Reducing cost and time is a major concern in clinical diagnostics. Current molecular diagnostics are multi-step processes that usually take at least several hours or even days to complete multiple reagents delivery, incubations and several washing processes. This highly labor-intensive work and lack of automation could result in reduced reliability and low efficiency. The Laboratory-on-a-chip (LOC), taking advantage of the merger and development of microfluidics and biosensor technology, has shown promise towards a solution for performing analytical tests in a self-contained and compact unit, enabling earlier and decentralized testing. However, challenges are to integrate the fluid regulatory elements on a single platform and to detect target analytes with high sensitivity and selectivity. The goal of this research work is to develop an AC electrokinetic (ACEK) flow through concentrator for in-situ concentration of biomolecules and develop a comprehensive understanding of effects of ACEK flow on the biomolecule transport (in-situ concentration) and their impact on electronic biosensing mechanism and performance, achieving automation and miniaturization. ACEK is a new and promising technique to manipulate micro/bio-fluids and particles. It has many advantages over other techniques for its low applied voltage, portability and compatibility for integration into lab-on-a-chip devices. Numerical study on preconcentration system design in this work has provided an optimization rule for various biosensor designs using ACEK technique. And the microfluidic immunoassay lab-chip designed based on ACET effect has showed promising prospect for accelerated diagnostics. With optimized design of channel geometry, electrode patterns, and properly selected operation condition (ac frequency and voltage), the preconcentration system greatly reduced the reaction time to several minutes instead of several hours, and improved sensitivity of the assay. With the design of immunoassay lab-chip, one can quantitatively study the effect of ACET micropumping and mixing on molecular level binding. Improved sensors with single-chip form factor as a general platform could have a significant impact on a wide-range of biochemical detection and disease diagnostics including pathogen/virus detection, whole blood analysis, immune-screening, gene expression, as well as home land security.

Teleoperation of ground/aerial vehicle extends operator's ability (e.g. expertise, strength, mobility) into the remote environment, and haptic feedback enhances the human operator's perception of the slave environment. In my thesis, two cases are studied: wheeled mobile robot (MWR) haptic tele-driving over the Internet and unmanned aerial vehicle (UAV) haptic teleoperation over the Internet. We propose novel control frameworks for both dynamic WMR and kinematic WMR in various tele-driving modes, and for a "mixed" UAV with translational dynamics and attitude kinematics. The recently proposed passive set-position modulation (PSPM) framework is extended to guarantee the passivity and/or stability of the closed-loop system with time-varying/packet-loss in the communication; and proved performance in steady state is shown by theoretical measurements.For UAV teleoperation, we also derive a backstepping trajectory tracking control with robustness analysis. Experimental results for dynamic/kinematic WMR and an indoor quadrotor-type UAV are presented to show the efficacy of the proposed control framework.

This thesis presents the optimization of deep reactive ion etching process (DRIE) to achieve high precision 3-dimensional integrated micro electro mechanical systems (MEMS) sensors with high aspect ratio structures. Two optimization processes have been performed to achieve 20 &amp / #956 / m depth for 1 &amp / #956 / m opening for a dissolved wafer process (DWP) and to achieve 100 &amp / #956 / m depth for 1 &amp / #956 / m opening for silicon-on-glass (SOG) process. A number of parameters affecting the etch rate and profile angle are investigated, including the step times, etch step pressure, platen power, and electrode temperature. Silicon etch samples are prepared and processed in METU-MET facilities to understand and optimize the DRIE process parameters that can be used for the production of MEMS gyroscopes and accelerometers. The etch samples for DWP are masked using a photoresist, Shipley S1813. After the optimization process, vertical trench profiles are achieved with minimum critical dimension loss for trench depths up to 20 &amp / #956 / m. Since the selectivity of the resist is not sufficient for 100 &amp / #956 / m deep trench etch process, silicon dioxide (SiO2) is used as the mask for this process. At the end of the optimization processes, more than 100 &amp / #956 / m depth for 1 &amp / #956 / m opening with almost vertical sidewalls are achieved. In summary, this study provides an extensive understanding of the DRIE process for successful implementations of integrated MEMS sensors.

RFID has been characterized as a “disruptive technology” that has the potential to revolutionize numerous key sectors. A key advantage of passive RFID applications is the ability to wirelessly transmit automatic identification and related information using very little power. This paper presents an experimental investigation to inform the optimal configuration for programming passive ultra-high frequency (UHF) RFID media in dynamic applications. Dynamic programming solutions must be designed around the tag’s functionality, the physical programming configuration and environment. In this investigation, we present a methodology to determine an optimal configuration to maximize the systems programming efficiency for dynamic applications.

This thesis reports the development of micromachined accelerometers and gyroscopes that can be used for micromachined inertial measurement units (IMUs). Micromachined IMUs started to appear in the market in the past decade as low cost, moderate performance alternative in many inertial applications including military, industrial, medical, and consumer applications. In the framework of this thesis, a number of accelerometers and gyroscopes have been developed in three different fabrication processes, and the operation of these fabricated devices is verified with extensive tests. In addition, the fabricated accelerometers were combined with external readout electronics to obtain hybrid accelerometer systems, which were tested in industrial test facilities. The accelerometers and gyroscopes are designed and optimized using the MATLAB analytical simulator and COVENTORWARE finite element simulation tool. First set of devices is fabricated using a commercial foundry process called SOIMUMPs, while the second set of devices is fabricated using the electroplating processes developed at METU-MET facilities. The third set of devices is designed for a new advanced process based on DRIE, which is under development. Mechanical and electrical test results of the fabricated accelerometers and gyroscopes are in close agreement with the designed values. The testing of the SOI and nickel accelerometers is also performed in industrial test environments. In order to perform these tests, accelerometers are hybrid connected to commercially available capacitive readout circuits. These accelerometer systems require only two DC supply voltages for operation and provide an analog output voltage related to the input acceleration. The industrial tests show that the SOI accelerometer system yields a 799 &micro / g/&amp / #8730 / Hz average noise floor, a 1.8 mg/&amp / #8730 / Hz peak noise floor, a 22.2 mV/g sensitivity, and a 0.1 % nonlinearity, while the nickel accelerometer system yields a 228 &micro / g/&amp / #8730 / Hz average noise floor, a 375 &micro / g/&amp / #8730 / Hz peak noise floor, a 1.02 V/g sensitivity, and a 0.23 % nonlinearity. Long-term drift components of the accelerometers are determined to be smaller than 20 mg. These systems are the highest performance micromachined accelerometer systems developed in Turkey, and they can be used in implementation of a national inertial measurement unit.

Στις τελευταίες δεκαετίες η σμίκρυνση (miniaturization) έχει αποτελέσει ένα σημαντικό παράγοντα στην ανάπτυξη της τεχνολογίας. Ένας από τους κύριους στόχους της μέσω της μικρομηχανικής (micro-engineering) είναι η παραγωγή ολοκληρωμένων Μικρο-Ηλεκτρο-Μηχανικών Συστημάτων (MEMS), τα οποία χρηςιμοποιούνται σήμερα ως υποσυστήματα σε πάρα πολλές εφαρμογές. Αντικείμενο της παρούσας διατριβής είναι ο παράλληλος χειρισμός καθώς και η ανοιχτού βρόχου/άνευ αισθητήρων συναρμολόγηση μικροαντικειμένων χωρίς τη χρήση μικροβραχιόνων. Για το σκοπό αυτό η έρευνα επικεντρώθηκε σε τέσσερις διαφορετικές διαδικασίες/προσεγγίσεις: α) το μικροχειρισμό με τρισδιάστατα πεδία δυνάμεων, β) το μικροχειρισμό με προγραμματιζόμενα πεδία δυνάμεων στο επίπεδο, γ) το χειρισμό μικροαντικειμένων έγκλειστων σε σταγόνες υγρού και δ) την αυτοσυναρμολόγηση μικροαντικειμένων με ηλεκτροστατικές δυνάμεις. / In the last decades, miniaturization has become an important factor in the development of technology. One of its main objectives through the discipline of micro-engineering is the production of integrated Micro-Electro-Mechanical Systems (MEMS), which are currently used as sub-systems in many applications. The target of this thesis is the parallel manipulation and the open-loop/sensorless assembly of microparts without the use of microrobots. For this purpose, the research was focused on four different procedures: a) micromanipulation with 3D force fields, b) micromanipulation with programmable force fields on a plane, c) manipulation of microparts enclosed in a droplet of liquid and d)self-assembly of microparts with electrostatic forces.

abstract: A Microbial fuel cell (MFC) is a bio-inspired carbon-neutral, renewable electrochemical converter to extract electricity from catabolic reaction of micro-organisms. It is a promising technology capable of directly converting the abundant biomass on the planet into electricity and potentially alleviate the emerging global warming and energy crisis. The current and power density of MFCs are low compared with conventional energy conversion techniques. Since its debut in 2002, many studies have been performed by adopting a variety of new configurations and structures to improve the power density. The reported maximum areal and volumetric power densities range from 19 mW/m2 to 1.57 W/m2 and from 6.3 W/m3 to 392 W/m3, respectively, which are still low compared with conventional energy conversion techniques. In this dissertation, the impact of scaling effect on the performance of MFCs are investigated, and it is found that by scaling down the characteristic length of MFCs, the surface area to volume ratio increases and the current and power density improves. As a result, a miniaturized MFC fabricated by Micro-Electro-Mechanical System(MEMS) technology with gold anode is presented in this dissertation, which demonstrate a high power density of 3300 W/m3. The performance of the MEMS MFC is further improved by adopting anodes with higher surface area to volume ratio, such as carbon nanotube (CNT) and graphene based anodes, and the maximum power density is further improved to a record high power density of 11220 W/m3. A novel supercapacitor by regulating the respiration of the bacteria is also presented, and a high power density of 531.2 A/m2 (1,060,000 A/m3) and 197.5 W/m2 (395,000 W/m3), respectively, are marked, which are one to two orders of magnitude higher than any previously reported microbial electrochemical techniques. / Dissertation/Thesis / Doctoral Dissertation Electrical Engineering 2016

abstract: Early detection and treatment of disease is paramount for improving human health and wellness. Micro-scale devices promote new opportunities for the rapid, cost-effective, and accurate identification of altered biological states indicative of disease early-onset; these devices function at a scale more sensitive to numerous biological processes. The application of Micro-Electro-Mechanical Systems (MEMS) in biomedical settings has recently emerged and flourished over course of the last two decades, requiring a deep understanding of material biocompatibility, biosensing sensitively/selectively, biological constraints for artificial tissue/organ replacement, and the regulations in place to ensure device safety. Capitalizing on the inherent physical differences between cancerous and healthy cells, our ultra-thin silicone membrane enables earlier identification of bladder cancer—with a 70% recurrence rate. Building on this breakthrough, we have devised an array to multiplex this sample-analysis in real-time as well as expanding beyond bladder cancer. The introduction of new materials—with novel properties—to augment current and create innovative medical implants requires the careful analysis of material impact on cellular toxicity, mutagenicity, reactivity, and stability. Finally, the achievement of replacing defective biological systems with implanted artificial equivalents that must function within the same biological constraints, have consistent reliability, and ultimately show the promise of improving human health as demonstrated by our hydrogel check valve. The ongoing proliferation, expanding prevalence, and persistent improvement in MEMS devices through greater sensitivity, specificity, and integration with biological processes will undoubtedly bolster medical science with novel MEMS-based diagnostics and therapeutics. / Dissertation/Thesis / Doctoral Dissertation Electrical Engineering 2018

Submitted by Maria Medeiros (maria.dilva1@ufcg.edu.br) on 2018-07-16T14:51:43Z No. of bitstreams: 1 FRANCISCA CIBELE DA SILVA - DISSERTAÇÃO (PPGEM) 2016.pdf: 4026542 bytes, checksum: ed454ebfc1325519e82b94fd3c4aab3e (MD5) / Made available in DSpace on 2018-07-16T14:51:43Z (GMT). No. of bitstreams: 1 FRANCISCA CIBELE DA SILVA - DISSERTAÇÃO (PPGEM) 2016.pdf: 4026542 bytes, checksum: ed454ebfc1325519e82b94fd3c4aab3e (MD5) Previous issue date: 2016-08-31 / Capes / O objetivo deste trabalho foi estudar falhas mecânicas em elementos de máquina por meio da Termografia. O caso pesquisado foi o dos rolamentos rígidos de uma carreira de esferas sem blindagem. Quanto aos objetivos a pesquisa é explicativa e quanto aos procedimentos técnicos é de carácter experimental. A metodologia utilizada, neste trabalho, fez uso de uma bancada de teste constituída por motor, rolamento e mancal, montada em mesa inercial, monitorada por meio de sensores de vibração e câmera térmica. Nas amostras de rolamentos foram inseridas falhas mecânicas por meio de uma micro retífica e sob condições de controle de rotação, carga, temperaturas, ventilação e umidade foram realizados os testes. Como resultado pôde-se perceber alterações térmicas em determinadas regiões dos rolamentos, as quais coincidiram com picos de frequência oscilatória do espectro de vibração em função do tempo da FFT. Outro aspecto importante é que as detecções térmicas são melhor evidenciadas nos primeiros minutos de acionamento do sistema observado. Como conclusão pode-se afirmar que é possível utilizar a técnica da Termografia para detectar falhas mecânicas em rolamentos desde que a análise termográfica seja realizada nos instantes iniciais de aquecimento do objeto, com atenção para se manter as condições ambientais e demais variáveis de estudo sob controle. / The objective of this work was to study mechanical failures in machine elements through Thermography. The case investigated was that of the rigid bearings of a sphere race without shielding. Regarding the objectives, the research is explanatory and technical procedures are experimental. The methodology used, in this work, made use of a test bench constituted by motor, bearing and bearing, mounted in inertial table, monitored by means of vibration sensors and thermal camera. In the samples of bearings mechanical faults were inserted through a micro grinding and under conditions of control of rotation, load, temperatures, ventilation and humidity were carried out the tests. As a result, it was possible to observe thermal changes in certain regions of the bearings, which coincided with oscillatory frequency peaks of the vibration spectrum as a function of FFT time. Another important aspect is that the thermal detections are better evidenced in the first few minutes of the observed system activation. It can be concluded that it is possible to use the Thermography technique to detect mechanical failures in bearings as long as thermographic analysis is performed in the initial instants of heating the object, with attention to maintain the environmental conditions and other variables of study under control.

A ventilação mecânica pulmonar é a substituição da respiração espontânea de um paciente quando este não realiza ou realiza parcialmente esta tarefa. Esta ventilação é de extrema importância para o tratamento de pacientes em estado crítico em unidades de terapia intensiva e para a manutenção da oxigenação sanguínea durante cirurgias. A ventilação mecânica pulmonar consiste em empurrar os gases para dentro do pulmão de forma controlada, mantendo uma pressão inspiratória ou um volume inspiratório determinado. Além disso, controla o nível de pressão durante a expiração do paciente para manter os alvéolos abertos e dificultar lesões internas. Este trabalho se propõe a caracterizar uma especificação de engenharia para os sistemas de controle de ventilação, se baseando em características fisiológicas do sistema respiratório do paciente saudável e também com patologias conhecidas. São apresentados modelos matemáticos para os sistemas mecânicos responsáveis pela atuação na inspiração e na expiração do paciente, bem como um modelo matemático para o sistema respiratório. Foram desenvolvidos sistemas de controle, baseados no controlador PID, para os principais tipos de modalidades ventilatórias. Os sistemas controlados foram simulados e os resultados são apresentados neste trabalho. Os controles propostos foram implementados em equipamentos de anestesia e UTI projetados na K. Takaoka Ind. Com. Prod. Hosp. LTDA. entre 2008 e 2010 no Brasil, e estão sendo usados hoje nas salas de cirurgia e centros de terapia intensiva pelo Brasil e em alguns países da América do Sul e do Oriente médio. / The mechanical ventilation is the replacement of spontaneous breathing of a patient when it does not perform or partially perform this task. This ventilation is extremely important for the treatment of critically ill patients in intensive care units and for the maintenance of blood oxygenation during surgery. The mechanical ventilation consists in pushing the gas into the lungs in a controlled manner, maintaining a determined inspiratory pressure or inspiratory volume. In addition, it has to control the pressure level during the patients exhalation to keep the alveoli opened and prevent internal injuries. This work aims to characterize an engineering specification for the control systems of ventilation, relying on physiological characteristics of the patient\'s respiratory system on healthy subjects and also subjects with known diseases. Here are presented mathematical models for the mechanical systems responsible for acting on the inspiration and expiration of the patient, as well as a mathematical model for the respiratory system. There were developed control systems, based on the PID controller for the main types of ventilation modes. Controlled systems were simulated and the results are presented in this dissertation. The proposed controls were implemented in anesthesia and intensive care equipments designed in K. Takaoka Ind. Com Prod. Hosp. LTD. between 2008 and 2010 in Brazil, and are being used today in the operating rooms and intensive care centers in Brazil and some countries in South America and the Middle East.