The highly c-axis oriented ZnO films were deposited on silicon substrates by reactive RF magnetron sputtering in this study. The optimal two-step deposition parameters for ZnO films, which are oxygen concentrations of 70 % (1st step) and 50 % (2nd step), RF power of 100 W and sputtering pressure of 25 mTorr, are obtained by means of XRD, SEM and AFM analysis. Al films are deposited under optimal deposition parameters, which are DC power of 100 W and sputtering pressure of 4 mTorr, to form IDT electrodes with low sheet resistances. Therefore, Al/ZnO/Si layered SAW devices were fabricated under these optimized manufacturing parameters. An oscillator based on a Al/ZnO/Si layered SAW device was fabricated for the application of UV detection and then investigating the acoustoelectric effect between surface acoustic wave and ultraviolet light illumination. Due to the fact that the sensor sensitivity is directly proportional to the resonance frequency, in this study the SAW device with high resonance frequency of Sezawa mode is adopted to form SAW oscillator for high sensitivity. The resonance frequency of SAW oscillator is 751.41 MHz. The optimal detecting zone for UV light is the center of IDT electrode with maximum sensitivity of 8.12 ppm/(£gW/cm2).

Thesis (MEng)--Stellenbosch University, 2015. / ENGLISH ABSTRACT: Please refer to full text for abstract.

Neste trabalho apresentaremos os procedimentos para a confecção de substratos de LiNbO3 para dispositivos OAS (Ondas Acústicas Superficiais). Assim como a construção de linhas de atraso, caracterização elétrica e pelo método de \"Laser Probe\". No procedimento experimental, inicialmente descreveremos os métodos e cuidados para a preparação dos substratos do monocristal de LiNbO3 produzido nos laboratórios do Grupo de Crescimento de Cristais do DFCM - IFQSC - USP. Para serem utilizados em linhas de atraso com freqüência central de operação de 70 MHz. Na segunda etapa, descreveremos a construção dos transdutores, o encapsulamento e a caracterização elétrica das linhas de atraso. A caracterização elétrica consta das medidas de impedância das portas de entrada e saída, e da medida de transmissão em um espectro de freqüência do dispositivo OAS. Finalmente, para a caracterização dos substratos confeccionados e util1zados nas linhas de atraso, construímos um sistema óptico, \"Laser Probe, que nos permite medir a velocidade e determinar o campo da onda acústica superficial sobre esses substratos. Apresentamos através do conhecimento do campo acústico, o espalhamento, o desvio de feixe acústico com relação ao alinhamento dos transdutores e as frentes de ondas superficiais em regiões do substrato. Resultados das medidas de perda intrínseca (6 dB) por linha de atraso e o espectro de transmissão dos dispositivos OAS foram apresentados. Sendo a última medida apresentada em comparação com a medida de transmissão da caracterização elétrica / In this work a procedure is presented for fabricating LiNbO3 substrates for Surface Acoustic Wave (SAW) devices. Also described is the construction of SAW delay lines which are characterized using electrical and acoustic-optical methods. Firstly, the experimental methods for producing LiNbO3 single crystal substrates for operation at 70 MHz are described in detail. The single crystals were grown in the crystal growth laboratory of DFCM_IFQSC. Secondly, the techniques for building the transducers are discussed including the encapsulation. The delay lines are then characterized electrically by measuring the impedance of transducers and also the transmission frequency spectra of the SAW devices. Finally, for the characterization of substrates used in delay lines, a laser probe technique was developed, which allows the propagation velocities to be measured. Surface acoustic wave fields in these substrates are then determined making it possible to obtain the scattering, beam steering acoustic and the surface wave fronts in the substrates regions. As an application, results of intrinsic loss (6dB) and pass band measurements in the delay line are presented. These results are found to be in good agreement with previously published data

Neste trabalho apresentaremos os procedimentos para a confecção de substratos de LiNbO3 para dispositivos OAS (Ondas Acústicas Superficiais). Assim como a construção de linhas de atraso, caracterização elétrica e pelo método de \"Laser Probe\". No procedimento experimental, inicialmente descreveremos os métodos e cuidados para a preparação dos substratos do monocristal de LiNbO3 produzido nos laboratórios do Grupo de Crescimento de Cristais do DFCM - IFQSC - USP. Para serem utilizados em linhas de atraso com freqüência central de operação de 70 MHz. Na segunda etapa, descreveremos a construção dos transdutores, o encapsulamento e a caracterização elétrica das linhas de atraso. A caracterização elétrica consta das medidas de impedância das portas de entrada e saída, e da medida de transmissão em um espectro de freqüência do dispositivo OAS. Finalmente, para a caracterização dos substratos confeccionados e util1zados nas linhas de atraso, construímos um sistema óptico, \"Laser Probe, que nos permite medir a velocidade e determinar o campo da onda acústica superficial sobre esses substratos. Apresentamos através do conhecimento do campo acústico, o espalhamento, o desvio de feixe acústico com relação ao alinhamento dos transdutores e as frentes de ondas superficiais em regiões do substrato. Resultados das medidas de perda intrínseca (6 dB) por linha de atraso e o espectro de transmissão dos dispositivos OAS foram apresentados. Sendo a última medida apresentada em comparação com a medida de transmissão da caracterização elétrica / In this work a procedure is presented for fabricating LiNbO3 substrates for Surface Acoustic Wave (SAW) devices. Also described is the construction of SAW delay lines which are characterized using electrical and acoustic-optical methods. Firstly, the experimental methods for producing LiNbO3 single crystal substrates for operation at 70 MHz are described in detail. The single crystals were grown in the crystal growth laboratory of DFCM_IFQSC. Secondly, the techniques for building the transducers are discussed including the encapsulation. The delay lines are then characterized electrically by measuring the impedance of transducers and also the transmission frequency spectra of the SAW devices. Finally, for the characterization of substrates used in delay lines, a laser probe technique was developed, which allows the propagation velocities to be measured. Surface acoustic wave fields in these substrates are then determined making it possible to obtain the scattering, beam steering acoustic and the surface wave fronts in the substrates regions. As an application, results of intrinsic loss (6dB) and pass band measurements in the delay line are presented. These results are found to be in good agreement with previously published data

No description available.

No description available.

Ce travail a pour objectif de développer de nouveaux microcapteurs à onde acoustique de surface (SAW) capables de détecter le dioxyde de souffre (SO₂) à l’échelle de traces par l’intermédiaire d’une couche sensible à base d’un polymère fonctionnel. Une famille originale de cinq polyuréthaneimides (PUIs) à blocs contenant un nombre contrôlé de sites amines tertiaires de structures différentes a été synthétisée et caractérisée. Ces matériaux présentent des propriétés originales, en solution et à l’état solide, qui sont dues essentiellement à la présence des sites basiques et à la structure à blocs associant des blocs souples polyéthers et des blocs rigides en partie fluorés. Leur excellent caractère filmogène a permis leur application en tant que couche sensible au SO₂ sur des microcapteurs SAW. Deux structures de microcapteurs à onde de Love, bicouche et tri-couche, ont été développées en respectant les conditions de génération de l’onde. La structure bicouche comporte le Quartz-ST 90° comme substrat et l’un des PUIs joue le double rôle de couche guidante et sensible. Cette structure génère bien l’onde de Love mais elle présente une forte sensibilité à la température, inconvénient majeur pour les capteurs de gaz. L’ajout d’une couche guidante à base de ZnO, dans une structure tri-couche, a permis de rendre le dispositif peu sensible à la température et donc compatible avec l’application visée. Les résultats des tests de détection du SO₂ montrent que tous les PUIs étudiés contribuent à une amélioration de la sensibilité comparativement au dispositif sans couche polymère. La présence des sites amines tertiaires conduit à une amélioration importante de la sensibilité qui n’est pas seulement gouvernée par leur basicité mais également par leur encombrement stérique dont le rôle apparaît déterminant / This work aimed at developing new surface acoustic wave (SAW) microsensors capable of detecting traces of sulfur dioxide (SO₂) through a sensitive layer based on a functional polymer. An original family of five polyurethaneimide (PUI) block copolymers containing a controlled number of tertiary amine sites with different chemical structures was synthesized and characterized. These materials exhibited original properties in solution and solid state, which were mainly due to the presence of the basic sites and the block structure combining polyether soft blocks and partially fluorinated hard blocks. Their excellent film-forming character allowed their application as SO₂ sensitive layers on SAW microsensors. Two bi-layer and three-layer structures of Love wave microsensors were developed by respecting the conditions of the Love wave generation. The bi-layer structure included the Quartz ST-90° as the piezoelectric substrate and one of the PUIs acting as both guiding and sensitive layer. This structure generated the Love wave but its high sensitivity to temperature was a major drawback for gas sensors. The addition of a ZnO guiding layer in a three-layer structure led to a microsensor almost insensitive to temperature and thus compatible with the targeted application. The experimental results for SO₂ detection showed that all the PUIs contributed to improve the sensitivity compared to the device without polymer layer. The presence of tertiary amine sites led to a significant improvement in gas sensitivity which was not only governed by their basicity but also by their steric hindrance which played a determining role

Un système microfluidique à onde élastique de surface a été développé dans le but de réaliser une réaction d'amplification de brins d'ADN par PCR. Nous avons principalement étudié la température et l'uniformité de l'échauffement des gouttes irradiées par des ondes de type Rayleigh. Ces dernières sont générées à la surface d'un substrat piézoélectrique de Niobate de Lithium (LiNbO3). Nous avons pensé un système consommant le moins d'énergie électrique possible pour atteindre les températures désirées et permettant une meilleure uniformité de la température des gouttes. Pour cela, un dispositif à transducteur enterré a été réalisé sous une couche isolante de silice. Les gouttes sont ainsi directement posées sur le transducteur ce qui limite les pertes et améliore la répartition de la chaleur au sein des gouttes. Nous avons ensuite vérifié que les réactifs de la PCR ne sont pas affectés par les ondes de Rayleigh ce qui laisse présager que la PCR peut être réalisée à l'aide d'un système d'échauffement par ondes de Rayleigh. Par ailleurs, le déplacement de goutte sur ce type de substrat de LiNbO3 est important pour des applications de type laboratoire sur puce. Ce substrat ayant des propriétés hydrophiles, des revêtements ont été développés afin de minimiser la force nécessaire à l'actionnement des gouttes. Dans ces travaux, nous proposons un nouveau type de couche à base de copolymère P(VDF-TrFe) dont la fabrication est simplement réalisée par dissolution et étalement par spin-coating. Nous avons montré que ce type de couche n'affecte que très peu la propagation des ondes de Rayleigh et les propriétés hydrophobes sont équivalentes à d'autres revêtements / In this work, a microfluidic system based on surface acoustic wave has been developed in order to achieve the amplification of DNA strands by temperature cycling (PCR). We studied mainly the temperature and the heat uniformity of microdroplets irradiated by Rayleigh waves. These waves are generated at the surface of a lithium niobate substrate. We propose a system allowing better temperature uniformity within microdroplets with an optimal energy consumption. For this, a device with buried transducer has been developed under an insulating layer (Silice). The droplets are then placed directly on the transducer which limits losses and improves the distribution of heat within the microdroplets. We then verified that the PCR reagents are not affected by the Rayleigh waves which suggests that PCR can be performed using a heating system by Rayleigh waves. Moreover, the move of microdroplets on this kind of LiNbO3 substrate is important for lab on chip applications. This substrate having hydrophilic properties, some coatings have been developed to minimize the required force to actuate the microdroplets. In this work, we developed a new hydrophobic layer based on copolymer P(VDF-TrFe) whose production is simply made by dissolving and spreading by spin-coating. We have shown that this kind of layer is compatible with Rayleigh waves and that the hydrophobic properties are equivalent to other coatings

[pt] Os sensores de deformação convencionais, por exemplo, os strain gages resistivos e ópticos, consagrados pelo mercado, são empregados em diferentes ambientes e estruturas, oferecendo um nível de flexibilidade que permite sua integração a vários tipos de sistemas de medição. No entanto, requerem uma fonte de energia elétrica local ou não podem funcionar sem cabos, limitando o seu uso em alguns cenários, como em partes móveis de máquinas. Os dispositivos SAW (Surface Acoustic Wave) podem ser usados como sensores de deformação piezoelétricos, pois possuem sensibilidade à deformação e podem operar de forma passiva por meio de antenas, podendo ser integrados a sistemas de monitoramento sem fio. Seu funcionamento é baseado em ondas de superfície geradas em um meio piezoelétrico. O estado de tensão na superfície do meio altera as características dessas ondas e induz mudanças na frequência de operação. O presente trabalho analisou a sensibilidade à deformação de dispositivos SAW ressonadores feitos de quartzo ST-X com frequência central de 433,92 MHz colados com diferentes adesivos, e testou sua operação como sensores passivos sem fio. A metodologia incluiu testes de tração não destrutivos em diferentes temperaturas e também simulações com elementos finitos. Os resultados experimentais mostraram relação linear entre a variação de frequência dos ressonadores e as deformações aplicadas, concordando com a literatura. A interrogação sem fio foi bem sucedida, confirmando o grande potencial dessa tecnologia. Os resultados numéricos, combinados a um modelo teórico, foram próximos aos experimentais, validando o modelo numérico. / [en] The conventional strain sensors, e.g., resistive and optical strain gages, established in the market, are deployed in different environments and structures, providing the flexibility of integration with different measurement systems. However, they require a local energy source to work or cables, limiting their use in some scenarios such as moving parts of machines. The SAW (Surface Acoustic Wave) devices can be used as piezoelectric strain sensors since they have sensitivity to strain, can operate passively by antennas and can be integrated to wireless monitoring systems. Its working principle is based on surface acoustic waves generated on piezolectric medium. The stress state of the medium changes the characteristics of these waves and induces changes in the operating frequency. The present work analyzed the strain sensitivity of SAW resonators made of ST-X cut quartz operating at a central frequency of 433,92 MHz, bonded with different adhesives, and tested their operation as passive wirelesss sensors. The methodology included non-destructive tensile testing at different temperature, and also finite elements simulations. The experimental results showed linear relation between the frequency change and the applied strain, agreeing with the literature. The wireless interrogations was successful, confirming the great potential of this technology. The numerical results, combined to a theoretical model, matched well the experiments, validating the model.