MEMS (Microelectromechanical Systems) acoustic sensors are a promising platform for Point-of-Care biosensing. In particular, piezoelectrically driven acoustic sensors can provide fast results with high sensitivity, can be miniaturized and mass produced, and have the potential to be fully integrated with sample handling and electronics in handheld devices. Furthermore, they can be designed as multiplexed arrays to detect multiple biomarkers of interest in parallel. In order to develop a microfabricated biosensing platform, a specific and high affinity biodetection platform must be optimized, and the microfabricated sensors must be designed to have high sensitivity and maintain good performance in a liquid environment. A biomolecular sensing system that uses high affinity peptide aptamers and a passivation layer has been optimized for the detection of proteins of interest using the quartz crystal microbalance with dissipation monitoring (QCM-D). The resulting system is highly specific to target proteins, differentiating between target IgG molecules and other closely related IgG subclasses, even in complex environments such as serum. Piezoelectrically actuated MEMS resonators are designed to operate in flexural microplate modes, with several modes shown to be ideally suited for fluid based biosensing due to improved performance in the liquid environment. The increase in quality factor of these MEMS microplate devices in liquid, as compared to air, is further investigated through the analytical and finite element modeling of MEMS fluid damping mechanisms, with a focus on acoustic radiation losses for circular microplate devices. It is found that the impedance mismatch at the air-water interface of a droplet is a key contributor to reduced acoustic radiation losses and thus improved device performance in water. Microplate acoustic sensors operating in flexural plate wave and microplate flexural modes are then integrated with a fluidic cell to facilitate protein sensing from fluid samples. Flexural plate wave devices are used to measure protein mass adsorbed to the sensor surface and initial results toward microplate flexural mode protein sensing are presented. Finally, challenges and areas of future research are discussed to outline the path towards finalization of a sensing platform taking advantage of the combination of the sensitive MEMS acoustic sensor capable of operating in a liquid environment and the specific and high affinity biomolecular detection system. Together, these form the potential basis of a novel Point-of-Care platform for simple and rapid monitoring of protein levels in complex samples.

abstract: Different environmental factors, such as ultraviolet radiation (UV), relative humidity (RH) and the presence of reducing gases (acetone and ethanol), play an important role in the daily life of human beings. UV is very important in a number of areas, such as astronomy, resin curing of polymeric materials, combustion engineering, water purification, flame detection and biological effects with more recent proposals like early missile plume detection, secure space-to-space communications and pollution monitoring. RH is a very common parameter in the environment. It is essential not only for human comfort, but also for a broad spectrum of industries and technologies. There is a substantial interest in the development of RH sensors for applications in monitoring moisture level at home, in clean rooms, cryogenic processes, medical and food science, and so on. The concentration of acetone and other ketone bodies in the exhaled air can serve as an express noninvasive diagnosis of ketosis. Meanwhile, driving under the influence of alcohol is a serious traffic violation and this kind of deviant behavior causes many accidents and deaths on the highway. Therefore, the detection of ethanol in breath is usually used as a quick and reliable screening method for the sobriety checkpoint. Traditionally, semiconductor metal oxide sensors are the major candidates employed in the sensing applications mentioned above. However, they suffer from the low sensitivity, poor selectivity and huge power consumption. In this dissertation, Zinc Oxide (ZnO) based Film Bulk Acoustic Resonator (FBAR) was developed to monitor UV, RH, acetone and ethanol in the environment. FBAR generally consists of a sputtered piezoelectric thin film (ZnO/AlN) sandwiched between two electrodes. It has been well developed both as filters and as high sensitivity mass sensors in recent years. FBAR offers high sensitivity and excellent selectivity for various environment monitoring applications. As the sensing signal is in the frequency domain, FABR has the potential to be incorporated in a wireless sensor network for remote sensing. This study extended our current knowledge of FBAR and pointed out feasible directions for future exploration. / Dissertation/Thesis / Ph.D. Electrical Engineering 2011

Union between top-down and bottom-up assembly is inevitable when scaling down physical, chemical, and biological sensors and probes. Current sensor/probe-based technologies are firmly founded on top-down manufacturing, with limitations in cost of production, manufacturing methods, and material constraints. As an alternative to such limitations, contemporary synthesis techniques for one-dimensional nanostructures have been combined with established methods of micro-fabrication for the development of novel tools and techniques for nanotechnology. More specifically, this dissertation is a systematic study of the synthesis and characterization of ZnO nanostructures for piezoelectric applications. Within this study the following goals have been achieved: 1) rational design and control of a diversity of novel ZnO nanostructures, 2) improved understanding of polar-surface-dominated (PSD) phenomena among Wurtzite crystal structures, 3) confirmation of Taskers Rule via the synthesis, characterization, and modeling of polar-surface-dominated nanostructures, 4) measurement of the surface-charge density for real polar surfaces of ZnO, 5) confirmation of the electrostatic polar-charge model used to describe polar-surface-dominated phenomena, 6) dispersion of ZnO nanobelts onto the selective layers of surface acoustic wave (SAW) devices for gas sensing applications, 7) manipulation of ZnO nanostructures using an atomic force microscope (AFM) for the development of piezoelectric devices, 8) fabrication of bulk acoustic resonator (BAR) and film bulk acoustic resonator (FBAR) devices based on the integrity of individual ZnO belts, 9) electrical characterization of a ZnO belt BAR device, 10) prediction and confirmation of the electrical response from a BAR device using a one-dimensional Krimholt-Leedom-Matthaei (KLM) model, and 11) development of a finite element model (FEM) to accurately predict the electrical response from ZnO belt BAR and FBAR devices in 3D.

abstract: Micro-electro-mechanical systems (MEMS) film bulk acoustic resonator (FBAR) demonstrates label-free biosensing capabilities and is considered to be a promising alternative of quartz crystal microbalance (QCM). FBARs achieve great success in vacuum, or in the air, but find limited applications in liquid media because squeeze damping significantly degrades quality factor (Q) and results in poor frequency resolution. A transmission-line model shows that by confining the liquid in a thickness comparable to the acoustic wavelength of the resonator, Q can be considerably improved. The devices exhibit damped oscillatory patterns of Q as the liquid thickness varies. Q assumes its maxima and minima when the channel thickness is an odd and even multiple of the quarter-wavelength of the resonance, respectively. Microfluidic channels are integrated with longitudinal-mode FBARs (L-FBARs) to realize this design; a tenfold improvement of Q over fully-immersed devices is experimentally verified. Microfluidic integrated FBAR sensors have been demonstrated for detecting protein binding in liquid and monitoring the Vroman effect (the competitive protein adsorption behavior), showing their potential as a promising bio-analytical tool. A contour-mode FBAR (C-FBAR) is developed to further improve Q and to alleviate the need for complex integration of microfluidic channels. The C-FBAR consists of a suspended piezoelectric ring made of aluminum nitride and is excited in the fundamental radial-extensional mode. By replacing the squeeze damping with shear damping, high Qs (189 in water and 77 in human whole blood) are obtained in semi-infinite depth liquids. The C-FBAR sensors are characterized by aptamer - thrombin binding pairs and aqueous glycerine solutions for mass and viscosity sensing schemes, respectively. The C-FBAR sensor demonstrates accurate viscosity measurement from 1 to 10 centipoise, and can be deployed to monitor in-vitro blood coagulation processes in real time. Results show that its resonant frequency decreases as the viscosity of the blood increases during the fibrin generation process after the coagulation cascade. The coagulation time and the start/end of the fibrin generation are quantitatively determined, showing the C-FBAR can be a low-cost, portable yet reliable tool for hemostasis diagnostics. / Dissertation/Thesis / Ph.D. Electrical Engineering 2011

Partial enclosures are commonly used to reduce machinery noise. However, it is well known in industry that enclosures sometimes amplify the sound at low frequencies due to strong acoustic resonances compromising the performance. These noise issues are preventable if predicted prior to prototyping and production. Though boundary and finite element approaches can be used to accurately predict partial enclosure insertion loss, modifications to the model require time for remeshing and solving. In this work, partial enclosure performance at low frequencies is simulated using a plane wave transfer matrix approach. Models can be constructed and the effect of design modifications can be predicted rapidly. Results are compared to finite element analysis and measurement with good agreement. The approach is then used to design and place resonators into a sample enclosure. Improvements in enclosure performance are predicted using plane wave simulation, compared with acoustic finite element analysis, and then validated via measurement.

The fields of health care and environment control have an increasing demand for sensors able to detect low concentrations of specific molecules in gaseous or liquid samples. The recent introduction of microfabricated devices in these fields gave rise to sensors with attractive properties. A cutting edge technology is based on guided acoustic waves, which are perturbed by events occurring at the nanometer scale. A first part of the thesis investigates the Love mode waveguide, a versatile structure in which a thin film is guiding the acoustic wave generated in a piezoelectric substrate. A systematic analysis of its sensitivity was obtained using a transmission line model generalized to discriminate the rigid or viscous nature of the probed layers. We developed a novel integrated combination of the Love mode device with a Surface Plasmon Resonance optical sensor to quantify the thickness and the composition of soft layers. The electromagnetic interferences in the recorded signal were modeled to determine the phase velocity in the sensing area and to provide new mechanisms for an enhanced sensitivity. The experimental aspects of this work deal with the fabrication, the important issue of the packaging and the sensitivity calibration of the Love mode biosensor. A second part of the thesis investigates nanocrystalline diamond under the form of a thin film membrane suspended to a rigid silicon frame. The high mechanical and chemical resistance of nanocrystalline diamond, close to single-crystal diamond, open ways to membrane based acoustic sensors such as Flexural Plate Wave and thin Film Bulk Acoustic Resonators (FBAR). A novel dynamic characterization of the thin film is reported and the properties of composite FBAR devices including a diamond thin film membrane and a piezoelectric aluminum nitride layer are assessed using the perturbation theory. This study is applied to evaluate the high sensing potential of the first prototype of an actual diamond-based composite FBAR.

The fields of health care and environment control have an increasing demand for sensors able to detect low concentrations of specific molecules in gaseous or liquid samples. The recent introduction of microfabricated devices in these fields gave rise to sensors with attractive properties. A cutting edge technology is based on guided acoustic waves, which are perturbed by events occurring at the nanometer scale. A first part of the thesis investigates the Love mode waveguide, a versatile structure in which a thin film is guiding the acoustic wave generated in a piezoelectric substrate. A systematic analysis of its sensitivity was obtained using a transmission line model generalized to discriminate the rigid or viscous nature of the probed layers. We developed a novel integrated combination of the Love mode device with a Surface Plasmon Resonance optical sensor to quantify the thickness and the composition of soft layers. The electromagnetic interferences in the recorded signal were modeled to determine the phase velocity in the sensing area and to provide new mechanisms for an enhanced sensitivity. The experimental aspects of this work deal with the fabrication, the important issue of the packaging and the sensitivity calibration of the Love mode biosensor. A second part of the thesis investigates nanocrystalline diamond under the form of a thin film membrane suspended to a rigid silicon frame. The high mechanical and chemical resistance of nanocrystalline diamond, close to single-crystal diamond, open ways to membrane based acoustic sensors such as Flexural Plate Wave and thin Film Bulk Acoustic Resonators (FBAR). A novel dynamic characterization of the thin film is reported and the properties of composite FBAR devices including a diamond thin film membrane and a piezoelectric aluminum nitride layer are assessed using the perturbation theory. This study is applied to evaluate the high sensing potential of the first prototype of an actual diamond-based composite FBAR.

New methodologies and concepts for developing compact and energy efficient automotive exhaust systems have been studied. This originates in the growing concern for global warming, to which road transportation is a major contributor. The focus has been on commercial vehicles—most often powered by diesel engines—for which the emission legislation has been dramatically increased over the last decade. The emissions of particulates and nitrogen oxides have been successfully reduced by the introduction of filters and catalytic converters, but the fuel consumption, which basically determines the emissions of carbon dioxides, has not been improved accordingly. The potential reduction of fuel consumption by optimising the exhaust after-treatment system (assuming fixed after-treatment components) of a typical heavy-duty commercial vehicle is ~4%, which would have a significant impact on both the environment and the overall economy of the vehicle. First, methodologies to efficiently model complex flow duct networks such as exhaust systems are investigated. The well-established linear multiport approach is extended to include flow-acoustic interaction effects. This introduces an effective way of quantifying amplification and attenuation of incident sound, and, perhaps more importantly, the possibility of predicting nonlinear phenomena such as self-sustained oscillations—whistling—using linear models. The methodology is demonstrated on T-junctions, which is a configuration well known to be prone to self-sustained oscillations for grazing flow past the side branch orifice. It is shown, and validated experimentally, that the existence and frequency of self-sustained oscillations can be predicted using linear theory. Further, the aeroacoustics of T-junctions are studied. A test rig for the full determination of the scattering matrix defining the linear three-port representing the T-junction is developed, allowing for any combination of grazing-bias flow. It is shown that the constructive flow-acoustic coupling not only varies with the flow configuration but also with the incidence of the acoustic disturbance. Configurations where flow from the side branch joins the grazing flow are still prone to whistling, while flow bleeding off from the main branch effectively cancels any constructive flow-acoustic coupling. Two silencer concepts are evaluated: first the classic Herschel-Quincke tube and second a novel modified flow reversal silencer. The Herschel-Quincke tube is capable of providing effective attenuation with very low pressure loss penalty. The attenuation conditions are derived and their sensitivity to mean flow explained. Two implementations have been modelled using the multiport methodology and then validated experimentally. The first configuration, where the nodal points are composed of T-junctions, proves to be an example where internal reflections in the system can provide sufficient feedback for self-sustained oscillation. Again, this is predicted accurately by the linear theory. The second implementation, with nodal points made from Y-junctions, was designed to allow for equal flow distribution between the two parallel ducts, thus allowing for the demonstration of the passive properties of the system. Experimental results presented for these two configurations correlate well with the derived theory. The second silencer concept studied consists of a flow reversal chamber that is converted to a resonator by acoustically short-circuiting the inlet and outlet ducts. The eigenfrequency of the resonator is easily shifted by varying the geometry of the short circuit, thus making the proposed concept ideal for implementation as a semi-active device. Again the concept is modelled using the multiport approach and validated experimentally. It is shown to provide significant attenuation over a wide frequency range with a very compact design, while adding little or no pressure loss to the system. / QC 20110208

This thesis is about the design of a biosensor system for detection of multiple cancer biomarkers. Accurate diagnosis and prognosis of cancer requires early detection. Equally important, though, is the measurement of biomarker-velocity and detection of multiple biomarkers. Early detection requires highly sensitive biosensors capable of detection at very low concentrations of target molecules. Biomarker-velocity can be measured by monitoring concentration of target molecule over a period of time. This requires a system which is very easy to use, fast, flexible, inexpensive and portable, thus enabling its ubiquitous presence at the point of care. For detection of multiplexed biomarkers, biosensors which easily lend to array configuration are required. Conventional techniques do not fulfill either all or some aspects of the requirements listed above. In this work, we present the design of a biosensor system, keeping in view the desired features described above, to achieve the ultimate goal of enabling ubiquitous presence of biosensor at the point of care. We focus on acoustic transducer based biosensors. The two fundamental components of design in an acoustic biosensor are the design of an acoustic transducer and the design of a novel electrical interface for the transducer. For transducer design, we introduce and present the design of a single structure, GHz range, multi-mode acoustic resonator. We present this as a suitable transducer for liquid phase biosensors, which is the preferred medium for sensing of cancer biomarkers. We explore the underlying physics and do experimental and theoretical characterization of this device. The transducer needs to be functionalized with a chemically sensitive layer which performs the molecular recognition of cancer biomarkers. We present the experimental exploration of a reversible and oriented immobilization based Histidine-Ni(2+) interaction which used NTA as the chelator for anchoring onto the device. Then we discuss the microfluidic design to enable liquid phase operation. We used SU-8 polymer barriers for liquid containment and addressed the challenges of making it compatible with ZnO based devices. An electrical interface is needed to excite and extract the sensor response. We have presented here a novel method to measure and track a resonator's response and extract its characteristic parameters. This method measures the wideband frequency response of the resonator with a much simpler setup as compared to conventional methods. We have proposed and demonstrated the use of a white noise signal as a viable signal for broadband excitation of resonator-based sensing platforms. We have also established, shown through simulation and prototype measurements, the feasibility of the proposed method. The accuracy and speed of the system can be further greatly improved by FFT-based digital implementation of the spectral analysis system. We have presented an example hardware implementation of FFT-based signal analyzer, and have discussed the hardware resources required for actual implementation in a chip form. Lastly we discuss the measurement protocol and sensor results for head and neck cancer and prostate cancer biomarkers. These results demonstrate the usability of the proposed sensor system for detection of cancer biomarkers.

<p dir="ltr">In this research, a novel acoustic sensor with a waveguide is made to induce the local volumetric resonance of concrete material. The sensor is embedded in fresh concrete and monitors the in-place elastic modulus and strength development of the concrete. The resonant peak of the EMI spectrum of the sensor is governed by the concrete material in the proximate area of the sensor. The sensor itself does not affect the position of the resonant peak.</p><p dir="ltr">This research covers theoretical demonstration, sensor design and prototyping, remote testing systems, experimental study, and machine learning. Current work demonstrated the sensor successfully produced the resonant peaks that are related to the concrete curing process (R-square=0.86 for lab testing and R-square=0.64 for field testing); however, the sensitivity (S=1.00 Hz/psi) of the resonant frequency is not sufficient for practical application.</p><p dir="ltr">Machine learning algorithms were employed to map the EMI spectra to concrete strength profile. Several existing architectures were explored and evaluated. A novel machine learning scheme was proposed and successfully improved the accuracy of prediction. The algorithm is also able to handle real-time data with decent generalization among diverse concrete mixtures.</p><p dir="ltr">The integration test for the sensing system, including the sensor, the data collection device, the data pipeline, and the trained machine learning models, was performed in field testing of eight States. The averaged MAPE of the field prediction results is 23.43% for field structures and 16.13% for companion beam samples.</p><p dir="ltr">The knowledge produced during this study further advanced the application of EMI sensors in the NDE of concrete material. The EMI resonator tailored for local structural resonance is reported in this study for the first time. The EMI data processing algorithm using machine learning that is generalizable among various concrete mixtures is employed in this study for the first time. This study would be helpful for the real-world application of the EMI technique in the NDE of concrete and other phase-changing materials.</p>