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Les travaux de cette thèse ont pour objectif la conception de dispositifs multifonctions (filtre-antennes) à la fois compacts et agiles, mis au point par une conception conjointe des éléments associés. Le sous-système doit répondre à des spécifications électriques pour des applications dans la bande ISM à 2,45 GHz ainsi qu’à des contraintes d’intégration et d’encombrement. L’antenne et le filtre sont développés conjointement sur une impédance particulière où l’antenne, réduite en dimensions, présente une efficacité de rayonnement optimale. Le filtre est optimisé pour adapter l’antenne sur son impédance optimale et pour présenter des pertes minimales. Les travaux se sont focalisés dans un premier temps sur la co-conception et la co-intégration des fonctions, puis sur l’accord en fréquence du sous-système. / The aim of this thesis is to design a new tunable and compact multifunctional device (filters, antennas) based on the co-design of an antenna and the associated filter. The subsystem needs to fit with electrical specifications for ISM band applications at 2.45GHz while being integrated and compact. The antenna and the filter are jointly developed on particular impedances where the antenna has a high radiation efficiency. The filter is optimized to adapt the antenna on its optimal impedance and introduce minimal losses. The work has initially been focused on the co-design and the co-integration of functions to finish on the tunability of the filter/antenna subsystem design.

The subject of this thesis is the development of a hybrid-integrated scanning grating spectrometer based on a micro-opto-electro-mechanical device or a micro-opto-electromechanical system, respectively. Features of spectral measurement system to be emphasized are a miniaturized construction with the volume of about a sugar cube, a corresponding low mass and low power consumption. In contrast to comparable and currently available spectroscopic instruments with compact physical dimensions, the system offers advantages in terms of enhanced mobility, portability, energy efficency, feasibility for on-site analysis and sensor integration. Miniaturized spectroscopes can help to address new areas of application as well as improve already existing applications. Food analysis, medical care, environmental monitoring, qualtiy inspection, process control, generation of bioenergy as well as safety and security tasks are exemplary fields of application. Within these areas, organic compounds ubiquitously to our everyday life play an important role. The near-infrared spectral band, that is the measurement range of the hybrid-integrated grating spectrometer, is well suited for the detection as well as the qualitative and quantitative analysis of organic compounds. The system follows the construction of a Czerny-Turner grating monochromator that is characterized by a rotatable mounted diffraction grating as well as separated optics for collimation and refocusing. By the rotation of the dispersive element, the spectrum is scanned across the fixed detector and sampled time-discretely. In the case of the hybrid-integrated spectrometer, the grating is part of a micro-opto-mechanical system, with the size of about 50 mm², developed at the Fraunhofer IPMS. Additionally to the grating, the corresponding driving mechanism, the position detection for the deflection angle and two optical slits are part of this device, as well. Integrating several functional components into one structural element is the main strategy of the construction process and is applied to all remaining features. A potentioally serial manufacturing is taken into account by the assembly and joining technology involved. Apart from the theoretical basics, the state of the art, the system specifications as well as the constructive and experimental results, a major part of this thesis is concerned with the technological and constructive boundary conditions, an analytical system description and the discussion of the solution space of this class of spectroscopic instruments. / Das Thema der vorliegenden Arbeit ist die Entwicklung eines hybrid-integrierten Gitterspektrometers basierend auf einem mikro-opto-elektro-mechanischen Bauelement. Auszeichnen soll sich das spektrale Messsystem durch einen miniaturisierten Aufbau mit dem Volumen eines Stück Würfelzuckers, einem dementsprechend geringen Gewicht und einer niedrigen Leistungsaufnahme. Im Vergleich zu bereits verfügbaren kompakten Spektralapparaten gleicher Funktionsweise ergeben sich Vorteile hinsichtlich Mobilität, Portabilität, Energieeffizienz, Anwendbarkeit in der Vor-Ort-Analytik und Sensorintegration. Mit miniaturisierten Spektrometern lassen sich neue Anwendungsgebiete adressieren und für bestehende Applikation bislang ungenutzte Entwicklungspotenziale erschließen. Exemplarische Einsatzfelder sind die Lebensmittelanalytik, Medizin- und Umweltmesstechnik, Qualitäts- und Prozesskontrolle, Bioenergiegewinnung sowie Sicherheitsanwendungen. In diesen Gebieten spielen die in unserem Alltag oft vorkommenden organischen Verbindungen eine wichtige Rolle. Zu ihrer qualitativen und quantitativen Analyse ist insbesondere der nahinfrarote Spektralbereich geeignet, in welchem das hybrid-integrierte Gitterspektrometer messen soll. Der Aufbau des Systems entspricht einem Czerny-Turner-Gittermonochromator, der durch ein drehbar gelagertes Beugungsgitter sowie eine getrennte Kollimations- und Refokussieroptik charakterisiert wird. Durch die Drehung des dispersiven Elementes verschiebt sich das Spektrum über einen ortsfesten Detektor, der die zeitdiskrete Abtastung durchführt. Im miniaturisierten Spektrometer ist das Gitter Teil eines am Fraunhofer IPMS hergestellten mikro-opto-elektro-mechanischen Bauelementes mit einer Fläche von nur 50 mm². In dieser Komponente sind neben dem dispersiven Element auch dessen Antrieb, die Positionsdetektion zum Bestimmen der Gitterauslenkung und zwei optische Spalte zusammengefasst. Die Strategie, mehrere Funktionskomponenten über geeignete Mikrofertigungstechniken in ein Bauteil zu integrieren, wird auch auf alle anderen Systembestandteile angewendet. Die Aufbau- und Verbindungstechniken zum Justieren und Montieren der komplexen Bauelemente berücksichtigt eine potenzielle Serienfertigung. Neben den theoretischen Grundlagen, dem Stand der Technik, den Systemspezifikationen sowie den konstruktiven und experimentellen Resultaten befasst sich die Arbeit eingehend mit technologischen und konstruktiven Randbedingungen, einer analytischen Systembeschreibung und der Behandlung des Lösungsraumes für diese Klasse von Spektralapparaten.

Wireless power transfer (WPT) technologies for communication and recharging devices have recently attracted significant research attention. Conventional WPT systems based either on far-field or near-field coupling cannot provide simultaneously high efficiency and long transfer range. The Strongly Coupled Magnetic Resonance (SCMR) method was introduced recently, and it offers the possibility of transferring power with high efficiency over longer distances. Previous SCMR research has only focused on how to improve its efficiency and range through different methods. However, the study of optimal and miniaturized designs has been limited. In addition, no multiband and broadband SCMR WPT systems have been developed and traditional SCMR systems exhibit narrowband efficiency thereby imposing strict limitations on simultaneous wireless transmission of information and power, which is important for battery-less sensors. Therefore, new SCMR systems that are optimally designed and miniaturized in size will significantly enhance various technologies in many applications. The optimal and miniaturized SCMR systems are studied here. First, analytical models of the Conformal SCMR (CSCMR) system and thorough analysis and design methodology have been presented. This analysis specifically leads to the identification of the optimal design parameters, and predicts the performance of the designed CSCMR system. Second, optimal multiband and broadband CSCMR systems are designed. Two-band, three-band, and four-band CSCMR systems are designed and validated using simulations and measurements. Novel broadband CSCMR systems are also analyzed, designed, simulated and measured. The proposed broadband CSCMR system achieved more than 7 times larger bandwidth compared to the traditional SCMR system at the same frequency. Miniaturization methods of SCMR systems are also explored. Specifically, methods that use printable CSCMR with large capacitors, novel topologies including meandered, SRRs, and spiral topologies or 3-D structures, lower the operating frequency of SCMR systems, thereby reducing their size. Finally, SCMR systems are discussed and designed for various applications, such as biomedical devices and simultaneous powering of multiple devices.

Ce manuscrit est consacré à l’élaboration de phases monolithiques à base de dioxyde de titane pour les techniques séparatives appliquées à l’analyse des produits phosphorylés. La partie bibliographique situe d’abord l’intérêt des monolithes pour le développement des techniques séparatives en portant une attention particulière à la problématique de miniaturisation. L’état de l’art sur l’utilisation du dioxyde de titane, dans les sciences séparatives, est ensuite établi. À ce niveau, les principales caractéristiques physico-chimiques et chromatographiques de ce matériau sont revues pour les lits particulaires. Un descriptif de la synthèse des monolithes de dioxyde de titane par le procédé sol-gel est ensuite détaillé avant d’illustrer la mise en oeuvre de ce type de colonnes dans les techniques séparatives. La partie expérimentale est axée d’abord sur la compréhension du comportement du dioxyde de titane particulaire en chromatographie liquide à interaction hydrophile (HILIC). Le travail expérimental est ensuite orienté vers l’élaboration d’un procédé sol-gel répétable, permettant d’obtenir le matériau sous le format monolithique. Dans un premier temps, le support est élaboré sous forme de barreau, dont l’utilisation potentielle après mise en colonne est illustrée dans le cadre de la purification et de l’enrichissement des acides aminés phosphorylés. Des adaptations de protocole sont apportées pour la synthèse in situ de ces monolithes à l’intérieur des capillaires afin de répondre aux contraintes des techniques séparatives miniaturisées. Ces monolithes sont caractérisés en HILIC, par comparaison avec les phases particulaires. Pour terminer, les propriétés chromatographiques originales de ces phases sont mises à profit pour la séparation et le traitement d’échantillons, contenant des produits phosphorylés / This manuscript is dedicated to the development of monolithic titania phases for chromatographic analysis of phosphorylated compounds. The bibliography section first summarizes the interest of monolithic phases for the development of separation techniques while emphasizing on the problem of miniaturization. The state of the art on the use of titanium dioxide in liquid chromatography techniques is established. In this subject, the physico-chemical and chromatographic behaviour of this material are reviewed for particle beds. Then a detailed description of the sol-gel synthesis of monolithic titania is presented with a final illustration of the potential use of this support in separation techniques. The experimental part concentrates first on the analysis of the chromatographic behaviour of particulate titania in the hydrophilic interaction mode (HILIC). The work is then focused on the development of a repeatable sol-gel process that enables the formation of monolithic titania. The monolithic phase is first synthesized at a large scale, and its potential use, after column cladding, is illustrated with the purification and enrichment of phosphorylated amino acids. The elaboration process is also adapted to meet with the miniaturized separation techniques by performing an in situ synthesis route within capillary columns. These columns are characterized in HILIC by comparison with the chromatographic properties observed for titania particulate beds. The original behaviour of native titania observed also for the synthesized monolithic phases is finally applied to the separation and sample treatment of mixtures of phosphorylated products

This master’s thesis deals with the explanation of the concept of smart wearables and the different application possibilities. This work also includes examples of finished demonstration devices in this category. Part of this work is devoted to guide the selection of appropriate components for the design of new equipment in the category of smart wearable. The result of this thesis is designed wearable and charging station. This device is able to read user input and display that information on a smart device running under Android system connected via Bluetooth technology.

Owing to the advantages of high power density, fast charge/discharge rates as well as long lifetime, micro-supercapacitor (MSC) has drawn much attention for its potential application in miniaturized electronics. Many efforts have been devoted to the design and fabrication of high-performance MSCs. On the other hand, the integration of MSCs with multiple functional materials and devices has emerged with the development of portable and wearable microelectronics. To date, the biggest challenge in research is to develop a reliable and smart fabrication technology/strategy, which can integrate diverse objective materials into compact devices. Rolled-up nanotechnology is a unique approach to self-assemble 2D nanomembranes into 3D structures by using strain engineering. This self-assembly process smartly combines top-down and bottom-up methods to pattern functional nanomaterials into ordered 3D micro- and nanostructure arrays. One promising advantage of this approach is that such a self-assembled structure can endow micro-devices with functionality and high performance under a limited footprint area. The first part of this thesis focuses on the fabrication of planar interdigital MSCs with thermo-responsive function. Based on this work, the second part involves the research on novel tubular MSC which was fabricated by employing shapeable materials and strain engineering. A polymeric framework consisting of swelling hydrogel and polyimide layers ensures excellent ion transport between electrodes and provides efficient self-protection of the tubular MSC against external compression. Such tubular device also exhibits excellent areal capacitance, and an improved cycling stability compared to that of planar MSCs. The third part introduces the step-by-step experiments towards the fabrication and optimization of inorganic strained layer-based tubular MSC. Al2O3/Ni/Cr/Al2O3 strained nanomembrane is designed and can successfully drive the rolling up of MnO2 electrodes with a high yield under magnetic fields.:Chapter 1. Introduction 1 1.1. General background 1 1.2. Motivation of this work 2 1.2.1. Integration of micro-supercapacitors 2 1.2.2. Thermo-responsible micro-supercapacitors 2 1.2.3. 3D tubular functional micro-supercapacitors 2 1.3. Dissertation structure 3 Chapter 2. Overview of micro-supercapacitors 5 2.1. Introduction to MSCs 5 2.1.1. Capacitor 5 2.1.2. Electric double-layer capacitor 5 2.1.3. Pseudocapacitor 7 2.2. MSC configuration 8 2.3. Fabrication strategies of interdigital MSCs 9 2.4. Fabrication methods of active materials 12 2.5. Functionalization of supercapacitors 15 2.5.1. Tribo/piezoelectric driven self-charging function 15 2.5.2. Solar cell driven self-charging function 16 2.5.3. Electrochromic function 18 2.5.4. Self-healing function 19 2.5.5. Sensing function 20 2.5.6. Stretchable function 21 2.5.7. Thermo-responsive function 22 2.5.8. Photo-switchable function 23 2.6. Conclusion and outlook 23 Chapter 3. Overview of rolled-up technology 27 3.1. 3D self-assembly of the inorganic nanomembrane 27 3.1.1. Introduction 27 3.1.2. Rolled-up nanomembranes for capacitors 28 3.1.2. Rolled-up nanomembranes for Li-ion batteries 30 3.2. 3D self-assembly of the polymeric layers 32 3.2.1. Introduction 32 3.2.2. Self-assembled polymeric layers for microelectronics 35 Chapter 4. Experimental methods 39 4.1. Deposition methods 39 4.1.1. Photolithography 39 4.1.2. Electron beam evaporation 39 4.1.3. Atomic layer deposition 40 4.1.4. Electrochemical deposition 41 4.2. Characterization methods 43 4.2.1. Scanning electron microscopy and focused ion beam milling 43 4.2.2. Electrochemical characterization 43 Chapter 5. An integrated MSC with thermo-responsible function 47 5.1. Introduction 47 5.2. Fabrication and characterization of thermo-responsible MSCs 47 5.2.1. Single thermo-responsible MSCs 47 5.2.2. The array of thermo-responsible MSC 51 5.3. Conclusion 53 Chapter 6. Self-assembly of 3D tubular MSCs 55 6.1. Introduction 55 6.2. Fabrication of tubular MSCs 57 6.2.1. Diagram of processing flow 57 6.2.2. Polymeric layer stack 58 6.2.3. Microelectrodes, self-assembly and capsulation 59 6.3. Results and discussion 60 6.3.1. On-chip and free-standing sample morphology 60 6.3.2. Electrochemical characterization of tubular MSCs 64 6.3.3. Self-protection function of tubular structures 72 6.3.4. Assembly of tubular structures in series/parallel 76 6.4. Conclusion 80 Chapter 7. Tubular nanomembranes for MSCs 81 7.1. Introduction 81 7.2. Self-assembly of Al2O3/Ti/Cr/Al2O3 strained nanomembranes 82 7.2.1. Fabrication method 82 7.2.2. Results and discussion 83 7.3. Self-assembly of Al2O3/Ni/Cr/Al2O3 strained nanomembranes 87 7.3.1. Fabrication method 87 7.3.2. Results and discussion 88 7.4. Conclusion 92 Chapter 8. Summary and outlook 93 8.1. Summary 93 8.2. Outlook 94 Bibliography 95 List of Figures 109 List of Tables 117 Theses 119 Acknowledgment 121 Publications and presentations 123 Curriculum Vita 125

Nowadays, the increasing requirements of portable, implantable, and wearable electronics have greatly stimulated the development of miniaturized energy storage devices (MESDs). Electrochemically active materials and microfabrication techniques are two indispensable parts in MESDs. Particularly, the architecture design of microelectrode arrays is beneficial to the accessibility of two-dimensional (2D) active materials. Therefore, this study reviews the recent advancements in microbatteries and microsupercapacitors based on electrochemically active 2D materials. Emerging microfabrication strategies enable the precise control over the thickness, homogeneity, structure, and dimension in miniaturized devices, which offer tremendous opportunities for achieving both high energy and power densities. Furthermore, smart functions and integrated systems are discussed in detail in light of the emergence of intelligent and interactive modes. Finally, future developments, opportunities, and urgent challenges related to 2D materials, device fabrications, smart responsive designs, and microdevice integrations are provided.

De nos jours les applications spatiales nécessitent d’embarquer toujours plus d’équipements afin de rendre les missions les plus complètes possibles. Cependant l’espace à bord des satellites est une ressource limitée et par conséquent, la miniaturisation de l’électronique embarquée est une nécessité cruciale. Dans les applications embarquées couvrant plusieurs plages de fréquence différentes, l’utilisation d’antennes ultra large bande (ULB) est une solution classique et efficace pour limiter le nombre d’antennes et de circuits associés. Leur miniaturisation présente donc un enjeu scientifique majeur. Une technique de miniaturisation consistant à charger une antenne spirale d’Archimède par un empilement d’anneaux résonants et couplés a récemment été découverte [1]-[3]. Elle permet une diminution de l’ordre de 35% du diamètre de l’antenne sans dégradation notable des performances en rayonnement. Les travaux de cette thèse permettent d’affiner la compréhension physique du rôle joué par les anneaux dans le phénomène de miniaturisation. Un circuit électrique équivalent est élaboré sur la base d’équations intégrales utilisant des fonctions d’essai étendues et le concept d’impédance de surface réactive. Ce circuit permet de simuler la réponse électromagnétique des anneaux empilés et couplés 10 fois plus vite qu’en utilisant des logiciels de simulation commerciaux et rigoureux. Ce gain de temps est mis à profit pour tester un nombre de combinaisons importants de solutions parmi lesquelles il est possible d’identifier la structure optimale pour la miniaturisation de la spirale d’Archimède chargée par des anneaux empilés et résonants. Pour maximiser l’effet des anneaux résonants couplés dans la miniaturisation de l’antenne, le choix de la fréquence de résonance des anneaux est crucial. Cette fréquence doit être suffisamment basse et permettre à l’antenne de rester adaptée en impédance sur la bande de fréquence la plus large possible. La fréquence de résonance des anneaux dépend du périmètre déployé des anneaux. Ce périmètre est fixé par le choix du motif de base et par le nombre de ses répétitions le long des anneaux. Une méthode rapide pour choisir le motif le plus adapté à la conception de l’antenne miniaturisée est présentée. Cette méthode et le circuit électrique équivalent permettent la conception optimisée et rapide d’une antenne ULB miniature. La validation de cette méthodologie de conception s’est faite expérimentalement sur la base de plusieurs réalisations. / Currently space applications require to embark more and more equipment to make the most complete missions possible. However, the space on satellites is a limited resource, therefore miniaturization of embedded electronics is a crucial requirement. In embedded applications covering several frequency ranges, use Ultra WideBand antennas (UWB) is a classic and effective solution to limiting the number of antennas and associated circuits. Therefore, the miniaturization of UWB antennas is a major scientific challenge. A miniaturization technique was recently discovered [1] - [3]. It consists to load an Archimedean spiral antenna by stacking coupled resonant rings. This technique allows a reduction of about 35% of the diameter of the antenna without significant degradation of radiating performances. The work of this thesis allows to improve the physical understanding of the role played by the rings in the miniaturization process. An equivalent circuit is developed on the basis of integral equations using extended test functions and the concept of surface impedance. This circuit simulates the electromagnetic response of the coupled and stacked rings 10 times faster than using commercial and rigorous simulation software. This time saving is employed to test a large number of solutions from which it is possible to identify the optimal structure for the miniaturization of the Archimedean spiral loaded with stacked resonant rings. To maximize the effect of coupled resonant rings in the miniaturization of the antenna, the choice of the resonant frequency of the rings is essential. This frequency must be low enough and allow the antenna to stay matched over the widest possible frequency band. The resonant frequency of the rings depends on the deployed perimeter of the rings. The perimeter length is fixed by the choice of the pattern and its number of repetitions along the rings. A quick methodology to select the most suitable pattern for the design of the miniaturized antenna is presented. This method and the equivalent electrical circuit enable a quick and optimized design of a miniature UWB antenna. The validation of this design methodology was done experimentally on the basis of several realizations.

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