This report collects selected outstanding scientific and technological results obtained within the frame of the European project "FLASiC" (Flash LAmp Supported Deposition of 3C-SiC) but also other work performed in adjacent fields. Goal of the project was the production of large-area epitaxial 3C-SiC layers grown on Si, where in an early stage of SiC deposition the SiC/Si interface is rigorously improved by energetic electromagnetic radiation from purpose-built flash lamp equipment developed at Forschungszentrum Rossendorf. Background of this work is the challenging task for areas like microelectronics, biotechnology, or biomedicine to meet the growing demands for high-quality electronic sensors to work at high temperatures and under extreme environmental conditions. First results in continuation of the project work – for example, the deposition of the topical semiconductor material zinc oxide (ZnO) on epitaxial 3C-SiC/Si layers – are reported too.
| Identifer | oai:union.ndltd.org:DRESDEN/oai:qucosa.de:bsz:d120-qucosa-28591 |
| Date | 31 March 2010 |
| Creators | Skorupa, Wolfgang, Brauer, Gerhard |
| Contributors | Forschungszentrum Rossendorf, Institut für Ionenstrahlphysik und Materialforschung |
| Publisher | Forschungszentrum Dresden |
| Source Sets | Hochschulschriftenserver (HSSS) der SLUB Dresden |
| Language | English |
| Detected Language | English |
| Type | doc-type:report |
| Format | application/pdf |
| Source | Wissenschaftlich-Technische Berichte / Forschungszentrum Rossendorf; FZR-433 2005 |
| Relation | dcterms:isPartOf:Wissenschaftlich-technische Berichte ; FZR-433 |
Page generated in 0.0015 seconds