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Evaluation and Modification of Airflow Pattern and Contaminant Diffusion in Semiconductor Wet BenchLin, Chih-Hung 14 July 2000 (has links)
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In the wet wafer cleaning process, the wafer
surfaces are washed with toxic solutions such as
ammonia and sulfuric acid which was not to allow
to enter the surroundings i.e. clean room.
Therefore, common practice is to reduce the
pressure differential between the wet bench and
the surroundings to a very low pressure
difference level while maintaining a high exhaust
flow rate for toxic fumes. In such a case, the
isolation of process area from the surrounding
area may be compromised i.e. there is a danger
that the surrounding air was suctioned to the
process area. Conceptually, this dilemma can be
solved by creating an air buffer between the
wafer process area and the surrounding area. This
study aims to determine/prove-in the optimal
operational conditions and geometries of such
design by both CFD analysis and experimental
verification.
This thesis includes three parts. First, the
detailed experimental data to a bio-clean bench
installed with the guide-vane design are
conducted. The data are then used to verify the
feasibility/accuracy of the CFD model.
Second, the optimal operational conditions
and geometries of a full-scale isothermal wet
bench with the guide-vane design are determined
by CFD simulation that takes most influential
factors into account. These influential factors
include exhaust pressures, length of the guide-
vane, guide-vane angle and downward face velocity
of the filter etc. The results show that the air
curtain created by the guide-vane is able to
isolate the process area from surrounding area,
and vise-versa.
Third, the thermal effect of ammonia solution
on the distribution of ammonia vapor are
examined. The shape of the thermal plume that
encounters the downward air stream of the filter
is discussed intensively.
In general, this thesis provides significant
information in improving the isolation effect of
wet benches by the air-curtain design.
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Analyse des structures des écoulements et des instabilités développées par un rideau d'air cisaillé latéralement par un courant externe : application au cas des meubles frigorifiques de vente / Analysis of flow structures and instabilities developed by and air curtain sheared laterally by an external stream : application to the case of refrigerated display cabinetsKaffel, Ahmed 16 February 2017 (has links)
Dans cette étude, le comportement aérodynamique du jet pariétal (Re = 8000) cisaillé latéralement par un courant de perturbation externe (ELS) de profil de vitesse uniforme (Ulf) a été étudié et analysé. Les expérimentations ont été réalisées par PIV et LDV sur une maquette aéraulique isotherme à échelle réduite d’un meuble frigorifique de vente. L’étude est centrée sur la région du jet située à proximité de la section de soufflage (x/e < 10) qui correspond à la zone dans laquelle se développent les instabilités et le processus de transition vers la turbulence. L’analyse des résultats obtenus avec et sans perturbation a mis en évidence que la perturbation entraîne une diminution significative du pouvoir d’entraînement du jet, une forte décroissance de la vitesse moyenne maximale, un faible épanouissement du jet et une augmentation globale des valeurs des moments d’ordre deux de toutes les composantes des contraintes de Reynolds. L’analyse par PIV résolue en temps (10 kHz) montre une topologie déformée et allongée des structures de Kelvin-Helmholtz (K-H) pour (Ulf = 0,5 ms-1) et détachée pour (Ulf = 1 ms-1). Les résultats de l’interaction mutuelle ente les couches interne et externe indiquent que le courant ELS brise partiellement le mécanisme de formation des dipôles de vortex qui deviennent irréguliers et moins prédictifs, ce qui conduit à l’allongement de la zone de transition et retarde donc l’apparition de la zone auto-similaire du jet. D’après la technique POD, l’ELS engendre une redistribution énergétique entre les modes. Le courant ELS affecte également les instabilités K-H en perturbant leur organisation bidimensionnelle, leur topologie, leur alignement et leur fréquence de passage mettant en évidence l’effet inhibiteur exercé sur le développement des structures primaires. Les corrélations spatiales Rvv reflètent la diminution des échelles de longueur dans le cas d’un jet perturbé. / In this study, the aerodynamic behavior of the plane wall jet (Re = 8000) sheared laterally by an external lateral stream (ELS) of a uniform velocity profile (Ulf) was studied and analyzed. The experiments were carried out by PIV and LDV on a reduced-scale isothermal aeraulic model of a refrigerated display cabinet. The study focuses on the near-field region of the jet (x / e <10) which corresponds to the zone of transition to turbulence and onset and development of instabilities. The results obtained with and without perturbation showed a significant decrease in the entrainment rate, a strong decrease in the maximum velocity decay rate, a lower jet expansion and an overall increase in the values of second order moments of the Reynolds stress components. The time-resolved PIV analysis (10 kHz) shows a distorted and elongated topology of the Kelvin-Helmholtz (K-H) structures for (Ulf = 0,5 ms-1) and a detached topology for (Ulf = 1 ms-1). The results of the mutual interaction between the inner and outer layers indicate that the ELS partially breaks the vortex dipole formation mechanism which becomes irregular and less predictive, leading to the elongation of the transitional region and a lag effect in the beginning of the self-similarity region. POD technique reveals the role of the ELS in redistributing energy between the modes. The ELS also affects the K-H instabilities by disrupting their two-dimensional organization, topology, alignment and shedding frequency, highlighting the inhibitory effect exerted on the development of primary structures. The spatial correlations Rvv reflect the decrease of the length scales in the case of a perturbed jet.
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Vzduchotechnika prostoru autosalonu / Air conditioning area of the car showroomSvobodová, Leona January 2022 (has links)
The diploma thesis deals with shielding elements in the theoretical, project and experimental level. The theoretical part describes the variants of building shading and compares individual shading elements. It explains several concepts from the field of environmental technology, which are related to the topic. The design part deals with the air conditioning of the showroom space with a specific indoor environment. The space has a flush facade, so it has a high heat load. This is a showroom for veterans, where it is necessary to maintain optimal constant hu-midity throughout the year. An air conditioning unit was designed for these needs. The experimental part describes the measurement of the values of the shielding factor of external blinds for individual slopes of slats. The measurement results are applied to the reference room and the dependence between the inclination of the slats and the energy demand for space cooling is evaluated by the software.
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Modélisation des écoulements d’air et des transferts de chaleur dans un camion frigorifique : Etude des performances d’un dispositif de rideau d’air innovant pour le maintien de la chaîne du froid et la réduction des pertes à l’ouverture des portes / Modeling of airflow, heat and mass transfers in a refrigerated truck : Study of an innovative air curtain device to protect the cold chain and to reduce energy losses at the door openingLafaye de Micheaux, Téo 09 June 2016 (has links)
La préservation de la chaîne du froid est un paramètre particulièrement important dans le cadre de la distribution urbaine, où les fréquentes ouvertures de portes induisent une charge thermique d’infiltration. Afin de réduire les transferts de masse et de chaleur et de protéger l’ouverture, des rideaux d’air ont récemment été installés au niveau de l’ouverture des camions frigorifiques. L’objet de la présente étude est d’étudier ce type confinement. Deux modèles CFD ont été développés pour simuler les champs de températures et de vitesses dans un camion réfrigéré clos. Ils ont permis de montrer que la variation de la vitesse de soufflage ne modifie pas de manière significative la structure des écoulements. Différents conduits d’air sont modélisés. Les résultats numériques montrent que la configuration avec un conduit ouvert améliore fortement le renouvellement d’air. Puis, une étude numérique est réalisée dans le but d’étudier les infiltrations de chaleur et de masse au cours de l’ouverture des portes. Ces écoulements sont bien prédits par le modèle CFD, excepté à la transition entre les deux régimes d’infiltration. Une caisse expérimentale a été équipée d’un dispositif de rideau d’air composé d’un jet ambiant, d’un jet froid ou d’un jet double. En parallèle, un modèle numérique CFD a été développé pour étudier l’influence de différents paramètres. Une bonne concordance entre les résultats numériques et expérimentaux a été observée. L’efficacité du rideau d’air ambiant est maximale lorsque le point d’impact du rideau se situe dans le plan de l’ouverture. Le rideau double maintient efficacement l’homogénéité de la température pour de courtes ouvertures. Le rideau d’air froid est la meilleur configuration, il limite fortement l’augmentation de température de l’enceinte et permet des gains énergétiques importants. / Cold chain safety is a key parameter for urban distribution where the frequent door-opening induces a heat infiltration. In order to reduce heat and mass transfer, air curtain have recently been installed to protect the doorway of refrigerated truck. The aim of this work is to study this type of door insulation. Two CFD numerical models were developed to simulate the temperature and velocity fields in a closed refrigerated truck. These models showed that modifying the blowing velocity does not modify the air flow structure inside the cavity. Different air chutes were modelled. Numerical results demonstrate that the configuration with a convergent and an open duct strongly improves the air renewal. A numerical investigation was performed in order to study heat and mass infiltration rates during the opening. The infiltration flow rate is well predicted by the CFD model, except at the transition between both flow regimes. An experimental truck was equipped with an air curtain setup, composed by an ambient air jet, a cold air jet or a double jet. In parallel, a numerical CFD model was developed to study the influence of various parameters. Experimental and numerical results were found to be in good agreement. The maximum efficiency of the ambient air curtain is reached when the impact point of the jet occurs in the door plane at the ground level. This configuration is only relevant for short opening times. The double air curtain efficiently maintains the temperature homogeneity for short openings. The cold air curtain is the best configuration which strongly limits the temperature increase during the opening and allows important energy savings.
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Autosalon / MotorshowBár, Radek January 2014 (has links)
This master thesis is focused on elaboration of project documentation for constructing autosalon in Kopřivnice. Project and appendix are processed by current applicable laws, regulations and standarts. Designed object is situated on plat #419/2 and partly on plat #419/27. Both plats are parts of cadastral area of Kopřivnice. There are all needed engineering networks nearby. Object is divided on three functional parts, which are operationally and constructionally connected. First part is exhibition and representative hall, with capacity of 11 exhibited vehicles. Second part is formed by administrative facilities for staff including sanitary facilities for both staff and visitors. Third part is service for personal and light commercial vehicles with three working stations. Construction is designed partially reinforced concrete columnar structural system and partially of brick longitudinal structural system. The biggest plan dimension of building is 34.3x35.15m. The cladding is designed of sandwich blocks LIVETHERM tl.400mm. Roof of building accross the surface is flat roof with several height levels. Establishment of the object is a combination of footings and foundation belts. Cladding of exhibition hall is more than 50% glazed. Parts of service and autosalon are designed as sigle storey objects, while administrative part is designed as a two.
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