
ContributorsTechnische Universität Dresden, Fakultät Elektrotechnik und Informationstechnik, Prof. Dr.-Ing. habil. Gerald Gerlach, Prof. Dr.-Ing. habil. Gerald Gerlach, Prof. Dr. mont. Mario Kupnik
PublisherSaechsische Landesbibliothek- Staats- und Universitaetsbibliothek Dresden
Source SetsHochschulschriftenserver (HSSS) der SLUB Dresden
LanguageEnglish
Detected LanguageEnglish
Typedoc-type:doctoralThesis
Formatapplication/pdf
Relationdcterms:isPartOf:Dresdner Beiträge zur Sensorik; Band 66

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